Impact 8G Series Photochemical Filters

Transcription

1 MICROCONTAMINATION CONTROL Impact G Series Photochemical Filters Ultraclean, point-of-dispense filtration of photoresist and photochemical solvents Impact G series filters deliver best-in-class, point-of-dispense photochemical filtration with superior flow rate performance and reduced microbubble formation capabilities in sub- nm technology nodes. To minimize the risk of filter contamination, Impact G filters utilize an enhanced ultraclean technology to reduce particle shedding, microbubble entrapment and metal and organic extractables. In addition, the unique core-fill device structure increases flow rate performance, shortens filter startup times, reduces on-wafer defects and enhances filter lifetime. APPLICATIONS FEATURES & BENEFITS Critical photochemical filtration of: Photoresists BARCs Enhanced cleaning process Minimal organic and metal extractables in photochemical solvents TARCs Underlayers Solvents EUV lithography Cleaner filters with less particle shedding Less time spent on filter startups Emerging chemistries Unique core-fill flowpath design Better flow rate performance than comparable filters Limited microbubble formation upstream and downstream Reduces overall filter priming time leading to reduced filter startup costs Oktolex membrane technology Revolutionizes the removal of critical chemical contaminants Further optimizes removal performance to eliminate any adverse interactions with chemical composition Enables a tailored approach to the contamination control requirements of ArF, KrF, and EUV applications for Logic, DRAM, and 3D NAND devices

2 Impact G and G UC Series Filters SPECIFICATIONS Materials Membrane G, G-L UPE, Nylon, Duo (UPE/Nylon), PCM* G UC, G-L UC UPE (clean resin), Duo (UPE/Nylon) Surface area G, G UC UPE 1 cm (1.9 ft ) G, G UC Nylon cm (. ft ) G, G UC Duo cm (. ft ) G PCM 13 cm (1. ft ) G-L, G-L UC UPE cm (.5 ft ) G-L Nylon 1 cm (1.7 ft ) G-L, G-L UC Duo 1 cm (1.7 ft ) G-L, G-L UC PCM cm (. ft ) Supports, core, shell O-ring HDPE Kalrez perfluoroelastomer (OF) Retention rating UPE Standard: 3, 5, 1, nm UC: 3, 5, 1 nm Nylon Standard: 1, nm UC: 1 nm Duo Standard: 5, 1 nm UC: 3, 5, 1 nm PCM* Standard: 1 nm UC: None Maximum operating conditions Maximum inlet pressure:.3 MPa (3. bar, 5 5 C (77 F) Maximum forward/reverse differential pressure:.7 MPa (.7 bar, 39 5 C (77 F) Maximum operating temperature: C (1 F) Hold up volume Impact G, G UC 55 cc Impact G-L, G-L UC 11 cc Compatibility Wettability Fittings (use Impact manifold) PGMEA, PGME, NMP, ethyl lactate, MMP, cyclohexanone and other photochemical solvents. Spontaneously wets in butyl acetate, PGMEA, PGME, ethyl lactate, MMP, cyclohexanone, ECA and other photochemical solvents. Refer to page for more information. *PCM: Surface-modified hydrophilic UPE

3 PERFORMANCE DATA IMPACT G FILTERS Impact G UPE/UPE UC Impact G Duo/Duo UC nm 1 nm 5 nm nm* nm** 5 nm 1 nm Typical Flow Rate (ml/sec) 1 5 C (77 F) Typical Flow Rate (ml/sec) 1 5 C (77 F) Impact G Nylon/Nylon UC Impact G PCM nm nm* nm Typical Flow Rate (ml/sec) 1 5 C (77 F) Typical Flow Rate (ml/sec) 1 5 C (77 F) *UPE nm: Standard UPE only **Duo 3 nm: UC only 3

4 IMPACT G-L FILTERS Impact G-L UPE/UPE UC Impact G-L Duo/Duo UC nm 5 nm nm* 1 nm nm 3 nm** nm Typical Flow Rate (ml/sec) 1 5 C (77 F) Typical Flow Rate (ml/sec) 1 5 C (77 F) Impact G-L Nylon/Nylon UC Impact G-L PCM nm nm* nm Typical Flow Rate (ml/sec) 1 5 C (77 F) Typical Flow Rate (ml/sec) 1 5 C (77 F) *UPE nm: Standard UPE only **Duo 3 nm: UC only

