Curtis Doss Deshraj Singh Rick Scott. Spansion APM Group. Building the stronger manufacturing systems software

Transcription

1 Curtis Doss Deshraj Singh Rick Scott Spansion APM Group Building the stronger manufacturing systems software Dec 4 th 2007 ISMI e-manufacturing Workshop Tokyo, Japan

2 2 Overview Spansion history and global presence Complexity of 300mm IC manufacturing Factory automation s impact on factory startup The difficulty of the custom automation solution Better automation software and systems are critical Where do we go next? Conclusions

3 3 Overview Spansion history and global presence Complexity of 300mm IC manufacturing Factory automation s impact on factory startup The difficulty of the custom automation solution Better automation software and systems are critical Where do we go next? Conclusions

4 4 Spansion History 1 st 300mm Manufacturing facility SP1 in Aizuwakamatsu Japan 2H, 2007 IPO in NASDAQ Dec 2005 Spansion LLC/Spansion Japan n Established 2001 JV JV JV1 Expanding Flash Memory Market Jul 2003 Jun 2004 Apr 1993 Fujitsu AMD Semiconductor Limited. (FASL) (Integration of Corporate Brand & Company Name) FASL LLC/FASL JAPAN Established (Flash Memory Business Consolidation) 2002 Fab25 Converted from LOGIC to Flash Memory JV: Joint Venture Factory Established with Fujitsu & AMD s Flash Memory MFG Established

5 5 Most of the IC manufacturers have similar global footprint

6 6 Summary Spansion history and global presence Increasing complexity of the 300mm state of the art IC manufacturing Factory automation s impact on factory startup The difficulty of the custom automation solution Better automation software and systems are critical Where do we go next? Conclusions

7 7 Today, highly automated 300mm fabs are stateof-the-practice Continuously decreasing line-widths require a high degree of wafer processing control Large wafer sizes increase per-wafer value significantly Increased equipment cost demands maximum asset utilization Today s product life-cycle demands speed

8 8 We understand the complexity drivers Increased complexity of tool management E5, E30, E37, Number of Standards 150mm E4, E5 200mm E4, E5, E30 Tracking 61 events/carrier 300mm E39, E40, E82, E84, E87, E88, E90, E94, E116, etc. Tracking events/carrier Wafer Diameter (mm) Slide courtesy of Brooks Automation

9 9 Working together we can make things better Aggressively work together on industry initiatives and standards Adhere to standards in our software solutions Non-standard software solutions are hurting us!

10 10 Suppliers and IC Makers must work together To create and adopt best known practices and standards that reduce the cost and time needed to implement automation software solutions

11 11 Summary Spansion history and global presence Increasing complexity of the 300mm state of the art IC manufacturing Factory automation s impact on factory startup The difficulty of the custom automation solution Better automation software and systems are critical Where do we go next? Conclusions

12 12 Building an automation system is often the gating factor in a 300mm fab startup Today, 300mm automation requires extensive custom design and development EI development demands valuable tool time System development is still a cut-and-try situation Automation takes almost twice as long to implement as other startup activities Integration with legacy applications requires custom workarounds

13 13 Fab buildings can be constructed in 6-8 months Well defined building codes and standards Well established supplier community Good availability of resources because of overlap with other industries

14 14 Tool delivery and hook-up can be completed in 3-6 months Well defined tool hook-up standards Dedicated tool experts who can meet demanding schedules

15 15 Operations staffing and training can be accomplished in 3-6 months Highly automated systems require less human interaction Re-training the existing workforce is less demanding

16 16 Automation integration and deployment typically takes from 12 to 24 months Weak standards implementations demand a high degree of customization Integration to legacy systems having obsolete interfaces demand custom programming Shortfalls in requirements development can bring an automation project to its knees

17 17 Summary Spansion history and global presence Increasing complexity of the 300mm state of the art IC manufacturing Factory automation s impact on factory startup The difficulty of the custom automation solution Better automation software and systems are critical Where do we go next? Conclusions

18 18 The solutions available to IC manufacturers are complex, expensive and time-consuming Complex systems with many integration points and applications Very expensive to build and maintain because of customization

19 19 Fully functional systems require integration of major applications plus a custom EI for each tool type FAB GUI Applications for targeted Functionality Dispatching Tool mgmt SPC EDC Yield mgmt NPW etc MES EI EI * Special EI for every tool type Many custom interfaces

20 20 Home-grown solutions demand years to build and very large support organizations Specialized skills for development Not scalable to meet changing needs Very expensive to maintain

21 21 Massively integrated systems require hundreds of highly specialized workers and managers 2007 Spansion, Inc.

22 22 Systems integration Systems integration is an exercise in connecting applications that have non-standard, and obsolete interfaces and designs

23 23 Summary Spansion history and global presence Increasing complexity of the 300mm state of the art IC manufacturing Factory automation s impact on factory startup The difficulty of the custom automation solution Better automation software and systems are critical Where do we go next? Conclusions

24 24 We are still disagreeing on bricks, mortar and architecture 2007 Spansion, Inc.

25 25 Data management architectures are still not state-of-the- art Non compatible components High maintenance Unpredictable scaling End-of-life infrastructure Custom data translation

26 26 Process tool software is often non-standard and fails to meet promised performance requirements 2007 Spansion, Inc.

