Solar Cell Factory. Ready for the future

Transcription

1 Solar Cell Factory Ready for the future

2 Factory

3 Factory manufactures 6 multicrystalline silicon solar cells Project Engineering project designed by Zander Building m 2 land m 2 built-up 2-story building Clean room m 2 clean room 30 MW fully-auto production line Easily expandable to 120 MW Other features Utilities for 120 MW cell production Waste water and exhaust treatment facilities Quality control system R&D unit

4 Utilities

5 Air conditioning system System regulates air conditions inside the factory Make-up air system Recirculation air system Specifications ISO clean room 2 x m 3 /h make-up air units 4 x m 3 /h recirculation air units Particle, temperature and moisture fine tuning control Other characteristics Specific air conditioning system for office building Specific air conditioning system for electrical rooms Specific air conditioning system for technical rooms

6 Ultra-pure and waste water systems System management of water waste and generation of ultrapure water for wafer cleaning Ultra-pure water plant Neutralization and fluoride removal plant Specifications 9 m 3 /h ultra-pure water capacity Ultra-pure quality: resistivity > 18 MOhm*cm, TOC<100ppb, Bacteria<100 col/l,sio 2 <10ppb 14 m 3 /h waste water plant UE regulation and environmental permits Other characteristics Osmosis water distribution system Soft water distribution system Filter-press for sludge drying

7 Compressed dry air and vacuum system System generate high quality oil-free compressed dry air and vacuum supply Compressed dry air system Vacuum system Specifications L/s at 8,5 bar oil-free compressed dry air 900 m 3 /h at -0,7 bar vacuum system Other characteristics Stainless steel compressed air distribution system PVC vacuum distribution system Ready for 120 MW hook-up

8 Chemical distribution system System pump chemicals to wet benches Ultra-pure acid distribution system Ultra-pure caustic distribution system Solvent distribution system Specifications Fluorhydric, nitric, acetic and clorhydric acid distribution systems Sodic hidroxide, amonium hidroxide and hydroxide peroxide distribution systems Dopant solution distribution system Other characteristics Distribution with double pipe ATEX regulations Pneumatic pumping High quality safety systems Exhaust cleaning systems Capacity for 120 MW solar cell production

9 System Emergency and power supply systems High voltage electrical power installation Low voltage electrical power installation Emergency power supply installation Specifications 5 MVA electrical distibution system 400 kva emergency power diesel system 250 kwp solar farm installation supply power to machines and, in case of power failure, generator start Other characteristics Halogen-free copper cabling USP system for offices and critical installations Oil-free electrical transformers Air conditioning electrical rooms

10 Exhaust and gas cleaning systems System extract and treat exhaust gases from the production line Acid and caustic exhaust cleaning system NOx exhaust cleaning system Dust exhaust cleaning system Solvent exhaust cleaning system Specifications m 3 /h acid exhaust cleaning system with scrubber m 3 /h NOx exhaust cleaning system with scrubber m 3 /h solvent exhaust cleaning system with thermal oxidizer m 3 /h dust exhaust cleaning system with dust filters m 3 /h general exhaust system Other characteristics Acid/caustic/ NOx exhaust PP ductwork Solvent exhaust stainless steel ductwork ATEX regulations for dust exhaust Capacity for 120 MW solar cell production

11 Chilled and hot water system System Chilled and hot water to the right temperature kw chilled water system kw hot water system Specifications kw natural gas boiler 2 x kw air-cooled chillers Heat-recovery installation Other characteristics Redundant pumping systems 10ºC loop for air conditioning system 14ºC loop for utilities refrigeration 18ºC loop for process cooling water 80ºC for heating systems

12 Fire protection and intrusion detection system System Chilled and hot water to the right temperature Electric, diesel and jockey pumps Fire hydrants and sensors Sprinklers for ATEX areas CCTV system Access control system Specifications 160 m 3 water tank and 125 m 3 /h pumping system Notifier analogic central ID3000 ADT CCTV and access control system Other characteristics Remote access control and CCTV System According to UE regulations

13 Clean room

14 Solar cell production line System 30 MW solar cell production line Easy to expand to 60 MW Specifications Wafer sorting 60 MW Texturization, PSG removal and AR coating 60 MW Diffusion, metallization, laser and cell tester 30 MW Other characteristics Fully automated line Low man power requirements ECN recipe R&D improvements

15 Wafer sorting and automation System 60 MW wafer tester Flex Picker robots Specifications Manz wafer tester and automation Automatic measurement of wafer resistivity, wafer lifetime, saw marks, contamination, edge defects, microcracks, wafer dimensions and breakage Other characteristics 100% wafer quality control Delicate wafer manipulation

16 Texturization, diffusion and PSG removal System Inline 60 MW acid texturization Inline 30 MW phosphorous diffusion Inline 60 MW PSG removal Inline 60 MW automation units Specifications RENA wet benches Despatch diffusion system Manz automation units Manz wafer tester Other characteristics ECN recipe Liquid dopant solution 5 hour production buffer system

