This SDS adheres to the standards and regulatory requirements of Korea and may not meet the regulatory requirements in other countries.

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1 This SDS adheres to the standards and regulatory requirements of Korea and may not meet the regulatory requirements in other countries. 1. IDENTIFICATION OF THE SUBSTANCE/MIXTURE AND OF THE COMPANY/UNDERTAKING Product name : Recommended use of the chemical and restrictions on use Recommended use : Polyimide coating for semi-conductor industry Information on the Manufacturer/Supplier/Distributor Company : Hitachi Chemical DuPont MicroSystems Ltd. Street address Higashi-cho, Hitachi-shi Ibaraki, Responsible Department Contact person : No information available. : Dong Young EMS Co. LTD, 772 Yeoksam-Dong, Kangnam-Gu, Seoul, Korea Telephone : Telefax : Emergency telephone : (Day time) (24hrs) number 2. HAZARDS IDENTIFICATION GHS-Classification Acute toxicity (Oral) Category 4 Serious eye damage/eye irritation Category 2 Reproductive toxicity Category 1B Endpoints which are not classified, cannot be classified or are not applicable are not shown. GHS Label element Pictogram : Signal word Hazard statements : Danger : Harmful if swallowed. Causes serious eye irritation. May damage fertility or the unborn child. 1/10

2 Precautionary statements : Obtain special instructions before use. Do not handle until all safety precautions have been read and understood. Wash skin thoroughly after handling. Do not eat, drink or smoke when using this product. Wear protective gloves/ eye protection/ face protection. IF SWALLOWED: Call a POISON CENTER or doctor/ physician if you feel unwell. IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing. IF exposed or concerned: Get medical advice/ attention. Rinse mouth. If eye irritation persists: Get medical advice/ attention. Store locked up. Dispose of contents/ container to an approved waste disposal plant. 3. COMPOSITION/INFORMATION ON INGREDIENTS Pure substance/mixture : Mixture Components Chemical Name CAS-No. Concentration 4-Butyrolactone % 1-Methoxy-2-propyl acetate % Ethanol <1 % N-Methyl-2-pyrrolidone <1 % Non regulated ingredients <=45 % 4. FIRST AID MEASURES If symptoms persist, call a physician. Eye contact Skin contact Inhalation Ingestion Notes for physicians and etc. : Rinse thoroughly with plenty of water, also under the eyelids. Consult a physician. : Wash off immediately with soap and plenty of water while removing all contaminated clothes and shoes. : Move to fresh air. Artificial respiration and/or oxygen may be necessary. Consult a physician. : Do NOT induce vomiting. Immediately give large quantities of water to drink. Never give anything by mouth to an unconscious person. Consult a physician. : No information available. 5. FIREFIGHTING MEASURES Suitable (and inappropriate) extinguishing media : Use water spray, alcohol-resistant foam, dry chemical or carbon dioxide. Unsuitable extinguishing media: High volume water jet 2/10

3 Specific hazards arising from the chemical Special protective equipment for firefighters : Vapours may form explosive mixtures with air. Do not allow run-off from fire fighting to enter drains or water courses. Evacuate personnel to safe areas. : In the event of fire, wear self-contained breathing apparatus. 6. ACCIDENTAL RELEASE MEASURES Personal precautions, protective equipment and emergency procedures : Ensure adequate ventilation. Evacuate personnel to safe areas. Keep people away from and upwind of spill/leak. Remove all sources of ignition. Wear respiratory protection. Dispose of in accordance with local regulations. Environmental precautions Methods and materials for containment and cleaning up : Do not flush into surface water or sanitary sewer system. Avoid subsoil penetration. Prevent further leakage or spillage if safe to do so. : Contain spillage, and then collect with non-combustible absorbent material, (e.g. sand, earth, diatomaceous earth, vermiculite) and place in container for disposal according to local / national regulations (see section 13). 7. HANDLING AND STORAGE Precautions for safe handling Technical : Avoid contact with skin, eyes and clothing. Smoking, eating and drinking should measures/precautions be prohibited in the application area. Avoid inhalation of vapour or mist. Provide sufficient air exchange and/or exhaust in work rooms. Take precautionary measures against static discharges. Precautions for safe handling Hygiene measures : Keep away from heat and sources of ignition. : Wash contaminated clothing before re-use. Wash hands before breaks and at the end of workday. Keep away from food and drink. Conditions for safe storage Suitable storage conditions : Keep container closed to prevent contamination. Keep away from sources of ignition - No smoking. Keep away from direct sunlight. Storage temperature: > < -10 C 8. EXPOSURE CONTROLS/PERSONAL PROTECTION Exposure Limits of the chemical substance, biological exposure limits and etc. Chemical Name Occupational Exposure Limits Regulation Ethanol TWA 1,000 ppm, 1,900 mg/m3 Industrial Safety and Health Act ( ) 3/10

