UPW Recycle Strategy

Transcription

1 UPW Recycle Strategy Semiconductor Safety Association April 28, 2000 Texas Instruments Inc. Recycling Water in Dallas since 1994!

2 TI Water Recycling Strategy Strategy: Match Water Qualities to Water Requirements; Segregate, Collect, Monitor, and Recycle Clean Spent Rinsewaters back to the UPW facility for re-use as Ultrapure Water. Why do we Recycle? Re-use Reject Streams & Industrial Wastewaters in Scrubbers and Cooling Towers where appropriate. Use unpolished DI water for lower water quality demands. Dallas area has plenty of water. Quantity of Supply and Sewer discharge is quite reliable. Cost for water and wastewater is relatively low. We do save 263 Million Gallons every year, for a cost savings of $700 K/yr. We do improve the final UPW quality used on the wafer. We do minimize the seasonable variability from our municipal supply. We do provide a more reliable UPW system to our fabs, with less downtime. Our operators appreciate that there are less regenerations, & membrane cleanings.

3 TYPICAL PROCESS TOOL SETUP PREFURNACE HOOD SC-1 HDI 1OO:1 HF CDI SC-2 HDI CDI IPA DRYER SOLVENT RECYCLE RESIST STRIP HOOD SC-1 SC-1 HDI CDI SC-2 HDI CDI IPA DRYER SOLVENT RECLAIM / SOLVENT HOOD RECYCLE Organic Organic Organic Solvent Solvent Solvent IPA IPA HDI CDI SPIN DRYER SOLVENT HDI : Hot DI Water CDI : Cold DI Water : Industrial Waste Water

4 Rinse with Segregated Drain Valve within Tool Rinse 3 Way Diverter Valve Recycle IW Waste Fully programmable within Tool Software: Available on many existing tools Overflow Rinse; Time settings, i.e. 90 sec. to waste, 510 sec. Recycle QDR; Dump settings; i.e. First dump to waste, dumps 2-5 to Recycle Reliable? : Don t bet your fab on it. But take advantage of it.

5 UPW System Model Calcium Ion Concentrations Predicted vs. Actual Municipal Feed Water Concentration Spent Wafer Calcium Ion (ppb) Rinse Fab Predicted Actual Act UV Water Tools ,000 30, Carbon nm 0.04 <0.010 Feed Act Reverse 341 Reverse 15 UV Carbon Osmosis 316 Osmosis nm (RO) DEGAS UV Bed nm IX 1.50 UPW UPW Return UV Bed U.F nm 0.98 IX <0.010 <0.010 UPW Supply Legend: Predicted Calcium ion concentrations, indicated on top of flow line, in red. Actual calcium ion concentrations, measured by ICPMS, GFAA, on bottom of flow line in blue.

6 UPW System without Recycle Predicted POU 14 ppt Ca Municipal Feedwater flow at 1351 gpm Municipal Feed Water 0 Spent Wafer Conc. Flow Rinse Fab (ppb) (gpm) Act UV Water Tools Carbon nm CALCIUM Feed Act Reverse 341 Reverse UV Carbon 1596 Osmosis 1245 Osmosis nm (RO) 1079 UPW 120 DEGAS UV Bed nm IX UPW Return UV Bed U.F nm 1579 IX UPW Supply 79 Legend: Predicted Calcium ion concentrations, indicated on top of flow line, in red. Predicted Flowrates, indicated below flow line in blue.

7 UPW System w/ 50% Recycle Predicted POU 9 ppt Ca Municipal Feedwater flow at 851 gpm Municipal Feed Water 0 Spent Wafer Conc. Flow Rinse Fab (ppb) (gpm) Act UV Water Tools Carbon nm CALCIUM Feed Act Reverse 341 Reverse UV Carbon 1596 Osmosis 1245 Osmosis nm (RO) 1079 UPW 120 DEGAS UV Bed nm IX UPW Return UV Bed U.F nm 1579 IX UPW Supply 79 Legend: Predicted Calcium ion concentrations, indicated on top of flow line, in red. Predicted Flowrates, indicated below flow line in blue.

8 UPW System Model Chloroform Concentrations Predicted vs. Actual Municipal Feed Water Conc. CHCl Act UV 9.58 Spent Rinse Water 9.58 Wafer Fab Tools 9.58 (ppb) 4.4 Carbon 185 nm Feed 140 Multi- 140 Reverse 84 Reverse 67 UV Media 172 Osmosis 119 Osmosis nm (RO) DEGAS 61.8 UV Bed nm IX 40.7 UPW UPW Return UV Bed 9.54 U.F nm 10.2 IX UPW Supply Legend: Predicted Chloroform concentrations, indicated on top of flow line, in red. Actual chloroform concentrations, measured by GCMS on bottom of flow line in blue.

