PREFACE. Welcome to all participants of Sensor Device Research Group Seminar 2004
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2 PREFACE Welcome to all participants of Seminar 2004 On behalf of the Organizing Committee I have great pleasure in welcoming all of you to the 2004 Seminar on Towards Nano Sensing Device. This is fifth conference since the first conference in The scope of the conference covers major areas such as nanoscience, nanotechnology, sensing device, and MEMS. Thanks to all authors who have submitted their papers to make this conference successful event. I would like to thank the Faculty of Engineering and Electrical Engineering Department for the co-operation in providing assistance and facilities to support the seminar. To all participants, I hope you will enjoy your stay in Depok UI Campus. Finally, I would like to thank every member of the organizing committee for their tireless effort and contributions to ensure the success of this seminar. Thank you. ARIEF UDHIARTO Conference Chairman Seminar 2004 ii
3 EDITOR COMMITTEE Prof. DR. Ir. Djoko Hartanto, M.Sc DR. Bambang Soegijono DR. Masbah R.T. Siregar, APU DR. Totok Soegandi, M.Sc Electrical Engineering Department, Department of Physic University of Indonesia Lembaga Ilmu Pengetahuan dan Teknologi Indonesia Lembaga Ilmu Pengetahuan dan Teknologi Indonesia iii
4 ORGANIZING COMMITTEE Chairman Arief Udhiarto, S.T, M.T (Electrical Engineering Department ) Vice Chairman Albert M. K. (Electrical Engineering Department ) Committee Members Ir. Riri Fitri Sari, M.M, M.Sc. PhD Ir. Anondho Widjanarko, M.Eng Technical Committee Chairman Members (Electrical Engineering Department ) (Chemical Engineering Department ) R.M. Emmanuel S.R. Andhina Putri Prihatina Dwi R. SECRETARIAT Electrical Engineering Department Faculty of Engineering Depok 16424, INDONESIA Tel: Fax: iv
5 CONTENTS 1. Delay Time Analysis of SiGe HBT with 30-nm Base Width 1 Engelin Shintadewi Julian 2. Dual Frequency Operation of Equilateral Triangular Microstrip Antenna Using Microstrip Feed Line 4 Indra Surjati and Eko Tjipto Rahardjo 3. Study of Nano Composite Charge Coupled Device 6 Albert M. Lukman 4. A Study of Optical Bloch Oscillation in Porous Silicon Superlattice Structures 9 Prihatina Dwi Rahmatika 5. Charge Transfer Mechanism In Nanotube 12 Kharris Wiseso 6. The Comparation between Highly Structured ETA Cell and Solar Cell with Flat Absorber 16 Agung Kurniawan 7. The Study of Tunable Cantilever-VCSEL 19 R.M.Emmanuel Santosa Rahardjo v
6 8. The Phenomenon of Protein Binding Using Nanotube FET Device 23 Fani Triwiyanto 9. The Study of Carbon Nanotube FET Inverter 25 Muhammad Wardi Hadi and Harry Soedibyo 10. Visualization of Quarks 29 Albert Mardianto Kurniawan 11. Development of Silicon Micromachining for MEMS Application 33 Munawar A Riyadi, M.Amien Sulthoni, and Irman Idris Device & IC Processing Lab, R&D Group on Microelectronics & Materials, Institut Teknologi Bandung 12. Modeling Si/Sige/Si Quantum Well Solar Cell Using Different Well Width and Mole Fraction 40 Raden Arif, Nji Raden Poespawati, Arief Udhiarto 13. Current and Voltage Analysis of Single-Electron Transistor with Sidewall Depletion Gates Using SDRG 4.01 Model 43 Hilman F. Pardede and Djoko Hartanto 14. Preliminary Studies on Nano Scale Absorption of Hydrocarbon on Cell Membrane, Redundancy of Pseudomonas aeruginosa on Isooctane Concentration in Liquid Media 50 Wijanarko, Misri Gozan, Dianursanti, Rizky Andika and Roekmijati W. Soemantojo Chemical Engineering Department, Faculty of Engineering vi
7 15. Micro gas sensor with Tin-Oxide layer 53 Agus Sofwan Electrical Engineering Department-FTI National Institute of Science and Technology vii
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