Graphite and C/C Products for Semiconductor & Solar Applications Graphite and C/C Products for Semiconductor & Solar Applications www.schunk-group.com
SCHUNK GROUP HIGH TEMPERATURE APPLICATIONS Schunk Carbon Technology: Always at your side Schunk Carbon Technology focuses on development, manufacture and application of carbon and ceramic solutions. It combines innovative spirit and technological expertise with exceptional customer service to provide a range of products and services unique to the market. In Schunk Carbon Technology, you have a partner who can offer all the technological possibilities of an international company and implement ideas custom-tailored to your needs, both for high-volume industrial markets and for highly specialized niche markets. A Schunk Group division Enabling, idea-driven, cooperative if you hope to apply environment simulation and air conditioning technology, technology to develop better products and capture sintered metal and ultrasonic welding. new markets, we can help. The Schunk Group has been supporting customers with innovative technologies since The Schunk Group is active in a large number of key 1913. As an idea-driven technology company, innovation industries, from automotive, rail, aviation and marine technologies to solar and wind energy, medical and electrical is funda mental to our culture. We forge long-lasting, cooperative working relationships with our clients. technology as well as the semiconductor industry. Our more than 8,000 employees in 29 countries are ready to serve You will find our custom-tailored high-tech products and you. systems in markets such as carbon technology and ceramics, High Temperature Applications: Material expertise for the most extreme conditions Our premium carbon solutions are used in nearly every thermal application: heat treatment, medical and analysis technology, the glass industry and solar technology. Schunk Carbon Technology offers a broad spectrum of graphite, carbon fibre-reinforced carbon and ceramics, carbon and graphite felt materials and components for these applications. Together with solutions devised by our technical ceramics business unit, we have a spectrum of products and services for high temperature applications and heat engineering available nowhere else in the world. Thermal processes firmly under control In the area of heat treatment and tempering, we have assembled a product portfolio that sets standards in technological development. This includes everything from furnace components, insulation materials and charge carrier systems to burning aids and solutions for temperature measurement. We combine innovative solutions, such as new patented processes for relining Hot Zones, silicon material solutions and intelligent charge carrier designs, with our distinctive material and application expertise to create solutions that bring economy, energy efficiency and a long service life. Made-to-order industrial solutions It s good to know what markets need. It s even better to provide the technological answers. As a global leading specialist for high temperature applications, Schunk Carbon Technology has solutions and ideas to benefit every market, including: hollow glassware industry components and systems for the photovoltaic industry delicate, yet high-performance, graphite components for analysis and medical technology 02 03
POLYSILICON PRODUCTION Customized Solutions for Polysilicon Production Inhouse Graphite-Production Material Combination for Best Performance optimized production-flow for short delivery time standard dimensions available from our stock high density with optimized grain-size isostatic graphite extruded graphite Graphite Electrodes for CVD-Reactors modern press-fit design high precision machining very low tolerances feasible graphite grades selection according to customer requirements customized design development soft felt hard felt graphite foil C/C foil C/C composite materials Oxatherm C and SiC specialized insulation STC-TCS converter purification to semiconductor standards insulation tubes with diffusion barriers insulations tubes with coatings to prevent particle release Graphite chuck for Siemens reactor Outstanding Heater Elements single piece design + CVD-SiC tailorable specific electrical resistance high uniformity of heat transfer Siemens CVD reactor Components for STC-to-TCS Thermal Converters Purification at Semiconductor Standard improved lifetime due to refined materials reduction of operating costs lowest operating cost per kilogram of Si produced high temperature purification of graphite-products impurity-level of single elements in the ppb-range total ash-content below 5 ppm boron and phosphor content in single digit ppb-rang certificate of purification available on request clean room environment for processing and packing (ISO Class 3) CVD-PyroCarbon CVD-SiC highly orientated coatings with ß-SiC crystalline structure prevents from carbon contamination lifetime improvement large dimensions up to diameter 1700 mm and 2000 mm length high unifomity and homogeneity even for large substrates tight tolerances feasible high purity CVD/CVI coatings and infiltration highly orientated large dimensions up to diameter 1800 mm and 2000 mm length layer thicknesses are adapted to end use high unifomity and homogeneity even for large substrates Hybrid Insulation Tube Customized Heat-Exchanger machining of large dimensions in bore CVD-SiC coating 04 05
