Texture Analysis in MSE
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1 Texture Analysis in MSE 집합조직제어연구실 서울대학교재료공학부
2 Texture (Preferred Orientation)
3 Similarity of Texture E.T?! 한쪽을쳐다보고있는사람들여러방향을쳐다보는 Randomly Preferred Oriented
4 What a Wonderful & Beautiful Life!
5 Scientific View for Life on Earth
6 Interaction between Sun & Earth Magnetic Field around Earth protects Earth from Sun!
7 Magnetic Field around Earth
8 What Magnetic Field Does?
9 Magnetic Field Configuration Inside Earth
10 Thermodynamic Condition Inside Earth
11 Phase Diagram Inside Earth Liquid fcc hcp
12 Magnetic Field due to hcp Iron Crystals Preferentially Oriented Single Crystal Size of Order of few Hundreds Km
13 Texture as A Necessary Condition for Life on Earth
14 Technical Overview of Texture Analysis
15 X-ray Configuration
16 EBSD Configuration EDS Detector Objective Lens CCD Camera Phosphor Screen Vanguard Detector Specimen Holder Motorized Stage Kikuchi pattern acquisition in SEM Crystal orientation identification in SEM
17 Orientation Measurement by EBSD Orientation Measurement JEOL 6500F FE-SEM + EDS + EBSD SEM Image Color Code for indexin Automatic Indexing Point Click for Pattern Orientation Mapping Orientation Information [1 1 1] [1 1 2] O O 20.5 O 16.1 O [1 1 4] 15.78O 8.18 O [1 3 4] [1 3 3] O O 14.3 O 15.5 O 13.9 O O O O [0 0 1] [0 1 3] [0 2 3] [0 1 1]
18 Fine Grained IF Steel Slab 열간압연 850 C 압하율 80% 냉간압연 페라이트의결정립미세화 (5 μm) 냉간압연 압하율 75% 30분열처리 냉간압연조직발달 {111}<110>, {001}<110> 재결정열처리 75 분열처리 650 C 60 분 <111>//ND 방위증가 결정립미세화에따라경도증가
19 Strip Casting : 4.5% Si Steel Disordered Texture Controlled Cold Rolled Strip Cast 1(11.62 ) 2(11.62 ) 3(27.23 ) 4(38.18 ) 5(42.10 ) 6(2.83 ) 7(59.36 ) 8(43.56 ) 9(50.49 ) 10(15.0 ) - High Angle Boundary - 냉간압연시균열발생 - Low Angle Boundary - 냉간압연가능
20 High Strength Gold Bonding Wire : EBSD 社 1.0mil(25.4μm) Wire 와이어표면부 와이어내부 용접부분거대결정립발달 M 社 Gold Bonding Wire
21 High Strength Gold Bonding Wire : Processing 개발된와이어의단면집합조직 와이어드로잉 공정개선전 공정개선후 [111] 60% : 260MPa [111] 90% : 280MPa [111] 집합조직의비율을높여고강도금본딩와이어제작공정개발
22 Electron Mobility in ELA & SMC Orientation Misorientation CSL 0.20 Total high Total angle high angle fraction Energy level Energy Level 0.12 LA 4µm Misorientation Fraction ELA SMC Mean Surface Energy MC 30µm - High angle & CSL - Energy ELA SMC Electron mobility ELA > SMC
23 HRTEM Analysis around Ti inclusion SEM Image (a) Ferrite TEM Image (b) A B Martensite 2µm Ti 2 O 3 (c) TiN (d) Ti 1µ m Ti 0.5µ m 1µ m O Mg Mn N Zone Axis [42-1] : Ti 2 O 3 Zone Axis [001] : TiN
24 Modern Scale of Texture nm µm mm HRTEM JEOL 3000F 300kV FEG TEM 0.17nm(0.1nm) Res. 극미세집합조직관찰 SEM/EBSD Opal/JSM μm Res. 미세조직 / 집합조직동시관찰 Pole figure Seifert 3000PTS 60kV, 80mA, 3.5kW 벌크재료집합조직
25 NOVA NanoLab (Full Configuration)
26 What are FIB Man doing Now?
27 Sample FIB Configuration SEM:Imaging Sample Plane FIB: Cutting EDS Cross Section SEM Column FIB SEM EDS Magnum Stage GIS Detector GIS
28 Schematic of Focused Ga Ion Beam (FIB) iquid Ga Metal Ceramic Base oom Temperature Operation Filament Support Pins hr Sources igh Vacuum Compatible arge Ion for Sputtering Filament Tip Secondary Electrons Secondary Ions (i + or i - ) or Neutral Atoms (n 0 )
29 FIB Configuration SEM SE GIS FIB EDS EBSD
30 Texture Analysis of Gold Bonding Wire Random Area Measurement Difficulties in Handling Many Sample Required Expected Area Measurement Easy Preparation FIB Can!
31 Cu Damascene : FIB Assisted EBSD Cu Electro-deposit 배선폭에따른재결정집합조직변화 Trench : 500/500nm 140nm Line 300nm Line Blanket ( ) over plated Cu electrodepo. Cu sputter-dep. Cu {111}<110> {111} Fiber FSG FSG LD LD TaN Si 3 N 4 Si wafer ND ND
32 3D- Reconstruction of Grain Orientation High Speed EBSD + FIB Auto Slice
33 REDS (Reprocessing of EBSD Data in SNU) FEM Graphics ODF(WIMV) BSD ystem Orientation Data Set Physics Montage Mosaic Analysis + + =
34 EBSD 장비운영 EBSD 활용및홈페이지운영 - 주요연구서비스 - 정기 EBSD Workshop 개최 -EBSD 장비를통한공동연구 연구기간내 EBSD 대내외활용현황 구분년도 2001 이전 상반기 계 건수 시료수 활용건수 이용자수 이용기관수 Ferrous Metal Non-Ferrous Metal Thin Film ( 상반기 )
35 Dimensional Material Analysis Scalable Analysis + Thermodynamic Analysis y 2D analysis EBSD, SEM UHV Chamber z 3D sectional analysis- FIB t 4DTEM x τ : Time with in-situ heating f : Environmental factor (Deformation, Coating)
36 Interactive Analysis System in SNU EBSD FE-SEM EDS FIB STM HR-EM TEM EDS HAADF Heating Low Energy Ion Milling UHV Chamber Deformation Coating Capable of Quasi in-situ Experiments!
37 Possible Example of FIB Related Analysis FIB I want to See this Area EBSD TEM
38 E Gold Bonding Wire Measured by U Texture Control Lab. FIB Sculpture for Fun chool of Materials Science and Engineering, Seoul National University. K Electron Co. Ltd, Kumeo-Li 316-2, Pogok-Myeon, Yongin-Si, Kyeonggi-Do.
39 Traditional Sculpture with FIB Jade Sculpture by J.W. Jang
40 현재계획 년 3월 NOVA 200 NanoLab 설치 년상반기시험운용운영방안 - 내부 : 교육과연구를통한보편화 - 외부 : 연구협력을통한운영 Education of Students through Challenging Research FIB Men 강석훈, 이상훈, More Students, FEI Members FIB FIB Operation Schedule 년장비의설치및안정화 서비스개시 년 1학기대학원특수문제연구 ( 집속이온공학 ) 개설 - 집속이온공학연구회모임추진
41 END
42 발표자료만드는법 1. One Page : One Content 2. One Line : One Statement 3. Not full statement : Abridged Words 4. Not Paragraph : Picture or Movie 5. Not Art Color : Simple Color 6. Not Equation : Final Equation
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