A micromachined electrochemical sensor for free chlorine monitoring in drinking water
|
|
- Allyson Pitts
- 6 years ago
- Views:
Transcription
1 A micromachined electrochemical sensor for free chlorine monitoring in drinking water A. Mehta*, H. Shekhar**, S.H. Hyun***, S. Hong**** and H.J. Cho* *Mechanical, Materials and Aerospace Engineering, University of Central Florida, Orlando, FL , USA ( **Electrical Engineering, University of Central Florida, Orlando, FL , USA ***Civil and Environmental Engineering, University of Central Florida, Orlando, FL , USA ****Civil and Environmental Engineering Department, Korea University, 1, 5-ka, Anam-dong, Sungbuk-ku, Seoul, , Korea Abstract In this work, we designed, fabricated and tested a disposable, flow-through amperometric sensor for free chlorine determination in water. The sensor is based on the principle of an electrochemical cell. The substrate, as well as the top microfluidic layer, is made up of a polymer material. The advantages include; (a) disposability from low cost; (b) stable operation range from three-electrode design; (c) fluidic interconnections that provide on line testing capabilities; and (d) transparent substrate which provides for future integration of on-chip optics. The sensor showed a good response and linearity in the chlorine concentration ranging from 0.3 to 1.6 ppm, which applies to common chlorination process for drinking water purification. Keywords Chlorination; drinking water; electrochemical sensor; microsensor Introduction Required potable water quality has changed dramatically from the late 1970s due to enhanced regulation of pathogens and disinfection by-products: for example, Surface Water Treatment Rule and Disinfection By-Product Rule (Taylor and Hong, 2000). Consequently, new treatment technology and reliable analytical techniques are required to meet this challenge. In the United States, waterborne disease has been controlled primarily by chlorination, which is an essential part of typical drinking water treatment processes to prevent bacterial proliferation in the water distribution systems. The use of chlorine for disinfection of pathogens, however, requires caution since it also reacts with organics and forms disinfection by-products (DBPs). Regulated carcinogenic DBPs formed during chlorination include trihalomethanes and haloacetic acids. Excess chlorination also results in the corrosion of water distribution system and adds odour and taste to drinking water. To ensure public health and safety, it is extremely important to accurately and effectively monitor chlorine residuals during the treatment and transport of drinking water. HACH DR/4000 Spectrophotometer and DPD (N, N-diethyl-p-phenylenediamine) ferrous titrimetric methods are the standard methods used for measuring free chlorine (APHA, 1995; Hach, 1995). These methods are not portable and require expensive instrumentation. Several alternative methods have been suggested. One approach is based on optical detection using differential absorption spectroscopy (Belz et al., 1997). This method requires UV or laser light sources and complicated instrumentation. Electrochemical sensing techniques, and more specifically amperometry, have been employed for their simple sensor structure and good sensitivity (Matsumoto et al., 2002). Although different types of disposable electrochemical microsensors have been studied (Yang et al., 1996, 1997), most of doi: /wst Water Science & Technology Vol 53 No 4 5 pp Q IWA Publishing 2006
2 A. Mehta et al. them are paper-based, dip-type sensors. They have limitations in lifetime and on-line measurement. A miniaturized amperometric flow-through sensor for residual chlorine measurement has been studied (Okumura et al., 2001), but the sensor cell consists of protruded electrodes on silicon and a glass cover, which requires relatively complicated fabrication process. The microsensor presented here has been developed based on a transparent polymer substrate (Trichur et al., 2002) and is inexpensive and offers advantages such as future integration of on-chip optics. For improved linearity over a wide range of chlorine concentrations, three electrode configurations have been selected (Zhu et al., 2002). Microfluidic packaging allows easy approach to external connections with the sensor. Methods Sensor design The sensor is comprised of an electrode layer which is used to conduct amperometric measurements corresponding to the changing analyte concentration and a fluidic layer on top which allows for sample transport over the sensor electrodes. The two layers bonded together provide a packaged device for flow-through measurement of free chlorine concentration. In addition to the electrochemical sensor, the electrode layer also contains a temperature sensor for sample temperature monitoring. Electrode layer. A spherical design was used to design a 3-electrode amperometric sensor. The working (WE) and counter (CE) electrodes were fabricated using Au, while Ag/AgCl was also deposited on top of the Au for the reference electrode (RE). The principle of amperometry is based on the measurement of the current between the working and counter electrode, which is induced by a redox reaction at the working electrode. The conditions are chosen in such a way that the current is directly proportional to the concentration of a redox active species in the analyte solution. In the case of free chlorine measurement, the current corresponds to the movement of OCl - ions. Figure 1a, shows the structure and dimensions of the amperometric sensor. In addition to the sensing electrodes, a meander type Au temperature sensor was designed. It is a resistance temperature sensor (RTS) which is based on the change of electrical resistivity with temperature in metals. The active area shown in Figure 1b is the region that is in direct contact with the substance (gas or liquid) of which the temperature is to be determined. The area of the region determines the correct operating range. For our application, with a known gold film thickness and temperature range, an area of a b c d e Active region Area 1 mm 2 (a) (b) 404 Figure 1 (a) Free chlorine sensor dimensions (mm): a ¼ 400, b ¼ 100, c ¼ 350, d ¼ 400 and e ¼ 250. a, c and e correspond to the dimensions of RE, WE and CE respectively. (b) Resistive meander type temperature sensor
