Elastomer Technology for Semiconductor Applications. Steve Jagels

Transcription

1 Elastomer Technology for Semiconductor Applications Steve Jagels Technical Manager Advanced sealing solutions for critical applications.

2 Basic Facts & Figures 2 Located in Blackburn, Lancashire, UK Established 1975 Employees = 265+ Export revenue = 85% Accreditations; ISO 9001 (Quality) AS 9100(Aerospace) NADCAP (Aerospace) ISO 14001(Environmental) OHSAS (Health and Safety) PPE is a subsidiary of IDEX Corporation IDEX Background; HQ in Lake Forest, IL, USA Revenues = $2.0B+ Employees = 6,000+ IDEX has approximately 50 subsidiaries in 14 countries globally IDEX is quoted on the New York stock exchange Ticker = IEX PPE s 75,000sq.ft. Facility in Blackburn, UK A leading manufacturer of seals for demanding applications

3 PPE Product Manufacturing Capability 3 High performance elastomer O-rings Diameters from 1mm up to 2.6m High performance elastomer seals & gaskets X-Seals, lip seals, other seal geometries, precision cut gaskets Custom precision-molded elastomer components Including micro precision molded parts Metal gates with elastomer seals Typically for semiconductor applications Elastomer/metal and elastomer/plastic bonded components All manufactured to order using PPE materials

4 PPE Material Families 4 The ultimate perfluoroelastomers for sealing applications where chemical resistance and high temperature performance are critical. Exceptional perfluoroelastomers for extreme low temperature sealing applications. The ultimate range of elastomers for sealing applications in the world s most aggressive high pressure environments. A unique range of fully organic elastomers for semiconductor sealing applications which demand extreme plasma resistance. Other Materials from A comprehensive range of high performance elastomers, for sealing applications in all industries and markets. Includes many unique materials developed by PPE

5 Quality & Other Accreditations 5 ISO9001 Quality Management System OSHAS18001 Health & Safety Investors in People Training & Development ISO14001 Environmental Management NADCAP Manufacturing & Quality Processes (Aerospace Standard)

6 Elastomer Technologies for Semiconductor Applications Material Advancements Higher Purity Ingredients Improved Manufacturing Processes

7 Material Advancements Early Rubber Parts Factories Not Designed For Cleanliness Photo Source:

8 Material Advancements Market Trends and Evolution Commercial Grade Elastomers White Colored Elastomers Clean Room Molding Nano-Fillers Filler Free Elastomers Specialized Materials for Different Processes

9 Specialized Materials Ultra Clean Perfluoroelastomers Perlast G67P Perlast G74P Fully Organic Elastomers for Semiconductor Applications K13X K2CD K23X

10 Fully Organic Polymers Outer surface Peak due to sample prep (gold) Only carbon, oxygen and fluorine detectable No fillers Fractured surface

11 Fully Organic Polymers White filled elastomer Magn: 1500x um Kimura unfilled elastomer Magn: 1500x um Fillers are often the cause of particulation Kimura elastomers contain NO FILLERS SEM micrographs at 1,500x magnification

12 Fully Organic Polymers White filled elastomer Magn: 10000x um Kimura unfilled elastomer Magn: 10000x um Fillers are often the cause of particulation Kimura elastomers contain NO FILLERS SEM micrographs at 10,000x magnification

13 % WEIGHT LOSS Fully Organic Polymers Zero Residual Mass = minimal particulation Zero mass on full degradation confirms that material is entirely organic. Absence of any fillers reduces the risks associated with particulation TEMPERATURE C

14 Stress (MPa) Mechanical Strength at Elevated Temps. Improved Properties at Elevated Temperatures High Temperature Tensile Testing C 150 C Pink = K13X Red = Nano-filled grade 150 C % Strain

15 Higher Purity Ingredients Most Rubber Grade Chemicals are not Pure Rubber Industry has an automotive market focus Metallic contaminants are common Polymers Must be Sourced to be polymerized with DI Water and Specially Washed during Coagulation Reduce Sources of Ca, Na, and other metals In Contrast- Industrial Grade Polymers have Metal Salts added for coagulation Other Ingredients Purified or Isolated

16 Improved Manufacturing Processes

17 Improved Manufacturing Processes Fully molded seals up to 8ft wide

18 Improved Manufacturing Processes

19 Summary Manufacturers must be focused on the Semiconductor Market to meet performance demands Increasing Specialization of materials for the market All aspects of manufacturing are specialized for semiconductor market

20 20 Thank you Any Questions?