PROCESS ECONOMICS PROGRAM
|
|
- Karin Parrish
- 6 years ago
- Views:
Transcription
1 PEP 85 RHSrnM PROCESS ECONOMICS PROGRAM SRI INTERNATIONAL Menlo Park, California Abstract Process Economics Program Report No. 184 HIGH-PURITY SILICON (October 1988) This report summarizes the technology and economics of producing high-purity silicon ( polysilicon ) suitable for making single-crystal silicon for semiconductors or photovoltaic cells. In the commercial processes, the raw material-metallurgical-grade silicon--is converted to trichlorosllane (TCS), which is purified and then decomposed to high-purity silicon. In the Siemens process, TCS is made by reacting metallurgical-grade silicon with hydrogen and SiCW in a two-stage vapor-phase reaction in a fluidized bed. The TCS is purified by distillation and is decomposed at 1125OC in the presence of hydrogen. Purified silicon is deposited on heated filaments in a bell-jar reactor. In an alternative process, practiced commercially by Union Carbide, TCS is converted to sllane (SiHJ by disproportionatlon. Chlorosilanes are recycled, and purified silane is decomposed at 805OC. Purified silicon Is deposited on heated filaments in a bell-jar reactor. According to our analysis, this is a more expensive process. Other processes for making high-purity silicon are now under development. Some of them use other intermediates such as SiF, or SiBr,.
2 Report No. 184 HIGH-PURITY SILICON by ROBERT H. SCHWAAR and TOM McMlLLAN with contributions by JAMES J. L. MA and ROSEMARY BRADLEY c cl I a m A private report by the October 1988 PROCESS ECONOMICS PROGRAM Menlo Park, California 94025
3 For detailed marketing data and information, the reader is referred to one of the SRI programs specializing in marketing research. The CHB4ICAL ECONOMICS limd8ook Program covezs most major chemicals and chemical products produced in the United States and the WOEtLD PgTROCHgHICAlS Program covsrs major hydrocarbons and their derivatives on a worldwide basis. In addition, the SRI DIRECTORY OF CHEMICAL PRODUCERS services provide detailed lists of chemical producers by company, prod- uct, and plant for the United States and Western Europe. ii
4 CONTENTS 1 INTRODUCTION l-l 2 SUMMARY... 2-l TECHNICAL ASPECTS High-Purity Silicon via Chlorosilane Reduction... 2-l High-Purity Silicon via Silane Decomposition ECONOMIC ASPECTS INDUSTRY STATUS... 3-l PRODUCERS AND CAPACITY... 3-l CONSUMPTION AND GROWTH DEVELOPMENTS AND TRENDS PRICES HIGH-PURITY SILICON VIA CHLOROSILANE REDUCTION... 4-l REVIEW OF PROCESSES TCS by Reaction of Si and HCI TCS by Reaction of Si, HCI, and Recycled Chtorosilanes TCS from SiCl, and Hydrogen TCS from SiCl,,, Hydrogen, and Impure Si TCS from SiCl,, HCI, and Impure Si TCS from SCI,, HCI, Hydrogen, and Impure Si TCS Purification High-Purity Silicon from Trichlorosilane (TCS) Production of Silicon Rods by CVD Silicon Melt Production Production of Silicon Granules in a Fluidized Bed Effluent Gases from Silicon Production Recovery of Chlorosilanes Handling of SC&... 4-l 3 Recovery of HCI Production of Silicon by an Integrated Process PROCESS DESCRIPTION Design Basis Trichlorosilane Synthesis (Section 100) Chlorosilanes Purification (Section 200) Chemical Vapor Deposition (Section 300) Waste Treatment (Section 400) PROCESS DISCUSSION Materials of Construction Trichlorosilane (TCS) Synthesis Ill
5 CONTENTS 4 HIGH-PURIN SILICON VIA CHLOROSllANE REDUCTION (Continued) Synthesis Reactor Effluent... Boron Removal... Chlorosilanes Purification... Chemical Vapor Deposition (CVD)... CVD Effluent Treatment... Waste Treatment... COST ESTIMATES... Capital Costs... Production Costs HIGH-PURITY SILICON VIA SILANE DECOMPOSITION... 5-l REVIEW OF PROCESSES... 5-l Production of Silane Disproportionation of Chlorosilanes Silane Purification Silane Pyrolysis Filament (Rod)-Type Reactors Fluldized Bed Deposition Free-Space Reactors Effluent Gases from Silane Decomposition Integrated Process for Making Silicon from MG-Si via TCS and Silane PROCESS DESCRIPTION Trichlorosilane Synthesis (Section 100) DistlllationlDisproportionation (Section 200) Pyrolysis (Section 300) Waste Treatment (Section 400) PBOCESS DISCUSSION Trichlorosilane Synthesis Distillation/Disproportionation Silane Decomposition Rod Processing Materials of Construction Waste Treatment COST ESTlMATES Capital Costs Production Costs High-Purlty SIUCON VIA SILICON TETRAHALIDE REDUCTlON PROCESSES FOR MAKING SILICON TETBAHALIDES... 6-l PURlFlCATiON OF SIUCON TETRAHALIDES iv
