Intercept Liquid Filters

Transcription

1 MICROCONTAMINATION CONTROL Intercept Liquid Filters Advanced dual-retention, liquid filtration for critical DHF/BOE cleaning applications Intercept liquid filters enable best-in-class filtration for critical dilute, aqueous, and low-neutral ph cleaning applications at 1 nm or greater technology nodes. The 7 nm filter type ensures tighter particle retention and ultraclean filtration with consistently good flow rates. Intercept s dual-capture mechanism utilizes both sieving and nonsieving retention technologies to retain fine particles, reduce on-wafer defects, and provide low metal, chloride, and particle counts. The hydrophilic membrane prevents sudden flow loss caused by membrane dewetting and eliminates the need for prewetting. Intercept filters meet various process requirements to deliver yield-enabling filtration for advanced applications with long filter life and improved process stability. FEATURES & BENEFITS s from.1 µm to 7 nm Provides superior filtration for critical dilute, aqueous, and low-neutral ph cleaning applications at advanced technology nodes APPLICATIONS Weak acid-based process chemicals such as BOE and DHF Bulk chemical delivery and distribution systems DI water Single wafer tools Recirculating etch baths Advanced membrane technology Clean, dual-capture membrane improves process performance with fewer on-wafer defects Asymmetric membrane (7 nm [UC], 1 nm, nm) ensures tighter particle retention while maintaining high flow rates Hydrophilic membrane no prewetting or flushing required Increases process uptime Prevents risk of chemical interactions Minimizes risk of dewetting (and loss of flow) M-pleat membrane area (HPM and HSM configurations) Enables increased flow rates for critical applications Clean filtration Low metals, chlorides, particles Intercept UC 7 nm provides even lower metals and chlorides than previous filters

2 SPECIFICATIONS TYPE HP HPX HPM HSM Materials Membrane Hydrophilic ultra-high molecular weight polyethylene (UPE) Hydrophilic polysulfone (PS) Supports, sleeve, core, end caps Nonwoven high-density polyethylene (HDPE) Code double - o-rings Encapsulated fluoropolymer (E-FKM) or Kalrez 79 and 375 Chem-Line II disposable outer shell N/A Polypropylene and PFA Chem-Line I disposable outer shell N/A PFA.1,.5 μm.1,.5 μm.5 µm, 3 nm, 1 nm, 7 nm Membrane surface area 1 :.5 m (9.15 ft ) :.5 m (5.3 ft ) 1 : 1.9 m (.5 ft ) :. m (. ft ) 1 : 1.1 m (11. ft ) : 3. m (.9 ft ) 1 : 1. m (1.9 ft ) :. m (3. ft ) 3 : 5.7 m (1.35 ft ) :. m (3.3 ft ) Maximum operating conditions Maximum forward differential pressure.3 MPa (3. bar; 5 5 C (77 F) Maximum reverse pressure.1 MPa (.1 bar; 3 5 C (77 F) Maximum operating temperature 7 C (15 3 psi 7 C (15 3 psi

3 Intercept HP, HPX, HPM and HSM Cartridge Filters DIMENSIONS Intercept HP Cartridge Filters Ø 95.3 mm (3.75 ) REF Ø 9 mm (.7 ) Key adds. mm (.15 ) to length 1 filter length:.3 mm (1.33 ) Intercept HPX, HPM and HSM Cartridge Filters Ø 95.3 mm (3.75 ) REF Ø mm (3.1 ) REF Key adds. mm (.15 ) to length : 17.3 mm (5.1 ) 1 :.3 mm (9.5 ) : 71.5 mm (1.5 ) HPX, HPM : 7.3 mm (1. ) HSM only 3 : 9.5 mm (7.5 ) 1 nm HPM only 3

4 PERFORMANCE DATA Intercept HP 1 Cartridges µm.1 µm 1 Intercept HPX, HPM and HSM Cartridges µm 1 nm nm.1 µm Typical Flow Rate (L/min) 1 5 C (77 F) Typical Flow Rate (L/min) 1 5 C (77 F) Intercept HPX 1 Cartridges Intercept HPX, HPM and HSM Cartridges µm.1 µm µm.5 µm 7 nm 1 nm nm Typical Flow Rate (L/min) 1 5 C (77 F) Typical Flow Rate (L/min) 1 5 C (77 F) Intercept HPM and HSM 1 Cartridges nm 5 1 nm 7 nm nm µm Typical Flow Rate (L/min) 1 5 C (77 F) 1 Intercept HPM and HSM 3 Cartridges nm 1 nm Typical Flow Rate (L/min) 1 5 C (77 F) 1