CZ-PULLER Customized Solutions for CZ-Puller C/C Crucible Graphite Heater C/C heating element tight electrical resistance tolerance wide range of graphite grades available to match specific electrical resistance high durability and lifetime Graphite Funnel optimized design for thermal properties increased pulling speed due to refinement with PyC prevention of chemical contamination due to CVD-SiC less crystal defects due to optimized temperature profile Graphite Crucible standard and new designs available low thermal mass design high lifetime performance due to new design new concept of material combinations increased lifespan and optimized handling C/C-Crucible single piece design from 20 36 low thermal mass design high lifetime performance increased lifespan and optimized handling CZ hybrid crucible Insulation Setup OxaTherm C150 Insulation self-supporting soft felt insulation design optimized thermal conductivity level particle release protection uniform temperature distribution enhances process optimized energy consumption One-Piece Insulation Tubes reduced particle release improved insulation performance inside graphite foil as reflection layer low thermal conductivity reduces heat loss customized designs available CZ Hot Zones CVD/CVI Technology for Process Improvement CVD ß-SiC (10 300 µm) CVD of pryrolitic carbon (5 300 µm) CVI of pyrolitic carbon High Temperature Purification of All Carbon Parts impurity level below 5 ppm prevents from carbon contamination element content i.e. for boron and phosphorus are in the single digit ppb-range 06 07
DSS HOT ZONES Fasteners Made of Carbon Customized Products for DSS Hot Zones Optimized Graphite Portfolio New Crucible-Box Design graphite or C/C fasteners for highest mechanical loads optimized design for high durability standard and customized designs available all graphite materials are selected for ultimate performance isostatic graphite and extruded graphite high temperature uniformity due to selected graphite materials high durability and lifetime lower cost of ownership improved thermal mass lower energy consumption due to improved material utilization high chemical resistance due to CVD/CVI refinement lowest possible C-contamination C/C fasteners Protection Layer Made of C/C increased lifespan of insulation higher temperature uniformity extended maintenance cycle reduced down-time Premium Insulation Material high uniformity low thermal conductivity tight flatness tolerances for plate materials best insulation properties in their class (one-piece-design) specialized grades due to CVD/CVI refinement very low particle release Top-Plates with CVD-SiC reduced contamination no back-contamination improved mono like block production improved block utilization longer lifetime lowest operating costs C/C Top Plate for DSS (left) C/C Top Plate with specialized coating (right) Upgrade from Gen5 up to Gen8 C/C Material DSS Hot Zone on-site consulting service available customized dimensions and solutions for upgrades short production and delivery times for customized parts one-stop service variety of C/C grades from stock available different thermal conductivity options highly purified C/C top class mechanical properties 08 09
PECVD-SYSTEMS C/C Carrier for PECVD-Systems In-House Premium C/C Production optimized production-flow for short delivery time standard dimensions available from our stock different C/C grades available maximum plate size 3000 x 2000 mm 2 available customized grades and sizes on request state-of-the-art production methods in-house on-site consulting service available Improved Mechanical Performance optimized mechanical strength and stiffness no degradation of mechanical performance high durability during PECVD carrier optimization with FE analysis optional Optimized Cleaning Behavior optimized pore structure reduced outgasing after cleaning reduced conditioning reduced contamination of coating tool C/C Carrier Optimized Temperature Profile reduced thermal mass due to optimized carrier density high temperature uniformity across carrier best in class thin layer depostion uniformity low discoloration effect PECVD coating tool Different C/C grades Optimized Machining tight tolerances for complex pocket designs no fiber release in application precise Si-wafer positioning on carrier reduced automation failure 3D measurement of pocket symmetry Maximum Production Size for Plates 3000 x 2000 mm 2 10 11
Schunk Kohlenstofftechnik GmbH Rodheimer Strasse 59 35452 Heuchelheim Germany Phone +49 641 608-0 Fax +49 641 6080-1223 E-Mail info@schunk-group.com www.schunk-group.com 20.06/250/2015