6 CONTENTS 6 High-Purity SILICON VIA SILICON TETRAHALIDE REDUCTION (Continued) INTEGRATED PRODUCTION PROCESSES Silicon Tetrafluoride Reduction ARC Siemens AG SRI International U.S. Department of Energy Silicon Tetrachloride Reduction Ethyl Corporation J. S. Schumacher COMPARISON OF INTEGRATED PROCESSES UPGRADING METALLURGICAL-GRADE SILICON... 7-l ELECTROREFINING OF METALLURGICAL-GRADE SILICON... 7-l PRECIPITATION REFINING OF METALURGICAL-GRADE-SILICON... 7-l LEACHING OF A SILICON ALLOY... 7-l CARBON REMOVAL SiCl, INTERMEDIATE a PRODUCTION OF SINGLE-CRYSTAL SILICON... a-i Appendix A PHYSICAL PROPERTY DATA... A-l Appendix B DESIGN AND COST BASIS... B-l Appendix C PATENT SUMMARY TABLES... C-l Appendix D CITED REFERENCES... D-l Appendix E PATENT REFERENCES BY COMPANY... E-l V
7 ILLUSTRATIONS Trichlorosilane by Direct Synthesis I Combination Si Melt Production and Crystallization l 2 High-Purity Silicon via Chlorosilanes Reduction Flow Sheet I... High-Purity Silicon via Chlorosilanes Reduction Effect of Electricity Cost on Product Value.....I High-Purity Silicon via Chlorosilanes Reduction Effect of Operating Level on Product Value *...* F-9 High-Purity Silicon via Silane Decomposition Effect of Operating Level on Product Value High-Purity Silicon via Silane Decomposition Effect of Electricity Cost on Product Value..I...,...,..,.., F-l High-Purity Silicon via Silicon Tetrahalide Reduction Silicon Tetrafluoride Purification by the Swarovski Process High-Purity Silicon via Silicon Tetrahalide Reduction Silicon Tetrafluoride Preparation by the Proposed ARC0 Process Flow Sheet *......,.... Siemens AG Process SRI International Process U.S. Department of Energy Process Battelle Columbus Laboratories Process Schumacher Process, Version A Flow Sheet *... Schumacher Process, Version B Flow Sheet,...~..., vii
8 2.1 Comparison of TCS and Silane Processes , Summary of Cost Estimates for High-Purity Silicon Manufacture.., Polysllicon Production Capacity, 1967-l Principal Producers of Single-Crystal Ingots/Silicon Wafers Having No Captive Polysilicon Capacity, Consumption of Polycrystalline Silicon, Trichlorosilane from Silicon and HCI Patent Summary *...*... Trichlorosilane from Silicon, HCI, and Recycled Chlorosilanes Patent Summary *... B...,. c-2 TCS Production by SCI, Hydrogenation Patent Summary , ,..,..,.. C-4 Manufacture of SiCl, Patent Summary a....*... c-5 TCS from SiCl, by Hydrogenation in the Presence of Silicon Patent Summary a... C-6 Purification of Trichlorosilane Patent Summary.,...,...,.., C-6 Silicon from Trichlorosilane Patent Summary c-9 Silicon Production in a Fluidized Bed Patent Summary I... C-l 6 Handling of Gaseous Effluent from Silicon Reactors Patent Summary I... c-19 Integrated Processes for Silicon Manufacture via Chlorosilane Reduction Patent Summary.....*...*...*...*... c-21 High-Purity Silicon via Chlorosilane Reduction Design Bases and Assumptions * C-l 4.12 Impurities Found in Metallurgical Grade Silicon Feeds High-Purity Silicon via Chlorosilanes Reduction Major Equipment High-Purity Silicon via Chlorosilanes Reduction Utilities Summary , High-Purity Silicon via Chlorosilanes Reduction Stream Flows ix
9 TABLES 4.16 High-Purity Silicon via Chlorosilanes Reduction Waste Streams High-Purity Silicon via Chlorosilanes Reduction Total Capital Investment * High-Purity Silicon via Chlorosilanes Reduction Production Costs *...* Production of Silane Patent Summary Disproportionation of TCS Patent Summary Silane Purification Patent Summary *...*...a...*... Silicon from Silane Patent Summary Design Bases and Assumptions *... Major Equipment,...m...m...,...,... Utilities Summary Stream Flows Waste Streams * Total Capital Investment, ,,...,..a..,... Production Costs, ,... C-23 C-27 c-31 c l High-Purity Silicon by Silicon Tetrahalide Reduction Patent Summary *... c-37 High-Purity Silicon by Silicon Tetrahalide Reduction Comparison of Silicon Made by the SRI Process with Semiconductor Grade Silicon High-Purity Silicon by Silicon Tetrahalide Reduction Comparison of Integrated Processes Single-Crystal Pulling Patent Summary *... C-42 X
Solar Photovoltaic Technologies
Solar Photovoltaic Technologies Lecture-29 Prof. C.S. Solanki Energy Systems Engineering IIT Bombay Contents Brief summary of the previous lecture Production of Si MG-Si, EG-Si Siemens Process, FBR process
More informationThe lowest quality of silicon is the so- called metallurgical silicon. The source material of making metallurgical silicon is quartzite.
