Sensors : Introduction

Size: px
Start display at page:

Download "Sensors : Introduction"

Transcription

1 GBM5320 Dispositifs Médicaux Intelligents Sensors : Introduction Mohamad Sawan, Professor Benoit Gosselin, and Louis-Francois Tanguay, Ph.D. Candidates Laboratoire de neurotechnologies Polystim mohamad.sawan@polymtl.ca M February 2008 Biomedical microsensors : Course outline Microsensors - Overview - Definitions Microsensors types: - Strain - Pressure - Displacement - Temperature - Gas (Electrode-based) - Chemical sensors (ISFET, CHEMFET) Biosensors Lab-on-chip technology GBM Dispositifs Médicaux Intelligents 2 Microsensors? Microsensors are small devices that convert physical or chemical signals to electrical signals. They enable objects to interface to the real world; Implantable microsensors enables monitoring biological parameters. They could allow real-time measurement of temperature, pressure, ph, oxygen and nitric oxide concentrations in vivo; They allow to help the medical research community in learning about the progression of diseases and assess degree of response to treatment; More & better access to measurement sites - Do not perturb the system under test - More accurate measurements and less invasive - Less psychological trauma & feedback More functionality, better portability, and lower cost. Pressure sensor Gas sensor GBM Dispositifs Médicaux Intelligents 3

2 Definitions Microsensor A microdevice that transforms a signal in measured/analyte format in an electrical signal. Direct sensor Signal to be measured is directly transformed to electrical signal. Example: photo-conductor converts light to change of resistance. Indirect sensor Signal to be measured is first converted to some other variable that is then converted to an electrical signal Example: acceleration sensor converts acceleration to strain which is then sensed. Biosensor A microsensor dedicated for medical implantable and cellular devices. GBM Dispositifs Médicaux Intelligents 4 Sensor Performance Characteristics Transfer Function: The functional relationship between physical input signal and electrical output signal. Sensitivity: The sensitivity is the ratio between a small change in electrical signal resulting from a small change in the physical signal to be measured. Dynamic Range: The range of input physical signals which may be converted to electrical signals by the sensor. Signals outside of this range are expected to cause unacceptably large inaccuracy. Linearity: The maximum deviation from a linear transfer function over the specified dynamic range. Accuracy: Generally defined as the largest expected error between actual and ideal output signals. Resolution: The resolution of a sensor is defined as the minimum detectable signal fluctuation. GBM Dispositifs Médicaux Intelligents 5 Sensor Performance Characteristics Hysteresis: Some sensors do not return to the same output value when the input stimulus is cycled up or down. The width of the expected error in terms of the measured quantity is defined as the hysteresis. Noise: All sensors produce some output noise in addition to the output signal. The noise of the sensor limits the performance of the system based on the sensor. Noise is generally distributed across the frequency spectrum. Bandwidth: All sensors have finite response times to an instantaneous change in physical signal. In addition, many sensors have decay times, which would represent the time after a step change in physical signal for the sensor output to decay to its original value. The reciprocal of these times correspond to the upper and lower cutoff frequencies, respectively. The bandwidth of a sensor is the frequency range between these two frequencies. GBM Dispositifs Médicaux Intelligents 6

3 Microsensors: General architecture A generalized architecture of a microsensor system: Inputs Sensor/Actuator Array Signal Conditioners ( Digital (Analog + Drivers Embedded Controller (Calibrate-measure, process & compress, store & forward) Comm. Interface GBM Dispositifs Médicaux Intelligents 7 Strain sensors - Resistive Resistance is related to length and area of cross-section of the resistor and resistivity of the material as By differentiating both sides, the equation becomes Piezoresistance Dimensional Strain gage component can be related by poisson s ratio (v) as Length Transfer Function : Input is strain, output is dr. Webster, Medical Instrumentation GBM Dispositifs Médicaux Intelligents 8 Strain sensors - Resistive Gage Factor of a strain gage G is a measure of sensitivity ε = dl/l Put mercury strain gage around an arm or chest to measure force of muscle contraction or respiration, respectively Used in prosthesis or neonatal apnea detection, respectively. Webster, Medical Instrumentation GBM Dispositifs Médicaux Intelligents 9

4 Piezoelectric Sensors What is piezoelectricity? Strain causes a redistribution of charges and results in a net electric dipole q = k f & V = q / C where q = charge, f = force k = 2.3 pc/n for quartz = 140 pc/n for Barium Different transducer applications: - Accelerometer, - Microphone. group27imaging.com/respiratorysensor.aspx GBM Dispositifs Médicaux Intelligents 10 Displacement Sensor - LVDT An LVDT (Linear Variable Differential Transformer) is used as a sensitive displacement sensor: for example, in a cardiac assist device or a basic research project to study displacement produced by a contracting muscle. Inductive displacement sensors: - Self inductance; - Mutual inductance; - Differential transformer. Signal Conditioning Electronics Muscle LVDT GBM Dispositifs Médicaux Intelligents 11 Capacitance-based Sensors Variable Area Mode Variable Dielectric Mode Differential Mode GBM Dispositifs Médicaux Intelligents 12

5 Acceleration sensor Accelerometer for displacement monitoring - Surface micromachined, capacitive sensor - Sensor + Electronics on same substrate= smart g Analog Devices ADXL-50 C1 C2 GBM Dispositifs Médicaux Intelligents 13 Pressure sensors Miniature Passive Pressure Transensor for Implanting in the Eye Measurement of intraocular and other physiological pressures. Displacement transducer contained in a small distensible pillbox. This passive resonant transensor absorbs energy from an oscillating detector coil outside of the animal at a frequency dependent upon the pressure in the eye. Collins Miniature Passive Pressure Transensor for Implanting, GBM Dispositifs Médicaux Intelligents 14 Pressure sensors 15 Flexible Wireless Passive Pressure Sensors for Biomedical Applications. The sensor consists of a cavity, bounded on 2 sides by capacitor plates interconnected with inductance. The value of capacitor change with pressure due to the deflectable diaphragm. This variation change the resonant frequency of the LC circuit and is measured wirelessly. Allen, GA Tech, PTFE = Polytetrafluoroethylene FEP = Fluorinated Ethylene Propylene Ceramic chamber GBM Dispositifs Médicaux Intelligents 15