27 27 Each supplier seems to have its own view of the best mousetrap and creates home-grown software to prove it 2007 Spansion, Inc.

28 28 Most tool software does not comply with established SEMI standards when tested Specifications: CIM GJG, Factory Specs, GEM300 Operational Scenarios: ISMT, Selete, Factory-specific E84 EPIO E87 E94 E40 E90 E42 CMS CJM PJM STS RMS GEM (E30) / SECS-II (E5) E39 OSS SECS-I (E4) HSMS E5 SECS-II (E37) E53 ERS E116 EPT E30 GEM E99 CID RW E5 E37.1 HSMS-SS E4 AMHS HOST CIDRW

29 29 Most tool software has difficulty meeting customer expectations even when promised to do so Req. # Description Compliance N/A (NOTE: The above referenced International SEMATECH documents are available from the International SEMATECH web site International SEMATECH 300mm Operational Flowcharts and Scenarios (Production Equipment) Version 09 December, 2000, available via the ISMT web site The following scenarios shall be supported: Section Heading Comply Section Heading Comments and/or Commit Date Fact Finding Comments Action Items Scenario E30 GEM Initialization (Host initiated option) Scenario E40 Processing Management (PM) Initialization Scenario E84 Enhanced Parallel I/O (EPIO) Initialization Scenario E87 Carrier Management System (CMS) Initialization Comply Comply Do Not Comply Comply Scenario E90 Substrate Tracking (STS) Initialization Comply Scenario E94 Control Job Management (CJM) Initialization Comply Scenario Material Movement - Support Services: Place Port in Service Do Not Comply Scenario Material Movement - Support Services: Place Port out of Do Not Comply Service Scenario Material Movement - Support Services: Access Mode Change - Do Not Comply AUTO Scenario Material Movement - Support Services: Access Mode Change - Do Not Comply MANUAL Scenario Material Movement - Move In - Assignment, comprising: Do Not Comply Scenario Reserve At Port Do Not Comply

30 30 Our ACM program shows that tool software has not significantly improved in the last 4 years! Issues HIGH MED LOW

31 31 Our ACM program shows that tool software has not significantly improved in the last 4 years! 2007 Issues HIGH MED LOW

32 32 Summary Spansion history and global presence Increasing complexity of the 300mm state of the art IC manufacturing Factory automation s impact on factory startup The difficulty of the custom automation solution Better automation software and systems are critical Where do we go next? Conclusions

33 33 SP1 automation systems deployment continues to point strongly to a need to improve industry-wide adoption of best practices and standards for software Tool Classifications No Issue Med Issue Critical Issues A B C Issues Time After testing almost half of our tools we finally found a good 300mm standard software compliant tool Spansion, Inc.

34 34 More than 10 years after the first 300mm fab was built integration and deployment of sophisticated 300mm engineering and production management tools continue to be limited by non-standard automation software solutions

35 35 We must work together to create and adopt best known practices and standards that reduce the co$t and time needed today to create and implement software solutions

36 36 Stronger Manufacturing Systems Software Together, let s build stronger manufacturing systems software by supporting the creation and strengthening of 1. Standards 2. Best Known Practices 3. Initiatives such as those at ISMI to improve software

37 37 Stronger Manufacturing Systems Software Action Items for IC Makers: 1. Get our Requirements act together 2. Maintain in-house programs which review and measure tool software performance 3. Participate in initiatives at ISMI and similar forums 4. Hold suppliers accountable for established, agreedupon requirements 5. Build and use even better software mapping and measurement tools

38 38 Stronger Manufacturing Systems Software Action Items for Suppliers: 1. Do your own QA against some uniform set of criteria 2. Actively participate in the creation and development of industry standards 3. Proactively provide proof of compliance (e.g., tool log files) of tool automation capabilities 4. Support 3 rd Party Testing of your software as requested 5. Truly leverage advances in IT technology in your system solutions

39 39 Let's build stronger manufacturing systems software to meet the industry challenge Let us all work together to Develop and adhere to a very rich set of standards Share best known practices to help the industry Support industry initiatives such as those from ISMI to guide, adapt, and define automation systems technology

40 40 Summary Spansion history and global presence Increasing complexity of the 300mm state of the art IC manufacturing Factory automation s impact on factory startup The difficulty of the custom automation solution Better automation software and systems are critical Where do we go next? Conclusions

41 41 Challenges We must improve factory control systems and process tool software to meet the increased complexity of IC manufacturing We must reduce the deployment time and cost of factory automation systems We must work together to support industrywide initiatives and improve commercially available systems, instead of going it alone and building one-of-a-kind home-grown solutions

42 42 Further Questions/Comments can be sent to the contact information below Curtis Doss APM Program Manager Home Office- Spansion Austin, TX Deshraj Singh APM Staff Project Manager Current Office- Spansion Aizuwakamatsu, Japan Home Office Austin TX Rick Scott APM Department Manager Home Office, Spansion Austin, TX

43

44 44 Trademark Attribution Spansion, the Spansion Logo and combinations thereof are trademarks of Spansion LLC. Other product names used in this presentation are for identification purposes only and may be trademarks of their respective companies.