ET3034TUx - 4.2 - Manufacturing of crystalline silicon We have various types of silicon wafers such as monocrystalline silicon and polycrystalline silicon. In this block I will give an answer to the question:
More informationPROCESS ECONOMICS PROGRAM
PROCESS ECONOMICS PROGRAM SRI INTERNATIONAL Menlo Park, California 94025 Abstract Process Economics Program Report No. 155 ETHYLENE COPOLYMERS (March 1983) This report covers the technology and costs of
More informationPROCESS ECONOMICS PROGRAM
PROCESS ECONOMICS PROGRAM SRI INTERNATIONAL Menlo Park. California Abstract Process Economics Program Report No. 56A UREA (January 1981) The market for urea is growing rapidly worldwide principally because
More informationPROCESS ECONOMICS PROGRAM. Report No by NICK KORENS ROBERT W. VAN SCOY. January private report by the PARK, CALIFORNIA
Report No. 110 SYNTHESIS GAS PRODUCTION by NICK KORENS and ROBERT W. VAN SCOY January 1977 A private report by the PROCESS ECONOMICS PROGRAM STANFORD RESEARCH INSTITUTE I MENLO PARK, CALIFORNIA For detailed
More informationH. Aülich PV Silicon AG Erfurt, Germany
Workshop on "Physics for Renewable Energy" October 17-29, 2005 301/1679-28 "Technology of Solar-grade Silicon" H. Aülich PV Silicon AG Erfurt, Germany Silicon for the PV Industry Hubert A. Aulich PV Crystalox
More informationSiemens AG, 2009 MAXUM II. Boom in Photovoltaics
Online monitoring of polysilicon production in photovoltaic industry Case Study January 2009 Boom in Photovoltaics Global demand for solar energy is booming as a cost competitive reliable source of clean
More informationSemiconductor Grade Silicon *
OpenStax-CNX module: m31994 1 Semiconductor Grade Silicon * Andrew R. Barron Based on Synthesis and Purication of Bulk Semiconductors by Carissa Smith Andrew R. Barron This work is produced by OpenStax-CNX
More informationPROCESS ECONOMICS PROGRAM
PROCESS ECONOMICS PROGRAM SRI INTERNATIONAL Menlo Park, California Abstract Process Economics Program Report No. 20B ABS RESINS (December 1980) This second supplement to Process Economics Program Report
More informationProcess Economics Program Report No. 8C WET PROCESS PHOSPHORIC ACID. (August, 1982) Abstract
Process Economics Program Report No. 8C WET PROCESS PHOSPHORIC ACID (August, 1982) Abstract Three processes to produce wet process phosphoric acid are evaluated. The dihydrate process, once the undisputed
More informationPROCESS ECONOMICS PROGRAM
PROCESS ECONOMICS PROGRAM SRI lnternatlonal Menlo Park, California ABSTRACT 94025 Process Economics Program Report 46C MALEIC ANHYDRIDE (October t 989) This study presents designs and economics for the
More informationReport No. 29 ETHYLENE. August A private report by the PROCESS ECONOMICS PROGRAM I STANFORD RESEARCH INSTITUTE MENLO PARK, CALIFORNIA
Report No. 29 ETHYLENE by SHIGEYOSHI TAKAOKA August 1967 A private report by the PROCESS ECONOMICS PROGRAM I STANFORD RESEARCH INSTITUTE MENLO I PARK, CALIFORNIA CONTENTS 1 INTRODUCTION........................
More informationPROCESS ECONOMICS PROGRAM
PROCESS ECONOMICS PROGRAM Abstract SRI INTERNATIONAL Menlo Park, California 94025 Process Economics Program Report No. 5C VINYL CHLORIDE (December 1982) This report covers the manufacture of vinyl chloride
More informationPROCESS ECONOMICS PROGRAM
PROCESS ECONOMICS PROGRAM SRI INTERNATIONAL mnlo Puk, cdifomim Abstract Process Economics Program Report No. 126 Cl CHLORINATED HYDROCARBONS This report reviews the technology, economics and market status
More informationAbstract Process Economics Program Report 274 FUEL ALCOHOLS AND ELECTRICITY COGENERATION FROM PETROLEUM COKE GASIFICATION (December 2010)
Abstract Process Economics Program Report 274 FUEL ALCOHOLS AND ELECTRICITY COGENERATION FROM PETROLEUM COKE GASIFICATION (December 2010) Increasing use of heavy crude oil in refineries in recent years
More informationPROCESS ECONOMICS PROGRAM
PROCESS ECONOMICS PROGRAM SRI INTERNATIONAL Menlo Park, California Abstract 94025 Process Economics Program Report No. 22C PHENOL (March 1991) This is the fourth in a series of reports on the manufacture
More informationPROCESS ECONOMICS PROGRAM
PROCESS ECONOMICS PROGRAM Abstract Process Economics Program Report No. 185 SRI INTERNATIONAL Menlo Park, California 94025 SLURRY PHASE POLYPROPYLENE (June 1988) This report summarizes the technology and
More informationPROCESS ECONOMICS PROGRAM
PROCESS ECONOMICS PROGRAM SRI INTERNATIONAL Menlo Park, California 94025 Abstract Process Economics Program Report No. 19C HIGH DENSITY POLYETHYLENE High density polyethylene is manufactured by polymerizing
More informationPhotovoltaics: BASICS
Laurea Magistrale in Scienza dei Materiali Materiali Inorganici Funzionali Photovoltaics: BASICS Prof. Antonella Glisenti - Dip. Scienze Chimiche - Università degli Studi di Padova AIR MASS NUMBER defines
More informationManufacture of Granular Polysilicon from Trichlorosilane in an Internally Circulating Fluidized Bed Reactor
Engineering Conferences International ECI Digital Archives 10th International Conference on Circulating Fluidized Beds and Fluidization Technology - CFB-10 Refereed Proceedings Spring 5-2-2011 Manufacture
More informationAbstract Process Economics Program Report 7D CAPROLACTAM UPDATE (October 2011)
Abstract Process Economics Program Report 7D CAPROLACTAM UPDATE (October 2011) This report is an update of Process Economics Program report 41B Caprolactam and Nylon 6. The capacity and economics for the
More informationPHTHALIC ANHYDRIDE PROCESS ECONOMICS PROGRAM I. Supplement. June A private report by the STANFORD RESEARCH INSTITUTE I MENLO PARK, CALIFORNIA
Report No. 34A PHTHALIC ANHYDRIDE Supplement A by LLOYD M. ELKIN June 1974 A private report by the PROCESS ECONOMICS PROGRAM I STANFORD RESEARCH INSTITUTE I MENLO PARK, CALIFORNIA CONTENTS 1 INTRODUCTION........................