6 Micromachined pressure sensors Pressure Sensor -Resistive / capacitive based measurements -Thin Silicon Membrane deforms with pressure -Piezoresistors change with strain induced by bending membrane -Packaging requires sealing to maintain pressure differential. High sensitivity capacitive strain sensor. GBM Dispositifs Médicaux Intelligents 16 Temperature sensors Temperature sensors have become common elements in wide range of modern integrated circuits The main parameters of temperature sensors are: temperature range, sensitivity, output range, linearity, accuracy Types of integrated temperature sensors: - Resistance based : Thermistors, RTDs - Thermocouples & CMOS PTAT references. GBM Dispositifs Médicaux Intelligents 17 Thermistors Thermistors are made from semiconductor material Generally, they have a negative temperature coefficient (NTC), that is NTC thermistors are most commonly used Ro is the resistance at a reference point (in the limit, absolute 0), B is material constant, and T and T0 are absolute and reference temperatures. Webster, Medical instrumentation GBM Dispositifs Médicaux Intelligents 18

7 Thermocouples A conductor generates a voltage when subjected to a temperature gradient. To measure this voltage, one must use a second conductor material which generates a different voltage under the same temperature gradient. So, Thermocouples measure temperature differences and need a known reference temperature to yield the absolute readings. When a pair of dissimilar metals are joined at one end, and there is a temperature difference between the joined ends and the open ends, thermal electromotive force (emf) is generated, which can be measured in the open ends. There are three major effects involved : the Seebeck, Peltier, and Thomson. Webster, Medical Instrumentation GBM Dispositifs Médicaux Intelligents 19 CMOS temperature sensor The voltage difference between the two diodes, operated at a different current density, is used to generate a Proportional To Absolute Temperature (PTAT) current. This voltage difference is PTAT with a temperature coefficient of mv/ C at room temperature. V BE 2!V BE1 = "V BE (T) = kt q ln # pi & E % (! kt $ I S2 ' q ln # I & E % ( = kt $ I S1 /r' q ln[ p ) r] Pertijs et al, Precision Temperature Measurement using, IEEE Sensors, v4, GBM Dispositifs Médicaux Intelligents 20 CMOS temperature sensor : Complete PTAT circuit V X! V Y V R1 = V Y!V Z " V X!V Z V R1 = V EB1!V EB 2 = kt q ln # A & 1 % ( $ A 2 ' I R1 = I 2 = V R 1 = 1! kt R 1 R 1 q ln " A % 1 $ ' # A 2 & The current mirrored at the output is PTAT: I PTAT = I 5 =W 5 /W 4 *I 2 GBM Dispositifs Médicaux Intelligents 21

8 ph Electrodes Glass electrodes develop a gel layer with mobile hydrogen ions when dipped into an aqueous solution; ph changes cause ion diffusion processes generating an electrode potential. Lithium-rich glasses are well suited for this purpose; The potential is measured in comparison to a reference electrode which is usually an Ag/AgCl system; The electric circuit is closed via a diaphragm separating the reference electrolyte from the solution. Sonnleitner, Bioanalysis and Biosensors for Bioprocess Monitoring, Springer, GBM Dispositifs Médicaux Intelligents 22 Oxygen Partial Pressure (po 2 ) electrode A membrane through which oxygen must diffuse separates the measuring solution from the electrolyte Oxygen is reduced by electrons coming from the central platinum cathode which is surrounded by a glass insulator. This design, a so-called polaro-graphic electrode, needs an external power supply. For oxygen, the polarization voltage is in the order of 700 mv and the typical current for atmospheric po 2 is in the order of 10 7 A. Sonnleitner, Bioanalysis and Biosensors for Bioprocess Monitoring, Springer, Clark-type oxygen partial pressure (po2) electrode GBM Dispositifs Médicaux Intelligents 23 Carbon Dioxide Partial Pressure (pco 2 ) electrode CO 2 diffuses through the membrane into or out of the electrolyte where it equilibrates with HCO 3 thus generating or consuming protons. The respective ph change of the electrolyte is sensed with a ph electrode and is logarithmically proportional to the pco 2 in the measuring solution. Sonnleitner, Bioanalysis and Biosensors for Bioprocess Monitoring, Springer, GBM Dispositifs Médicaux Intelligents 24

9 ISFET/CHEMFET sensors Ion-Sensitive Field Effect Transistors (ISFETS and CHEMFETs) are basically metal oxide semiconductor field-effect devices. The construction of an ISFET differs from the conventional MOSFET devices, in that the gate metal is omitted and replaced by a membrane sensitive to the ions of interest. Shepherd, Weak Inversion ISFETs Sensing, S&A B, v107, GBM Dispositifs Médicaux Intelligents 25 ph ISFET equivalent model ph-isfet Macromodel The drain current for the weak inversion ISFET in saturation is given by: Shepherd & Toumazou, Weak Inversion ISFETs for Ultra-Low Power Biochemical Sensing, Sensors and Actuators B (Chemical), v107, GBM Dispositifs Médicaux Intelligents 26 Classification of biosensors Ferrari et al, BioMEMS and Biomedical Nanotechnology: Vol IV: Biomolecular Sensing, Processing and Analysis, Springer, GBM Dispositifs Médicaux Intelligents 27

10 Biosensors A bioreceptor is a biological molecular species (e.g., an antibody, an enzyme, a protein, or a nucleic acid) or a living biological system (e.g., cells, tissue, or whole organisms) that utilizes a biochemical mechanism for recognition The sampling component of a biosensor contains a bio-sensitive layer. The layer can either contain bioreceptors or be made of bioreceptors covalently attached to the transducer. The most common forms of bioreceptors used in biosensing are based on: - Antibody/antigen interactions - Nucleic acid interactions - Enzymatic interactions - Cellular interactions (i.e. microorganisms, proteins) - Interactions using biomimetic materials (i.e., synthetic bioreceptors). GBM Dispositifs Médicaux Intelligents 28 Example : Glucose Sensors Enzymatic Approach Makes use of catalytic (enzymatic) oxidation of glucose The setup contains an enzyme electrode and an oxygen electrode and the difference in the readings indicates the glucose level. The enzyme electrode has glucose oxidase immobilized on a membrane or a gel matrix*. Glucose Plastic membrane Platinum electrode Glu coseoxidase Glu cose + O!!!!!!! " GluconicAcid + H O O2 H2O2 O Gluconic acid O2 Silver anode *In the enzyme electrode, when glucose is present it combines with O2, so less O2 arrives to the cathode. Webster, Medical Instrumentation GBM Dispositifs Médicaux Intelligents 29 Example : Glucose Sensors Affinity Approach (Optical) This approach is based on the immobilized competitive binding of a particular metabolite (glucose) and its associated fluorescent label with receptor sites specific to the metabolite and the labeled ligand. This change in light intensity is then picked up. Hollow dialysis fiber Excitation Emission Optical Fiber Glucose 3 mm Measure of glucose concentration by detecting changes in fluorescent light intensity caused by competitive binding of a fluorescein-labeled indicator. 0.3 mm Schultz et al, Affinity sensor : A new technique, Diabetes Care, GBM Dispositifs Médicaux Intelligents 30