5 ORDERING INFORMATION This information serves as a guide. Please contact your local representative to confirm part numbers. Intercept HP and HPX Cartridge Filters: part number IHA P Key K = PFA Chemlock key (optional) for use with Chemlock O-ring housing only LT = E-FKM (HP) LK = Kalrez 79 (HP) 1 = E-FKM K1 = Kalrez 79 Cartridge length S = (HPX only) 1 = 1 = (HPX only) Y = 3 nm (HPX only) Z =.5 µm V =.1 μm Intercept HPM and HSM Cartridge Filters: part number IHA M 1 Cartridge length S = 1 = 1 = 3 = 3 Key K = PFA Chemlock key (optional) for use with Chemlock housing only O-ring = E-FKM K = Kalrez 79 R = Kalrez 375 T = 1 nm X = nm Y = 3 nm (1 or only) Z =.5 µm (1 only) Intercept UC Cartridge Filters: part number IHA M C M 1 Key K = PFA Chemlock key (optional) for use with Chemlock O-ring housing only = E-FKM R = Kalrez 375 Cartridge length S = 1 = 1 = M = 7 nm (HSM only) 5

6 Intercept Disposable Filters DIMENSIONS Chem-Line II (PP) Disposable Filters 39 mm (1.5 ) A Inlet/outlet size " disposable filter with Flaretek fittings 1" disposable filter with Flaretek fittings 3 37 mm (9.3 ) 35 mm (13.77 ) A 1 7 mm (9.7 ) 3 mm (1.17 ) 15 mm (.1 ) 3 7 mm (9.7 ) 3 mm (1.17 ) 1 57 mm (1.1 ) 37 mm (1.57 ) Vent/drain all versions: 1/ 11 mm (.7 ) Chem-Line II (PFA) Disposable Filters Super 3 Type Pillar 37 mm (1. ) Flaretek 37 mm (1. ) A A 1 mm (.1 ) 1 mm (.1 ) 11 mm (.33 ) 11 mm (.33 ) Inlet/outlet size 1" filter Inlet/outlet size 1" filter mm (13.9 ) 1 37 mm (1.5 ) 3 3 mm (1.31 ) mm (1. ) mm (1. ) Vent/drain all versions: 1/ 1 3 mm (15. ) Vent/drain all versions: 1/

7 Chem-Line I Disposable Filters TH: T-line 3 " Super Type Pillar 3S: T-line 3 " Super 3 Type Pillar 3 mm (1. ) mm (.3 ) 1 mm (7.9 ) 1 mm (.55 ) mm (.3 ) mm (.3 ) M 1.5 Depth 15 mm 1 mm (.3 ) mm (.3 ) M 1.5 Depth 15 mm 5 mm (.9 ) 5 mm (. ) 3 mm 17 mm (.77 ) (1. ) 33 mm (1.3 ) 39 mm (15.5 ) 335 mm (13.19 ) mm (1. ) Ø1 mm (.97 ) Ø1 mm (. ) Ø1 mm (.5 ) 399 mm (15.7 ) 31 mm (13.3 ) mm (1. ) Ø1 mm (.97 ) Ø1 mm (.5 ) Ø1 mm (. ) Ø17 mm (5. ) Ø17 mm (5. ) S: T-line 1" Super 3 Type Pillar 3 mm (1. ) 1 mm (7.17 ) mm (.3 ) 5 mm (. ) mm (.3 ) 33 mm (1.3 ) M 1.5 Depth 15 mm 399 mm (15.7 ) 31 mm (13.3 ) mm (1. ) Ø1 mm (.97 ) Ø1 mm (.5 ) Ø1 mm (. ) Ø17 mm (5. ) 7

8 PERFORMANCE DATA Intercept HPX and HSM Disposable Filters Intercept HPX 1 Disposable Filters 3 " 3 " µm nm.1 µm Typical Flow Rate (L/min) 1 5 C (77 F) µm.1 µm Typical Flow Rate (L/min) 1 5 C (77 F) " 1 " µm nm.1 µm Typical Flow Rate (L/min) 1 5 C (77 F) µm.5 µm Typical Flow Rate (L/min) 1 5 C (77 F) " 3 " µm nm.1 µm Typical Flow Rate (L/min) 1 5 C (77 F) µm.5 µm Typical Flow Rate (L/min) 1 5 C (77 F) " 1" µm nm.1 µm Typical Flow Rate (L/min) 1 5 C (77 F) µm.5 µm Typical Flow Rate (L/min) 1 5 C (77 F)