3 approximately 1 mm 2 is ideal. This area represents the area of the Au in the active region. The inclusion of a temperature sensor adds to the functionality of design by allowing compensation for temperature variation during measurements. Fluidic layer. The fluidic layer provides standard 1/16 00 and 1/32 00 tubing connections for sample flow over the bottom electrode layer. Figure 2 shows the sample injection mechanism into the electrode layer using the top fluidic layer. Sensor fabrication Au was deposited on a 3 00 COC (cyclic olefin copolymer) wafer using electron beam evaporation. Specific sites corresponding to the reference electrode were opened using photolithography for Ag deposition via electroplating. To complete the Ag/AgCl fabrication process, chlorination was carried out through electroplating with a 0.1 M KCl solution as the analyte. The Au was selectively patterned by a photolithographic step which defined the electrochemical sensor, temperature sensor and contact pads. Finally, the remaining Au was etched away using the standard potassium iodide-iodine gold etch solution. Figure 3 illustrates the fabrication steps. The substrate was then diced to produce individual devices. Figure 4 shows one of the assembled and packaged devices with the fluidic layer on top. A. Mehta et al. Sample preparation Free residual chlorine sample solutions were prepared by diluting standard chlorine solutions (Hach Company, USA). The 63.5 ppm standard solution was diluted using the deionized (DI) water to obtain samples in the ppm range. This was done to simulate the free chlorine concentration found in drinking tap water. Free chlorine is the sum of hypochlorous acid (HOCl) and hypochlorite ions (OCl 2 ). The ratio HOCl to OCl 2 is ph and temperature dependent. As the ph increases, the fraction of hypochlorous acid decreases and the fraction of hypochlorite ions increases (Rosemount Analytical, 2002). Since the sensor responds to OCl 2 ions alone, the operating ph was kept at 9 by adding appropriate amount of 0.1N NaOH. Free chlorine concentrations for each sample were measured using HACH DR/4000 spectrophotometer (Hach Company, U.S.A). To ensure the accuracy of the Hach measurements, DPD (N, N-diethyl-p-phenylenediamine) ferrous titrimetric method was also performed. Figure 2 (a) Fluidic and electrode layers (b) Cross sectional schematic showing a flow-through sample test 405
4 A. Mehta et al. Figure 3 Fabrication steps: (a) Au deposition, (b) photolithography and Ag electroplating, (c) chlorination and photoresist stripping, (d) Au etching Figure 4 Packaged sensor with top fluidic layer and electrical contacts 406 Test setup For sample injection, the injection pump (NE 1000, New Era Pump Systems) and valves were preset. The flow rate was fixed under 5 ml/min. Cyclic polarization was performed between 21V and 1V with respect to the Ag/AgCl electrode to determine the reduction potential for free chlorine. The measured potential was obtained with respect to the Ag/AgCl reference potential. Then, the potentiostatic measurements were performed using the reduction potential for free chlorine. These experiments were conducted on samples in the ppm free chlorine range. The sensor was first run with a calibration cycle, then the samples. The signal from the sensor was obtained with a potentiostat (Multistat II, Sycopel Scientific) from which the data was transferred to a PC and displayed using the multistat II software package. Figure 5 shows the experimental setup.
5 Calibration Sample Pump Valve Fluidic path Waste reservoir Disposable sensor Potentiostat Figure 5 Schematic view of the setup for sensor testing PC Electrical path A. Mehta et al. Results and discussions Amperometric sensor The current flow observed during the potentiostatic measurements was in direct proportion with the free chlorine concentration (OCl 2 ions) exclusively. The working potential of 100 mv was determined using cyclic polarization. For the initial sample measurements, a stability period of 100 s was needed before the sensor signal attained a constant value. Figure 6 shows the potentiostatic curves plotted for chlorine concentration variation in the range ppm. Current outputs from all the experiments were tabulated and plotted against the sample concentration as shown in Figure 7. Using the calibration curve, the sensor was also tested to measure free chlorine in a tap water sample. It was measured to be in the range of 0.7 ppm. The sensor shows linear operation in the test range of ppm chlorine solutions. The correlation factor, R 2, is found to be This linearity in operation can be used to correlate the sensor output to the chemically Figure 6 Time variation of sensor output measured in a solution with 1.6 ppm chlorine Figure 7 Sensor output as a function of free chlorine concentration where the correlation factor is R 2 ¼