Biomedical microsensors : Course outline

Biomedical microsensors : Course outline 10 & 20 October 2014 Biomedical microsensors : Course outline Microsensors - Overview - Definitions Microsensors types: - Strain - Displacement - Pressure - Temperature - Gas (Electrode-based) - Chemical

More information

GBM8320 Dispositifs médicaux intelligents. Sensors. Mohamad Sawan et al. Laboratoire de neurotechnologies Polystim.

GBM8320 Dispositifs médicaux intelligents. Sensors. Mohamad Sawan et al. Laboratoire de neurotechnologies Polystim. GBM8320 Dispositifs médicaux intelligents Sensors Mohamad Sawan et al. Laboratoire de neurotechnologies Polystim mohamad.sawan@polymtl.ca M5418 5 October 2018 Biomedical microsensors : Course outline Microsensors

More information

Introduction to Biomedical Engineering

Introduction to Biomedical Engineering Introduction to Biomedical Engineering Biomedical sensors Kung-Bin Sung 5/21/2007 1 Outline Chapter 9: Biomedical sensors Biopotential measurements Physical measurements Chemical measurements Blood gases

More information

COGNOME Nome Data. 2) Self generating type transducers are transducers? a) Active b) Passive c) Secondary d) Inverse

COGNOME Nome Data. 2) Self generating type transducers are transducers? a) Active b) Passive c) Secondary d) Inverse Tecnologie elettriche/elettroniche TEE classe 5B Prof. De Luca Fortunato (Temperature Transducers n1) COGNOME Nome Data 1) An inverse transducer is a device which converts? a) Electrical quantity into

More information

Enzyme based biosensors

Enzyme based biosensors Enzyme based biosensors Brief history; how it all started? 1916 First report on immobilization of proteins : adsorption of invertase on activated charcoal 1922 First glass ph electrode 1956 Clark published

More information

Amperometric Biosensors. Rahul N 04/10/2014

Amperometric Biosensors. Rahul N 04/10/2014 Amperometric Biosensors Rahul N 04/10/2014 Biosensor A biosensor is an analytical device, used for the detection of an analyte, that combines a biological component with a physicochemical detector. Bio-recognition

More information

Bio MEMS Class -1 st week

Bio MEMS Class -1 st week Bio MEMS Class -1 st week Jang, Jaesung Ref: Bashir ADDR Review paper, 2004. 1 Introduction Bio-MEMS: devices or systems, constructed using techniques inspired from micro/nano-scale fabrication, that are

More information

Sensor. Device that converts a non-electrical physical or chemical quantity into an electrical signal. Sensor Processor Display Output signal

Sensor. Device that converts a non-electrical physical or chemical quantity into an electrical signal. Sensor Processor Display Output signal Microsensors Outline Sensor & microsensor Force and pressure microsensors Position and speed microsensors Acceleration microsensors Chemical microsensors Biosensors Temperature sensors Sensor Device that

More information

Introduction of Biosensors

Introduction of Biosensors Introduction of Biosensors Lecture April 17 Jeff T.H.Wang website: http://pegasus.me.jhu.edu/~thwang/ New course : BioMEMS and BioSensing (Spring 04 ) What s is a biosensor? Target 4.22 Signal Signal Analtye

More information

Nanobiosensor. Chennai, Tamil Nadu, India. Mumbai, Maharashtra, India. Abstract

Nanobiosensor. Chennai, Tamil Nadu, India. Mumbai, Maharashtra, India. Abstract Advance in Electronic and Electric Engineering ISSN 2231-1297, Volume 3, Number 3 (2013), pp. 321-326 Research India Publications http://www.ripublication.com/aeee.htm Nanobiosensor M. Naveen Kumar Reddy

More information

MEHRAN UNIVERSITY OF ENGINEERING AND TECHNOLOGY, JAMSHORO Sensors & Actuator for Automatic Systems LAB # 01 RESISTIVE TEMPERATURE TRANSDUCERS

MEHRAN UNIVERSITY OF ENGINEERING AND TECHNOLOGY, JAMSHORO Sensors & Actuator for Automatic Systems LAB # 01 RESISTIVE TEMPERATURE TRANSDUCERS MEHRAN UNIVERSITY OF ENGINEERING AND TECHNOLOGY, JAMSHORO Sensors & Actuator for Automatic Systems LAB # 01 RESISTIVE TEMPERATURE TRANSDUCERS Roll No: Checked by: Date: Grade: 1. Objectives: To determine

More information

Introduction to Biosensor. Wei Shi DianHong Shi

Introduction to Biosensor. Wei Shi DianHong Shi Introduction to Biosensor Wei Shi DianHong Shi Outline The definition of biosensor The history of biosensor The development of biosensor The working principle of biosensor The application of the biosensors

More information

WEARABLE BIOSENSOR Submitted in partial fulfillment of the requirement for the award of degree Of Electronics

WEARABLE BIOSENSOR Submitted in partial fulfillment of the requirement for the award of degree Of Electronics A Seminar report On WEARABLE BIOSENSOR Submitted in partial fulfillment of the requirement for the award of degree Of Electronics SUBMITTEDTO: SUBMITTED BY: www.studymafia.org www.studymafia.org Preface

More information

UNIT I PHYSIOLOGYAND TRANSDUCERS

UNIT I PHYSIOLOGYAND TRANSDUCERS SRI VENKATESWARA COLLEGE OF ENGINEERING AND TECHNOLOGY TIRUPACHUR DEPARTMENT OF ELECTRICAL AND ELECTRONICS ENGINEERING 1. What is meant by cell? EI 2311 BIOMEDICAL INSTRUMENTATION 2 Mark Questions With

More information

Electrochemical Sensors

Electrochemical Sensors Introduction to BioMEMS & Medical Microdevices Sensor Principles and Microsensors Part 2 Companion lecture to the textbook: Fundamentals of BioMEMS and Medical Microdevices, by Prof., http://saliterman.umn.edu/

More information

Lab #1a Temperature Measurement

Lab #1a Temperature Measurement Lab #1a Temperature Measurement Goals of lab Outline Purposes of measuring temperature Temperature scales Temperature standards Time constant Conventional temperature measuring devices Liquid-in-glass

More information

Jordan University of Science and Technology Faculty of Engineering Biomedical Engineering Department. BME 510- Biomedical Sensors and Transducers

Jordan University of Science and Technology Faculty of Engineering Biomedical Engineering Department. BME 510- Biomedical Sensors and Transducers Jordan University of Science and Technology Faculty of Engineering Biomedical Engineering Department BME 510- Biomedical Sensors and Transducers Course Catalog 3 Credit hours (3 h lectures). Introduction

More information

Chapter 11. Measurement of Temparature. Oxford University Press All rights reserved.

