A World Class Specialty Materials Company

Transcription

1 SEMICON KOREA MEDIA BRIEFING A World Class Specialty Materials Company Richard Hong President, Entegris Korea

2 AGENDA 01 A World Class Specialty Materials Company 02 Entegris in Korea 03 Q&A 04 Meeting Close Celebrating our 50 th year in business! 2

3 YIELD-ENHANCING MATERIALS SOLUTIONS Entegris provides yield-enhancing materials and solutions for the most advanced manufacturing environments through a unique combination of technology breadth and market focus that is unmatched in its industry Advanced Chemicals Filtration and Purification Materials Handling Selected peers and competitors 3

4 GLOBAL INFRASTUCTURE WITH LOCAL R&D AND FIELD SUPPORT SERVICES Entegris is close in proximity to its customers for collaboration and access to services U.S.-based company, FY2016 sales of $1.2 billion, 3,500 full-time employees, publicly traded company (NASDAQ: ENTG) 4

5 A TOP-TIER MATERIALS SUPPLIER Customer Value Proposition Enabling higher yields, improved performance, reduced cost of ownership Technology Portfolio Global Responsiveness Operational Excellence Creating value by leveraging best-in-class technology with a global infrastructure and a relentless focus of operational excellence 5

6 ACHIEVING WORLD-CLASS QUALITY 6 Global Quality Complaint Index Sigma Level Sigma Level H16 Entegris quality levels are approaching six sigma best in class Note: Index reflects numbers of customer complaints 6

7 A ROBUST NEW PRODUCT PIPELINE Strong discipline around managing R&D spending and project performance tracking R&D as % of Sales 272 Active R&D Projects 12% 10% 8% Derivatives Technology/Breakthrough 6% 4% 2% 0% A focus on technology/breakthrough projects that yield new products Platform 7

8 KEY OPPORTUNITIES TO EXPAND SHARE AND SERVED MARKET Entegris has a rich pipeline of development projects Top 5 Representative Opportunities Market Share Next Application SAM Expansion Bulk photochemical filtration Boron mixtures for implant Solid precursors for deposition Specialized coatings for key applications CMP pad conditioners 8

9 INCREASED IMPORTANCE OF SPECIALTY MATERIALS Increasing Numbers of Materials are Being Used to Make Semiconductors Device Performance Drivers Use of new innovative materials are having a greater impact on device performance Relative Impact on Device Performance Node in nm Scaling Design Materials 9

10 BROADEST TECHNOLOGY PORTFOLIO IN OUR SEGMENT Liquid Filtration Advanced Cleans Wafer Handling Specialty Gases Fluid Handling Gas Purification Specialty Materials Deposition Materials 10

11 COMPREHENSIVE, COMPLEMENTARY TECHNOLOGIES TO SOLVE COMPLEX YIELD ISSUES Entegris has a unique combination of technology, deep applications knowledge and critical materials science know-how Implant Lithography Deposition Dry Etch Wet Clean CMP Fab Facility Safe Gas Delivery Systems Advanced Photoresist Packaging CVD/ALD Precursors Formulated Cleans Formulated Cleans Formulated Cleans Advanced FOUPs Electrostatic Chucks Filtration and Dispense Copper Plating Gas Filters and Diffusers Liquid Filtration Liquid Filtration AMC Filtration Gas Purification Gas/Liquid Purification Gas Filtration and Purification Gas Purification Fluid Handling and Sensing Pad Conditioners Bulk Chemical Delivery Specialty Gases Reticle Pods Fluid Handling and Sensing CVD Precursors and Specialty Coatings Containers Fluid Handling and Sensing Wafer Shippers Advanced Chemicals Filtration and Purification Materials Handling 11

12 UNMATCHED COMBINATION OF BREADTH OF SOLUTIONS AND INDUSTRY FOCUS Entegris has the broadest solutions set of specialty chemicals, filtration and materials handling solutions in its markets Selected Competitors Liquid Filtration Advanced Cleans Deposition Materials Specialty Gases Gas Purification Specialty Materials Wafer Handling Fluid Handling 12

13 ENSURING PURITY ACROSS THE SUPPLY CHAIN Example: Entegris has solutions to achieve purity of photochemicals from production to consumption Manufacturing 14 days cycle time Transportation 45 days cycle time materials + contamination control + packaging = yield, cost, safety and performance Inventory 60 days cycle time Tool 1 day cycle time Sub-fab 7 days cycle time Contamination can occur at multiple points in a chemical s journey to the wafer 13

14 WHY WHAT WE DO MATTERS Helping to achieve the most demanding levels of purity possible Next-generation semiconductor manufacturing requires purity levels measured in parts per quadrillion (PPQ) San Francisco bay has ~6.165 billion cubic meters of water A PPQ would be equal to finding 1 minnow in the entire San Francisco bay 14

15 50 YEARS OF PROVIDING MISSION CRITICAL SOLUTIONS 50 Years 1966 Fluoroware Founded 1981 EMPAK Founded 1999 EMPAK and Fluoroware merged; new entity called Entegris 2000 Entegris IPO 2005 Entegris merges with Mykrolis 2008 Poco Graphite acquired 2014 ATMI acquired Entegris Revenue $1,250,000 $1,000,000 $750,000 $500,000 $250,000 $ Note: Entegris founded as Fluoroware in Company became Entegris in All data is as reported. 15