6 determined values of free chlorine in water. Since the operational range of the developed microsensor is close to the free chlorine concentrations allowed in drinking water treatment, this sensor has applications in the free chlorine monitoring in drinking water. A. Mehta et al. Temperature sensor In view of the general temperature range under which the free chlorine measurement experiments are conducted, a temperature range of 5 258C was considered for testing. The change in resistance with increase in temperature of the sample was plotted and is shown in Figure 8. A linear response was observed. Once the resistance is calibrated, the temperature of the sample could be directly read. Flow-through measurement Figure 9a shows the results of time variation of the sensor output. The flow-through output required approximately 100 s for sensor stabilization. The decrease in free chlorine concentration was observed at a flow-through rate of 5 ml/min in the initial stage, which would be contributed by the decomposition of free chlorine in contract with polymeric tubing. After this initial soaking period, the measured values became stable. The temperature was also measured simultaneously to account for any change in concentration with Figure 8 Variation of resistance of the temperature sensor with respect to temperature where the correlation factor is R 2 ¼ Figure 9 (a) Time variation of concentration during flow-through measurement of sample with 8 ppm free chlorine. (b) Variation of temperature inside the sensor cell during the flow-through measurement
7 % Current deviation Figure 10 Interference effects on chlorine sensor measurements with [Cl] ¼ 1.6 ppm respect to temperature. Figure 9b shows the operating temperature variation measured during the sensor operation. This demonstrates the stability of the sensor at this flow rate. A. Mehta et al. Selectivity Selectivity testing is particularly important to ensure the absence of false alarms in free chlorine testing. Potassium iodide (KI) can produce fairly reactive ionic species that may interfere with chlorine detection. To determine the selectivity of free chlorine sensor, the interfering species, KI was added in a fixed 1.6 ppm chlorine solution. Since the chlorination in tap water can vary in a wide range from 0.4 to 2.0 ppm, this concentration is applicable. The interference testing was done by successive addition of increasing amounts of KI solution from the ppm range; this higher chlorine concentration (1.6 ppm) was intentionally chosen over the other samples to ensure an adequate supply of free chlorine in the repeated testing and to compensate for any chlorine absorption or loss. Concentration of KI was varied in the range of ppm and the deviation in current response with the 1.6 ppm chlorine solution was recorded. As shown in Figure 10, there was no significant deviation in the signal response despite the presence of almost equivalent amounts of interfering ionic species. Conclusions We designed, fabricated and tested a disposable microsensor for free chlorine monitoring in water. Amperometric measurements yielded a linear sensor response in the tested range of ppm of free chlorine. This operation range is within the allowed chlorine levels in drinking water. The sensor was also tested with a tap water sample and its chlorine content determined. The sensor showed a stable output response and good selectivity in the presence of interfering ionic species. A temperature sensor was also incorporated in the design to compensate for possible temperature variation effects on the measurements. The developed microsensor is a low cost device that is applicable to a portable on-site instrument for monitoring free chlorine in the water treatment process. Acknowledgements This work was partially supported by a National Science Foundation CAREER Award (ECS ) and by Korea Research Foundation Grant (KRF-2004-D00165). The authors would like to thank Dr. C. H. Ahn at the University of Cincinnati for technical discussions and assistance. References APHA-AWWA-WEF (1995). Standard Methods For The Examination Of Water And Wastewater, 19th Ed., Washington DC. Belz, M., Boyle, W.J.O., Klein, K-F. and Grattan, K.T.V. (1997). Smart-sensor approach for a fiber-opticbased residual chlorine monitor. Sensors Actuators B, 38 39, Hach Company (1995). HACH DR/4000 Spectrometer procedures manual. 409
8 A. Mehta et al. Matsumoto, T., Ohashi, A. and Ito, N. (2002). Development of micro-planar Ag/AgCl quasi-reference electrode with long term stability for an amperometric glucose sensor. Anal. Chim. Acta., 462, Okumura, A., Hirabayashi, A., Sasaki, Y. and Miyake, R. (2001). Simple miniaturized amperometric flow cell for monitoring residual chlorine in tap water. Anal. Sci., 17, Rosemount Analytical (2002). Water and wastewater industry application data sheet, PN Taylor, J. and Hong, S. (2000). Potable water quality and membrane technology. J. Lab. Med., 31, Trichur, R., Kim, S., Lee, S.H., Abdelaziez, Y.A., Starkey, D.E., Halsall, H.B., Heineman, W.R. and Ahn, C.H. (2002). A new plastic CE chip with wide optical clarity using cyclic olefin copolymers (COC). Proceedings of the 6th International Conference on Micro Total Analysis Systems, Yang, Z., Suzuki, H., Sasaki, S. and Karube, I. (1996). Disposable sensor for biochemical oxygen demand. Appl. Microbiol. Biotechnol., 46, Yang, Z., Suzuki, H., Sasaki, S. and Karube, I. (1997). Design and validation of a low-cost paper-based oxygen electrode. Anal. Lett., 30, Zhu, J., Zhu, Z., Lai, Z., Wang, R., Guo, X., Wu, X., Zhang, G., Zhang, Z., Wang, Y. and Chen, Z. (2002). Planar amperometric glucose sensor based on glucose oxidase immobilized by chitosan film on prussian blue layer. Sensors, 2,
A Disposable On-Chip Phosphate Sensor with Planar Cobalt Microelectrode on Polymer Substrate
A Disposable On-Chip Phosphate Sensor with Planar Cobalt Microelectrode on Polymer Substrate Zhiwei Zou,, Jungyoup Han, Am Jang*, Paul L. Bishop*, and Chong H. Ahn MicroSystems and BioMEMS Lab Department
More informationDevelopment of microsensors for chloride concentration in concrete
Development of microsensors for chloride concentration in concrete Feifei Cao and David W. Greve Department of Electrical and Computer Engineering Carnegie Mellon University, Pittsburgh, PA 15213 I.J.
More informationMicromachined Electrochemical Sensors For Hydrogen Peroxide And Chlorine Detection
University of Central Florida Electronic Theses and Dissertations Masters Thesis (Open Access) Micromachined Electrochemical Sensors For Hydrogen Peroxide And Chlorine Detection 2005 Anjum Mehta University
More informationWhich Chlorine Monitoring Method is Most Effective?