5 DIMENSIONS Impact G/G-L, G UC/G-L UC Top View: Impact G, G-L, G UC, G-L UC 73 mm (.7 ) 5 mm (.5 ) Side View: Impact G, G UC Side View: Impact G-L, G-L UC 9 mm (1.93 ) mm (3. ) 13 mm (5.35 ) Impact G, G UC, G-L, G-L UC with Impact Manifold.35 mm Flowell Type Front View Side View 17. mm (5. ) 79. mm (3.11 ) 35. mm (1.3 ) G, G UC: 17 mm (.77 ) 1 mm G, G UC: (.7 ) 13 mm (5.3 ) 17 mm (7.3 ) G, G UC: 1 mm (. ) 17 mm (.9 ) 5. mm (1.77 ) G, G UC: 9 mm (3.7 ) 1 mm (5. ) 59.5 mm (.3 ).5 mm (3.5 ) 1 mm (.39 ) Impact G, G UC, G-L, G-L UC Filter with Impact Manifold.35 mm Super Type Pillar Front View Side View 17. mm (5. ) 3. mm (. ) 35. mm (1.3 ) G, G UC: 157 mm (.1 ) mm G, G UC: (.11 ) 1 mm (5. ) 177 mm (.97 ) G, G UC: 1 mm (. ) 17 mm (.9 ) G, G UC: 9 mm (3.7 ) 1 mm (5. ) 59.5 mm (.3 ) 1 mm.5 mm (3.5 ) (.39 ) 5

6 ORDERING INFORMATION This information serves as a guide. Please contact your local representative to confirm part numbers. Impact G and G UC Series Filters: part number A C 1 UC Membrane S = Asymmetric C = UPE D = Duo N = Nylon M = PCM Retention rating K = 3 nm F = 5 nm T = 1 nm X = nm Configuration = Standard L = Long Pleating style = Standard M = M-pleat Quantity 1 = 1/pack O-ring = OM K = Kalrez Cleaning* UC = Ultraclean * Cleaning only applies to Impact G UC series filters Impact Manifolds (1/pack) Fitting Tube size (OD ID) OF type OM type (Kalrez) OM type (EPDM) Flowell series.35 mm 3.95 mm AMX1 AMXK1 Flowell series.35 mm.35 mm AMXT AMXKT AMXET Flowell series mm mm AMX1A Flowell series 5 mm 3 mm AMX5551A Flowell series mm 3 mm AMX1A Super Type Pillar.35 mm 3.95 mm AMP1 AMPK1 Super Type Pillar.35 mm.35 mm AMPT AMPKT

7 Impact G Flushing Shell SPECIFICATIONS FLUSHING SHELL TYPE Impact G Impact * Hold-up volume 1 ml 9 ml Resin Ultraclean Standard Internal surface area 1. cm (. in ) 33 cm (5.1 in ) Internal Test Results Durability air pulse test (. MPa) >. million cycles 1.5 ~. million cycles Burst pressure. ~ 5.5 MPa 3.5 ~. MPa Particle shedding particles / 1 ml (.5 μm H O after 5 min flush) Metal (1% HCl extract) <. μg/unit (3 metals) Organics (reference data) (GC-FID test).1 ~.3 mg/unit.7 ~ 3. mg/unit *Impact flushing shell specifications are included for comparison. DIMENSIONS mm (1.1 ) ORDERING INFORMATION Part number Recommended flow AAMCK1 Impact G flushing shell with Kalrez o-ring AAMC1 Impact G flushing shell with no o-ring 7

8 FOR MORE INFORMATION Please call your Regional Customer Service Center today to learn what Entegris can do for you. Visit entegris.com and select the Contact Us link to find the customer service center nearest you. TERMS AND CONDITIONS OF SALE All purchases are subject to Entegris Terms and Conditions of Sale. To view and print this information, visit entegris.com and select the Terms & Conditions link in the footer. Corporate Headquarters 19 Concord Road Billerica, MA 11 USA Customer Service Tel Fax Toll Free 39 3 Entegris, the Entegris Rings Design, Pure Advantage, Impact, and Oktolex are trademarks of Entegris, Inc. Kalrez is a registered trademark of E. I. du Pont de Nemours and Company. Flowell is a trademark of Flowell Corporation. Pillar is a registered trademark of Nippon Pillar Packing Company, Ltd Entegris, Inc. All rights reserved. Printed in the USA 1-79ENT-917