4 STEL 1,000 ppm US. ACGIH Threshold Limit Values (2011) Engineering measures : Ensure adequate ventilation, especially in confined areas. Personal protective equipment Respiratory protection Eye protection Hand protection Skin and body protection : If the occupational exposure limits cannot be met, in exceptional cases suitable respiratory equipment should be worn only for a short period of time. : Safety glasses with side-shields : Material: butyl-rubber Break through time: 60 min Permeation rate: 480 min Glove thickness: 0.7 mm The exact break through time can be obtained from the protective glove producer and this has to be observed., Take note of the information given by the producer concerning permeability and break through times, and of special workplace conditions (mechanical strain, duration of contact). : No information available. 9. PHYSICAL AND CHEMICAL PROPERTIES Appearance Physical state Form Colour Odour Odour Threshold ph : liquid : liquid : red : aliphatic Melting point/freezing point no data available Boiling point/boiling range no data available Flash point : 76 C Evaporation rate Flammability (solid, gas) 4/10

5 Upper and lower flammable or explosive limits Upper explosion limit Lower explosion limit Vapour pressure Solubility(ies) Water solubility Solubility in other solvents Vapour density : partly soluble Specific gravity no data available Partition coefficient: n-octanol/water Autoignition temperature Decomposition temperature Viscosity Molecular Weight 10. STABILITY AND REACTIVITY Chemical stability & Possibility of hazardous reactions : Stable at normal temperatures and storage conditions. Hazardous polymerisation does not occur. The material may slowly polymerize if heated or if inerted with nitrogen. Conditions to avoid : Heat, flames and sparks. Strong sunlight for prolonged periods. Materials to avoid Hazardous decomposition products : Strong acids and strong bases, Strong oxidizing agents, Oxygen : Carbon dioxide (CO2), Carbon monoxide, nitrogen oxides (NOx), Hydrocarbons 11. TOXICOLOGICAL INFORMATION Information on likely routes of exposure Respiratory system: Refer to below subheading Oral: Refer to below subheading Eye/Skin contact: Refer to below subheading 5/10

6 Health hazard information Acute toxicity Oral: LD50/rat : 1,580 mg/kg Dermal: LD50/guinea pig : > 5,000 mg/kg Oral: LD50/rat : 8,532 mg/kg Dermal: LD50/rabbit : > 5,000 mg/kg Oral: LD50/rat : 4,150 mg/kg Inhalation: LC50/4 h/rat : > 5.1 mg/l Respiratory tract irritation Target Organs: Respiratory Tract Dermal: LD50/rat : > 5,000 mg/kg Skin corrosion/irritation : : Irritating to skin. Serious eye damage/eye irritation : : Irritating to eyes. Respiratory sensitization / Skin sensitization Species: guinea pig Classification: Not a skin sensitizer. Result: Animal test did not cause sensitization by skin contact. Species: guinea pig Result: Did not cause sensitization on laboratory animals. Species: human Classification: Not a skin sensitizer. Result: Patch test on human volunteers did not demonstrate sensitization properties. Germ cell mutagenicity 6/10