Which Chlorine Monitoring Method is Most Effective? It's no secret that contaminated water can threaten the health of your laboratory animals and the validity of your research. That is why a residual disinfectant
More informationGeneral Introduction to Microstructure Technology p. 1 What is Microstructure Technology? p. 1 From Microstructure Technology to Microsystems
General Introduction to Microstructure Technology p. 1 What is Microstructure Technology? p. 1 From Microstructure Technology to Microsystems Technology p. 9 The Parallels to Microelectronics p. 15 The
More informationDevelopment of Corrosion Probe based on Solid State Reference Electrodes 1 Introduction
Development of Corrosion Probe based on Solid State Reference Electrodes BYUNG GI PARK*, IN HYOUNG RHEE**, DAECHUL CHO** *FNC Technology Co. Ltd., SNU Research Park Innovation Center #421, San 4-1 Bongchun-dong,
More informationPHYS 534 (Fall 2008) Process Integration OUTLINE. Examples of PROCESS FLOW SEQUENCES. >Surface-Micromachined Beam
PHYS 534 (Fall 2008) Process Integration Srikar Vengallatore, McGill University 1 OUTLINE Examples of PROCESS FLOW SEQUENCES >Semiconductor diode >Surface-Micromachined Beam Critical Issues in Process
More informationEvaluation of a miniaturized thermal biosensor for the determination of glucose in whole blood
ก ก ก ก Evaluation of a miniaturized thermal biosensor for the determination of glucose in whole blood.. 4805107.. 4805161 ก miniaturized thermal biosensor flow-injection analysis ก (1 µl) ก ก ก 0.5 16
More informationMultiphoton lithography based 3D micro/nano printing Dr Qin Hu
Multiphoton lithography based 3D micro/nano printing Dr Qin Hu EPSRC Centre for Innovative Manufacturing in Additive Manufacturing University of Nottingham Multiphoton lithography Also known as direct
More informationPortable Water Quality Sensor Fabrication Method
University of Central Florida UCF Patents Patent Portable Water Quality Sensor Fabrication Method 11-15-2011 Hyoung Cho University of Central Florida Shekhar Halakatti University of Central Florida Anjum
More informationPreface Preface to First Edition
Contents Foreword Preface Preface to First Edition xiii xv xix CHAPTER 1 MEMS: A Technology from Lilliput 1 The Promise of Technology 1 What Are MEMS or MST? 2 What Is Micromachining? 3 Applications and
More informationDrinking Water Disinfection A History and Improved Monitoring Techniques. Randy Turner Technical Director, Chemist Swan Analytical USA
Drinking Water Disinfection A History and Improved Monitoring Techniques By Randy Turner Technical Director, Chemist Swan Analytical USA History In many countries we take for granted the availability and
More informationBiosensor System-on-a-chip including CMOS-based Signal Processors and 64 Carbon Nanotube-based Sensors for the Detection of a Neurotransmitter
Biosensor System-on-a-chip including CMOS-based Signal Processors and 64 Carbon Nanotube-based Sensors for the Detection of a Neurotransmitter Supplementary Information Byung Yang Lee, Sung Min Seo, Dong
More informationElectrical and Fluidic Microbumps and Interconnects for 3D-IC and Silicon Interposer
Electrical and Fluidic Microbumps and Interconnects for 3D-IC and Silicon Interposer Li Zheng, Student Member, IEEE, and Muhannad S. Bakir, Senior Member, IEEE Georgia Institute of Technology Atlanta,
More informationPrototype Microfluidic System for Fluorescence-Based Chemical Sensing
Doi: 10.12982/cmujns.2014.0064 625 Prototype Microfluidic System for Fluorescence-Based Chemical Sensing Pattareeya Kittidachachan 1, Suparat Rujihan 1 and Badin Damrongsak 2* 1 Department of Physics,
More informationMicro Injection Molding of Micro Fluidic Platform
Micro Injection Molding of Micro Fluidic Platform S. C. Chen, J. A. Chang, Y. J. Chang and S. W. Chau Department of Mechanical Engineering, Chung Yuan University, Taiwan, ROC Abstract In this study, micro
More informationEnhancement of electrochemical biosensor performances using redox cycling at 3D sub-micrometer scale electrode architectures.
Enhancement of electrochemical biosensor performances using redox cycling at 3D sub-micrometer scale electrode architectures Heungjoo Shin School of Mechanical and Nuclear Engineering Contents 1 Introduction
More informationElectronic supplementary information
Electronic Supplementary Material (ESI) for ChemComm. This journal is The Royal Society of Chemistry 2014 Electronic supplementary information An electrochemical sensor for selective TNT sensing based
More informationCHLORAMINATION AND CHLORAMINE ANALYSIS
CHLORAMINATION AND CHLORAMINE ANALYSIS WHY THIS PRESENTATION? Chloramination use increasing ~1,300 utilities Serving 68 million concerns remains TAKE-HOME MESSAGES Nitrification Chemistry and biology Number
More informationWearable Chemical Sensors: Opportunities and Challenges
Wearable Chemical Sensors: Opportunities and Challenges Somayeh Imani, Amay Bandodkar, Jayoung Kim, Joseph Wang, and Patrick P. Mercier UC San Diego Wearables: an exciting high-growth market 3 billion
More informationLaboratory for Sensors, Department of Microsystems Engineering - IMTEK, University of Freiburg, Freiburg, Germany
Electronic Supplementary Material (ESI) for Lab on a Chip. This journal is The Royal Society of Chemistry 2015 Electronic Supplementary Information Self-assembled magnetic bead chains for sensitivity enhancement
More informationEPA APPROVED METHOD FOR TURBIDITY ANALYSIS 360 x 90, Turbidity Method 10258
EPA APPROVED METHOD FOR TURBIDITY ANALYSIS 360 x 90, Turbidity Method 10258 TURBIDITY MEASUREMENT HISTORY 3 TURBIDITY MEASUREMENT OVER THE LAST 50 YEARS TURBIDITY MEASUREMENT Turbidity is the interaction
More informationLab on a chip fotònics i electroquímics
Lab on a chip fotònics i electroquímics Grup de Transductors Químics gtq.imb-cnm.csic.es Xavier Muñoz xavier.munoz@imb-cnm.csic.es 21 Maig, 2015 Institut de Microelectrònica de Barcelona (IMB-CNM, CSIC)
More informationSupplementary Figure S1. CV curves of gold wire and seamless solid/nanoporous Au electrodes in 0.5 M H 2 SO 4 solution at a scan rate of 100 mv S -1.
