Package Solutions and Innovations

Similar documents
Chips Face-up Panelization Approach For Fan-out Packaging

Novel Materials and Activities for Next Generation Package. Hitachi Chemical., Co.Ltd. Packaging Solution Center Hiroaki Miyajima

3D Package Technologies Review with Gap Analysis for Mobile Application Requirements. Apr 22, 2014 STATS ChipPAC Japan

Towards Industrialization of Fan-out Panel Level Packaging

Henkel Adhesive Solutions for SiP Packaging. October 17-19, 2018 Shanghai, China

Encapsulation Selection, Characterization and Reliability for Fine Pitch BGA (fpbga )

IME Technical Proposal. High Density FOWLP for Mobile Applications. 22 April High Density FOWLP Consortium Forum

Outline. Market Size Industry Trends Material Segment Trends China Summary. Packaging Materials Market Trends, Issues and Opportunities

Statement of Work (SOW) inemi Packaging TIG SiP Module Moldability Project

Material based challenge and study of 2.1, 2.5 and 3D integration

Wire-Bond CABGA A New Near Die Size Packaging Innovation Yeonho Choi February 1, 2017

Wafer Level Molded DDFN Package Project Duane Wilcoxen

The Development of a Novel Stacked Package: Package in Package

5. Packaging Technologies Trends

IME Proprietary. EPRC 12 Project Proposal. 3D Embedded WLP. 15 th August 2012

Henkel Enabling Materials for Semiconductor and Sensor Assembly. TechLOUNGE, 14 November 2017

Panel Discussion: Advanced Packaging

Fan-Out Packaging Technologies and Markets Jérôme Azémar

Nanium Overview. Company Presentation

Challenges of Fan-Out WLP and Solution Alternatives John Almiranez

Narrowing the Gap between Packaging and System

D DAVID PUBLISHING. Large Format Encapsulation. 1. Introduction. Eric Kuah, Hao Ji Yuan, Yuan Bin, Chan Wei Ling, Wu Kai and Ho Shu Chuen

Close supply chain collaboration enables easy implementation of chip embedded power SiP

Innovative Advanced Wafer Level Packaging with Smart Manufacturing Solutions YOON Seung Wook, Ph.D MBA

Challenges and Solutions for Cost Effective Next Generation Advanced Packaging. H.P. Wirtz, Ph.D. MiNaPAD Conference, Grenoble April 2012

Advanced Packaging Technologies Update

Semiconductor IC Packaging Technology Challenges: The Next Five Years

Development and Characterization of 300mm Large Panel ewlb (embedded Wafer Level BGA)

First Demonstration of Panel Glass Fan-out (GFO) Packages for High I/O Density and High Frequency Multi-Chip Integration

TechARENA Packaging Exhibitor Session OCT/08, 2014 New WLP-Technology-Fusion Concept Steffen Kröhnert, Director of Technology, NANIUM S.A. V1.

System-in-Package (SiP) on Wafer Level, Enabled by Fan-Out WLP (ewlb)

23 rd ASEMEP National Technical Symposium

SEMI MEMS Tech Seminar (Sept 26, Cornaredo, Italy)

RF System in Packages using Integrated Passive Devices

Illuminating Innovations

CMP for Thru-Silicon Vias TSV Overview & Examples March 2009

Die Attach Materials. Die Attach G, TECH. 2U. TECHNICAL R&D DIV.

OUR SPECIALTY OUR SCOPE. We specialize in the design and manufacture of thick-film hybrid microcircuits and custom packagings.

