Design for Environmental, Health and Safety. Mark Harralson; Intel Corporation, Chandler, AZ

Transcription

1 Design for Environmental, Health and Safety. Mark Harralson; Intel Corporation, Chandler, AZ Introduction In order to ensure a safe working environment, it is Intel s objective to purchase equipment that is compliant with environmental, health and safety requirements. This has become increasingly difficult with the rapid pace of modern technology cycles and continued globalization within the semiconductor industry. The Intel Equipment EHS Design for Environmental, Health and Safety (DFEHS) program was developed to aid equipment suppliers in providing a tool compliant with industry accepted EHS requirements in a cost-effective manner. DFEHS is comprised of two fundamental components; the integration of product design criteria into the equipment development process and the implementation of comprehensive EHS programs. About Intel The Intel Corporation was founded in 1968 to build semiconductor memory products. In 1971 Intel introduced the world s first microprocessor and has been integral in the growth of the computer industry since. Today Intel supplies the computing industry with chips, boards, systems and software that are the building blocks of today s advanced computer architecture. Intel has 65,000+ employees working in major facilities across North America, Central America, Europe, the Middle East, and Asia. Additionally Intel maintains sales offices in more than 30 countries worldwide. In 1998 Intel recorded revenues of 26 billion dollars, the 12 th consecutive year of record sales. Growth in recent years has been tremendous with employment and revenues doubling since Injury/Illness performance During this same period of significant growth Intel has made dramatic improvements in health and safety performance. In 1994 Intel s performance was on the same level with the average for the industry Intel Recordable And Lost Day Case Injury Rates Recordable Rate Lost Day Case Rate OSHA recordable injuries and illnesses have decreased an average of 37% for each of the last four years ending in 1998, from approximately 3 cases per 100 employees in 1994 to under ½ case per 100 employees in 1998.

2 6000 Days Away From Work Due To Injury Or Illness The number of days employees are away from work due to an injury or illness has decreased from slightly over 5000 in 1994 to slightly over 1000 in This is particularly remarkable since the number of employees has doubled during that same period. Intel has achieved health and safety performance on a par with the best safety data in any industry making Intel a true world class performer. New Equipment Procurement Process Semiconductor Equipment and Materials International (SEMI) EHS guidelines are standardized among device makers and suppliers and serve as the minimum expectations for design of equipment in the Semiconductor Industry. The primary guidelines are SEMI S2 Safety Guidelines For Semiconductor Manufacturing Equipment and SEMI S8 Safety Guidelines For Ergonomics Engineering of Semiconductor Manufacturing Equipment. In addition to meeting these guidelines, Intel requires equipment suppliers to meet additional requirements which include conformance to the applicable European Union Directives as well as environmental performance, material flammability / combustibility, utility consumption and electrical design. To ensure that any new technology equipment that Intel purchases meets these requirements the New Equipment Procurement Process (NEPP) is followed. NEPP is comprised of seven fundamental components. 1. Equipment Supplier Development 2. Primary Selection Activities 3. Compare and Rank Suppliers 4. Corrective Action and Data Collection 5. EEHS Design Validation and Discovery (DVD) 6. Tool Proliferation Support 7. Sustaining Support The objectives of the process include supplier development, purchase of advanced technology equipment that is safe, global placement of equipment, and continuous improvement for both the supplier and Intel.

3 Component 1, equipment supplier development, is approached in several ways. One way is through participation in industry wide EHS summits that are conducted at trade shows where equipment suppliers and end users collaborate setting goals for the development of new technologies. Intel also helps develop suppliers through participation in the International Sematech Equipment EHS Council, support for SEMI sponsored training courses and the annual Intel Supplier days. The most direct method of equipment supplier development is supplier engagement with Intel in the Design for Environmental, Health and Safety program. Primary selection activity, component 2, includes the formation of a selection working group that assesses new equipment technology. Corporate EHS participates directly in each selection team. It is during this phase that EHS requirements are established and prospective suppliers are educated on those requirements as well as Intel s expectations. The supplier s design is then assessed based on the industry third party review system. Selections often involve multiple equipment suppliers. Once the prospective suppliers respond with their status regarding EHS requirements they are compared and ranked using the EHS Supplier Score Card. Comparing and ranking suppliers is the third step in the process. Equipment EHS scores each candidate supplier at several points during the process. Supplier scores are determined from their performance in providing necessary EHS compliance documents on time, and the number of non-compliance features present in the tool design. Noncompliances to EHS design requirements are assessed and risk ranked using SEMI S10 criteria. Intel prohibits shipment of any equipment with a risk category of critical, high, or medium. Component 4 involves the review of the corrective action plan submitted by the supplier that addresses how each non compliant item is to be resolved and the timeline for resolution. Additional data such as the Tool Specific Package and the Environmental Characterization Package are obtained from the supplier at this time and reviewed. After installation in an Intel factory, the equipment is evaluated to validate closure of non-compliant items and to identify any EHS related issues created by installation or equipment application. Component 5 is referred to as Design Validation and Discovery (DVD). DVD focuses primarily on the maintenance of the equipment. If any additional EHS issues are identified during DVD they are risk ranked using SEMI S10 and added to the corrective action plan (CAP). The CAP must be completed before the equipment is proliferated from technology development into high volume manufacturing. The goal is to have design issues resolved prior to proliferation into volume manufacturing so that no engineering retrofits are required at the manufacturing sites. Prior to equipment proliferation to manufacturing, component 6, Corporate Equipment EHS holds a meeting with the receiving site(s) representatives to communicate equipment status and to deliver the Tool Specific Package (TSP). The TSP is a complete documentation set for a specific piece of equipment that includes compliance documentation as well as Intel specific equipment sign-off documentation. The use of the TSP eliminates redundant EHS activities at the manufacturing site, reduces the amount of time required to start-up the new piece of equipment, and allows for better use of EHS resources.