Supplementary Figure S1. CV curves of gold wire and seamless solid/nanoporous Au electrodes in 0.5 M H 2 SO 4 solution at a scan rate of 100 mv S -1. The seamless solid/nanoporous Au electrode was obtained
More informationSupporting Information. graphene oxide films for detection of low. concentration biomarkers in plasma
Supporting Information Wafer-scale high-resolution patterning of reduced graphene oxide films for detection of low concentration biomarkers in plasma Jinsik Kim a, Myung-Sic Chae a, Sung Min Lee b, Dahye
More information(12) United States Patent
(12) United States Patent USO08057724B2 (10) Patent No.: US 8,057,724 B2 Cho et al. (45) Date of Patent: Nov. 15, 2011 (54) PORTABLE WATER QUALITY SENSOR (56) References Cited FABRICATION METHOD U.S. PATENT
More informationSupporting Information: Model Based Design of a Microfluidic. Mixer Driven by Induced Charge Electroosmosis
Supporting Information: Model Based Design of a Microfluidic Mixer Driven by Induced Charge Electroosmosis Cindy K. Harnett, Yehya M. Senousy, Katherine A. Dunphy-Guzman #, Jeremy Templeton * and Michael
More informationFABRICATION OF SWTICHES ON POLYMER-BASED BY HOT EMBOSSING. Chao-Heng Chien, Hui-Min Yu,
Stresa, Italy, 26-28 April 2006 FABRICATION OF SWTICHES ON POLYMER-BASED BY HOT EMBOSSING, Mechanical Engineering Department, Tatung University 40 Chung Shan N. Rd. Sec. 3 Taipei, Taiwan ABSTRACT In MEMS
More informationCENTRIFUGAL MICROFLUIDICS
CENTRIFUGAL MICROFLUIDICS Yoon-Kyoung Cho School of Nano-Bioscience and Chemical Engineering, Ulsan National Institute of Science and Technology (UNIST), Republic of Korea ABSTRACT Lab-on-a-disc, in which
More informationDesign and implementation of a microchemistry analyzer
Pure & App/. Chem., Vol. 68, No. 10, pp. 1837-1841, 1996. Printed in Great Britain. Q 1996 IUPAC Design and implementation of a microchemistry analyzer Nina Peled, PhD i-stat Corporation 303 College Road
More informationABB MEASUREMENT & ANALYTICS DATA SHEET. AW400 Residual chlorine monitor
ABB MEASUREMENT & ANALYTICS DATA SHEET AW400 Residual chlorine monitor 2 AW 400 RESI DUAL CH LORI N E MO NITOR DS/AW400-E N RE V. F Measurement made easy For the measurement of free and total residual
More informationSupporting Information. Electro-triggering and electrochemical monitoring of dopamine
Electronic Supplementary Material (ESI) for Nanoscale. This journal is The Royal Society of Chemistry 2015 Supporting Information Electro-triggering and electrochemical monitoring of dopamine exocytosis
More informationCl500/Cl1000 BROCHURE
Cl500/Cl1000 BROCHURE JUNHO 2013 CAPITAL CONTROLS SERIES CL500, CL1000 AND CL1000B Severn Trent Services Capital Controls analyzers offer continuous and accurate residual analysis. The Capital Controls
More informationWelcome MNT Conference 1 Albuquerque, NM - May 2010
Welcome MNT Conference 1 Albuquerque, NM - May 2010 Introduction to Design Outline What is MEMs Design General Considerations Application Packaging Process Flow What s available Sandia SUMMiT Overview
More informationSupplementary Information
Electrochemical sensing in paper-based microfluidic devices Zhihong Nie a, Christian Nijhuis a, Jinlong Gong a, Xin Chen a, Alexander Kumachev b, Andres W. Martinez a, Max Narovlyansky a, and George M.
More informationSurface Plasmon Resonance Analyzer
Surface Plasmon Resonance Analyzer 5 6 SPR System Based on Microfluidics Wide Dynamic Range Kinetic Analysis by Detection of Association /Dissociation of Bio-Molecules Measuring of Mass Change below
More informationSensor. Device that converts a non-electrical physical or chemical quantity into an electrical signal. Sensor Processor Display Output signal
Microsensors Outline Sensor & microsensor Force and pressure microsensors Position and speed microsensors Acceleration microsensors Chemical microsensors Biosensors Temperature sensors Sensor Device that
More informationFlexible Substrates for Smart Sensor Applications
Flexible Substrates for Smart Sensor Applications A novel approach that delivers miniaturized, hermetic, biostable and highly reliable smart sensor modules. AUTHORS Dr. Eckardt Bihler, Dr. Marc Hauer,
More informationMagnesium Oxide Films as Temperature Sensor
Asian Journal of Chemistry Vol. 21, No. 1 (29), S76-8 Magnesium Oxide Films as Temperature Sensor ISHU SHARMA, AMBIKA and P.B.BARMAN* Department of Physics, Jaypee University of Information Technology
More informationEECS130 Integrated Circuit Devices
EECS130 Integrated Circuit Devices Professor Ali Javey 9/13/2007 Fabrication Technology Lecture 1 Silicon Device Fabrication Technology Over 10 15 transistors (or 100,000 for every person in the world)
More informationTutorial on Micro Electro Mechanical Systems (MEMS)
Tutorial on Micro Electro Mechanical Systems (MEMS) Bruce Kim Department of Electrical, 1 ! What is MEMS! Why MEMS! Applications! MEMS Fabrication! MEMS Packaging! Conclusion MEMS 2 WHAT IS MEMS! MEMS
More informationCHEMNIUM NACLO SODIUM HYPOCHLORITE GENERATOR
