Semiconductor Nanostructures

Similar documents
Semiconductor Nanostructures

3.46 OPTICAL AND OPTOELECTRONIC MATERIALS

Gallium Nitride Based HEMT Devices

Crystalline Silicon Solar Cells

InGaN quantum dot based LED for white light emitting

Grundlagen der LED Technik

Materials: Structures and Synthesis

Introduction to Nitride Semiconductor Blue Lasers and Light Emitting Diodes

ECCI of AlGaN/GaN HEMT structures grown on Si

LIGHT EMITTING. A Brief Introduction

Materials Characterization

Structural and optical properties of AlInN and AlGaInN on GaN grown by metalorganic vapor phase epitaxy

Molecular Beam Epitaxy Growth of GaAs 1-x Bi x

Semiconductor Optoelectronics Prof. M.R. Shenoy Department of Physics Indian Institute of Technology, Delhi

Supporting Information for. Design of Dipole-Allowed Direct Band Gaps in Ge/Sn. Core-Shell Nanowires

An advantage of thin-film silicon solar cells is that they can be deposited on glass substrates and flexible substrates.

Optoelectronic characterization of Au/Ni/n-AlGaN photodiodes after annealing at different temperatures

High Transmittance Ti doped ITO Transparent Conducting Layer Applying to UV-LED. Y. H. Lin and C. Y. Liu

Lecture 10: Semiconductors

Crystal Structure. Insulin crystals. quartz. Gallium crystals. Atoms are arranged in a periodic pattern in a crystal.

Improved color rendering and luminous efficacy in phosphor-converted white light-emitting diodes by use of dual-blue emitting active regions

Hetero-epitaxy of III-V Compounds by MOCVD on Silicon Substrates

ON THE PHOTOMAGNETIC EFFECT IN CdTe THIN FILMS EVAPORATED ONTO UNHEATED SUBSTRATES

Characteristics of Heat-Annealed Silicon Homojunction Infrared Photodetector Fabricated by Plasma-Assisted Technique

AlGaN/GaN based HEMT Device for High Power Applications

Supporting Information. AlN/h-BN Heterostructures for Mg Dopant-Free Deep Ultraviolet Photonics

Comparison Study of Structural and Optical Properties of In x Ga 1-x N/GaN Quantum Wells with Different In Compositions

AlGaN/GaN HFETs on 100 mm Silicon Substrates for Commercial Wireless Applications

9/4/2008 GMU, ECE 680 Physical VLSI Design

Transmission Mode Photocathodes Covering the Spectral Range

Germanium and silicon photonics

EFFECTS OF Si, Al 2 O 3 AND SiC SUBSTRATES ON THE CHARACTERISTICS OF DBRS STRUCTURE FOR GaN BASED LASER

Fraunhofer IZM Berlin

Improve the performance of MOCVD grown GaN-on-Si HEMT structure

SEMICONDUCTORS R. A. SMITH CAMBRIDGE AT THE UNIVERSITY PRESS. M.A., PH.D. Head of the Physics Department Royal Radar Establishment Malvern J 959

Effect of Process Parameters on the Growth of N-polar GaN on Sapphire by MOCVD

Lecture 14: Semiconductors

MOCVD technology in research, development and mass production. H. Juergensen. AIXTRON AG, Kackertstr , D Aachen, Germany

LANDOLT-BORNSTEIN. Zahlenwerte und Funktionen aus Naturwissenschaften und Technik. Neue Serie. Gesamtherausgabe: K.-H. Hellwege

In-Situ Characterization During MOVPE Growth of III-Nitrides using Reflectrometry

Semiconductor Physics

High Performance AlGaN Heterostructure Field-Effect Transistors

Impurity free vacancy disordering of InGaAs quantum dots

Bulk crystal growth. A reduction in Lg will increase g m and f oper but with some costs

ET3034TUx High efficiency concepts of c- Si wafer based solar cells

The components of. Technology focus: III-Vs on silicon. Fiber-optic gallium antimonide

Final Report for AOARD Grant FA Development of direct band gap group-iv. March, 2012

Detrimental effects of dislocations II

GROWTH AND INVESTIGATION OF INDIUM ARSENIDE BASED DIODE HETEROSTRUCTURES FOR MID INFRARED APPLICATION

PROPERTIES OF ADVANCED SEMICONDUCTOR MATERIALS

Electrochemical Oxidation, Threading Dislocations and the Reliability of GaN HEMTs

Silicon-on-insulator (SOI) was developed in the

GSMBE growth of GaInAsP/InP 1.3 mm-tm-lasers for monolithic integration with optical waveguide isolator

