CS CLEAN SYSTEMS AG Exhaust Gas Treatment Products. Peter Kaiser Sales Manager.

Transcription

1 CS CLEAN SYSTEMS AG Exhaust Gas Treatment Products Peter Kaiser Sales Manager CS CLEAN SYSTEMS AG Fraunhoferstr Ismaning Germany Phone: +49 (89)

2 Exhaust Gas Treatment with focus on dry bed absorption for Semiconductor, Photovoltaics and MEMS Industries and R&D applications Semicon Europa,

3 DISCOVER THE ADVANTAGES CS CLEAN SYSTEMS Your Reliable Partner for Exhaust Gas Treatment CS CLEAN SYSTEMS AG Fraunhoferstrasse Ismaning Germany Phone:+49 (89) Fax: +49 (89) sales@csclean.com Founded 1986 in Munich More than 27 years of experience Independent, private stock corporation Exhaust Gas Treatment for Semiconductor and Photovoltaic Industries and R&D Some 300 employees worldwide 1/3 of HQ-staff in R&D Proprietary CLEANSORB granulates at the core of our technology More than 5,000 installations worldwide PCS PIRANHA foreline plasma system: eco-friendly conversion of stable PFC gases Global company in dedicated centres of competence Throughout Europe, Asia, USA and the Far East 3

4 Waste Gas Abatement Product Lines Overview Position in the value chain of Semiconductor Industries CLEAN-PROTECT Removal of toxic gases during emergency release from gas cabinets PCS PIRANHA Plasma conversion system Removal of perfluorinated compounds CLEANVENT Removal of hazardous gases during purging of vent lines CLEANSORB Dry bed chemisorption technology Point-of-exhaust absorption for process waste gas 4

5 Safe, non-combustible inorganic medium (no charcoal) Highest capacities Unique customised material compositions No consumption of electricity, city water, oxygen, nitrogen No secondary emissions to the environment Passive operating principle Excellent Cost-of-Ownership CLEANSORB Dry-Bed Technology Application-Specific Granulates Developed in CS CLEAN SYSTEMS Research Laboratory 5

6 CS CLEAN SYSTEMS Proprietary CLEANSORB Absorbers In-House development and qualification of chemisorbers CLEANSORB granulates are designed to remove semiconductor waste gases below TLV (Threshold Limit Values), concentration, while ensuring there is no pressure increase within the absorber column. CLEANSORB chemisorbers are developed on an ongoing basis by CS CLEAN SYSTEMS chemists at our R&D lab in Munich. Release of new materials for manufacturing following B-site testing at selected customer sites 6

7 CS CLEAN SYSTEMS Proprietary CLEANSORB Absorbers In-House development and qualification of chemisorbers CLEANSORB granulates are made from inorganic starting materials which are non-combustible. Aside from process applications involving combustible hydride gases, this is also an important safety aspect when dealing with high flowrates of fluorine and other strong oxidizing gases. (Also for emergency absorber applications where air is present). Latest-generation CLEANSORB chemisorbers are based on high surface area materials, ensuring high absorption capacity. Special attention to surface chemistry and catalytical effects ensure reaction at ambient temperature without heating. 7

8 CS CLEAN SYSTEMS Proprietary CLEANSORB Absorbers Dry-Bed Chemisoption at Ambient Temperature The CLEANSORB waste gas treatment system removes hazardous process gases on the basis of chemical conversion (chemisorption) at ambient temperature. No external heating, moisturization or other facilities are required for operation. Hence the CLEANSORB system is fully passive, and is permanently on stand-by, even in the event of a power- or other facilities failure CLEANSORB Technology is based on dry bed chemisorption converting hazardous gas species into stable inorganic solids by employing CLEANSORB granulates. It is the most elegant and environmentally-friendly exhaust gas purification technology available. 8

9 CS CLEAN SYSTEMS Proprietary CLEANSORB Absorbers Stainless Steel Columns A wide range of CLEANSORB model sizes are available to meet the needs of all customers - from small-scale university researchers to round-the-clock wafer fabrication Reusable UN-approved for transportation Maximum operational safety No exposure to chemicals Hermetically sealed modules Local disposal service worldwide 9

10 CS CLEAN SYSTEMS Proprietary CLEANSORB Absorbers Smart Handling: Maintenance Refill Waste-Management CLEANSORB customers enjoy a comprehensive maintenance service which incorporates a unique disposal/ reprocessing function for the spent absorber material. Accordingly, the process user need not concern himself to an unnecessary degree with the handling of hazardous process by-products, and is thereby additionally relieved of a considerable bureaucratic burden. In some cases the wastes are amenable for reprocessing. For instance, to recover copper metal. Depending on the country or region and the used absorber granulates may be sent to incineration, underground disposal, etc. The waste from e.g. etch processes, would often be used in the steel industry as a slag forming additive. The slag formed is often used further in the cement making industry. 10

11 CS CLEAN SYSTEMS Proprietary CLEANSORB Absorbers Advantages of Dry-Bed Technology Long Column Lifetimes, depending on application Low Cost of Ownership High Scrubbing efficiency Guaranteed absolute outlet concentrations - typically the TLV (Threshold Limit Values), not in terms of percent waste gas removal No cost for natural gas or hydrogen fuel No cost for electricity No expensive hook-up of facility lines for e.g. gas and waste water No replacement of expensive burner components No costly maintenance cleaning 11

12 CS CLEAN SYSTEMS AG The Global Network 12

13 Any Questions? 13

14 Thank you very much for your time! Booth Silicon Saxony Peter Kaiser Sales Manager CS CLEAN SYSTEMS AG Fraunhoferstr Ismaning Germany Phone: +49 (89)