CHEMNIUM NACLO SODIUM HYPOCHLORITE GENERATOR www.chemnium.com R ALL FOR BETTER WATER SODIUM HYPOCHLORITE NACLO APPLICATION Tap Water Disinfection Food & Beverage Processing Disinfection Waste Water Treatment
More informationWireless implantable chip with integrated Nitinol-based pump for radio-controlled local drug delivery
Electronic Supplementary Material (ESI) for Lab on a Chip. This journal is The Royal Society of Chemistry 2014 Electronic Supplementary Information Wireless implantable chip with integrated Nitinol-based
More informationHigh Density Plasma Etching of IrRu Thin Films as a New Electrode for FeRAM
Integrated Ferroelectrics, 84: 169 177, 2006 Copyright Taylor & Francis Group, LLC ISSN 1058-4587 print / 1607-8489 online DOI: 10.1080/10584580601085750 High Density Plasma Etching of IrRu Thin Films
More informationApplication Story Maintenance Free Chlorine Analyser
Application Story Maintenance Free Chlorine Analyser Who is & who is?? SWAN is a leading manufacturer of liquid analytical products and are based in Switzerland. Highly accurate and low maintenance solutions
More informationEQUIPMENT AND SERVICE COMPANY, INCORPORATED FX- 300 ISE Ammonia, Nitrate, Nitrite Measurement
FX-300 Online Ammonia, Nitrate, Nitrite Monitor and Controller The Foxcroft FX-300 with ion selective electrode technology can be used as an online monitor and control method for Ammonium (NH4+), Ammonia
More informationFABRICATION PROCESSES FOR MAGNETIC MICROACTUATORS WITH POLYSILICON FLEXURES. Jack W. Judy and Richard S. Muller
FABRICATION PROCESSES FOR MAGNETIC MICROACTUATORS WITH POLYSILICON FLEXURES Jack W. Judy and Richard S. Muller Berkeley Sensor & Actuator Center (BSAC) Department of EECS, University of California, Berkeley,
More informationNote Flexible Four-in-one Micro Sensor for Reliability and 100-hour Durability Testing
Int. J. Electrochem. Sci., 10 (2015) 3185-3191 International Journal of ELECTROCHEMICAL SCIENCE www.electrochemsci.org Note Flexible Four-in-one Micro Sensor for Reliability and 100-hour Durability Testing
More informationChapter 3 Silicon Device Fabrication Technology
Chapter 3 Silicon Device Fabrication Technology Over 10 15 transistors (or 100,000 for every person in the world) are manufactured every year. VLSI (Very Large Scale Integration) ULSI (Ultra Large Scale
More informationSimultaneous glucose sensing and bio-hydrogen evolution from direct photoelectrocatalytic glucose oxidation on robust Cu 2 O-TiO 2 electrodes
Electronic Supplementary Material (ESI) for Physical Chemistry Chemical Physics. This journal is the Owner Societies 2014 Supporting information Simultaneous glucose sensing and bio-hydrogen evolution
More informationApplication of a New Cl-Plasma-Treated Ag/AgCl Reference Electrode to Micromachined Glucose Sensor
IEEE SENSORS JOURNAL, VOL. 3, NO. 3, JUNE 2003 267 Application of a New Cl-Plasma-Treated Ag/AgCl Reference Electrode to Micromachined Glucose Sensor Se-Ik Park, Sang Beom Jun, Sejin Park, Hee Chan Kim,
More informationNote Fabrication of Flexible Micro CO Sensor for Proton Exchange Membrane Fuel Cell Applications
Int. J. Electrochem. Sci., 11 (2016) 2269-2275 International Journal of ELECTROCHEMICAL SCIENCE www.electrochemsci.org Note Fabrication of Flexible Micro CO Sensor for Proton Exchange Membrane Fuel Cell
More informationSupporting Information
Supporting Information Fast-Response, Sensitivitive and Low-Powered Chemosensors by Fusing Nanostructured Porous Thin Film and IDEs-Microheater Chip Zhengfei Dai,, Lei Xu,#,, Guotao Duan *,, Tie Li *,,
More information9-11 April 2008 Micro-electroforming Metallic Bipolar Electrodes for Mini-DMFC Stacks
9-11 April 8 Micro-electroforming Metallic Bipolar Electrodes for Mini-DMFC Stacks R. F. Shyu 1, H. Yang, J.-H. Lee 1 Department of Mechanical Manufacturing Engineering, National Formosa University, Yunlin,
More information:00 am 6:00 pm Mon-Thu (MT) 6:00 am 5:00 pm Fri (MT)
800.372.0122 303.431.8454 6:00 am 6:00 pm Mon-Thu (MT) 6:00 am 5:00 pm Fri (MT) info@eraqc.com www.eraqc.com www.facebook.com/eraqc www.youtube.com/eraqc 2013 Waters Corporation 1 Top Tips for Conducting
More informationA Distinct Platinum Growth Mode on Shaped Gold Nanocrystals
A Distinct Platinum Growth Mode on Shaped Gold Nanocrystals Sungeun Yang, a Na-Young Park, b Joung Woo Han, a Cheonghee Kim, a Seung-Cheol Lee b and Hyunjoo Lee a * a Department of Chemical and Biomolecular
More informationTotal Residual Chlorine Testing Methods
Total Residual Chlorine Testing Methods For: Northern Michigan Wastewater Operators Seminar Date: 25 September 2018 By: Tim LeTourneau, PE, PMP Regional Sales Manager Michigan Outline Regulatory Criteria
More informationIntegration and Scalable Manufacturing of Printed Microfluidic Devices
Integration and Scalable Manufacturing of Printed Microfluidic Devices Jeffrey Morse, Aditi Naik, Yiliang Zhou, David Gonzalez, Brenda Warren, Uzodinma Okoroanyanwu and James J. Watkins University of Massachusetts,
More informationII. A. Basic Concept of Package.
