CARBON-GRAPHITE PRODUCTS PERMA-FOIL Graphite Sheet

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CARBON-GRAPHITE PRODUCTS Graphite Sheet (1) (2) (3) (1) Roll Products (2) Punching Processed Product Samples (3) Punching Processed Product Samples

Features of is a generic term for the flexible graphite sheet that Toyo Tanso developed through our original manufacturing technology. It is a sheet graphite product that is formed using select acid treated natural graphite, which is then compressed after undergoing high temperature expansion. Only natural graphite is used as a raw material, which yields highly flexible carbon with excellent heat resistance and chemical resistance. Other features include a high compressibility recovery rate, excellent airtightness, and a high thermal conductivity. Excellent Self-Lubrication has self-lubricating properties due to its layered crystal structure, making it appropriate for use in high-temperature atmospheres and in fields where fluids and lubricants are avoided. In particular, its coefficient of friction in an unlubricated condition is low compared with other materials, making adhesion difficult to occur. Stable in the wide range of temperature Since is produce only from natural graphite without using a binder, it is stable in the wide range of temperature (-2 C to 32 C inert atmosphere) enabling it to be used. Graphite crystal structure x c =.678 nm a =.2461 nm z Flexibility, Compressibility recovery properties This graphite sheet has flexibility and high recovery from compressive stress, which previously unobtainable with existing graphite products. Good matching with counter materials make it ideal for use as a sealing material. Excellent Chemical Resistance has excellent chemical resistance (acid, base) and is chemically stable. Excellent Thermal and Electrical Conductivity Thermal and electrical conductivity are excellent parallel to surface, and is optimum as a heat release material and as a heat transfer material. * Patent Number 3691836 (JP) Silicon Glass Aluminum Steel Copper Silver Gold Tungsten.1421 nm y Excellent Purity High purity products that have undergone high temperature treatment with halogen gas have a very high purity. Since it has extremely high purity, it is optimum for components in semiconductor, IT, or nuclear energy industry application. * Patent Number 26266 (JP) 1 2 Bulk It is extremely light when compared with other metals. Silicon Glass Aluminum Steel Copper Silver Gold Tungsten (Sublimation) It has excellent heat resistance. 1 2 3 Melting point [ C] 23 No information in this catalog may be used or reproduced without the prior consent of Toyo Tanso.

Manufacturing Process Acid Treated Graphite (Acid treated graphite is natural graphite that has undergone acid treatment) Expanded Graphite 5 µm Expansion Treatment Expanded Graphite Through heat treatment, acid treated graphite becomes expanded graphite. Preforming Rolling Winding Bulk Roll Inspection No information in this catalog may be used or reproduced without the prior consent of Toyo Tanso. 24

Grade and Application has excellent sealing properties, durability, and machinability. Our high purity products have gone through our unique purification process and are optimum as components in the nuclear energy industry, as spacers and packing used in the semiconductor industry, as radiator plates used in the electronics industry, and as other such components. Grades are arranged for all kinds of applications including: automotive gaskets, general industrial packing, parts for semiconductor equipment, corrosion resistant seals, IT industry applications, and a wide range of other applications. We produce this product in a wide array of sizes and shapes including rolls, cut sheets and custom shapes made to customer specification. Grade Characteristics Application Forms of Supplies PF Graphite Sheet Standard products PF-R2 Thermal stable property improved version of standard products Automotive gaskets General industrial packing PF-HP Low ash content products Roll products Cut products PF-G3 Corrosion resistance and thermal stable property improved version of R2 Products Heat resistant gasket Packing PF-UHP, UHPU, UHPL High Purity products Parts for high purity furnace for semiconductor and nuclear applications. Heat conducting material Heat spreader. PF-A Bonded products (Thickness 1.5 mm) Heat insulation material General industrial packing PF-SUS, AL SUS, AL Foil Laminated products Automotive gaskets General industrial packing Gather Sheet S Gather sheets with adhesive tape Flange gasket PF Powder 4, 8F Pulverized graphite sheet General industrial packing Battery parts Powder * For available dimensions, please contact our sales department. 25 No information in this catalog may be used or reproduced without the prior consent of Toyo Tanso.