4 Component 7 in the NEPP process is sustaining support and transition. It is at this point when corporate support is focused on continuous improvement of the equipment through participation on equipment User Groups. Such groups are comprised of both Intel and supplier personnel and focus on meeting process requirements and addressing any EHS issues that may arise. DFEHS Model In the first component of the DFEHS process, Intel works with the supplier to integrate EHS requirements and analysis into the tool development cycle, starting at the design concept phase and continuing through each subsequent phase. The system must be closed loop so that lessons learned from previous tool generations are incorporated into new designs. This is a common sense approach based on the fact that good EHS design features are much less expensive and time consuming to implement in the design stage than to retrofit at the final inspection and approval phase. In the second aspect of the process, the people systems component, Intel works with the supplier to develop comprehensive EHS programs establishing a healthful and safe workplace for their employees on their property and while at Intel. It is Intel s belief that designing and building safe products is much easier in an environment where safety is an integral part of the company culture. This process relies heavily on the interest and commitment of the supplier management. No aspect of the tool s design, development, installation, operation, maintenance or service should place any person, facility, or the environment in jeopardy. Equipment manufacturers should assume exclusive ownership for developing and implementing a comprehensive EHS strategy that achieves this purpose. Representatives from Capital Equipment Development (CED) and Corporate EHS work together to determine which suppliers will be targeted for the DFEHS process. First and foremost, to be selected they would have to be suppliers with which Intel intends to do business in the future. Secondly, they would be selected based on past performance in the area of equipment design and/or safe job performance on Intel property. Supplier scorecards, developed at various stages in the selection process, are used to compare suppliers. Suppliers with poor past performance would be prioritized in the targeting process. Intel also tracks the health and safety performance of supplier employees working on Intel property. A supplier with a poor record for safe work would also be prioritized for the DFEHS process. Intel EHS has developed audit questionnaires for equipment development and people systems programs that are the basic tools for implementing the process. The audits are made up of probing questions designed to uncover gaps in the suppliers design process and EHS programs. Components of the audits include; EHS involvement in design reviews, knowledge of applicable codes and standards, development of a product safety program and training in EHS disciplines. The process is relatively simple. Intel CED presents the DFEHS process to a targeted supplier and secures their commitment to participate in the program. The supplier then fills out the audit questionnaire and returns it to Intel. Intel EHS and CED meet with the supplier management representatives, review the audit, and agree on program development steps to close