More informationPhysics and Material Science of Semiconductor Nanostructures
Physics and Material Science of Semiconductor Nanostructures PHYS 570P Prof. Oana Malis Email: omalis@purdue.edu Today Bulk semiconductor growth Single crystal techniques Nanostructure fabrication Epitaxial
More informationNew Methods for Producing Low Cost Silicon for Solar Cells
Lund, C., Zhang, W., Jennings, P. and Singh, P. (2000) New methods for producing low cost silicon for solar cells. In: Solar 2000: Renewable Energy Transforming Business, 38th annual conference of the
More informationPROCESS ECONOMICS PROGRAM
Abstract PROCESS ECONOMICS PROGRAM SRI INTERNATIONAL Mmlo Park, California 94025 Process Economics Program Report No. 154 COAL GASIFICATION (January 1983) This report reviews the current status of coal
More informationPEP Review METHANOL PRODUCTION VIA TOYO PROCESS By Syed N. Naqvi (December 2011) ABSTRACT
PEP Review 2011-14 METHANOL PRODUCTION VIA TOYO PROCESS By Syed N. Naqvi (December 2011) ABSTRACT This Review updates PEP Review 2001-14 by presenting a techno-economic evaluation of a methanol production
More informationPROCESS ECONOMICS PROGRAM
PROCESS ECONOMICS PROGRAM Abstract SRI INTERNATIONAL Menlo Park, California 94025 Process Economics Program Report No. 13D POLYVINYL CHLORIDE (May 1982) This supplementary report reviews recent developments
More informationPROCESS ECONOMICS PROGRAM
PROCESS ECONOMICS PROGRAM Abstract SRI INTERNATIONAL Mod0 PM, California 94025 Process Economics Program Report No. 123 CARRON MONaIDE RECOVERY Carbon monoxide, as synthesis gas, is obtained largely from
More informationAMINO ACIDS PROCESS ECONOMICS PROGRAM. Report No by WING S. FONG. Contributions by Victor E. Althouse. November A private report by the
Report No. 106 AMINO ACIDS by WING S. FONG Contributions by Victor E. Althouse November 1976 A private report by the PROCESS ECONOMICS PROGRAM STANFORD RESEARCH INSTITUTE I I MENLO PARK, CALIFORNIA For
More informationAbstract Process Economics Program Report No. 210 HETEROCYCLIC NITROGEN COMPOUNDS (January 1993)
Abstract Process Economics Program Report No. 210 HETEROCYCLIC NITROGEN COMPOUNDS (January 1993) This report contains preliminary process designs and cost estimates for the production of four heterocyclic
More informationPEP Report 50E POLYCARBONATE By Susan Bell (October 2007)
PEP Report 50E POLYCARBONATE By Susan Bell (October 2007) ABSTRACT This report continues our review of polycarbonate production technology, supplementing our earlier report PEP Report 50D issued in 1999.
More informationMott GasShield Filters made with Hastelloy C-22 alloy For unsurpassed strength and resistance to corrosion
Semiconductor Industry Gas Filtration Update Corrosive gases are easily handled with all Hastelloy gas filters from Mott. Today, Mott is the premier supplier of Hastelloy-based filters to the semiconductor
More informationPROCESS ECONOMICS PROGRAM
PROCESS ECONOMICS PROGRAM SRI INTERNATIONAL Abstract Process Economics Program Report No. 199 PLASTICS RECLAMATION AND RECYCLING Menlo Park, California 94025 (January 1992) In the rapidly growing business
More informationCrystal Growth and Wafer Fabrication. K.Sivasankaran, Assistant Professor (Senior), VLSI Division, School of Electronics Engineering, VIT
Crystal Growth and Wafer Fabrication K.Sivasankaran, Assistant Professor (Senior), VLSI Division, School of Electronics Engineering, VIT Crystal growth Obtaining sand Raw Polysilicon Czochralski Process
More informationPROCESS ECONOMICS PROGRAM
PROCESS ECONOMICS PROGRAM SRI INTERNATIONAL Manlo Park, California 94025 ABSTRACT Process Economics Program Report No. 140 OPERATING COSTS IN THE CHEMICAL INDUSTRY AND THEIR ESTIMATION (April 1981) This
More informationSustainable Si production for solar cells a responsibility for Norway? (or how can Norway contribute to the PV industry in collaboration with China?