16 SEMICON KOREA MEDIA BRIEFING Entegris in Korea ENTEGRIS PROPRIETARY AND CONFIDENTIAL

17 ENTEGRIS IN KOREA Delivering value to Korea customers since 1990 Four locations and 200 employees State-of-the-art facilities World-class solution development Top talent and equipment Customer co-development models Local access and support Reduced lead times Increased response times Local capabilities include: Sales, customer service, marketing, engineering, manufacturing and R&D 17

18 ENTEGRIS IN KOREA Manufacturing excellence Wonju Facility Size: 3,650 square meters Employees: 42 Products: Fluid management components 2016 focus: Expansion of ESD tube extrusion capability 2017 focus: Capacity and lead time improvement aligned with market needs 18

19 ENTEGRIS IN KOREA Wet chemistries and gas purification Manufacturing excellence JangAn Facility Size: 11,000 square meters Employees: 50 Products: Implant gases: SDS and VAC gas cylinder production Wet chemistries: PlanarClean AG for post-cmp wafer cleaning at advanced nodes GateKeeper Gas Purification System (GPS) production 2016 focus: Add GPS production 2017 focus: Achieve high-volume manufacturing of additional cleans products and add capabilities to produce specialty coatings products Office Implant (SDS/VAC) Deposition (future) 19

20 ENTEGRIS IN KOREA TTC - RD Formulation Development Lab Korea Technology Center (KTC) Size: 400 square meters, with cleanroom Employees: 14 Capabilities Wet chemistry development lab Deposition chemistry development lab Formulation scale-up (pilot production) On-site metrology and real-time reporting 2016 focus: Expand employee base and equipment 2017 focus: Customer engagement and product launches for advanced nodes 20

21 ENTEGRIS IN KOREA Our on-going commitment Providing a breadth of technologies Rapid innovation for advanced processes Continued expansion of local customer service and sales support Continued collaboration with customers to solve complex challenges Create task force for driving greater purity in our solutions Internal/external education on purity and its effect on yield Benchmarking for success stories/bkms Focus on new solutions in Korea Localization JangAn and Wonju capabilities R&D focus Specialty chemistries and filters 21

22 NEW PRODUCT ANNOUNCEMENT GateKeeper Gas Purification System Announcing our latest platform for gas purification Helps improve wafer yields for advanced semiconductor and LED processes Offers best-in-class purification with a small footprint Removes contaminants at a parts-per-trillion level and at a variety of flow rates It can purify many process stream gases at a much smaller footprint, including Nitrogen, Hydrogen, Hydrogen for EUV, Argon, Ammonia and Clean, Dry Air (CDA) Systems provide automated regeneration of purifiers New purifier media allows improved systems to offer best-in-class outlet purity New manufacturing for these systems has been installed in our JangAn facility for local and regional support See the new system at our booth! 22

23 ENTEGRIS AT SEMICON KOREA Stop by our Booth #5504, Hall D See our product display areas for more information on leading technologies designed to maximize process efficiency and yield 23

24 Entegris, the Entegris Rings Design, Pure Advantage, SDS, VAC, PlanarClean and GateKeeper are trademarks of Entegris, Inc Entegris, Inc. All rights reserved. SEMICON is a trademark of Semiconductor Equipment and Materials International Corporation. All other names are trademarks of their respective companies. 24 Media Briefing - SEMICON Taiwan

25 25 APPENDIX

26 DEFECTS AT ADVANCED NODES Defects Size Histogram Black Box Inspection limitation of 14 nm devices Requires >7 nm defect sizes for 14 nm device (50% of device pitch) Black Box getting bigger (now with 40% of 14 nm devices) Key Challenges Finding and reducing these defects Gas/chemical materials are the only way to prevent these defects Def. counts Small defects Sources NVD Technology Gap Inspection Technology Gap Res. vs. T-put Gap Def. size: nm BF & DF Insp. Gap Limited visibility to contaminants with smaller geometries at advanced nodes 26

27 EXAMPLE GAS FILTER CONSUMPTION RATES Consumption-Rate Comparison Filter & Purifier Gas Filter Consumption for 7 years (2010~2016.Sep) Company A: 54,642 E/A Company B: 12,976 E/A Gas Filter Top Total Total 2010~2016.Sep 5,358 4,894 6,250 7,568 11,712 10,979 7,881 54,642 3,785 2,895 2,115 1, ,976 41,666 67,618 WG2FT1RR2 2,455 1,926 1,834 2,144 2,768 2,033 1,776 14,936 1,707 2,512 1,470 1, ,482 6,454 23,418 WG2FT1SS2 2,255 2,491 2,689 2,618 3,674 4,449 2,369 20, ,008 21,082 WGPM0GGG2 1,112 1,888 4,429 4,032 3,199 14, ,489 14,831 WGPM0GGT ,563 1,563 1,563 WG3NS3RF ,404 WGMXMBRR , ,335-1,334 1,336 WG3NS1RR Gap (A-B) Grand Total Gas Purifier Consumption for 6 years (2011~2016.Sep) Need to consider gas filter replacement frequency Gas purification for moisture removal Entegris can support to analyze filter replacement frequency 27