9 Municipal Feed Water 0 Conc. Flow UPW System without Recycle Predicted POU 3.58 ppb TOC Municipal Feedwater flow at 1351 gpm Spent Wafer Rinse Fab (ppb) (gpm) 0.00 Act UV 103 Water 103 Tools Carbon nm TOC Feed Act Reverse 184 Reverse 24 UV Carbon 1596 Osmosis 1245 Osmosis nm (RO) 120 DEGAS UV Bed nm IX UPW 500 UPW Return UV Bed U.F nm 1579 IX UPW Supply 79 Legend: Predicted TOC concentrations, indicated on top of flow line, in red. Predicted Flowrates, indicated below flow line in blue.

10 Municipal Feed Water 0 Conc. Flow UPW System w/ 50% Recycle Predicted POU 1.05 ppb TOC Municipal Feedwater flow at 851 gpm Spent Wafer Rinse Fab (ppb) (gpm) 27 Act. 42 UV 101 Water 101 Tools Carbon nm TOC Feed Act Reverse 114 Reverse 10 UV Carbon 1596 Osmosis 1245 Osmosis nm (RO) 120 DEGAS 9.06 UV Bed nm IX UPW 500 UPW Return UV Bed U.F nm 1579 IX UPW Supply 79 Legend: Predicted TOC concentrations, indicated on top of flow line, in red. Predicted Flowrates, indicated below flow line in blue.

11 TEXAS INSTRUMENTS - CFCC DMOS 5 SCADA DATA FJJ September 1999 DM5 LOOP "A" (Phase 1) Cold Loop Supply TOC DM51DS1:Q F_CV Anatel A UPCL= TOC (ppb) Group range: Selected ( ) Auto drop : OFF CL Ordinate: 3.00 Curve: Johnson Sb. K-S: AVERAGE(m) : 3.02 PROCESS SIGMA : 0.14 HIGH SPEC : 3.00 % HIGH : % Cpk : 0.02 UCL : 4.83 LCL : /2/99 9/3/99 9/4/99 9/5/99 9/6/99 9/7/99 9/8/99 9/9/99 9/10/99 9/11/99 9/12/99 9/13/99 9/14/99 9/15/99 9/16/99 9/17/99 9/18/99 9/19/99 9/20/99 9/21/99 9/22/99 9/23/99 9/24/99 9/25/99 9/25/99 9/26/99 9/27/99 9/28/99 9/29/99 9/30/99 USL PCL=2.97 LPCL=1.83

12 TEXAS INSTRUMENTS - CFCC DMOS 5 SCADA DATA FJJ September 1999 DM5 LOOP "A" (Phase 1) DI Recycle TOC PRIHOST:DIRTOC.F_CV USL: TOC >=300 ppb = Direct DIW Recycle to (EB IWT SYS.) LSL: Low Alarm (Win 911) 19 ppb USL Group range: Selected ( ) Auto drop : OFF CL Ordinate: 3.00 Curve: Johnson Sb. K-S: AVERAGE(m) : PROCESS SIGMA : HIGH SPEC : % HIGH : % LOW SPEC : % LOW : % Cpk : UCL : LCL : TOC (PPB) /1/99 9/2/99 9/3/99 9/4/99 9/5/99 9/6/99 9/7/99 9/8/99 9/9/99 9/10/99 9/11/99 9/12/99 9/13/99 9/14/99 9/15/99 9/16/99 9/17/99 9/18/99 9/19/99 9/20/99 9/21/99 9/22/99 9/23/99 9/24/99 9/25/99 9/26/99 9/27/99 9/28/99 9/29/99 9/30/99 LSL UPCL= PCL=85.14 LPCL=26.49

13 TEXAS INSTRUMENTS - CFCC DMOS 5 SCADA DATA FJJ September 1999 DMOS 5 DI RECYCLED INFLUENT TOC DM52DS1:AI_701_2_PV.F_CV SIEVERS USL: TOC>=300 ppb = Direct DIW Recycle to (EB IWT Sys.) LSL: Low Alarm (Win911) 8 ppb USL UPCL= PPB ?? Group range: Selected ( ) Auto drop : OFF CL Ordinate: 3 Curve: Johnson Sb. K-S: AVERAGE(m) : 105 PROCESS SIGMA : 25 HIGH SPEC : 300 % HIGH : % LOW SPEC : 8 % LOW : % Cpk : 1.05 UCL : 289 LCL : /01/99 09/02/99 09/03/99 09/04/99 09/05/99 09/06/99 09/07/99 09/08/99 09/09/99 09/10/99 09/11/99 09/12/99 09/13/99 09/14/99 09/15/99 09/16/99 09/17/99 09/18/99 09/19/99 09/20/99 09/21/99 09/22/99 09/23/99 09/24/99 09/25/99 09/26/99 09/27/99 09/28/99 09/29/99 09/30/99 LSL PCL=96 LPCL=37