Property Data Typical properties Item Unit Grade PF PF-R2 PF-HP PF-G3 PF-UHPL PF-UHP, UHPU Operation Temperature C -2 to 32 Thickness mm.2 to 1..2 to 1.5.5 to 1..2 to 1..38.1 to 1.5 Bulk Density Mg/m 3.5 to 1.1.5 to 1.1.5 to 2..5 to 1.1 1. 1.,.9 Oxidation Loss mass % 4 25 4 3 5 5 Initial Oxidation Temperature C 44 73 63 85 82 82 Tensile Strength MPa 4.9 5.2 4.9 5.1 6.3 6.3 Sulfur Content mass ppm 1 1 1 1 <1 <1 Chlorine Content mass ppm <1 <1 <1 <1 <3 <3 Compression Rate % 47 Recovery Rate % 15 Stress Release Rate % 1. Ash Content mass %.5.5.1.5 <2 mass ppm <1 mass ppm ph - 5.1 5.1 5.1 5.1 7. 7. Gas Permeability (Nitrogen,.1MPa Differential Pressure) Coefficient of Thermal Expansion Thermal Conductivity (25 C) Electrical Resistivity (25 C) Parallel to surface Perpendicular to surface Parallel to surface Perpendicular to surface Parallel to surface Perpendicular to surface m 2 /s 1.3 x 1-1 1/K W/(m K) μω m 5 x 1-6 2 x 1-4 2 5 7 1, Flamability - Equivalent to UL94 V- * The figures above are typical values, and are not guaranteed. * Property data with the density of 1. Mg/m 3. * Oxidation loss is the result of the measurement for 1 hour at 67 C. * Initial oxidation temperature represents the Starting temperature of mass decrease by the result of the measurement using a thermobalance in the air atmosphere. * The measurement temperature range for the coefficient of thermal expansion is 3 to 4 C. * There are standard size for each grade, thickness or bulk density. * There are constraints of size depending on the size, thickness and bulk density. Before actually using one of our products, please be sure to contact our sales department to consult on selecting the most appropriate grade. Initial Oxidation Temperature Relationship Between Density and Tensile Strength 12 Mass Decrease Rate [mass %] 5 PF-5 PF-5R2 PF-5G3 Measurement Example Tensile Strength [MPa] 1 8 6 4 2 PF (Standard Type) 1 3 5 7 9 Temperature [ C].5 1 15 We have several grades that may suit customers heat resistance requirements. High density products have high strength. No information in this catalog may be used or reproduced without the prior consent of Toyo Tanso. 26

Property Data Excellent Compressibility Recovery Properties The relationship between density and compression stress during Compression and release (PF-5) 3. 2.5 2. 1.5 1. Determine the compression/recovery density by the thickness that has been altered by stress. * By the JIS R3453 measuring method. During Compression During Release.5 1 2 5 1 2 5 1 2 5 Compression Stress [MPa] High Sealing Properties The relationship between clamp pressure and amount of leakage (PF-5) Amount of Leakage [1-6 m 3 /s].5.4.3.2 Sample dimensions: ø65 x ø5 (mm) ring.1 Clamp Pressure 3 MPa.1.5 1 2 3 4 5 1 Nitrogen Inner Pressure [MPa] Clamp Pressure 1 MPa Clamp Pressure 2 MPa Effective of Compression Stress to Each Properties Thermal conductivity 5 <Parallel to surface> 1 <Perpendicular to surface> Thermal Conductivity [W/(m k)] 4 3 2 1 The thermal conductivity parallel to surface is excellent..5 1. 1.5 Thermal Conductivity [W/(m k)] 8 6 4 2.5 1. 1.5 The insulating properties perpendicular to surface is excellent. High density products have an extremely high thermal conductivity. (D=2.) Copper Aluminum (D=1.) 1 2 3 4 Thermal Conductivity [W/(m K)] Electrical Resistivity 2 <Parallel to surface> 2 <Perpendicular to surface> Electrical Resistivity [μω m] 15 1 5 The electrical resistivity parallel to surface is low..5 1. 1.5 Electrical Resistivity [μω m] 15 1 5 The electrical resistivity perpendicular to surface is high..5 1. 1.5 * Thermal conductivity is independent from sheet thickness and grade. 27 No information in this catalog may be used or reproduced without the prior consent of Toyo Tanso.