Sustainable Si production for solar cells a responsibility for Norway? (or how can Norway contribute to the PV industry in collaboration with China?) Gabriella Tranell, Associate Professor The Norwegian
More informationCL 240: Materials Technology
CL 240: Materials Technology Semiconductor materials Instructor: Vinay Prasad Materials and processing - descriptive, few mathematical equations Semiconductors (Si), dopants, metals, insulators 34% of
More informationReport No by ROBERT H. SCHWAAR. November A private report by the PROCESS ECONOMICS PROGRAM PARK, CALIFORNIA STANFORD RESEARCH INSTITUTE I
Report No. 104 THERMOPLASTIC ELASTOMERS by ROBERT H. SCHWAAR with oontxibutions by James J. L. Ma November 1976 A private report by the PROCESS ECONOMICS PROGRAM STANFORD RESEARCH INSTITUTE I MENLO PARK,
More informationPROCESS ECONOMICS PROGRAM
PROCESS ECONOMICS PROGRAM Abstract Process Economics Program Report No. 171 D SRI INTERNATIONAL Menlo Park, California 94025 PESTICIDES AND INTERMEDIATES (January 1989) Chlorothalonil, a fungicide, is
More informationAbstract Process Economics Program Report 229 REFINERY RESIDUE GASIFICATION (June 2001)
Abstract Process Economics Program Report 229 REFINERY RESIDUE GASIFICATION (June 2001) Following an episode of intensive interest during the late 1970s and early 1980s as a means to converting coal to
More informationAbstract PEP Review ETHYLENE GLYCOL PRODUCTION FROM COAL-BASED SYNTHESIS GAS By Syed N. Naqvi and R. J. Chang (October 2012)
Abstract PEP Review 2012-10 ETHYLENE GLYCOL PRODUCTION FROM COAL-BASED SYNTHESIS GAS By Syed N. Naqvi and R. J. Chang (October 2012) ABSTRACT This review presents a technoeconomic evaluation of a newly
More informationAbstract Process Economics Program Report No. 226 INNOVATIVE REACTORS (June 2001)
Abstract Process Economics Program Report No. 226 INNOVATIVE REACTORS (June 2001) This report examines potential applications and economic potential for the use of innovative chemical reactors in existing
More informationReport Requirements (submit electronic and hard copy version) Due Date: 9 AM on May 5, 2014
Spring 2014 EEC 503 Short Team Project Overall Objective In the team report on the project assigned to you it is expected that you will demonstrate: a) resourcefulness in (i) outlining of and focusing
More informationCHLORINATED SOLVENTS
Report No. 48 CHLORINATED SOLVENTS by LLOYD M. ELKIN contributions by Roberts A. Bell February 1969 A private report by the PROCESS ECONOMICS PROGRAM STANFORD RESEARCH INSTITUTE MENLO PARK, CALIFORNIA
More informationSilicon Technology - Facts and Perspectives
Silicon Technology - Facts and Perspectives Photovoltaik-Symposium Neue Photovoltaiktechnologien Innovation durch Synergie 15. / 16. November 2007 Bitterfeld-Wolfen Prof. Dr. Norbert Auner The Universe
More informationAbstract. Process Economics Program Report No. 149 ETHANOL FOR GASOHOL. (March 1982)
ECONOMICS PROGRAM SRI INTERNATIONA Menlo Park, Califo Abstract Process Economics Program Report No. 149 ETHANOL FOR GASOHOL (March 1982) This report covers the production of ethanol from three major classes
More informationPSE Challenges in Solar Research CAPD Review Sunday March 6, 2011 B. Erik Ydstie
PSE Challenges in Solar Research CAPD Review Sunday March 6, 2011 B. Erik Ydstie Solar grade silicon Float Process for Silicon Wafers Dye Sensitized Solar cells Solar and wind on the Grid (J. Du) (G. Oliveros
More informationSilicon for Wafer production
Silicon for Wafer production Introduction Production of Silicon Silicon is used in the semiconductor industry as raw material for the production of integrated circuits and solar cells. Integrated circuits
More informationTelemark University College Faculty of Technology. Werner 0. Filtvedt. Production of polysilicon from silane pyrolysis in a fluidized bed
Doctora I Dissertation Werner 0. Filtvedt Production of polysilicon from silane pyrolysis in a fluidized bed Telemark University College Faculty of Technology Werner 0. Filtvedt Production of polysilicon
More informationLecture 2 Silicon Properties and Growth
Lecture 2 Silicon Properties and Growth Chapters 1 & 2 Wolf and Tauber 1/63 Lecture 2 Why Silicon? Crystal Structure. Defects. Sand to Electronic Grade Polysilicon. Polycrystalline to Single Crystal Silicon.
