Visionary Sensor Technology CDG045D. High Precision Vacuum Gauge. True pressure measurement
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1 Visionary Sensor Technology CDG045D High Precision Vacuum Gauge True ressure measurement
2 CDG045D Vacuum Gauge The INFICON temerature controlled CDG Caacitance Diahragm Gauge line is designed for the highest accurate total ressure measurement available today. The temerature controlled corrosion resistant ultra-ure ceramic sensor rovides suerior san stability over many years aired with state-of-the-art zero stability. Advanced electronics offer the user a wide range of suitable filters yielding solutions for all alications and a choice of fieldbus interfaces. A unique sensor shield (atents granted) rotects the gauge from undesired rocess byroducts. Tyical alications Quality control, reference vacuum Load Lock Puller, ovens Industrial PVD, CVD, Etch Analytical Oxidation
3 CDG045D Vacuum Gauge Temerature control San stability Any mounting orientation Gauge rotection for increased lifetime Temerature controlled at ± 0.1 C Fast warm u Immune to ambient environment CDG working rincile Baffle Stos coating, articles Level 1 Direct ressure measurement by diahragm Level 2 Shield Protects diahragm Level 3 Protective coating Corrosion rotection Δd ~ Caacitance readout Δd 1 ~ Electrode Diahragm = ressure Interface I/O Classic analog signal 0 10V Wide range ower suly Zero adjust, ush button / remote DI 2 individual setoints Status LED Diagnostic ort Fieldbus: DeviceNet, Profibus, EtherCAT, RS-232 Fully ceramic sensor Bonded ceramic structure combined with digital signal rocessing rovides suerior measurement erformance. DeviceNet Profibus EtherCAT Gas tye indeendence (mbar) CDG sensor technology Other tyical sensor technologies Uout = a + b (a = sloe / b = off-set) U Longtime full scale stability standard gain dynamic offset + slow PVD, CVD, Etch Analytical Oxidation fast F.S. stability Tyical alications Quality control, reference vacuum Load Lock Puller, ovens Industrial Digital signal rocessing Indicated ressure The INFICON temerature controlled CDG Caacitance Diahragm Gauge line is designed for the highest accurate total ressure measurement available today. The temerature controlled corrosion resistant ultra-ure ceramic sensor rovides suerior san stability over many years aired with state-of-the-art zero stability. Advanced electronics offer the user a wide range of suitable filters yielding solutions for all alications and a choice of fieldbus interfaces. A unique sensor shield (atents granted) rotects the gauge from undesired rocess byroducts. measured at PTB True ressure (mbar) Setable outut P Digital filters Measuring oints of one gauge 10 time (years) Ceramic sensor technology offers suerior long-term stability.
4 CDG045D temerature controlled ADVantaGES AT A GLANCE Unrecedented Full Scale stability No eriodical recalibration required Digital signal rocessing Corrosion resistant Alumina sensor Measurement ranges Full Scale (Torr) % Accuracy Temerature coefficient C In-situ architecture assures an excellent temerature stability of zero and san Pressure (Torr) Temerature coefficient/accuracy
5 Excellent Customer Suort is a Commitment INFICON rovides a global network of sales and service centers. These centers are staffed with local service and alication exerts who can assist you in choosing the best solution for your individual roduct alication and rovide fast suort if service is needed. Asia and Pacifica CHINA INFICON Ltd. Beijing Phone: reach.china@inficon.com KOREA INFICON Ltd. Kyunggi-do Phone: reach.korea@inficon.com Americas INFICON Inc. East Syracuse, NY Phone: reach.us@inficon.com Euroe, Middle East and Africa INFICON GmbH Cologne Phone: reach.germany@inficon.com INDIA INFICON PVT. Ltd. Pune Phone: reach.india@inficon.com JAPAN INFICON Co. Ltd. Yokohama-shi, Kanagawa-ken Phone: reach.jaan@inficon.com SINGAPORE and AUSTRALIA INFICON PTE Ltd. Singaore Phone: reach.singaore@inficon.com TAIWAN INFICON Co. Ltd. Chuei City Phone: reach.taiwan@inficon.com inficon.com reachus@inficon.com Due to our continuing rogram of roduct imrovements, secifications are subject to change without notice. tibc21e INFICON
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