7 Overall weight of evidence indicates that the substance is not mutagenic. Did not cause genetic damage in animals. Genetic damage in cultured mammalian cells was observed in some laboratory tests but not in others. Did not cause genetic damage in cultured bacterial cells. Tests on bacterial or mammalian cell cultures did not show mutagenic effects. Ethanol: Overall weight of evidence indicates that the substance is not mutagenic. Did not show mutagenic effects in animal experiments. Tests on bacterial or mammalian cell cultures did not show mutagenic effects. Carcinogenicity Animal testing did not show any carcinogenic effects. Ethanol: No increased risk of cancer in humans has been shown in workplace-based studies. Overall weight of evidence indicates that the substance is not carcinogenic. Reproductive toxicity No reliable data are available. Animal testing showed no developmental toxicity. Animal testing showed no reproductive toxicity. Animal testing showed no developmental toxicity. Ethanol: Animal testing showed effects on reproduction at levels equal to or above those causing parental toxicity. Animal testing showed effects on embryo-fetal development at levels equal to or above those causing maternal toxicity. Animal testing showed effects on reproduction at levels equal to or above those causing parental toxicity. Animal testing showed effects on embryo-fetal development at levels equal to or 7/10

8 above those causing maternal toxicity. Reduced embryo-foetal viability Foetal malformations Specific Target Organs Toxicity (Single/Repeated) Aspiration toxicity : Refer to acute toxicity and/or repeated dose toxicity data for more information on target organs if applicable. Other : : Vapours may cause irritation to the eyes, respiratory system and the skin. Inhalation of high vapour concentrations may cause symptoms like headache, dizziness, tiredness, nausea and vomiting. 4-Butyrolactone: Repeated dose toxicity: Oral, rat No adverse effect has been observed in chronic toxicity tests. Repeated dose toxicity: Inhalation, multiple species Respiratory irritation Repeated dose toxicity: Oral, rat Reduced body weight gain 12. ECOLOGICAL INFORMATION Toxicity on aquatic terrestrial organisms Toxicity to fish LC50/96 h/leuciscus idus (Golden orfe): 316 mg/l LC50/96 h/oryzias latipes (medaka): > 100 mg/l LC50/96 h/oncorhynchus mykiss (rainbow trout): 134 mg/l LC50/96 h/pimephales promelas (fathead minnow): 161 mg/l LC50/96 h/oncorhynchus mykiss (rainbow trout): > 500 mg/l Other EC50/72 h/desmodesmus subspicatus (green algae): 360 mg/l EC50/48 h/daphnia magna (Water flea): > 500 mg/l 8/10

9 EC50/72 h/scenedesmus capricornutum (fresh water algae): > 1,000 mg/l EC50/48 h/daphnia magna (Water flea): 380 mg/l EC50/72 h/algae: > 500 mg/l Persistence and degradability Exposure time: 14 d Biodegradation: % Readily biodegradable. Readily biodegradable. Ethanol: Exposure time: 20 d Biodegradation: 84 % Readily biodegradable. Readily biodegradable, according to appropriate OECD test. Bioaccumulation Bioaccumulation is unlikely. Ethanol: Bioconcentration factor (BCF): 0.05 Does not bioaccumulate. Accumulation in aquatic organisms is unlikely. Mobility in soil Other adverse effects 13. DISPOSAL CONSIDERATIONS Waste disposal methods Precautions for Disposal : In accordance with local and national regulations. : Can be incinerated, when in compliance with local regulations. 9/10

10 14. TRANSPORT INFORMATION Not classified as dangerous in the meaning of transport regulations. 15. REGULATORY INFORMATION Industrial Safety and Health Act Refer to section 2 of this MSDS for classification according to the GHS. Toxic Chemicals Control Law not regulated Dangerous Substance Safety Management Act FSL Class 4 Flammable liquids Type 3 petroleums, Water insoluble liquid, (Threshold quantity: 2,000 liters) Waste Management Law Dispose of in accordance with local regulations. Regulations in other countries No information available. 16. OTHER INFORMATION Sources of key data used to compile the Safety Data Sheet : not applicable Issuing date : 2011/08/06 Number of revision times and the date of preparation of the latest revision : 2011/12/06 Other : No information available. Significant change from previous version is denoted with a double bar. The information provided in this Safety Data Sheet is correct to the best of our knowledge, information and belief at the date of its publication. The information given is designed only as a guide for safe handling, use, processing, storage, transportation, disposal and release and is not to be considered a warranty or quality specification. The above information relates only to the specific material(s) designated herein and may not be valid for such material(s) used in combination with any other materials or in any process or if the material is altered or processed, unless specified in the text. 10/10

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