Chapter 11. Measurement of Temparature. Oxford University Press All rights reserved. Chapter 11 Measurement of Temparature Introduction Temperature can be defined as a condition of a body by virtue of which heat is transferred from one system to another. A comparison between Kelvin, Celsius,

More information

Manufacturing Technologies for MEMS and SMART SENSORS

Manufacturing Technologies for MEMS and SMART SENSORS 4 Manufacturing Technologies for MEMS and SMART SENSORS Dr. H. K. Verma Distinguished Professor (EEE) Sharda University, Greater Noida (Formerly: Deputy Director and Professor of Instrumentation Indian

More information

Applications of High-Performance MEMS Pressure Sensors Based on Dissolved Wafer Process

Applications of High-Performance MEMS Pressure Sensors Based on Dissolved Wafer Process Applications of High-Performance MEMS Pressure Sensors Based on Dissolved Wafer Process Srinivas Tadigadapa and Sonbol Massoud-Ansari Integrated Sensing Systems (ISSYS) Inc., 387 Airport Industrial Drive,

More information

Sensor Principles and Microsensors Part 2

Sensor Principles and Microsensors Part 2 Introduction to BioMEMS & Medical Microdevices Sensor Principles and Microsensors Part 2 Companion lecture to the textbook: Fundamentals of BioMEMS and Medical Microdevices, by Prof., http://saliterman.umn.edu/

More information

Slide 1. Slide 2. Slide 3. Chapter 19: Electronic Materials. Learning Objectives. Introduction

Slide 1. Slide 2. Slide 3. Chapter 19: Electronic Materials. Learning Objectives. Introduction Slide 1 Chapter 19: Electronic Materials 19-1 Slide 2 Learning Objectives 1. Ohm s law and electrical conductivity 2. Band structure of solids 3. Conductivity of metals and alloys 4. Semiconductors 5.

More information

OMEGADYNE, INC. REVOLUTIONIZES SILICON PRESSURE TRANSDUCERS

OMEGADYNE, INC. REVOLUTIONIZES SILICON PRESSURE TRANSDUCERS OMEGADYNE, INC. REVOLUTIONIZES SILICON TRANSDUCERS A new line of Micro-Machined Silicon pressure transducers, the MM Series from Omegadyne, Inc., Sunbury, OH, promises to revolutionize a product category

More information

ID rd International Congress on Energy Efficiency and Energy Related Materials. Fuel Cell for Standalone Application Using FPGA Based Controller

ID rd International Congress on Energy Efficiency and Energy Related Materials. Fuel Cell for Standalone Application Using FPGA Based Controller 3rd International Congress on Energy Efficiency and Energy Related Materials ID-370 Fuel Cell for Standalone Application Using FPGA Based Controller 1 K.Mahapatra, 2 K.C.Bhuyan 1,2 ECE Department, National

More information

Commercial Biosensors

Commercial Biosensors Commercial Biosensors MB-JASS 2006 Nathalie Munnikes, TUM Commercial Biosensors - Nathalie Munnikes - TUM 1 What is a biosensor? Overview The biological component Immobilization Some transducer principles

More information

Development of High Temperature Pressure Sensor for Oil and Gas Field Based on SOI

Development of High Temperature Pressure Sensor for Oil and Gas Field Based on SOI 3rd International Conference on Material, Mechanical and Manufacturing Engineering (IC3ME 2015) Development of High Temperature Pressure Sensor for Oil and Gas Field Based on SOI Yong Chen 1, a *, Xiaohong

More information

Wearable Chemical Sensors: Opportunities and Challenges

Wearable Chemical Sensors: Opportunities and Challenges Wearable Chemical Sensors: Opportunities and Challenges Somayeh Imani, Amay Bandodkar, Jayoung Kim, Joseph Wang, and Patrick P. Mercier UC San Diego Wearables: an exciting high-growth market 3 billion

More information

Electronic circuit model for proton exchange membrane fuel cells

Electronic circuit model for proton exchange membrane fuel cells Journal of Power Sources 142 (2005) 238 242 Short communication Electronic circuit model for proton exchange membrane fuel cells Dachuan Yu, S. Yuvarajan Electrical and Computer Engineering Department,

More information

A Novel Low Temperature Self-Aligned Field Induced Drain Polycrystalline Silicon Thin Film Transistor by Using Selective Side-Etching Process

A Novel Low Temperature Self-Aligned Field Induced Drain Polycrystalline Silicon Thin Film Transistor by Using Selective Side-Etching Process Chapter 3 A Novel Low Temperature Self-Aligned Field Induced Drain Polycrystalline Silicon Thin Film Transistor by Using Selective Side-Etching Process 3.1 Introduction Low-temperature poly-si (LTPS) TFTs

More information

Overview of Temperature Measurement. The Big Three Thermocouples Resistance Temperature Detectors (RTD s) Thermistors

Overview of Temperature Measurement. The Big Three Thermocouples Resistance Temperature Detectors (RTD s) Thermistors Temperature Measurement Engr325 Instrumentation Dr Curtis Nelson Overview of Temperature Measurement The Big Three Thermocouples Resistance Temperature Detectors (RTD s) Thermistors Smaller Players Infrared

More information

Chapter 2 Capacitive Sensing Electrodes

Chapter 2 Capacitive Sensing Electrodes Chapter 2 Capacitive Sensing Electrodes The capacitive sensing electrodes on the top of a CMOS chip serve as an interface between the microelectronic readout system and the biological/chemical analyte.