17 AR coating deposition and metallization System Inline 60 MW nitride deposition Inline 30 MW metallization Specifications Roth&Rau PECVD machine with scrubber Baccini metallization line Manz automation units Other characteristics 5 hour production buffer system Automatic blue vision for nitride inspection ICOS metallization automatic inspection unit

18 Production process Elimination of cutting and texturization marks Elimination of cutting marks and dirt on the wafer and texturization made in one only stage of the process in a in-line machine by Rena. Addition of nitric acid is adjusted in automatic mode so the quantity of silicon eliminated in each wafer is between 8 and 12 microns. Texturization with hydrofluoric acid at 50%, acetic acid at 80%, nitric acid at 65% and water. Rinsing of wafers in deionized water. Bath with sodium hydroxide. Rinsing with deionized water. Drying with compressed air.

19 Production Process Phosphorous deposition and diffusion Deposition of phosphoric acid in spray in a doping in-line machine by Despatch, with diffusion in metallic belt and infrared lamps. Sheet resistance control by sheerescan

20 Production Process Removal of PSG layer The residual layer of phosphorous glass that comes from the diffusion stage is removed in the chemical stages by means of immersing wafers in hydrofluoric acid at 10%. Then in order to improve the quality of the cleaning and clear the rest of phosphorous glass the wafers are immersed in a bath of ECN with a temperature controlled automatically, after that rests are cleared in a bath of hydrofluoric acid at 1%. Control of sheet resistance by sheerescan

21 Production Process Deposition of antireflection layer Deposition of antireflection layer base SiNx:H on upper surface of the wafer in order to minimise the reflection of light on the solar cell and guarantee a correct passivation of the surface. The deposition of the antireflection layer is made in an inline SiNA machine by Roth&Rau with remote plasma source adding silane gas, ammonia and nitrogen in the process. Thickness control and refraction index of antireflection layer with elipsometer.

22 Production Process Printing and Firing Electric contacts of the solar cells are made with printing pastes in manual mode using printing machines by Baccini and DEC. The curing stage of the metallic contacts is made in an inline oven with infrared lamps by Despatch. Three printing stages with intermediate drying ovens: Printing of back silver bus bar Printing of aluminium back side. Printing of fingers and front bus bar, silver paste. Control of measure of fingers and bus bar by precision scale and digital microscope.

23 Production Process Insulation of edges and classification Insulation of edges making a perimetral groove with laser machine by Rofin. Final control, classification and packing of cells. Control is made with artificial vision by Baccini : Backside vision. Front vision. Power test and checking of more values with Halm. Automatic classification by Baccini. Inspection of depth of groove with a 3D microscope and inspection of micro-cracks in cells in Laboratory.

24 Free space for expansion Actual layout and free space

25 Free space for expansion Capabilities Space for aditional 100 MW Hook-up for expansion Exhaust ready for hook-up Compressed dry air ready for hook-up Cooling water ready for hook-up Ventilation/HVAC ready for 150 MW Chemical supply ready for hook-up Specialty gases ready for hook-up Vaccuum ready for hook-up

26 Free space for expansion Actual layout and free space

27 Free space for expansion Capabilities (I) Own production capabilities Expansion of the manufacturing line to 60 MW

28 Free space for expansion Capabilities (II) Own production and quality control Expansion of the manufacturing line to 60 MW 480 MW in solar cell testers with I/V test, EL, front/back side aesthetical inspection, colour inspection and 20% manual inspection

29 Free space for expansion Capabilities (II) Own production and quality control Expansion of the manufacturing line to 60 MW 480 MW in solar cell testers with I/V test, EL, front/back side aesthetical inspection, colour inspection and 20% manual inspection

30 Free space for expansion Capabilities (III) Own production, quality control and PV modules Expansion of the manufacturing line to 60 MW 240 MW in solar cell testers with I/V test, EL, front/back side aesthetical inspection, colour inspection and 20% manual inspection 15 MW PV module manufacturing line

31 Free space for expansion Capabilities (III) Own production and quality control Expansion of the manufacturing line to 60 MW 240 MW in solar cell testers with I/V test, EL, front/back side aesthetical inspection, colour inspection and 20% manual inspection 15 MW PV module manufacturing line

32 Laboratory: R&D and quality control System Corescan for shunt identification Sheerscan for sheet resistance Ellipsometer for AR coating Titration units for wet benches Reflectometer Microscope Precision scales Specifications Quality control for all process steps R&D department

33 Storage room System 500 m 2 for solar cell storage Air conditioning for cell storage Galvanized steel shelves Elevator for transportation from production room Specifications Capacity for solar cells/wafers Other characteristics Independent incoming&outcoming goods area Independent storage for other raw materials

34 Thank you!