5 gaps uncovered by the audit. This roadmap to process improvement is called a corrective action plan (CAP). Intel does not prescribe programs or processes, they only make available technical support to the supplier if requested. Periodically Intel EHS and CED will meet with supplier management and review their progress on the corrective action plan. When the supplier completes the roadmap items they are considered a mature DFEHS supplier. Intel intends to work with 10 to 15 suppliers at any one time. When one supplier completes the program, work with the next supplier on the target list is initiated. Intel measures the success of this program in two ways. First, they measure performance in engaging with suppliers, and the supplier response to the program at three key program milestones. They calculate the percent of targeted suppliers that have committed to the program, percent that have developed their corrective action plan and percent that have successfully completed their action plan. Second, they measure the impact in scorecard results before and after completing the program. Scorecard results and trending are reviewed on a quarterly basis. Benefits of DFEHS When discussing the benefits of DFEHS one needs to realize that both the equipment supplier and the end-user of the equipment are benefactors of a supplier integrated DFEHS model. From the people systems component, comprehensive EHS programs lead to safer work practices by the supplier s employees at the supplier facility and at the equipment end-user facility. Fewer injuries result in increased productivity, reduced costs and higher employee morale. Also, having the equipment design engineers working in a safe and healthy environment can increase their attention and dedication to following design procedures to produce a safe piece of equipment. Having consistent programs based on a proven model advance EHS performance across different supplier operations. As Intel proliferated its safety initiatives across different business units, all have seen good results. Other companies with successful EHS programs, like Dupont, have had a similar experience. As far as the product safety component is concerned, benefits include the manufacture of a safe piece of equipment, elimination of equipment retrofits and the incorporation of lessons learned from one generation of equipment to the next. An additional benefit is the ability of the equipment supplier to produce a documented product safety program that could be beneficial in the event of any product safety litigation. Those suppliers that integrate a DFEHS model into their business process should have a competitive advantage as a result of: Lower development costs (decreased post-design modifications and retrofits, improved engineering resource utilization), Increased marketability (early and accurate installation information, reduced cost of ownership for final user), and Faster installation and qualification time (estimated reduction in ramp cycle of 2 weeks). Why Intel is Pursuing DFEHS Since the inception of the SEMI Guidelines starting back in 1991 Intel has held suppliers accountable for designing equipment that meets the guidelines. However, Intel s history with equipment suppliers has shown that the majority of suppliers do not incorporate the SEMI S2

6 and SEMI S8 criteria at the design phase. They wait until a SEMI S2/S8 compliant piece of equipment is requested by an end-user and then have the tool inspected to those design guidelines. Reviewing the EHS score cards over the last several years reveals that the majority of Intel equipment suppliers continue to offer non compliant equipment at the time of equipment selection. Acceptance of equipment that fails to meet accepted industry standards results in additional costs both to the end-user and the equipment supplier due to retrofits needed to bring the equipment into compliance and the resulting schedule impact. Also, for companies like Intel with a strong safety culture, acceptance of non-compliant equipment can have a negative impact both on employee and community perception. Results and Next Steps Data made available by one industry supplier shows a significant decrease in EHS associated costs for tool development after implementing a DFEHS program. The data show a 56 percent decrease in total cost. This a total of a 75% reduction in internal engineering cost, a 7% reduction in third party cost, a 100% reduction in redesign cost and no impact to manufacturing cost. EHS Cost During Tool Development 56% reduction in total cost Industry Average Supplier "A" - pre DFEHS Supplier "A" - post DFEHS As Intel began meeting with their equipment suppliers, their first observation was that each company has its own culture and operating philosophies. Each company has its own organizational model with different engineering and quality assurance approaches. DFEHS implementation must be flexible within the supplier business operation methodology. The suppliers Intel is currently working with initially responded to the potential cost and schedule savings that can be accomplished. Once the audit questionnaire was returned, a high level snapshot of the supplier tool development cycle and EHS people systems could be explored for improvements. Gaps in the supplier s process need to be openly and constructively discussed, to identify where improvements can be made and to quantify the results that can be accomplished. There is not one solution that will work for all suppliers. Gaps must be filled in a manner that will work within the individual company culture and operating model. One supplier Intel is working with has had a poor record for safe work on Intel property. There have been multiple incidents resulting in recordable injuries. They are focusing on implementing product safety and employee safety as a company wide operating value. This supplier has a company orientation in customer service and responding to customer needs. They have added safety management as a corporate value, and are strengthening the EHS element of their employee training and certification programs.

7 Another supplier has had difficulty in completing compliance documents in a timely fashion. An investigation determined that appropriate steps were taken during the design process to ensure a compliant tool, but there was no documentation to facilitate the third party review process. This supplier is focusing on how they document the safety design work done during the tool development and validation cycle to increase the timeliness of their compliance validation and eliminate re-documenting work that has already been done. Intel is in the initial phases of deployment of this program with their suppliers. Eventually they would like for all of their current suppliers to participate in, and successfully complete, the program. At that point they will add new participants as new suppliers come into the picture. Eventually, they expect that the success of this program could change the way equipment is selected. As a supplier matures in the program and Intel becomes assured that they have the best programs and processes in place to design safe equipment, it should be possible to lessen the rigor of the selection process. At that point it should be possible to discontinue the current process of third party review for the supplier prior to selection, and discontinue the DVD process for that supplier s equipment after selection. Mark R Harralson Intel Corporation 145 S 79 th street Chandler, AZ (480) Leonard Craig Intel Corporation 145 S 79 th street Chandler, AZ (480)