More information

Meteorology 432. Thermometry Spring 2013

Meteorology 432. Thermometry Spring 2013 Meteorology 432 Thermometry Spring 2013 General Temperature impacts every day life. Errors of 2-3 ºC are not uncommon in many networks. Bank thermometers or Car thermometers. Errors of this magnitude are

More information

What is ph? ph is the measurement of the Hydrogen Ion concentration in a particular solution. Indicates the Acidity or Alkalinity of a solution.

What is ph? ph is the measurement of the Hydrogen Ion concentration in a particular solution. Indicates the Acidity or Alkalinity of a solution. What is ph? ph is the measurement of the Hydrogen Ion concentration in a particular solution. Indicates the Acidity or Alkalinity of a solution. Why is ph measured? Used as a process control parameter.

More information

MEDICAL EQUIPMENT (1) TOPIC 1: RECORDING AND PROCESSING OF BIOSIGNALS

MEDICAL EQUIPMENT (1) TOPIC 1: RECORDING AND PROCESSING OF BIOSIGNALS MEDICAL EQUIPMENT (1) TOPIC 1: RECORDING AND PROCESSING OF BIOSIGNALS Term 1 2013/14 Prof. Yasser Mostafa Kadah www.k-space.org Measurement Basics Measuring is the experimental determination of a measured

More information

Electrochemical biosensors-a Review

Electrochemical biosensors-a Review Electrochemical biosensors-a Review Annalen der Chemischen Forschung Vol-2: No-1: 36-40: 2014 Mohamed Sikkander A Department of Chemistry, Velammal Engineering College, Chennai- 600018, Tamil Nadu, India

More information

CMOS Technology. Flow varies with process types & company. Start with substrate selection. N-Well CMOS Twin-Well CMOS STI

CMOS Technology. Flow varies with process types & company. Start with substrate selection. N-Well CMOS Twin-Well CMOS STI CMOS Technology Flow varies with process types & company N-Well CMOS Twin-Well CMOS STI Start with substrate selection Type: n or p Doping level, resistivity Orientation, 100, or 101, etc Other parameters

More information

Microsystem Technology: A Survey of the State of the Art

Microsystem Technology: A Survey of the State of the Art Microsystem Technology: A Survey of the State of the Art Stephanus BÜTTGENBACH Institute for Microtechnology, Technical University of Braunschweig Langer Kamp 8, D-38106 Braunschweig, Germany Abstract.

More information

User Manual. Version 1.0 THERMISTOR CHARACTERISTICS TRAINER. Model No : (ITB - 06ACE)

User Manual. Version 1.0 THERMISTOR CHARACTERISTICS TRAINER. Model No : (ITB - 06ACE) THERMISTOR CHARACTERISTICS TRAINER Model No : (ITB - 06ACE) User Manual Version 1.0 Technical Clarification /Suggestion : / Technical Support Division, Vi Microsystems Pvt. Ltd., Plot No :75, Electronics

More information

Fairchild Semiconductor Application Note June 1983 Revised March 2003

Fairchild Semiconductor Application Note June 1983 Revised March 2003 Fairchild Semiconductor Application Note June 1983 Revised March 2003 High-Speed CMOS (MM74HC) Processing The MM74HC logic family achieves its high speed by utilizing microcmos Technology. This is a 3.5

More information

MicroMetrics. A Precision Contact Stress Sensor for Monitoring Swelling in Li-Ion Cells

MicroMetrics. A Precision Contact Stress Sensor for Monitoring Swelling in Li-Ion Cells MicroMetrics A Precision Contact Stress Sensor for Monitoring Swelling in Li-Ion Cells The 34 th Annual International Battery Seminar and Exhibition Fort Lauderdale, FL March 23, 2017 James Kaschmitter

More information

Process Variables. Process Variables. Temperature Strain Level Flow Pressure

Process Variables. Process Variables. Temperature Strain Level Flow Pressure Process Variables Process Variables Temperature Strain Level Flow Pressure Process Variables Weight Viscosity Vibration ph Conductivity Process Variables Density Distance Position Altitude Acceleration

More information

2.3 Quantum Dots (QDs)

2.3 Quantum Dots (QDs) 2.3 Quantum Dots (QDs) QDs are inorganic nanocrystals, approximately 1 10 nm in size, with unique optical properties of broad excitation, narrow size-tunable emission spectra, high photochemical stability,

More information

Fabrication Technology, Part II

Fabrication Technology, Part II EEL5225: Principles of MEMS Transducers (Fall 2003) Fabrication Technology, Part II Agenda: Process Examples TI Micromirror fabrication process SCREAM CMOS-MEMS processes Wafer Bonding LIGA Reading: Senturia,

More information

Microelectromechanical Drug Delivery Systems. Sarah Smith & Jurek Smolen

Microelectromechanical Drug Delivery Systems. Sarah Smith & Jurek Smolen Microelectromechanical Drug Delivery Systems Sarah Smith & Jurek Smolen Current Drug Delivery Systems Common Administration Methods Problems Oral Intravenous Intramuscular Transdermal Difficult to control

More information

Biomedical Instrumentation

Biomedical Instrumentation Biomedical Instrumentation Prof. Dr. Nizamettin AYDIN naydin@yildiz.edu.tr naydin@ieee.org http://www.yildiz.edu.tr/~naydin Chemical Biosensors 1 Table 10.1 Figure 10.1 The oxyhemoglobin dissociation curve,

More information

DNA Biosensors. Anand Jagota 16 November 2015

DNA Biosensors. Anand Jagota 16 November 2015 DNA Biosensors Anand Jagota 16 November 2015 1 Market, Unmet Needs Worldwide In-vitro diagnostics ~$ 50 Billion and growing Nucleic Acid diagnostics ~$9 Billion Health, Security, Pathogen Detection, etc.