More informationAbstract Process Economics Program Report 34B PHTHALIC ANHYDRIDE (October 1998)
Abstract Process Economics Program Report 34B PHTHALIC ANHYDRIDE (October 1998) Worldwide consumption of phthalic anhydride (PA) reached 6.6 billion lb/yr in 1996, and is projected to reach 7.9 billion
More informationPROCESS ECONOMICS PROGRAM
PROCESS ECONOMICS PROGRAM SRI INTERNATIONAL Menlo Park, California 94025 ABSTRACT Process Economlcr Program Report No. 4C ETHYLENE-PROPYLENE COPOLYMER AND TERPOLYMER RUBBERS (March 1990) The annual worldwide
More informationPROCESS ECONOMICS PROGRAM
PROCESS ECONOMICS PROGRAM SRI INTERNATIONAL Abstract Menlo Park, California 94025 Process Economics Program Report No. 181 COGENERATION (April 1987) The revival of cogeneration in industrial plants is
More informationMicroelettronica. Planar Technology for Silicon Integrated Circuits Fabrication. 26/02/2017 A. Neviani - Microelettronica
Microelettronica Planar Technology for Silicon Integrated Circuits Fabrication 26/02/2017 A. Neviani - Microelettronica Introduction Simplified crosssection of an nmosfet and a pmosfet Simplified crosssection
More informationReport No. 32 HYDROGEN. December A private report by the PROCESS ECONOMICS PROGRAM STANFORD RESEARCH INSTITUTE PARK, CALIFORNIA
Report No. 32 HYDROGEN by RICHARD G. DENNEY December 1967 A private report by the PROCESS ECONOMICS PROGRAM STANFORD RESEARCH INSTITUTE I I MENLO PARK, CALIFORNIA CONTENTS 1 2 3 4 5 6 INTRODUCTION....
More informationPROCESS ECONOMICS PROGRAM
Abstract - Process Economics Program Report No. 36B PROCESS ECONOMICS PROGRAM SRI INTERNATIONAL Menlo Park, California 64025 LOW DENSITY POLYETHYLENB (August 1980) Low density polyethylene continues to
More informationAbstract Process Economics Program Report No. 85B ANTIOXIDANTS AND LIGHT STABILIZERS (March 1993)
Abstract Process Economics Program Report No. 85B ANTIOXIDANTS AND LIGHT STABILIZERS (March 1993) This report supplements our technical and economic appraisals of antioxidants and light stabilizers for
More informationGraphite and C/C Products for Semiconductor & Solar Applications
Graphite and C/C Products for Semiconductor & Solar Applications Graphite and C/C Products for Semiconductor & Solar Applications www.schunk-group.com SCHUNK GROUP HIGH TEMPERATURE APPLICATIONS Schunk
More information(12) United States Patent (10) Patent No.: US 6,827,786 B2
USOO6827786B2 (12) United States Patent (10) Patent No.: LOrd () Date of Patent: Dec. 7, 2004 (54) MACHINE FOR PRODUCTION OF 5,037,3 A 8/1991 Kajimoto GRANULAR SILICON 5.242,671 A 9/1993 Allen 5,374,413
More informationAbstract Process Economics Program Report No. 76C ANILINE AND DERIVATIVES (December 1993)
Abstract Process Economics Program Report No. 76C ANILINE AND DERIVATIVES (December 1993) This report supplements previous reports on the subject of aromatic amines. The report includes updated preliminary
More informationCSI G SYSTEMS CSI GAS DELIVERY SUPPORT. Chemical Vapor Deposition (CVD)
This page discusses the CVD processes often used for integrated circuits (ICs). Particular materials are deposited best under particular conditions. Facilitation recommendations are at the bottom of the
More informationDISPOSAL AND RECOVERY OF WASTE ORGANO CHLORIDES
Report No. 102 DISPOSAL AND RECOVERY OF WASTE ORGANO CHLORIDES by PARK L. MORSE and HIROAKI TSURUTA July 1976 A private report by the PROCESS ECONOMICS PROGRAM STANFORD RESEARCH INSTITUTE I I MENLO PARK,
More informationIndustrial,Medical andspecialtygases
I I Industry xperts I RedefinesBusinessAcumen Construction&Manufacturing Industrial,Medical andspecialtygases AGlobalMarketOverview Thereportreviews,analyzesandprojects theglobalmarketforindustrial,medicaland
More informationTRIMELLITIC AND PYROMELLITIC ANHYDRIDES
Report No. 66 TRIMELLITIC AND PYROMELLITIC ANHYDRIDES by HAROLD W. SCHEELINE November 19 70 A private report by the PROCESS ECONOMICS PROGRAM STANFORD RESEARCH INSTITUTE MENLO PARK, CALIFORNIA CONTENTS
More informationPERP/PERP ABSTRACTS Carbon Monoxide PERP 09/10S11
PERP/PERP ABSTRACTS 2010 Carbon Monoxide PERP 09/10S11 Report Abstract December 2010 Report Abstract Carbon Monoxide PERP 09/10S11 December 2010 The ChemSystems Process Evaluation/Research Planning (PERP)
