Contamination Control and Cleanrooms

Transcription

1 Contamination Control and Cleanrooms

2 Contamination Control and Cleanrooms Problems, Engineering Solutions, and Applications Alvin Lieberman ~ VAN NOSTRAND REINHOLD ~ New York

3 Copyright 1992 by Van Nostrand Reinhold Softcover reprint of the hardcover 1 st edition 1992 Library of Congress Catalog Card Number ISBN-13: e-isbn-13: DOI: / All rights reserved. No part ofthis work covered by the copyright hereon may be reproduced or used in any form or by any means-graphic. electronic, or mechanical, including photocopying, recording, taping, or information storage and retrieval systems-without written permission of this publisher. Manufactured in the United States of America Published by Van Nostrand Reinhold 115 Fifth Avenue New York, New York Chapman and Hall 2-6 Boundary Row London, SE 1 8HN, England Thomas Nelson Australia 102 Dodds Street South Melbourne 3205 Victoria, Australia Nelson Canada 1120 Birchmount Road Scarborough, Ontario M1K 5G4, Canada Library of Congress Cataloging-in-Publication Data Lieberman, Alvin, Contamination control and cleanrooms : problems, engineering solutions, and applications / Alvin Lieberman. p. cm. 1. Clean rooms. I. Title. TH7694.L ' 6-dc20 2. Decontamination (from gases, chemieals, etc.) CIP

4 To the engineers and the scientists who worked in the early stages of contamination control and to those who are carrying on the development of new technology at this time. This appreciation includes the technicians, laboratory workers, and engineers who developed the early white room technology by trial and error, and by applying basic engineering to solve the problems of cleaning and maintaining c1eanliness in those areas. lt also includes the scientists and engineers of today who are developing and applying the needed and technically realistic models for the phenomena causing contamination in our present, more critical world and the procedures needed for control. A special appreciation to Andrew R. Gutacker of ARGOT, Inc. He is one of the pioneers in this field who has moved with the times to add the latest scientific approaches to a wealth of practical experience. A further thanks to Andy for permission to use many of the illustrations shown in this book.

5 Contents 1 Contamination Control Overview 2 Particulate Contaminant Descriptions and Definitions 9 3 Particle Effects on Products 25 Appendix Contaminant Effects on Mechanical Parameters Summary 37 4 Gaseous, Chemieal, and Other Contaminant Descriptions 42 5 Contaminant Sources 54 6 Contaminant-Generation Mechanisms 73 7 Contaminant Transport and Deposition Mechanisms 82 8 Product Protection Methods Summary Liquid Cleaning Methods Gas Cleaning Methods for Ambient Air and Compressed Gases Surface Cleaning Methods Standards for Contamination Control Areas Verification and Monitoring: Requirements and Procedures Standards for Contamination Control Testing Systems Cleanroom Design Bases and Allowable Components HV AC Filter and Flow Control Systems for Cleanrooms 217 VII

6 VIII Contents 17 Cleanroom Work Support Component Areas Cleaning, Maintenanee, and lanitorial Needs Component and Equipment Testing Personnel Seleetion and Training Clothing, Gloves, and Wipers Gas Sampling Considerations Optieal Airborne Particle Counter Operation Optieal Measurement of Deposited Partieles Optieal Liquidborne Particle Counter Operation Optieal Particle Counter Operating Proeedures, Calibration and Correlation Methods Optieal Particle Counter Errors and Problem Areas 350 Good Signal-to-Noise Ratio 357 Adequate Particle-Sizing Sensitivity 359 Maximum Particle-Sizing Aeeuraey 359 Aeeeptable Particle-Sizing Resolution 360 Adequate Particle-Counting Aeeuraey 360 Maximum Sampie Size or Volumetrie Flow Rate 363 Maximum Particle Coneentration Capability 363 Minimum Data Proeessing Time 365 Correlation with Other Instruments 365 Adequate Particle Size Definition Range 366 Other OPC Speeifieations Gas Filter Testing Methods Liquids: A Cleaning Overview Partieulate Contamination Measurement in Liquids 393 Index 407

7 Contamination Control and Cleanrooms