More information

Concept Definition. Integration of functions. Smart Structures. sensor, actuator and control mechanisms

Concept Definition. Integration of functions. Smart Structures. sensor, actuator and control mechanisms Lecture Outline Definitions Need for Applications Current Needs & Research Programs Components of a Smart Structure Concept Definition Integration of functions sensor, actuator and control mechanisms The

More information

Introduction to Biosensors. Prof. Xingwei Wang

Introduction to Biosensors. Prof. Xingwei Wang Introduction to Biosensors Prof. Xingwei Wang 1 Brain Storm What do you think of biosensor? 2 Brain Storm What do you think of biosensor? 3 Significance & Great Demands Civil defense Food safety Criminology

More information

Temperature Measuring Instrumentation. M H Joshipura Chemical Engineering Department IT, NU

Temperature Measuring Instrumentation. M H Joshipura Chemical Engineering Department IT, NU Temperature Measuring Instrumentation M H Joshipura Chemical Engineering Department IT, NU Why Measuring Temperature in Chemical Industry is Important? Temperature A measure of a substance s internal kinetic

More information

Thermistors and the various world applications. Comtest (Pty) Ltd. By: Gavin van Rooy

Thermistors and the various world applications. Comtest (Pty) Ltd. By: Gavin van Rooy Thermistors and the various world applications Comtest (Pty) Ltd By: Gavin van Rooy Table of contents Abstract. History of the Thermistor. What is a thermistor made of? Different Types of thermistors -

More information

Piezoelectric All-Rounder

Piezoelectric All-Rounder Piezoelectric All-Rounder Sensor, Actuator or Both? PI Ceramic GmbH, Lindenstraße, 07589 Lederhose, Germany Page 1 of 5 The Piezo Effect By the end of the 19th century Jacques und Pierre Curie had already

More information

Preface Preface to First Edition

Preface Preface to First Edition Contents Foreword Preface Preface to First Edition xiii xv xix CHAPTER 1 MEMS: A Technology from Lilliput 1 The Promise of Technology 1 What Are MEMS or MST? 2 What Is Micromachining? 3 Applications and

More information

Principles of Electronic Nanobiosensors

Principles of Electronic Nanobiosensors Principles of Electronic Nanobiosensors Unit 3: Sensitivity Lecture 3.7: Amperometric Sensors: Glucose Sensors I By Muhammad A. Alam Professor of Electrical and Computer Engineering Purdue University alam@purdue.edu

More information

Advanced Materials for Thermal Management of Electronic Packaging

Advanced Materials for Thermal Management of Electronic Packaging Xingcun Colin Tong Advanced Materials for Thermal Management of Electronic Packaging Sprin ger Contents 1 Thermal Management Fundamentals and Design Guides in Electronic Packaging 1 Rationale of Thermal

More information

Thomas M. Adams Richard A. Layton. Introductory MEMS. Fabrication and Applications. Springer

Thomas M. Adams Richard A. Layton. Introductory MEMS. Fabrication and Applications. Springer Thomas M. Adams Richard A. Layton Introductory MEMS Fabrication and Applications Springer Contents Preface xiü Part I Fabrication Chapter 1: Introduction 3 1.1 What are MEMS? 3 1.2 Why MEMS? 4 1.2.1. Low

More information

Bio-Microelectromechanical Systems (Bio-MEMS) GROUP 6 廖宇鴻陳奕達陳奐晴

Bio-Microelectromechanical Systems (Bio-MEMS) GROUP 6 廖宇鴻陳奕達陳奐晴 Bio-Microelectromechanical Systems (Bio-MEMS) GROUP 6 廖宇鴻陳奕達陳奐晴 OUTLINE - 1 Introduction to Bio-MEMS Traditional MEMS & Fabrication Bio-MEMS feature Materials Manipulation Bio-MEMS in Biosensor and Diagnostics

More information

L5: Micromachining processes 1/7 01/22/02

L5: Micromachining processes 1/7 01/22/02 97.577 L5: Micromachining processes 1/7 01/22/02 5: Micromachining technology Top-down approaches to building large (relative to an atom or even a transistor) structures. 5.1 Bulk Micromachining A bulk

More information

MEMSAND MICROSYSTEMS Design, Manufacture, and Nanoscale Engineering

MEMSAND MICROSYSTEMS Design, Manufacture, and Nanoscale Engineering MEMSAND MICROSYSTEMS Design, Manufacture, and Nanoscale Engineering Second Edition TAI-RAN HSU Microsystems Design and Packaging Laboratory Department of Mechanical and Aerospace Engineering San Jose State

More information

Smart Precision in Harsh Environments

Smart Precision in Harsh Environments Smart Precision in Harsh Environments Paddy French+, Gijs Krijnen* & Fred Roozeboom# + TU Delft, *U Twente, #TU Eindhoven 1 Overview Introduction/definitions Application areas Approaches Solutions Conclusions

More information

Case Studies of Micro-Biosensors

Case Studies of Micro-Biosensors Case Studies of Micro-Biosensors Lecture April 18 Jeff T.H.Wang website: http://pegasus.me.jhu.edu/~thwang/ New course : BioMEMS and BioSensing (Spring 04 ) Advantages of Micro Biosensors Bench process

More information

Final Year Progress Report

Final Year Progress Report Final Year Progress Report Student: Stephen Mulryan Student ID: 06583725 Discipline: Electronic & computer Engineering Supervisor: Dr. Maeve Duffy Co-Supervisor: Professor Ger Hurley Project Title: Energy

More information

Biomedical Sensors. Intro. To. BME

Biomedical Sensors. Intro. To. BME Biomedical Sensors Transducer A transducer is a device, usually electrical, electronic, electro-mechanical, eletromagnetic, photonic or photovoltaic that converts one type of energy or physical attribute

More information

Biosensors. Introduced by Elena Neufeld Dec 8 th 2010

Biosensors. Introduced by Elena Neufeld Dec 8 th 2010 Biosensors Introduced by Elena Neufeld Dec 8 th 2010 One of the first 'biosensors' To detect gas build-ups in coal mines, caged canaries were used because of their sensitivity towards methane. biological

More information

Tutorial on Micro Electro Mechanical Systems (MEMS)

Tutorial on Micro Electro Mechanical Systems (MEMS) Tutorial on Micro Electro Mechanical Systems (MEMS) Bruce Kim Department of Electrical, 1 ! What is MEMS! Why MEMS! Applications! MEMS Fabrication! MEMS Packaging! Conclusion MEMS 2 WHAT IS MEMS! MEMS

More information

Instrumentation and Process Control

Instrumentation and Process Control Instrumentation and Process Control Topics Covered Critical Monitoring Leachate collection system performance Moisture measurement In-place specific weight Critical Monitoring - Gas Production Rate Gas

More information

Electrochemical Sensors

Electrochemical Sensors Electrochemical Sensors Arthur Gildea ABC s of Electrochemistry 1/26/2012 Overview Introduction Reference electrode Biosensors and Immunosensors Potentiometric sensor Amperometric sesnor Conductometric

More information

Application Note. Capacitor Selection for Switch Mode Power Supply Applications

Application Note. Capacitor Selection for Switch Mode Power Supply Applications Application Note AN37-0013 Capacitor Selection for Switch Mode Power Supply Applications 1. Introduction Faced with the availability of multiple capacitor options for use in high reliability SMPS applications,

More information

Preprint - Mechatronics 2008, Le Grand-Bornand, France, May

Preprint - Mechatronics 2008, Le Grand-Bornand, France, May Potentialities of piezoresistive cantilever force sensors based on free standing thick films Hélène Debéda(*), Isabelle Dufour, Patrick Ginet, Claude Lucat University of Bordeaux 1, IMS Laboratory, 51

More information

The Electronics Biological Matter Interface.