14 TEXAS INSTRUMENTS - CFCC DMOS 5 SCADA DATA FJJ September 1999 DM5 RECYCLED EFFLUENT TOC to BLEND WATER TANK Trans. #1 DM52DS1:AIT_707_1A.F_CV Values in Units of ppb Group range: Selected ( ) Auto drop : OFF CL Ordinate: Curve: Normal. K-S: AVERAGE(m) : SAMPLE SIGMA : UCL : LCL : UCL= PCL= LCL= /01/99 09/02/99 09/03/99 09/04/99 09/05/99 09/06/99 09/07/99 09/08/99 09/09/99 09/10/99 09/11/99 09/12/99 09/13/99 09/14/99 09/15/99 09/16/99 09/17/99 09/18/99 09/19/99 09/20/99 09/21/99 09/22/99 09/23/99 09/24/99 09/25/99 09/26/99 09/27/99 09/28/99 09/29/99 09/30/99

15 TEXAS INSTRUMENTS - CFCC DMOS 5 SCADA DATA FJJ September 1999 DMOS 5 (Phase 2) DI Recycle Flow DM52DS1:FIT_707_1.F_CV 500 UPCL= PCL= gpm LPCL=277 Group range: Selected ( ) Auto drop : OFF CL Ordinate: 3 Curve: Johnson Su. K-S: AVERAGE(m) : 375 PROCESS SIGMA : 26 UCL : 496 LCL : /01/99 09/02/99 09/03/99 09/04/99 09/05/99 09/06/99 09/07/99 09/08/99 09/09/99 09/10/99 09/11/99 09/12/99 09/13/99 09/14/99 09/15/99 09/16/99 09/17/99 09/18/99 09/19/99 09/20/99 09/21/99 09/22/99 09/23/99 09/24/99 09/25/99 09/26/99 09/27/99 09/28/99 09/29/99 09/30/99

16 TEXAS INSTRUMENTS - CFCC DMOS 5 SCADA DATA FJJ September 1999 DM5 LOOP "A" (Phase 1) DI Recycle Flow PRIHOST:DIFT1.F_CV UPCL= PCL= FLOW (GPM) Group range: Selected ( ) Auto drop : OFF CL Ordinate: 3.00 Curve: Johnson Su. K-S: AVERAGE(m) : PROCESS SIGMA : UCL : LCL : LPCL= /1/99 9/2/99 9/3/99 9/4/99 9/5/99 9/6/99 9/7/99 9/8/99 9/9/99 9/10/99 9/11/99 9/12/99 9/13/99 9/14/99 9/15/99 9/16/99 9/17/99 9/18/99 9/19/99 9/20/99 9/21/99 9/22/99 9/23/99 9/24/99 9/25/99 9/26/99 9/27/99 9/28/99 9/29/99 9/30/99

17 TEXAS INSTRUMENTS - CFCC DMOS 5 SCADA DATA FJJ September 1999 DMOS 5 (Phase 2) DI Recycle ph DM52DS1:AI_701_1_PV.F_CV PCL=6.62 ph Group range: Selected ( ) Auto drop : OFF CL Ordinate: 3.00 Curve: Normal. K-S: AVERAGE(m) : 6.62 PROCESS SIGMA : 1.50 UCL : LCL : LCL= /01/99 09/02/99 09/03/99 09/04/99 09/05/99 09/06/99 09/07/99 09/08/99 09/09/99 09/10/99 09/11/99 09/12/99 09/13/99 09/14/99 09/15/99 09/16/99 09/17/99 09/18/99 09/19/99 09/20/99 09/21/99 09/22/99 09/23/99 09/24/99 09/25/99 09/26/99 09/27/99 09/28/99 09/29/99 09/30/99

18 Conclusions Realized Recycle Benefits 1. Improved feed water quality, final UPW quality. 2. Improved reliability of UPW facility, Less downtime: Reduced frequency of RO membrane cleaning processes. Reduced frequency of ion exchange regenerations. Reduced frequency of filter backwashes/rinses. Improved efficiencies in UPW treatment processing. 3. Reduced chemical usage for ion exchange regenerations. 4. Significant cost savings: Less feed water and backwash water costs. Less regeneration chemical cost. Less industrial waste treatment cost. Less maintenance and cleaning chemical cost. 5. Improved RO reject quality for other reclamation purposes. 6. Less demand on the municipal water supply and waste water treatment systems.