NSF Nanoscale Science and Engineering Center for High-rate Nanomanufacturing (CHN)

Transcription

1 NSF Nanoscale Science and Engineering Center for High-rate Nanomanufacturing (CHN) High-rate Nanomanufacturing of Applications in Electronics, Energy and Biotechnology Ahmed Busnaina, W.L. Smith Professor and Director Director: Ahmed Busnaina, NEU Deputy Director: Joey Mead, UML, Associate Directors: Carol Barry, UML; Nick McGruer, NEU; Glen Miller, UNH; Jacqueline Isaacs, NEU, Group Leader: David Tomanek, MSU

2 Scaling Millimeter Micrometer Nanometer Gold Atoms Human Hair Carbon nanotubes Nanoparticles Carbon atoms

3 Macro to Nanomanufacturing Semiconductor Manufacturing Automotive Manufacturing

4 Macro to Nanomanufacturing Macro Micro Nano ddgg

5 How does Nature Do it

6 How Can we do it more like Nature? Precise, no waste, etc. Nanotechnology, build from the bottom up, atom by atom. We also, need to manufacture molecule by molecule, particle by particle, nanotube by nanotube, etc.

7 Our Vision The Path from Nanoscience to Nanomanufacturing Nanoscience Manipulation of few atoms and SWNTs STM 1981 AFM STM 1986 manipulation AFM manipulation of atoms 1989 of a SWNT 1999 Molecular logic gate 2002 Source: IBM

8 The Path to Nanomanufacturing; moving atoms one-by-one But manipulating atom by atom is a very slow process for manufacturing AFM manipulation of a SWNT 1999 If an AFM is used to assemble nanotubes to make one gigabyte memory chip, it will take 400 million hours.

9 CHN Vision: The Path from Nanoscience to Nanomanufacturing Nanomanufacturing Manipulation of Trillions of Nanoelements P Applications in Energy Electronics Biomedical Materials Nanoelements and templates SWNTs Assembly and Transfer Environment, Health and Safety Reliability Regulation, Ethics and Education CHN Mission To bridge the gap between nanoscale scientific research and the creation of nanotechnology-based commercial products

10 Nanotrench Template Directed Assembly Using Electrophoresis or Chemical Functionalization High-rate (< 1 min.) Nanoparticles down to 10 nm Pat. Pend. Polymer blends Pat. Pend. Carbon nanotubes Pat Pend. down to 80 nm lines Xiong, X, Busnaina, A, Selvarasah, S, Somu, S, Wei, Ming, Mead, J, Chen, C-L, Aceros, J, Makaram, P, and Dokmeci, M R., Appl. Phys. Lett. 91, (2007) Wei, M. Liang F., Lee, J. Somu, S., Xiong, X., Barry, C., Busnaina, A., Mead, J, Advanced Materials, 21(17), 794 (2009) Xiong, X, Jaberabsari, L, Hahm, M G, Busnaina, A, and Jung, Y, J, Small, 3(12) 2006 (2007) Makaram, P, Somu, S, Xiong, X, Busnaina, A, Jung,Y J, and McGruer, N, Appl. Phys. Lett. 90, (2007).

11 Template Guided Fluidic Assembly Assembly of CNTs over large areas on templates with different surface energies Hydrophobic and hydrophilic regions assist fluidic assembly Crossbar structure Xiong, X, Jaberabsari, L, Hahm, M G, Busnaina, A, and Jung, Y, J, Small, 3(12) 2006 (2007) Jaber-Ansari, L, Hahm, M G, Somu, S, Echegoyen Sanz, Y, Busnaina, A, and Jung, Y J, J. Am. Chem. Soc., 131 (2), pp 804 (2009) Jaberasani, L., Somu, S. Hahm, M G, Busnaina, A, and Jung, Y J, Appl. Phys. A., 5194 (2009)

12 Nanotechnology Applications Roadmap SWNT & NP Interconnects CNTs for Photovoltaic Flexible SWNT NEMS Electronics Switch for Memory Devices Assembly of CNTs and NPs for Batteries Nano multibiomarker Biosensors 2-D Assembly for Structural App. EMIshielding Energy Electronics Bio/Med Materials Directed Assembly and Transfer Nanoscale Science NP based Delivery Chips 1 0 µ m

13 KeckIn vivo NanoBiosensor Image of the in-vivo biosensor (0.1 mm x 0.1 mm) after animal testing 10 µm Incubated with human plasma spiked with CEA 15 pg/ml (32 pg/ml in vivo) Current technology detection limit is 3000pg/ml

14 Strong Industrial Partnerships Over 30 companies

15 CHN Responsible Manufacturing: Overview Exposure Assessment & Control High-rate Toxicity Screening EHS Assessment, Screening & EOL Impacts End-of-Life Impacts Environmental & Economic Uncertainties Regulatory Issues Enviro & Economic Uncertainties Regulatory Issues in MA Social & Ethical Issues Social & Ethical Issues 15

16 540 EHS Issues: Are Exposures Harmful? Evaluating oxidative stress for high-rate screening of nanomaterials Oxidative stress is a key mechanism leading asthma, cardiovascular, and lung diseases, etc. Baseline (unexposed serum) Antioxidant capacity (TEU s s; umol/l) CS Silica Increasing Oxd stress Al 2 O 3 nag Ag n-a m-a n-r TiO 2 m-r N550 N110 N990 Carbon Black purified refined soot Fullerene MWCNT-s MWCNT-i Nanotubes MWCNT-l SWCNT-l SWCNT-s nanohorn

17 EHS Issues: Are Exposures Harmful? What properties cause biological oxidative stress (BOD)? Nanomaterial Properties Surface area (SSA) Metals/impurities (T Me ) Surface charge Morphology Crystallinity Solubility in biological fluids SSA and T Me explained 93% of BOD E. Rogers, D. Bello, S-F. Hsieh, Inhalation Toxicology, 20(9), 985 (2008) D. Bello, S.-F Hsieh, D. Schmidt, E. Rogers, Nanotoxicology, accepted April, 2009

18

19 What is Nano? Nano Ipod? Nano Car?

20 Macro to Nanomanufacturing Semiconductor Manufacturing from sand to computer chips

21 Path Forward CMOS Technology Interconnects Room temperature 3D assembly of CNTs for CMOS interconnects 3-D Assembly of SWNT in CMOS vias over a wafer level

22 Interconnects and Nanorods in Various Aspect Ratio Gold nanorods Gold surface A high angle SEM of fabricated 100nm nanorods. 12Vpp was applied to the 5nm gold nanoparticles at the frequency of 10 khz. a) 1µm a) SEM image of 50nm nanorods over 10µ x 10µ area. b) c) b) A magnified image of the Nanorods array. c) High magnification image of a single rod.