The Electronics Biological Matter Interface. The Electronics Biological Matter Interface. Introduction. The interface of inorganic materials and biological matter is a subject of significant current interest. The fundamental science of this area

More information

Nemoto Sensor Engineering Company Ltd

Nemoto Sensor Engineering Company Ltd Nemoto Sensor Engineering Company Ltd 4-10-9 Takaido-Higashi Suginami-ku Tokyo 168-0072 Japan Web: www.nemoto.eu E-mail: sensor2@nemoto.co.jp Technical Information and User Manual NE4-HCHO-S Electrochemical

More information

3D Finite Element Modeling and Analysis of Micromechanical Sensors

3D Finite Element Modeling and Analysis of Micromechanical Sensors Abstract 3D Finite Element Modeling and Analysis of Micromechanical Sensors Alexey I. Borovkov, Eugeny V. Pereyaslavets Computational Mechanics Laboratory, St. Petersburg State Technical University, Russia

More information

Critical Analytical Measurements for Bioreactor Optimization. controlling an organism s chemical environment leads to consistent and

Critical Analytical Measurements for Bioreactor Optimization. controlling an organism s chemical environment leads to consistent and Critical Analytical Measurements for Bioreactor Optimization Mettler-Toledo Ingold, Inc., Bedford, MA Abstract Most bioreactor processes share a basic principle; optimizing and controlling an organism

More information

RTD CHARACTERISTICS TRAINER

RTD CHARACTERISTICS TRAINER RTD CHARACTERISTICS TRAINER (Model No : ITB - 06CE) User Manual Version 1.0 Technical Clarification /Suggestion : / Technical Support Division, Vi Microsystems Pvt. Ltd., Plot No :75,Electronics Estate,

More information

(General principles and applications)

(General principles and applications) BIOSENSOR (General principles and applications) Jayanti Tokas, PhD 1 ; Rubina Begum PhD 1 ; Shalini Jain, PhD 2 and Hariom Yadav, PhD 2* 1 Department of Biotechnology, JMIT, Radaur, India; 2 NIDDK, National

More information

Special Lecture Series Biosensors and Instrumentation

Special Lecture Series Biosensors and Instrumentation !1 Special Lecture Series Biosensors and Instrumentation Lecture 11 - An Implantable Drug Delivery Microsystem This lecture covers the development of a drug delivery device in the Institute for Integrated

More information

Earlier Lecture. In the earlier lecture, we have seen the importance of instrumentation in Cryogenic Engineering.

Earlier Lecture. In the earlier lecture, we have seen the importance of instrumentation in Cryogenic Engineering. 40 1 Earlier Lecture In the earlier lecture, we have seen the importance of instrumentation in Cryogenic Engineering. Various properties like pressure, temperature, liquid level, etc are monitored for

More information

Surface Plasmon Resonance Analyzer

Surface Plasmon Resonance Analyzer Surface Plasmon Resonance Analyzer 5 6 SPR System Based on Microfluidics Wide Dynamic Range Kinetic Analysis by Detection of Association /Dissociation of Bio-Molecules Measuring of Mass Change below

More information

Dr. Lynn Fuller Webpage:

Dr. Lynn Fuller Webpage: ROCHESTER INSTITUTE OF TECHNOLOGY MICROELECTRONIC ENGINEERING Microelectromechanical Systems (MEMs) Process Integration Dr. Lynn Fuller Webpage: http://people.rit.edu/lffeee 82 Lomb Memorial Drive Rochester,

More information

Plasmonics using Metal Nanoparticles. Tammy K. Lee and Parama Pal ECE 580 Nano-Electro-Opto-Bio

Plasmonics using Metal Nanoparticles. Tammy K. Lee and Parama Pal ECE 580 Nano-Electro-Opto-Bio Plasmonics using Metal Nanoparticles Tammy K. Lee and Parama Pal ECE 580 Nano-Electro-Opto-Bio April 1, 2007 Motivation Why study plasmonics? Miniaturization of optics and photonics to subwavelength scales

More information

APPLICATION NOTE: AN-100. Selecting Strain Gages Silicon vs Metal Foil

APPLICATION NOTE: AN-100. Selecting Strain Gages Silicon vs Metal Foil APPLICATION NOTE: AN-100 Selecting Strain Gages Silicon vs Metal Foil (General Strain Measurement) Alex A. Ned, Senior Vice President Sensor Operations Joe VanDeWeert, Technical Director Miniature Transducers

More information

Basic advantages of the anisotropic etched, transverse gage pressure transducer. Technical paper 277

Basic advantages of the anisotropic etched, transverse gage pressure transducer. Technical paper 277 Basic advantages of the anisotropic etched, transverse gage pressure transducer Technical paper 277 Basic advantages of the anisotropic etched, transverse gage pressure transducer Introduction Endevco

More information

Micro-Electro-Mechanical Systems (MEMS) Fabrication. Special Process Modules for MEMS. Principle of Sensing and Actuation

Micro-Electro-Mechanical Systems (MEMS) Fabrication. Special Process Modules for MEMS. Principle of Sensing and Actuation Micro-Electro-Mechanical Systems (MEMS) Fabrication Fabrication Considerations Stress-Strain, Thin-film Stress, Stiction Special Process Modules for MEMS Bonding, Cavity Sealing, Deep RIE, Spatial forming

More information

Temperature Measurement

Temperature Measurement Temperature Measurement Sensing methods: contact and noncontact Temperature sensors generate output signals in one of two ways: 1. through a change in output voltage 2. through a change in resistance of

More information

Midterm Exam. on your way out. Sign - in. Pick up the TAKEHOME Midterm. Complete by Wednesday 8:30am. Turn in beginning of class Wednesday