Equipment and Process Challenges for the Advanced Packaging Landscape

Encapsulation Materials Technology For SiP in Automotive

A Flexible Vertical MEMs Probe Card Technology for Pre-Bump and ewlp Applications

Copper Wire Bonding: the Last Frontier of Cost Savings. Bernd K Appelt Business Development ASE (U.S.) Inc. April 11, 2012

Advanced Analytical Techniques for Semiconductor Assembly Materials and Processes. Jason Chou and Sze Pei Lim Indium Corporation

Copyright 2009 Year IEEE. Reprinted from 2009 Electronic Components and Technology Conference. Such permission of the IEEE does not in any way imply

Challenges for Embedded Device Technologies for Package Level Integration

PLASMA TREATMENT OF X-Wire. Insulated Bonding Wire

LS720V Series. Comparison of crack progression between Sn-Cu-Ni-Ge and M773. Development of Ag-free/M773 alloy

Worldwide IC Package Forecast (Executive Summary) Executive Summary

Design and Characterization of Thermal Conductive Wafer Coating in Thin Small Outline Package for Automotive Product Application

S/C Packaging Assembly Challenges Using Organic Substrate Technology

IMPLEMENTATION OF A FULLY MOLDED FAN-OUT PACKAGING TECHNOLOGY

Flip Chip - Integrated In A Standard SMT Process

MTS Semiconductor Solution

Wafer/Panel Level Package Flowability and Warpage Project. Call for Sign-up Webinar

Impact of Heatsink Attach Loading on FCBGA Package Thermal Performance

Hot Chips: Stacking Tutorial

Plastics made perfect.

An Innovative High Throughput Thermal Compression Bonding Process

ECE414/514 Electronics Packaging Spring 2012 Lecture 2. Lecture Objectives

Panel Fan-Out Manufacturing Why, When, and How?

Next Gen Packaging & Integration Panel

Chapter 3 Silicon Device Fabrication Technology

The Shift to Copper Wire Bonding

Three-Dimensional Flow Analysis of a Thermosetting. Compound during Mold Filling

SLIM TM, High Density Wafer Level Fan-out Package Development with Submicron RDL

Lehman Brothers Global Technology Conference. December 2007

Advanced 3D ewlb PoP (embedded Wafer Level Ball Grid Array Package on Package) Technology

Electrical and Fluidic Microbumps and Interconnects for 3D-IC and Silicon Interposer

Compression molding encapsulants for wafer-level embedded active devices

Improvement of Cu-Pillar Structure Using Advanced Plating Method

Cost effective 300mm Large Scale ewlb (embedded Wafer Level BGA) Technology

Microwave Plasma Processing

Power Electronics Packaging Solutions for Device Junction Temperature over 220 o C

Thermal Management in Today's Electronic Systems

Credit Suisse Technology Conference

A METALCUTTING TECHNICAL ARTICLE BETTER TOGETHER: Non Defective Bonding of Resistance Spot Welding Electrodes

Lighting the way in LED Applications

Stamped diaphragm technical information

Semiconductor Packaging and Assembly 2002 Review and Outlook

Measurement of Pressure Distribution During Encapsulation of Flip Chips

Mobile Device Passive Integration from Wafer Process

Hydraulic Presses and Molding Processes Making the optimal choice for your molding application

ewlb (embedded Wafer Level BGA) Technology: Next Generation 3D Packaging Solutions

Fraunhofer IZM Bump Bonding and Electronic Packaging

WF6317. A superactive low-volatile/high heat-resistant water-soluble flux for ball soldering

Thin Wafers Bonding & Processing

AN ANALYSIS OF KEY COST AND YIELD DRIVERS FOR FAN-OUT WAFER LEVEL PACKAGING

Forschung für die Elektroniksysteme von morgen

Micro CIM for Precision Instruments and Medical Applications. SmartManufacturingSeries.com

Impact of Zinc Oxide on the UV Absorbance and Mechanical Properties of UV Cured Films

Development of Novel High Density System Integration Solutions in FOWLP Complex and Thin Wafer-Level SiP and Wafer-Level 3D Packages

Cu Wire Bonding Survey Results. inemi Cu Wire Bonding Reliability Project Team Jan 30, 2011

Modelling Embedded Die Systems

Hot formed Steel and its Properties Test

NEC 79VR5000 RISC Microprocessor

Customizing Processes for Hermetic Assembly Of Devices Designed for Plastic Packages (1 of 3)

Paper type solvent filter Cartridge type solvent filter In-line filter. Uniform fiber diameter of 1 µm. Minimized deviation in particle size.

Innovative Substrate Technologies in the Era of IoTs

3D & 2½D Test Challenges Getting to Known Good Die & Known Good Stack

CLAD MATERIAL ~ FINE CLAD is a solution for high density, low cost PWB.