More informationABSTRACT. Introduction
Poly Plant Project, Inc. 3099 N. Lima St., Burbank, CA 91504 ABSTRACT A hybrid TCS-Siemens process to save operation cost caused by energy consumption and equipment investment cost from processes for TCS
More informationAbstract Process Economics Program Report 252 CHEMICALS FROM AGRICULTURAL WASTES (September 2004)
Abstract Process Economics Program Report 252 CHEMICALS FROM AGRICULTURAL WASTES (September 2004) Petrochemical hydrocarbon sources are finite and many experts suggest that they will become exhausted within
More informationReport No. 7 CAPROLACTAM PART II. November A private report by the PROCESS ECONOMICS PROGRAM STANFORD RESEARCH INSTITUTE MENLO PARK, CALIFORNIA
Report No. 7 CAPROLACTAM PART II by HAROLD C. RIES ROBERT G. MULLER November 1965 A private report by the PROCESS ECONOMICS PROGRAM STANFORD RESEARCH INSTITUTE I MENLO PARK, CALIFORNIA CONTENTS PART II
More informationAbstract Process Economics Program Report 227 1,3-PROPANEDIOL AND POLYTRIMETHYLENE TEREPHTHLATE (December 1999)
Abstract Process Economics Program Report 227 1,3-PROPANEDIOL AND POLYTRIMETHYLENE TEREPHTHLATE (December 1999) As an engineering thermoplastic, polytrimethylene terephthalate (PTT) combines the rigidity,
More informationUtilization of Silica in Rice Hulls as Raw Materials for Silicon Semiconductors
Journal of Metals, Materials and Minerals, Vol.19 No.2 pp.51-59, 2009. Utilization of Silica in Rice Hulls as Raw Materials for Silicon Semiconductors Takeshi OKUTANI Graduate School of Environment and
More informationAbstract PEP Review HEXENE PRODUCTION BY AXENS ALPHAHEXOL PROCESS By Girish Ballal (September 2012)
Abstract PEP Review 2012-11 1-HEXENE PRODUCTION BY AXENS ALPHAHEXOL PROCESS By Girish Ballal (September 2012) ABSTRACT This review presents a technoeconomic representation of a 1-hexene production process
More informationCrystalline Silicon Solar Cells
12 Crystalline Silicon Solar Cells As we already discussed in Chapter 6, most semiconductor materials have a crystalline lattice structure. As a starting point for our discussion on crystalline silicon
More informationSilicon VLSI Technology. Fundamentals, Practice and Modeling
Text Book: Silicon VLSI Technology Fundamentals, Practice and Modeling Authors: J. D. Plummer, M. D. Deal, and P. B. Griffin Crystal Growth, Wafer Fab and Properties High Quality Single Crystal Wafers
More informationAbstract Process Economics Program Report No. 173A SPECIALTY POLYOLEFINS: VLDPE (July 1993)
Abstract Process Economics Program Report No. 173A SPECIALTY POLYOLEFINS: VLDPE (July 1993) This report presents preliminary process designs and economics for the production of very-low-density polyethylene
More informationWinning the Global Race for Solar Silicon
Winning the Global Race for Solar Silicon David Lynch Professor of Materials Science & Engineering, University of Arizona dclynch@email.arizona.edu & Chief Technical Officer, Solar Technology Research
More informationMaterial Balances. Design Project. Production of Phthalic Anhydride from o-xylene
Material Balances Design Project Production of Phthalic Anhydride from o-xylene The most common method for production of phthalic anhydride is by oxidation of o-xylene. Phthalic anhydride is used in the
More informationAbstract Process Economics Program Report 280 COMPENDIUM OF LEADING BIOETHANOL TECHNOLOGIES (December 2011)
Abstract Process Economics Program Report 280 COMPENDIUM OF LEADING BIOETHANOL TECHNOLOGIES (December 2011) The use of ethanol as an alternative motor fuel has been steadily increasing around the globe
More informationProcess Economics Program
IHS Chemical Process Economics Program Review 2013-09 Coal-Based MEG Production by Ube Process By Syed N. Naqvi IHS Chemical agrees to assign professionally qualified personnel to the preparation of the
More informationOPTIMUM PROCESS CONDITIONS FOR STABLE AND EFFECTIVE OPERATION OF A FLUIDIZED BED CVD REACTOR FOR POLYCRYSTALLINE SILICON PRODUCTION
OPTIMUM PROCESS CONDITIONS FOR STABLE AND EFFECTIVE OPERATION OF A FLUIDIZED BED CVD REACTOR FOR POLYCRYSTALLINE SILICON PRODUCTION T. Kojima, O. Morisawa To cite this version: T. Kojima, O. Morisawa.