Direct growth of III-V quantum dot materials on silicon

GROWTH AND CHARACTERIZATION OF GeSn AND SiGeSn ALLOYS FOR OPTICAL INTERCONNECTS

INGAN BASED LIGHT EMITTING DIODE AND LASER DIODE THE PRESENT AND THE FUTURE

Development and Applications of Wide Bandgap Semiconductors

Wafer bowing control by polarity management of MOCVD AlN growth

CHAPTER 4 LED LIGHT EMITTING DIODE

Red InGaP light-emitting diodes epitaxially grown on engineered Ge-on-Si substrates

Optical pumping and final metal investigation

ECE440 Nanoelectronics. Lecture 08 Review of Solid State Physics

THE PAST, PRESENT, AND FUTURE OF LIGHTING

Improving performance of InGaN LEDs on sapphire substrates

Introduction to Energy Efficient Lighting ECEN 2060

ISSN: ISO 9001:2008 Certified International Journal of Engineering and Innovative Technology (IJEIT) Volume 3, Issue 6, December 2013

Nanomaterials and Analytics Semiconductor Nanocrystals and Carbon Nanotubes. - Introduction and Preparation - Characterisation - Applications

The effect of rapid thermal annealing to device performance of InGaAs/AlGaAs quantum well laser diodes

INVESTIGATION OF PHOTOVOLTAIC PROPERTIES of p-inse/n-cds HETEROJUNCTION SOLAR CELLS

Published in: Proceedings of the 19th Annual Symposium of the IEEE Photonics Benelux Chapter, 3-4 November 2014, Enschede, The Netherlands

Topological crystalline insulators. Tomasz Story Institute of Physics, Polish Academy of Sciences, Warsaw

The next thin-film PV technology we will discuss today is based on CIGS.

The Blue Laser Diode. Shuji Nakamura Stephen Pear ton Gerhard Fasol. The Complete Story. Springer

Strained SiC:Ge Layers in 4H SiC formed by Ge Implantation. M.W. Dashiell, G. Xuan, Xin Zhang, E. Ansorge and J. Kolodzey

This is the author s final accepted version.

High reflectivity and thermal-stability Cr-based Reflectors and. n-type Ohmic Contact for GaN-based flip-chip light-emitting.

Characterization and Fabrication of 90nm Strained Silicon PMOS using TCAD

Thermally-Enhanced Generation of Solar Fuels

Cubic GaN Light Emitting Diode Grown by Metalorganic Vapor-Phase Epitaxy

Chapter 18: Electrical Properties

Studies on Si-doped AlGaN Epilayers

Temperature dependence of molecular beam epitaxy of GaN on SiC (0001)

RSC Advances.

EPITAXY extended single-crystal film formation on top of a crystalline substrate. Homoepitaxy (Si on Si) Heteroepitaxy (AlAs on GaAs)

2014 NOBEL LECTURE IN PHYSICS

Ge Incorporation in SiC and the Effects on Device Performance

Nanostructured Solar Cells: From Academic Research to Commercial Devices

SOLID-STATE lighting (SSL) based on LEDs is an emerging

Applications for HFETs

Physics and Material Science of Semiconductor Nanostructures

Quarterly Report EPRI Agreement W

Ivan Bazarov Physics Department, Cornell University. Fundamental processes in III-V photocathodes; application for high-brightness photoinjectors

Simple fabrication of highly ordered AAO nanotubes

Control of Dislocations and Stress in AlGaN on Sapphire Using a Low Temperature Interlayer

1. Photonic crystal band-edge lasers

Crystalline Silicon Solar Cells With Two Different Metals. Toshiyuki Sameshima*, Kazuya Kogure, and Masahiko Hasumi

Microelectronics Devices

THIN AlN FILMS GROWTH ON Si (III) BY HYDRIDE VAPOR PHASE EPITAXY

OPTICAL MODE PATTERN STUDY OF GAN BASED LEDS WITH AND WITHOUT NANOSCALE TOP GRATING

Growth and characterization of tensile strained Ge on Ge 1-x Sn x buffers for novel channel layers

Transcription:

II H. von Känel Laboratorium für Festkörperphysik ETHZ

Applications Lighting Field effect transistors Sensors Infrared sensors X-ray detectors

Periodic table of elements

Comparison of wurtzite and zinc- blende structures

Group III-nitrides Structural data Fundamental band gaps (direct)

Band structures of AlN, GaN and InN All direct bandgap Semiconductors! Ph.D thesis Alexander Vozny Chernivski Natl. Univ., Ukraine 2004

Variation of bandgap with lattice parameter UV-green group III nitrides Yellow-red zinc blende arsenides - phosphides p M.R. Krames et al., J. Display Technol. 3,, 160 (2007)

LED chip designs M.R. Krames, J. Display Technol. 3,, 160 (2007)

p-n junctions at equilibrium and forward bias (a) (b) (c)

Osram s s blue LED chips 1 1 mm 2 chip size 350 ma drive current B. Hahn et al., Proc. SPIE Vol. 6910 (2008)

GaN PL intensity vs. TDD Theory: J.H. You, J. Appl. Phys. 101,, 023516 (2007)