Transcription:

Package Solutions and Innovations with Compression Molding IEEE SVC CPMT Aug 2015 Presented by C.H. Ang Towa USA Company Profile www.cpmt.org/scv 1

Corporate Overview Company: Towa Corp., Kyoto Japan Established: 1979 Employees: >1000 Average Sales (2000-15): US$160M/year 3 Core Business Molding Encapsulation Technology Singulation Cutting technology Compression Mold Transfer Mold 660x540mm (Outer Size) Large Panel 100 300mm MAP BGA 100 300mm MAP QFN 320x320mm Panel Mold Cut Sample LED ECU Module 100x300mm Transfer Mold LED Sample Wafer Level Mold IPM www.cpmt.org/scv 2

Molding Technology Overview 5 Transfer molding with multi-plunger Y System Series Y Series www.cpmt.org/scv 3

TOWA Transfer Molding Multi Plunger Mold Technology game changer became De Facto Standard Conventional Mold 1982 Improve Resin Utilization Shorten Cycle Time Uniform molding quality Easier Mold Operation Multi Plunger Mold 7 Since 2002 Compression Molding FFT, PMC System Series www.cpmt.org/scv 4

Package Trends Advanced Packages Types and Trend Source : Yole Development www.cpmt.org/scv 5

SOP 100X300 IPM Power Module More large LF for Automotive and Power PKG Metal Frame Automotive MEMS QFP QFN 100X300 Thick molding t5mm Full Auto Substrate FC 2.5D H/S 3D Hybrid Memory Cube SiP with Embedded PMC100 300 for QFN PMC 2nd Gen Low COO Wafer/Panel Scale PKG Fan-in WLP 8 150 mm 12 320mm FOWLP Embedded 18 (UP TO 20 ) 660 515 mm 2 nd Gen Large Panel Molding 660 515 Auto Manual Full for Auto Saw 660 515 LED 2013 8 Phosphor Mold 2014 2015 LCM 3nd Gen. for Low COO LCM 2nd Gen. with Edge Gate 8 WLP Semi-auto Source: 2013 YOLE Developpement www.cpmt.org/scv 6

Compression Molding Solutions, Innovations and Savings Why Compression Mold Technology Advantages: Scales up to wafer and large panel sizes Thinner and Smaller Packages Tight Tolerance requirement (+/- 7 um) Minimize mold compound cost, wastage and storage Enable finer and longer wires Minimum Packing Pressure Minimal process disruption and tool changes www.cpmt.org/scv 7

Compression Mold : Chase Structure VAC MIDDLE PLATE UPPER CHASE MAIN CAVITY BLOCK VAC UPPER CHASE HOLDER O-RING VA C VA C RELEASE FILM RESIN PRODUCT VA C MOLD PRESSURE VA C LOWER CHASE HOLDER FILM CLAMPER LOWER FRAME CLAMP BLOCK MOVE LOWER BASE PLATE LOWER MAIN CAVITY BLOCK Compression Molding Comparison Compression Mold Transfer Mold Compound usage 100% Around 70% Moisture Sensitivity Level Better due to even filler distribution Filler distribution uneven Stress to Die &Wire Mold ability Negligible Stress Stress from resin flow (Thin mold cap and large substrate w/o void) Very good Scalability Limited Flexible Package Thickness Mold recipe change Tool change required Production ratio All information 95% property without of Towa Cleaning Corporation 80 % inc. Cleaning www.cpmt.org/scv 8

Compound usage Transfer Molding Compression Molding Approx. 40~60% resin usage 100% resin usage Improved resin utilization and reduction of waste material and disposal cost 17 Filler Distribution Compression Mold Transfer Mold Filler rich Even Filler distribution Gate Runner Resin rich Effects of uneven filler distribution Warpage and MSL www.cpmt.org/scv 9

Filler Distribution Location Dependency Warpage due to uneven filler spread www.cpmt.org/scv 10

Warpage Effect on MSL Stress to Die & Wire Compression Mold Transfer Mold Gate Runner www.cpmt.org/scv 11

