Yttria-stabilized zirconia (YSZ) and alumina film deposition by multi energy processing

Size: px

Start display at page:

Download "Yttria-stabilized zirconia (YSZ) and alumina film deposition by multi energy processing"

Thomas Shields
5 years ago
Views:

NSF I/UCRC BOARD MEETING 2005 Yttria-stabilized zirconia (YSZ) and alumina film deposition by multi energy processing Joonghan Shin and Jyoti Mazumder Contents PART Background and Motivation of the

1 NSF I/UCRC BOARD MEETING 2005 Yttria-stabilized zirconia (YSZ) and alumina film deposition by multi energy processing Joonghan Shin and Jyoti Mazumder Contents PART Background and Motivation of the project - Multi energy processing (Two pulsed laser deposition ) - Application of products - Previous works for pulsed laser deposition (PLD) - Impact and Benefits PART Recent related work - The former experimental equipment and YSZ film - X-ray diffraction results and microstructure analysis of YSZ film cross section - Investigation of surface topography of YSZ film PART Future work

Background and motivation of the project -1 Multi energy processing

thin film depositi on, synthesis of new materials, control of

the YSZ and alumina targets, respectively Need to control

beams and online diagnostic technique Background and motivation of

2 Background and motivation of the project -1 Multi energy processing α β Multi energy processing can be advantageously applied for novel thin film depositi on, synthesis of new materials, control of surface properties, efficient removal of m aterials and other applications. Two pulsed beams are designed to be controlled separately to ablate the YSZ and alumina targets, respectively Need to control plume/plasma dynamics through adjusting the delay between two pulsed beams and online diagnostic technique Background and motivation of the project -2 Application of YSZ-alumina films Gear & Be aring Turbine blade Pump Engine comp onents Thermal barrier coatings and protective coatings

3 Background and motivation of the project -3 Previous works for pulsed laser deposition (PLD) α α β <Schematic of single-laser & single-target system> A limited area of uniformity in the deposite d film The deposition of micro and submicron-size d particles <Schematic of dual-laser & single-target system> Able to get particulate-free film growth and allow the growth of large uniform area and hig h quality films Decrease of film deposition rate Background and motivation of the project -4 Previous works for pulsed laser deposition (PLD) <Schematic of single-laser & multi-target system> Applicable to multi-layer film coating re quire the sequential deposition of several la yers of different materials Able to change target without breaking v acuum (enables a number of targets to be se lected in-situ computer control process) Mainly used to make superconducting fil ms composed of several layers

Background and motivation of the project -5 Technical impact and Benefits -Multi energy processing will have the several technological benefits in the areas of hard coating, corrosion protection,

- The hard coatings could be applied to gears and bearings, to cover pumps and oth er components for corrosion-resistance, protection of windows of vehicles from scr atches and erosion and for

4 Background and motivation of the project -5 Technical impact and Benefits -Multi energy processing will have the several technological benefits in the areas of hard coating, corrosion protection, faster removal of materials, and development of novel nano particles. - The hard coatings could be applied to gears and bearings, to cover pumps and oth er components for corrosion-resistance, protection of windows of vehicles from scr atches and erosion and for hardening of engine components to reduce wear. - Multi energy processing could significantly enhance thin film growth rates and pr ovide control for the development of new phases of materials. Material technology i s one of the most important areas and multi energy processing could lead to signific ant savings in cost. - Potential application can be found in a wide range of fields, both in the military a nd commercial sectors, that would benefit from some of the developed techniques will also have applications in the area of diagnostics and materials analysis Recent related work -1 The former experimental equipment and YSZ film Vacuum chamber Schematic view of PLD set up Excimer laser Optical system Figure of experimental equipment YSZ film < From Peng Li and Jyoti Mazumder J. Phys. D: Appl. Phys. 36 (2003) >

$Recent related work -2 The former X-ray diffraction$ images of the YSZ film cross section XRD theta/2theta

pressure SEM image of the YSZ film cross section (d

5h) a) 5 10-5 Torr O 2 b) 4 10-3 Torr O 2 c) 7 10-6

5 Recent related work -2 The former X-ray diffraction (XRD) result and scanning electron microscopy (SEM) images of the YSZ film cross section XRD theta/2theta scan of the YSZ films deposited at different oxygen pressure SEM image of the YSZ film cross section (d eposition time 0.5h) a) Torr O 2 b) Torr O 2 c) Torr Ar < From Peng Li and Jyoti Mazumder J. Phys. D: Appl. Phys. 36 (2003) > Recent related work -3 Scanning electron microscopy (SEM) images of the YSZ film surface Film surface Graphite 5um 5um 2um 500nm

6 Future work -Experimental set up for YSZ-alumina film deposition by using multi energy proce ssing will be started in the near future. And then ground experiment will be done. On the basis of it, the experimental work for producing YSZ-alumina film will be p erformed. -As the extension of the former work, nano hardness test will be performed to get mechanical property information such as hardness and Young s modulus of YSZ fi lm and this data will be used together with other test results to analyze material ch aracteristic of the YSZ film. -Working with counterpart group (University of Virginia) during the summer for collaboration and technology transfer

FLASHPOINTS N e w s l e t t e r, Vol. 4.1 Feb. 2007

Center for Lasers and Plasmas for Advanced Manufacturing FLASHPOINTS N e w s l e t t e r, Vol. 4.1 Feb. 2007 2007 Spring IAB Takes Place in Ann Arbor, MI. Attendees to include, Directors Dr. Mool C. Gupta,