Wafer Level Package for Image Sensor Module Won Kyu Jeung, Chang Hyun Lim, Jingli Yuan, Seung Wook Park Samsung Electro-Mechanics Co., LTD 314, Maetan3-Dong, Yeongtong-Gu, Suwon, Gyunggi-Do, Korea 440-743
More informationPolymer-based Microfabrication
Polymer-based Microfabrication PDMS SU-8 PMMA Hydrogel 1 Soft Lithography Developed by Whitesides, et. al A set of techniques for microfabrication based on the use of lithography, soft substrate materials
More informationWire-shaped Supercapacitor with Organic. Electrolyte Fabricated via Layer-by-Layer Assembly
Supporting information Wire-shaped Supercapacitor with Organic Electrolyte Fabricated via Layer-by-Layer Assembly Kayeon Keum, a Geumbee Lee, b Hanchan Lee, a Junyeong Yun, a Heun Park, a Soo Yeong Hong,
More informationHigh Sensitivity of Phase-based Surface Plasmon Resonance in Nano-cylinder Array
PIERS ONLINE, VOL. 4, NO. 7, 2008 746 High Sensitivity of Phase-based Surface Plasmon Resonance in Nano-cylinder Array Bing-Hung Chen, Yih-Chau Wang, and Jia-Hung Lin Institute of Electronic Engineering,
More informationFABRICATION ENGINEERING MICRO- NANOSCALE ATTHE AND. Fourth Edition STEPHEN A. CAMPBELL. of Minnesota. University OXFORD UNIVERSITY PRESS
AND FABRICATION ENGINEERING ATTHE MICRO- NANOSCALE Fourth Edition STEPHEN A. CAMPBELL University of Minnesota New York Oxford OXFORD UNIVERSITY PRESS CONTENTS Preface xiii prrt i OVERVIEW AND MATERIALS
More informationHybrid Amperometric and Conductometric Chemical Sensor Based on Conducting Polymer Nanojunctions
Anal. Chem. 2007, 79, 5217-5224 Hybrid Amperometric and Conductometric Chemical Sensor Based on Conducting Polymer Nanojunctions Erica S. Forzani, Xiulan Li, and Nongjian Tao* Department of Electrical
More informationResearch of Structure and Technology for the Micro- Machined Airflow Inclinometer
Available online at www.sciencedirect.com Physics Procedia 22 (2011) 397 402 2011 International Conference on Physics Science and Technology (ICPST 2011) Research of Structure and Technology for the Micro-
More informationChamber Temperature Measurement of Micro PCR Chip Using Thermocouple
Chamber Temperature Measurement of Micro PCR Chip Using Thermocouple Jong-Dae Kim 1,2, Chan-Young Park 1,2,*, Sang-Yoon Kim 2,3, Ok-Dong Gwak 3, Deuk- Joo Lee 2,3, Yu-Seop Kim 1,2 and Hye-Jung Song 1,2
More informationVLSI Design and Simulation
VLSI Design and Simulation CMOS Processing Technology Topics CMOS Processing Technology Semiconductor Processing How do we make a transistor? Fabrication Process Wafer Processing Silicon single crystal
More informationiniaturization of medical devices thanks to flexible substrates ISO 9001 certified
iniaturization of medical devices thanks to flexible substrates 04-12-2012 Hightec MC Presentation 2 Medical industry is clearly and urgently in need of the development of advanced interconnection solutions
More informationHigh-efficiency GaN-based light-emitting diodes fabricated with identical Ag contact formed on both n- and p-layers
High-efficiency GaN-based light-emitting diodes fabricated with identical Ag contact formed on both n- and p-layers Munsik Oh and Hyunsoo Kim * School of Semiconductor and Chemical Engineering and Semiconductor
More informationUltrasensitive and Highly Stable Resistive Pressure Sensors with. Biomaterial-Incorporated Interfacial Layers for Wearable
Supporting Information Ultrasensitive and Highly Stable Resistive Pressure Sensors with Biomaterial-Incorporated Interfacial Layers for Wearable Health-Monitoring and Human-Machine Interfaces Hochan Chang,,
More informationEnzyme based biosensors
Enzyme based biosensors Brief history; how it all started? 1916 First report on immobilization of proteins : adsorption of invertase on activated charcoal 1922 First glass ph electrode 1956 Clark published
More informationGold Passivated Mechanically Flexible Interconnects (MFIs) with High Elastic Deformation
Gold Passivated Mechanically Flexible Interconnects (MFIs) with High Elastic Deformation Chaoqi Zhang, Hyung Suk Yang, and Muhannad S. Bakir School of Electrical and Computer Engineering Georgia Institute
More informationLOW TEMPERATURE GROWTH OF SMOOTH INDIUM TIN OXIDE FILMS BY ULTRAVIOLET ASSISTED PULSED LASER DEPOSITION
Journal of Optoelectronics and Advanced Materials Vol. 4, No. 1, March 2002, p. 21-25 LOW TEMPERATURE GROWTH OF SMOOTH INDIUM TIN OXIDE FILMS BY ULTRAVIOLET ASSISTED PULSED LASER DEPOSITION V. Craciun,
More informationSupporting Information
Supporting Information Electrochemical reduction of CO 2 at Copper Nanofoams Sujat Sen a, Dan Liu a and G. Tayhas R. Palmore a, b, * a Department of Chemistry and b School of Engineering, Brown University,
More informationSupporting Information for Facile fabrication of nanofluidic diode membranes using anodic aluminum oxide
Supporting Information for Facile fabrication of nanofluidic diode membranes using anodic aluminum oxide Songmei Wu, Fabien Wildhaber, Oscar Vazquez-Mena, Arnaud Bertsch, Juergen Brugger, & Philippe Renaud
More informationKeysight Technologies Combining Atomic Force Microscopy with Scanning Electrochemical Microscopy. Application Note
Keysight Technologies Combining Atomic Force Microscopy with Scanning Electrochemical Microscopy Application Note Introduction Scanning probe microscopy (SPM) techniques have found a broad range of applications
More informationA Functional Micro-Solid Oxide Fuel Cell with. Nanometer Freestanding Electrolyte
Electronic Supplementary Material (ESI) for Journal of Materials Chemistry A. This journal is The Royal Society of Chemistry 2017 SUPPLEMENTARY INFORMATION A Functional Micro-Solid Oxide Fuel Cell with
More informationBio MEMS Class -1 st week
Bio MEMS Class -1 st week Jang, Jaesung Ref: Bashir ADDR Review paper, 2004. 1 Introduction Bio-MEMS: devices or systems, constructed using techniques inspired from micro/nano-scale fabrication, that are
More informationAvailable online at ScienceDirect. Energy Procedia 50 (2014 )