Thermal Desorption Spectrum (TDS) Total Pressure [Pa/g] 1-1 1-2 1-3 1-4 1-5 PF-38 PF-38UHP Heating Rate: 2 C/min Degree of vacuum inside the chamber before setting a test piece: 1-6 Pa 5 1 Temperature [ C] Have an extremely low emitted gas amount. Emissivity Emissivity [%] 1 8 6 4 2 5 1 15 2 Temperature [ C] PF-1UHP Chemical Resistance Chemical Substance Sulfuric Acid Nitric Acid Sulfuric Acid + Nitric Acid = 9:1 Concentration (mass%) Room temperature (3 Day Immersion) Thickness Increase Weight Increase Appearance 5 C (3 Day Immersion) Thickness Increase Weight Increase Appearance 85 C (6 Hour Immersion) Thickness Increase Weight Increase 9 95 1 2 Hydrochloric Acid 36 Phosphoric Acid 85 Hydrofluoric Acid 46 Ammonia Water 28 Sodium Hydroxide 25 Methanol 1 Acetone 1 Gasoline 1 * No Change Slight Change Significant Change * Chemical resistance is independent from sheet thickness and grade. Initial Reaction Temperatures with Various Substances * Extracted from other publications Reactant Initial Reaction Temperature Compounds of Reaction Silicon Dioxide 125 C CO, Si, SiC Copper No Reaction Magnesium No Reaction Iron 6 to 8 C Fe3C Cobalt 218 C CoC, Co3C Lead No Reaction Aluminum Oxide 128 C CO, Al, Al4C3 Magnesium Oxide 135 C CO, Mg Zirconium Oxide 13 C CO, Zr, ZrC Appearance Electromagnetic Shield Characteristics (PF-5) Shield Effectiveness [dbμv/m] 1 8 6 4 2 2 4 6 8 1 Frequency [MHz] High electromagnetic shield characteristics. Impurity Analysis Example Element * Measured by Kansai Electronic Industry Development Center (KEC) reulations Standard Products Element Units: mass ppm Purified Products Li <.1 <.1 Na 46 <.5 K 1.9 <.1 Cu 1. <.8 Be <.2 <.2 Mg.7 <.2 Ca 4 <.4 Zn <.1 <.1 Al 9 <.8 V.7 <.7 S 1 <1. Fe 16 <.4 Ni <.1 <.1 Toyo Tanso has a wide range of carbon and graphite grades available to meet your requirements. Before actually using one of our products, please be sure to contact our sales department to consult on selecting the most appropriate grade. No information in this catalog may be used or reproduced without the prior consent of Toyo Tanso. 28

Excellent heat conduction and pressure equalization effects of Heat conduction effects possessed high thermal conductivity in the surface direction parallel to the surface, and has flexibility that allows it to adhere closely to other materials, which improves heat transmission from heat source to the heat sink. Heat Flux Heat Flux Copper or Aluminum foil Comparison of heat conductivity 2 Heat dissipator (heat sink) Conductivity (T1-T) ( C) 15 1 5 Silicon grease Silicon rubber Aluminum foil Heat conducting material Copper foil No heat conducting material Temperature measurement results T T1 Heat conducting material Heating element Pressure equalization effects has high cushioning properties that allow the even application of pressure to the substrate in hot press and thermal bonding applications. Press Without With Spacer Work Spacer Example applications Components for semiconductor fabrication equipment Heat transfer applications in electronic equipment Automotive gaskets Packing material for chemical plants Insulation material for furnace interiors High-purity components for use in furnace interiors 29 No information in this catalog may be used or reproduced without the prior consent of Toyo Tanso.