Efficiency droop InGaN/GaN QW-based 1 1 mm 2 TFFC chips M.R. Krames et al., J. Display Technol. 3, 2007)

Time resolved PL of thick alloys S. Chichibu, nature materials 5, 810 (2006)

Inversion eso domains formation ato in GaN M. Stutzmann et al. phys. stat. sol. (b) 228, 505 (2001) Domain formation due to nucleation of Ga-face and N-face grains Need well-defined nucleation step

Al 2 O 3 surface termination and polarity Epi-ready sapphire is O-terminated O-removal during High-T thermal treatment M. Stutzmann t et al., phys. stat. t sol. (b) 228,, 505 (2001)

PL in In-containing alloys Spatially varying energy of excited state due to atomic-scale inhomogeneity Stokes shift between absorption and emission

Polarization of strained and unstrained nitrides O. Ambacher et al., J. Appl. Phys. 85,, 3222 (1999)

Polarization and band profiles Left image: Polar (0001) oriented heterostructure Right image: non-polar a-face orientation S. Chichibu, nature materials 5, 810 (2006)

GaN columns on AlN/Si(111) Potential for columnar LEDs with much higher light extraction ti efficiency i

Sensitivity of the human eye Green: night vision Gray: day vision

CIE chromaticity diagram CIE = Commission Internationale de l Eclairage

Blue-pumped YAG phosphor R Pump wavelength 460 nm LER decreases with blue leakage! M.R. Krames, J. Display Technol. 3,, 160 (2007)

Chromaticity for blue-pumped YAG y CCT ~ 5000 K for 35 % blue leakage (LER = 328 lm/w) Theoretical maximum LES ~ 283 lm/w at CRI ~ 80 M.R. Krames, J. Display Technol. 3,, 160 (2007)

Maximum down-conversion efficiency CE=(P leak +P conv )/P )/P LED M.R. Krames et al., J. Display Technol. 3, 160 (2007)

Near band edge PL of alloys S. Chichibu, nature materials 5, 810 (2006)

Quantum efficiencies of HBLEDs J.M. Phillips, Laser & Photon Review 1, No. 4, 2007

Maximum LER for RYGB (CCT = 3000 K) All linewidths 1 nm CCT = 3000 K JM J.M.. Phillips et al., Laser & Photon Rev. 1, 307 (2007)

Scheme of GaN-HEMT

Sheet charge density at AlGaN/GaN interfaces O. Ambacher et al., J. Appl. Phys. 85, 3222 (1999)

Al Al 0.09 Ga Ga 0.91 N/GaN heterostructure Sheet electron density 2.12 10 Mobility 60 000 cm 2 /Vs at 4 K 10 12 cm -2 at 4 K 12 cm C.R. Elsass et al., Jap. J. Appl. Phys. 39, L1023 (2000)

Comparison of HEMTs F. Schwierz, TU Ilmenau 2003

Comparison of transport properties p Typical room temperature data for important interfaces

Band structures of Si, Ge and α-sn Empirical pseudopotential method, Chelikowski and Cohen 1976

Band structures of tetrahedrally bonded d semiconductors Note the close similarity of the Ge band structure with that of GaAs around Γ

Ge under biaxial ba a strain M.V. Fischetti & S.E. Laux, J. Appl. Phys. 80, 2234 (1996)

Improved hole transport: compressive strain unstrained E compressively strained E k k LH SO HH Strain lifts HH-LH degeneracy Heavy holes become lighter Anti-crossing with LH band leads to non-parabolicity

Modulation doped strained Ge quantum wells Typical structure used for high mobility hole transport t

Record hole mobility of Ge quantum well B. Rössner et al., APL 84,, 3058 (2004) Most recently (University of Warwick 2012) > 1 000 000 cm 2 /Vs!

Ge photodiodes for IR detection Band gap shift by thermally induced tensile strain in Ge on Si

Bandgap shift through thermal annealing Extraction of the direct band-gap energy for the as grown ( ) and annealed ( ) 1 µm thick absorption layer G. Isella et al., Semicond. Sci. Technol. 22,, S26 (2007)

CMOS-integrated pixel detector CMOS circuit 2.5 µm, 1 metal, 1 poly process of CNM Barcelona R. Kaufmann et al., JAP 110, 023107 (2011)

IR image sensor with integrated Ge photodetectors R. Kaufmann et al., JAP 110, 023107 (2011)

Absorbed photons vs. X-reay tube voltage

Current-voltage measurements Au wire A p-si p-ge Ge Ge Ge n-si

In-situ measurements in SEM-chamber SEM chamber SEM picture of top contact on individual germanium tower tungsten tip A p-si p-ge I d Ge Ge Ge V d 2 µm Conductive tungsten tip n-si I-V characteristics measured in-situ SEM Zeiss Nvision 40 10 µm

Definition of detector pixels H. von Känel, Europhysics News 43,, 18 (2012)