Available online at www.sciencedirect.com ScienceDirect Energy Procedia 50 (2014 ) 711 718 The International Conference on Technologies and Materials for Renewable Energy, Environment and Sustainability,
More informationFenton Oxidation Process Control Using Oxidation-reduction Potential Measurement for Pigment Wastewater Treatment
Korean J. Chem. Eng., 21(4), 801-805 (2004) Fenton Oxidation Process Control Using Oxidation-reduction Potential Measurement for Pigment Wastewater Treatment Young-O Kim, Hai-Uk Nam, Yu-Ri Park*, Jong-Hyun
More informationUV15: For Fabrication of Polymer Optical Waveguides
CASE STUDY UV15: For Fabrication of Polymer Optical Waveguides Master Bond Inc. 154 Hobart Street, Hackensack, NJ 07601 USA Phone +1.201.343.8983 Fax +1.201.343.2132 main@masterbond.com CASE STUDY UV15:
More informationAll fabrication was performed on Si wafers with 285 nm of thermally grown oxide to
Supporting Information: Substrate preparation and SLG growth: All fabrication was performed on Si wafers with 285 nm of thermally grown oxide to aid in visual inspection of the graphene samples. Prior
More informationResearch Projects in Microelectromechanical Systems (MEMS) and Microfluidics
Research Projects in Microelectromechanical Systems (MEMS) and Microfluidics Luc G. Fréchette, Ph.D. Associate Professor Canada Research Chair in Microfluidics and Power MEMS Department of Mechanical Engineering
More informationGE Sensing & Inspection Technologies MEMS. Global Solutions for Microsystems
GE Sensing & Inspection Technologies MEMS Global Solutions for Microsystems g Global research, development and manufacturing excellence Groby, United Kingdom MEMS Design and Manufacturing Center Advanced
More informationGas and surface applications of atmospheric pressure plasmas
Gas and surface applications of atmospheric pressure plasmas Eugen Stamate Technical University of Denmark Roskilde 4000, Denmark OUTLINE Introduction of DTU Energy Conversion and Storage Activities in
More informationProperties of Highly Transparent Conductive Ga-Doped ZnO Films prepared on Polymer Substrates by Reactive Plasma Deposition with DC Arc Discharge
Journal of Photopolymer Science and Technology Volume 22, Number 4 (2009) 497-502 2009 CPST Properties of Highly Transparent Conductive Ga-Doped ZnO Films prepared on Polymer Substrates by Reactive Plasma
More informationSupplementary Information
Electronic Supplementary Material (ESI) for Sustainable Energy & Fuels. This journal is The Royal Society of Chemistry 2018 Supplementary Information for Chemical Science, DOI: 10.1039/ ((please add manuscript
More informationTwistable and Stretchable Sandwich Structured. Fiber for Wearable Sensors and Supercapacitors
Supporting Information Twistable and Stretchable Sandwich Structured Fiber for Wearable Sensors and Supercapacitors Changsoon Choi 1, Jae Myeong Lee 1, Shi Hyeong Kim 1, Jiangtao Di 2, Ray H. Baughman
More informationSIMULTANEOUS SPECTROPHOTOMETRIC DETERMINATION OF IRON (II) AND TOTAL IRON USING FLOW INJECTION ANALYSIS
SIMULTANEOUS SPECTROPHOTOMETRIC DETERMINATION OF IRON (II) AND TOTAL IRON USING FLOW INJECTION ANALYSIS ABDULRAHMAN SHABAN ATTIYAT Chemistry Department, Yarmouk University, Irbid-Jordan, email: attiyat@excite.com
More informationMonitoring THMs and TOC in High-Purity Process Water Systems
World Leader in Total Organic Carbon Analysis Model A-1000/A-1000XP/Access 643 Total Organic Carbon Analysis Systems Monitoring THMs and TOC in High-Purity Process Water Systems Introduction Trihalomethanes
More informationRecent Advances in Microfluidic Device Applications for Environmental Monitoring and Toxicity Assessments Tae Hyun Yoon
Recent Advances in Microfluidic Device Applications for Environmental Monitoring and Toxicity Assessments Tae Hyun Yoon Laboratory of Nanoscale Characterization & Environmental Chemistry Department of
More informationChloramine and Nitrification... Is There a Simple Solution?
Chloramine and Nitrification... Is There a Simple Solution? Scott Hibbs, P.E. & Dave Baker Enprotec/Hibbs & Todd 402 Cedar; Abilene TX 79601 325.698.5560 eht.com Workshop Objective Share your experiences
More informationProcese de depunere in sistemul Plasma Enhanced Chemical Vapor Deposition (PECVD)
Procese de depunere in sistemul Plasma Enhanced Chemical Vapor Deposition (PECVD) Ciprian Iliescu Conţinutul acestui material nu reprezintă in mod obligatoriu poziţia oficială a Uniunii Europene sau a
More informationChapter 4 Fabrication Process of Silicon Carrier and. Gold-Gold Thermocompression Bonding
Chapter 4 Fabrication Process of Silicon Carrier and Gold-Gold Thermocompression Bonding 4.1 Introduction As mentioned in chapter 2, the MEMs carrier is designed to integrate the micro-machined inductor
More informationEE 5344 Introduction to MEMS. CHAPTER 3 Conventional Si Processing
3. Conventional licon Processing Micromachining, Microfabrication. EE 5344 Introduction to MEMS CHAPTER 3 Conventional Processing Why silicon? Abundant, cheap, easy to process. licon planar Integrated
More informationAM-FCL Operation Manual AquaMetrix AM-FCL Free Chlorine Sensor
AquaMetrix AM-FCL Free Chlorine Sensor Installation and Operation Guide, Rev. 1.1, July 2016 1. Introduction... 3 2. Specifications... 3 3. Principle of Operation... 3 3.1. Free Chlorine... 3 3.2. Probe
More informationppm Dissolved Oxygen Measurement
ppm Dissolved Oxygen Measurement INTRODUCTION Dissolved oxygen (D.O.) levels are used as a general indicator of water quality. Oxygen is essential to life and vital for countless aquatic forms. D.O. level
More informationEvolution of MEMS Technology
Evolution of MEMS Technology 1 Raksha Sahadev Hukkeri, 2 Shreya Madapurmath, 3 Shreelekha Navale 1,2,3 UG Student, Department of ECE, SDMCET Dharwad Abstract Micro-Electro-Mechanical Systems (MEMS) is
More informationVISUALIZATION STUDY OF CATHODE FLOODING WITH DIFFERENT OPERATING CONDITIONS IN A PEM UNIT FUEL CELL
Proceedings of FUELCELL2005 Third International Conference on Fuel Cell Science, Engineering and Technology May 23-25, 2005, Ypsilanti, Michigan FUELCELL2005-74113 VISUALIZATION STUDY OF CATHODE FLOODING
More information