9 Intercept HPX and HSM 1 Disposable Filters 3 " 3 " nm 1 nm 7 nm nm.5 µm Typical Flow Rate (L/min) 1 5 C (77 F) nm 1 nm 7 nm 3 nm.5 µm Typical Flow Rate (L/min) 1 5 C (77 F) " 1" nm nm 7 nm 3 nm.5 µm Typical Flow Rate (L/min) 1 5 C (77 F) nm 1 nm 7 nm 3 nm.5 µm Typical Flow Rate (L/min) 1 5 C (77 F)

10 ORDERING INFORMATION This information serves as a guide. Please contact your local representative to confirm part numbers. Intercept HPX Chem-Line II (PP) Disposable Filters: part number IHD HP Length S = X = 1 Y = 3 nm ( only) Z =.5 µm V =.1 μm 1F = 3/ inlet/outlet, 1/ vent/drain, Flaretek fittings F = 1/ inlet/outlet, 1/ vent/drain, Flaretek fittings F = 3/ inlet/outlet, 1/ vent/drain, Flaretek fittings F = 1 inlet/outlet, 1/ vent/drain, Flaretek fittings Intercept HPM and HSM Chem-Line II (PP) Disposable Filters: part number IHD H Length S = (HSM only) M = 1 1F = 3/ inlet/outlet, 1/ vent/drain, Flaretek fittings F = 1/ inlet/outlet, 1/ vent/drain, Flaretek fittings F = 3/ inlet/outlet, 1/ vent/drain, Flaretek fittings F = 1 inlet/outlet, 1/ vent/drain, Flaretek fittings Membrane P = HPM S = HSM T = 1 nm (HPM only) X = nm (HSM only) Y = 3 nm (HPM only) Z =.5 µm (HPM only) Intercept HPM and HSM Chem-Line II (PFA) Disposable Filters: part number IHL H M Membrane P = HPM S = HSM T = 1 nm (HPM only) X = nm (HSM only) P3PM = 1/ inlet/outlet, 1/ vent/drain, Super 3 Type Pillar fittings P3PM = 3/ inlet/outlet, 1/ vent/drain, Super 3 Type Pillar fittings P3PM = 1 inlet/outlet, 1/ vent/drain, Super 3 Type Pillar fittings 1

11 Intercept UC Chem-Line II (PFA) Disposable Filters: part number IHLM C S M Membrane S = HSM M = 7 nm (HSM only) P3PM = 1/ inlet/outlet, 1/ vent/drain, Super 3 Type Pillar fittings P3PM = 3/ inlet/outlet, 1/ vent/drain, Super 3 Type Pillar fittings P3PM = 1 inlet/outlet, 1/ vent/drain, Super 3 Type Pillar fittings 1F = 3/ inlet/outlet, 1/ vent/drain, Flaretek fittings F = 1/ inlet/outlet, 1/ vent/drain, Flaretek fittings F = 3/ inlet/outlet, 1/ vent/drain, Flaretek fittings F = 1 inlet/outlet, 1/ vent/drain, Flaretek fittings Intercept UC Chem-Line II (PP) Disposable Filters: part number IHDM C S Membrane S = HSM Length S = M = 1 M = 7 nm (HSM only) 1F = 3/ inlet/outlet, 1/ vent/drain, Flaretek fittings F = 1/ inlet/outlet, 1/ vent/drain, Flaretek fittings F = 3/ inlet/outlet, 1/ vent/drain, Flaretek fittings F = 1 inlet/outlet, 1/ vent/drain, Flaretek fittings Intercept HPM and HSM Chem-Line I (PFA) Disposable Filters (1 only): part number IHP H M Membrane P = HPM S = HSM T = 1 nm (HPM only) X = nm (HSM only) Y = 3 nm (HPM only) Z =.5 µm (HPM only) TH = 3/ inlet/outlet, 1/ vent/drain, Super Type Pillar fittings 3S = 3/ inlet/outlet, 1/ vent/drain, Super 3 Type Pillar fittings S = 1 inlet/outlet, 1/ vent/drain, Super 3 Type Pillar fittings Intercept UC Chem-Line I (PFA) Disposable Filters (1 only): part number IHPM C M Membrane S = HSM TH = 3/ inlet/outlet, 1/ vent/drain, Super Type Pillar fittings 3S = 3/ inlet/outlet, 1/ vent/drain, Super 3 Type Pillar fittings S = 1 inlet/outlet, 1/ vent/drain, Super 3 Type Pillar fittings M = 7 nm (HSM only) 11

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