Stress to Die & Wire Mold evaluation example of fine & long Wire MOLDING CONDITION Wire: φ15μm Wire length 5mm Cost down proposal of finer gold wire φ25μm φ15μm Approx. 64% reduction φ22μm φ15μm Approx. 54% reduction Cross-section ratio Molding Pressure Effects Transfer Molding Minimum Packing Pressure 75 kg/cm2 Compression mold minimum pressure -10 kgf/cm2 All information property 24of Towa Corporation www.cpmt.org/scv 12

Moldability Scalable and Thin Cap Transfer molding Compression molding GATE side Longer flow distance Compound flow-free Value and precise performance Concept High quality Molding: Achieved PKG thickness Layout accuracy Specification ±10 μm Liquid Resin Granular Compound Uniform dispense granular compounds. Uneven resin supply Air flow Uneven resin flow Chip off-set Void No travel resin Air flow Travel Resin Filler segregation Uneven No defect Product defects www.cpmt.org/scv 13

Very Large Panel/Wafer Molding Moldability (Module device) Compression Mold Transfer Mold Air trap Memory Power Manager GPS FM NFC Memory Power Manager GPS FM NFC BB/P A/P RF Power AMP Power Manager RF RF BB/P A/P RF Power AMP Power Manager RF RF Gate Runner www.cpmt.org/scv 14

Void Free Molding Transfer molding Compression molding Package Thickness reduction Transfer molding Big Mold gap necessary for compounds flow Compression molding (Filler size coverage ) Minimum Mold Gap 0.1mm over Die www.cpmt.org/scv 15

Mold Flow Effects of Transfer Molding Model Mold Die for MAP BGA Model Mold Die for MAP 20mm 80mm 9mm Cull Test Results (Weld Void) Grade GAP 7730L / 75 m G760 / 55 m 220 m 0/6 0/6 200 m 1/6 0/6 0.6mm 11mm 180 m 2/6 0/6 160 m 6/6 1/6 Simple Tooling Design Transfer Molding Compression Molding - Substrate thickness compensation, - Two-step clamping Not require for substrate thickness compensation www.cpmt.org/scv 16

Mold Tool Flexibility PKG thickness range of 0.3mm within the same Mold PKG thickness 0.4-0.7mm Upper main cavity PKG thickness 0.8-1.1mm Upper main cavity Lower Outside cavity Spring a Lower main cavity b Lower Outside cavity Spring a Lower main cavity b 33 Reduction of CMP, back grinding process By reducing CMP, Back grinding process, Reduction of one process and equipment cost CMP, Back grinding process is required CMP/Back grind not required to achieve thin package Minimum Mold Gap over Die Transfer molding Compression molding 34 www.cpmt.org/scv 17

Summary TOWA s Compression Molding technology with fine molding offers - innovative solutions to advanced package demands - application versatility (IC package, LED, Solar) - scales up to large panel - cost effective ONE MORE THING TOWA USA LAB Morgan Hill, CA ~ TOWA Confidential www.cpmt.org/scv 18

FFT 1030 Manual Compression Molding Strip size: 100x300mm Mold Cavity : 65 x 260 x 0.3 ~1.2 mm Pieces per shot: 1 strip / press Clamp capacity: ~ 294 kn ( ~ 30 tonf) TOWA Confidential CPM1080 Manual Wafer or Panel Molding Large Panel Molding: Panel size: 320 x 320 mm Mold cap: 300 x 300 x 0.3 ~ 1.2 mm Wafer Level Molding: Wafer size: 12 (Diameter 300mm) Mold cap: Ø 290 x 0.3~1.2 mm Pieces per shot: 1 panel or wafer Clamp capacity: 98 ~ 784 kn (10 ~ 80 tonf) www.cpmt.org/scv 19

Thank you for your time and attention! Call us for your package solutions: Websites: http://towa-usa.com/ www.towajapan.co.jp General inquiries: info@towa-usa.com Sales inquiries: sales@towa-usa.com Towa USA Corporation 350 Woodview Ave. Suite #200 Morgan Hill, Ca, 95037 Phone: (408) ) 779-4440 39 www.cpmt.org/scv 20