More informationFiltration and Purification Solutions for the Total Photovoltaic Value Chain
Filtration and Purification Solutions for the Total Photovoltaic Value Chain MEPVCAPENb Introduction Company Profile Pall Corporation is the global leader in the rapidly growing field of filtration, separation
More informationAbstract Process Economics Program Report No. 88A ALKYLATION FOR MOTOR FUELS (February 1993)
Abstract Process Economics Program Report No. 88A ALKYLATION FOR MOTOR FUELS (February 1993) Alkylation has become an important refinery process because of increasing demand for high octane and low vapor
More informationJPL Publication Electricity from PhotoYoltaic Solar Cells. 11 Years of Progress. October 1986
JPL Publication 86-31 Electricity from PhotoYoltaic Solar Cells rtr~' Pr pgr 11 Years of Progress October 1986 Project Managed by the Jet Propulsion Laboratory for the U.S. Department of Energy Photovoltaic
More informationEnvironment General. The Twelfth International Ferroalloys Congress Sustainable Future. June 6 9, 2010 Helsinki, Finland
63 2 GREENHOUSE GAS EMISSIONS 2.1 Main Ferroalloys This study is confined to the ferroalloys produced in large quantities, e.g. FeSi, Si, FeMn, SiMn and FeCr. These ferroalloys amount to more than 90 %
More informationProcess Economics Program
IHS Chemical Process Economics Program Report 289 New Routes to Styrene and para-xylene By Dipti Dave IHS Chemical agrees to assign professionally qualified personnel to the preparation of the Process
More informationSynthesis and Purification of Bulk Semiconductors *
OpenStax-CNX module: m23936 1 Synthesis and Purification of Bulk Semiconductors * Carissa Smith Andrew R. Barron This work is produced by OpenStax-CNX and licensed under the Creative Commons Attribution
More informationCLEANER PRODUCTION GUIDELINES IN SMELTING INDUSTRIESS
2015 CLEANER PRODUCTION GUIDELINES IN COPPER SMELTING INDUSTRIESS Gujarat Cleaner Production Centre (Established by Industries & Mines Department, GoG) ENVIS Centre on: Cleaner Production/Technology Supported
More informationWater Vapor and Carbon Nanotubes
Water Vapor and Carbon Nanotubes Published technical papers on carbon nanotube fabrication point out the need to improve the growth rate and uniformity of Carbon Nanotubes. CNT faces major hurdles in its
More informationCHLOR-ALKALI INDUSTRY
CHLOR-ALKALI INDUSTRY The chlor-alkali industry represents of three major industrial chemicals: Soda ash (sodium carbonate-na 2 CO 3 ) Caustic soda (sodium hydroxide-naoh) Chlorine (Cl 2 ) These chemicals
More informationFrom sand to silicon wafer
From sand to silicon wafer 25% of Earth surface is silicon Metallurgical grade silicon (MGS) Electronic grade silicon (EGS) Polycrystalline silicon (polysilicon) Single crystal Czochralski drawing Single
More informationProcess Economics Program
IHS Chemical Process Economics Program Report 287 Bio-Based Aromatics By Michael Arné IHS Chemical agrees to assign professionally qualified personnel to the preparation of the Process Economics Program
More informationSolar Cell Production
Environmental Solutions for Solar Cell Production CVD Reactor* Solar Thin Film Cell* Polysilicon* *Images courtesy of Poly Plant Project, Inc. (PPP-E) Environmental Solutions for Solar Cell Production
More informationenabling tomorrow s technologies FirstNano EasyTube Systems powered by SEMI - S2/S8 and CE compliant
powered by FirstNano EasyTube Systems SEMI - S2/S8 and CE compliant www.cvdequipment.com www.firstnano.com FirstNano EasyTube Systems Overview Configurable CVD systems for advanced research & development
More informationAbstract Process Economics Program Report 244 STRATEGIC BUSINESS UNITS OF EPOXY AND POLYCARBONATE RESINS (June 2002)
Abstract Process Economics Program Report 244 STRATEGIC BUSINESS UNITS OF EPOXY AND POLYCARBONATE RESINS (June 2002) This report presents economics for three of strategic business units (SBUs) for the
More information50 Years of PSA Technology for H2 Purification
50 Years of PSA Technology for H 2 Purification 1 50 Years of PSA Technology for H2 Purification The first industrial application of Pressure Swing Adsorption (PSA) went on stream in 1966 at a Union Carbide
More informationSoG-Si Solar Cells from Metallurgical Process Route. MINI PV CONFERENCE Trondheim, 9-10 January 2008
NTNU - SINTEF SoG-Si Solar Cells from Metallurgical Process Route MINI PV CONFERENCE Trondheim, 9-10 January 2008 Kristian Peter International Solar Energy Research Center Konstanz, ISC Konstanz Outline
More informationPROCESS ECONOMICS PROGRAM
PROCESS ECONOMICS PROGRAM SRI INTERNATIONAL Mod0 Park, California 94025 Expires: July 1, 1981 PRICE SCHEDULE FOR REPORTS PHASES I THROUGH XI (PEP'75) (Offered Only to Clients of PEP'79 and PEP'80) Any
More informationPROCESS ECONOMICS PROGRAM
PROCESS ECONOMICS PROGRAM Abstract Process Economics Program Report No. FOAMED PLASTICS (January 1984) 97A SRI INTERNATIONAL Menlo Park, California 94025 Foamed plastics comprise a broad group of cellular
More informationLecture 8 Chemical Vapor Deposition (CVD)
Lecture 8 Chemical Vapor Deposition (CVD) Chapter 5 & 6 Wolf and Tauber 1/88 Announcements Homework: Homework Number 2 is due on Thursday (19 th October). Homework will be returned one week later Thursday
More informationChapter 2 Crystal Growth and Wafer Preparation
Chapter 2 Crystal Growth and Wafer Preparation Professor Paul K. Chu Advantages of Si over Ge Si has a larger bandgap (1.1 ev for Si versus 0.66 ev for Ge) Si devices can operate at a higher temperature
More informationTHE MIDDLE EAST S PROCESS ECONOMICS PROGRAM. Report No by THOMAS C. GUNN GEORGE E. HADDELAND MUHAMMAD ASHRAF. May A private report by the
Report No. 108 POTENTIAL THE MIDDLE EAST S IN CHEMICALS by THOMAS C. GUNN GEORGE E. HADDELAND MUHAMMAD ASHRAF May 1977 A private report by the PROCESS ECONOMICS PROGRAM STANFORD RESEARCH INSTITUTE I MENLO
More information