Midterm Exam. on your way out. Sign - in. Pick up the TAKEHOME Midterm. Complete by Wednesday 8:30am. Turn in beginning of class Wednesday Midterm Exam Sign - in Pick up the TAKEHOME Midterm on your way out Complete by Wednesday 8:30am Turn in beginning of class Wednesday Journals Due next Monday NEXT Week At start of class! Process Variables

More information

A Multi-Element Smart Gas Sensor

A Multi-Element Smart Gas Sensor A Multi-Element Smart Gas Sensor with IEEE 1451 Protocol Darold Wobschall State University of New York at Buffalo Dept. of Electrical Engineering and Esensors, Inc. May version Sensors Expo -- June 2004

More information

Biosensor System-on-a-chip including CMOS-based Signal Processors and 64 Carbon Nanotube-based Sensors for the Detection of a Neurotransmitter

Biosensor System-on-a-chip including CMOS-based Signal Processors and 64 Carbon Nanotube-based Sensors for the Detection of a Neurotransmitter Biosensor System-on-a-chip including CMOS-based Signal Processors and 64 Carbon Nanotube-based Sensors for the Detection of a Neurotransmitter Supplementary Information Byung Yang Lee, Sung Min Seo, Dong

More information

Citation for published version (APA): Maddalena, F. (2011). Organic field-effect transistors for sensing applications Groningen: s.n.

Citation for published version (APA): Maddalena, F. (2011). Organic field-effect transistors for sensing applications Groningen: s.n. University of Groningen Organic field-effect transistors for sensing applications Maddalena, Francesco IMPORTANT NOTE: You are advised to consult the publisher's version (publisher's PDF) if you wish to

More information

Semiconductor Device Fabrication

Semiconductor Device Fabrication 5 May 2003 Review Homework 6 Semiconductor Device Fabrication William Shockley, 1945 The network before the internet Bell Labs established a group to develop a semiconductor replacement for the vacuum

More information

ECE 541/ME 541 Microelectronic Fabrication Techniques

ECE 541/ME 541 Microelectronic Fabrication Techniques ECE 541/ME 541 Microelectronic Fabrication Techniques MW 4:00-5:15 pm Metrology and Characterization Zheng Yang ERF 3017, email: yangzhen@uic.edu ECE541/ME541 Microelectronic Fabrication Techniques Page

More information

Flexible Substrates for Smart Sensor Applications

Flexible Substrates for Smart Sensor Applications Flexible Substrates for Smart Sensor Applications A novel approach that delivers miniaturized, hermetic, biostable and highly reliable smart sensor modules. AUTHORS Dr. Eckardt Bihler, Dr. Marc Hauer,

More information

Oxide Growth. 1. Introduction

Oxide Growth. 1. Introduction Oxide Growth 1. Introduction Development of high-quality silicon dioxide (SiO2) has helped to establish the dominance of silicon in the production of commercial integrated circuits. Among all the various

More information

Micro-Scale Engineering I Microelectromechanical Systems (MEMS) Y. C. Lee

Micro-Scale Engineering I Microelectromechanical Systems (MEMS) Y. C. Lee Micro-Scale Engineering I Microelectromechanical Systems (MEMS) Y. C. Lee Department of Mechanical Engineering University of Colorado Boulder, CO 80309-0427 leeyc@colorado.edu September 2, 2008 1 Three

More information

Extend the limits of the possible in i-maginative interactivity. IMAGINE CAPABILITIES

Extend the limits of the possible in i-maginative interactivity. IMAGINE CAPABILITIES IMAGINE CAPABILITIES CTI CAPABILITIES Conductive Technologies Inc., has unique access to a wealth of specialized technologies exceptionally precise printing and processing, proprietary adhesive formulations,

More information

CHAPTER 2 LITERATURE REVIEW

CHAPTER 2 LITERATURE REVIEW CHAPTER 2 LITERATURE REVIEW In this chapter, explains about the fundamental used and also about each stages of the design application for this final year project. This project consists of three stages

More information

DNA & Protein Biosensors Vishwindera S. Kailey Vivek Govardhanam

DNA & Protein Biosensors Vishwindera S. Kailey Vivek Govardhanam BIOSENSORS DNA & Protein Biosensors Vishwindera S. Kailey Vivek Govardhanam 1 OUTLINE OF PRESENTATION Basic Information on DNA. Introduction to Biosensors DNA & Protein biosensors DNA- DNAFET & Southern

More information

Micro-Electro-Mechanical Systems (MEMS) Fabrication. Special Process Modules for MEMS. Principle of Sensing and Actuation

Micro-Electro-Mechanical Systems (MEMS) Fabrication. Special Process Modules for MEMS. Principle of Sensing and Actuation Micro-Electro-Mechanical Systems (MEMS) Fabrication Fabrication Considerations Stress-Strain, Thin-film Stress, Stiction Special Process Modules for MEMS Bonding, Cavity Sealing, Deep RIE, Spatial forming

More information

Today I'm going to talk about MEMS-- Micro Power Generation -- or MPG.

Today I'm going to talk about MEMS-- Micro Power Generation -- or MPG. Thank you. Today I'm going to talk about MEMS-- Micro Power Generation -- or MPG. MEMS is one of the core enabling technologies upon which many innovative programs are built. It leverages the fabrication

More information

Introduction to Materials Science & Engineering

Introduction to Materials Science & Engineering Introduction to Materials Science & Engineering Course Objective... Introduce fundamental concepts in Materials Science You will learn about: material structure how structure dictates properties how processing

More information

Temperature Measurement and Control

Temperature Measurement and Control Temperature Measurement and Control What is the definition of temperature? Correlates to molecular kinetic energy Measure of the quality of heat Reference material http://www.omega.com/temperature/z/zsection.asp

More information

Lecture 7 CMOS MEMS. CMOS MEMS Processes. CMOS MEMS Processes. Why CMOS-MEMS? Agenda: CMOS MEMS: Fabrication. MEMS structures can be made

Lecture 7 CMOS MEMS. CMOS MEMS Processes. CMOS MEMS Processes. Why CMOS-MEMS? Agenda: CMOS MEMS: Fabrication. MEMS structures can be made EEL6935 Advanced MEMS (Spring 2005) Instructor: Dr. Huikai Xie CMOS MEMS Agenda: Lecture 7 CMOS MEMS: Fabrication Pre-CMOS Intra-CMOS Post-CMOS Deposition Etching Why CMOS-MEMS? Smart on-chip CMOS circuitry

More information