July 11, Axcelis Technologies, Inc.

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1 July 11, 2017 Axcelis Technologies, Inc.

2 Safe Harbor Statement This presentation and discussion contain forward-looking statements, including our expectations for future revenues, expense reductions, profits, and other results that are forward-looking statements under the SEC s safe harbor provision. These forward-looking statements are based on management s current expectations, and are subject to the risks inherent in our business. These risks are described in detail in our Form 10-K annual report and other SEC filings. Our actual results may differ materially from our current expectations. We do not assume any obligation to update these forward-looking statements. 2

3 Axcelis at a Glance Global leader in technology development and manufacturing of ion implant systems and services for the semiconductor industry for over 35 years Serving a nearly $1B ion implant systems market Based in Beverly, MA with over 800 employees worldwide Global infrastructure supporting customers in 32 countries Growing installed base of over 3000 tools Strong IP portfolio with >800 patents Supplier of record to leading semiconductor CAPEX spenders in all market segments including DRAM, Flash, Foundry and Logic Implantation Global Support 3

4 Driving to Implant Market Share Leadership 4

5 Target Business Model The Path to Market Share Leadership Revenue $301.5M 2015(A) $267M 2016(A) $360M to $380M 2017(Estimate) $450M Model $550M Model Gross Margin 33.7% 37.3% 39% - 40% 40% - 42% 42% - 44% Total OPEX 26.8% 31.1% $96M - $104M 25% - 26% 22% - 24% Operating Profit 6.9% 6.2% 10% - 12% 14% - 17% 18% - 22% This information is not a forecast of results for any identified period, but is intended to be indicative of the annual results Axcelis may achieve based on our strategic objectives. 5

6 Market Share Common Purion Platform Drives Faster Adoption and Enables the Path to Implant Market Share Leadership 50% Axcelis Worldwide Implant Market Share 45% Target Business Models 32% - 40% Share 40% 35% 30% 2017 Projected Share 25% to 28% 25% 20% 15% 10% Purion M Introduction Medium Current Purion XE Introduction High Energy Purion H Introduction High Current DRAM Slow Down Introduction of Purion Product Extensions Purion EXE, VXE and SiC 5% 0% (F) $450 MODEL $550M MODEL Source Gartner, VLSI Research (April 2016) and Company Estimates (2016 TAM estimate of $850M, 2017 TAM estimate of $950M, Target Model TAM estimate of $1B) The target business model information is not a forecast of results for any identified period, but is intended to be indicative of the annual results Axcelis may achieve based on our strategic objectives 6

7 Systems Purion Continues to Gain Momentum 21 New Purion Placements Since Q New Purion Placements 7 New Purion Placements in Q Existing Customer New Fab New Customer 0 Market Segment Mix Success with New Products Implant Segment Mix Mature Process Technology 76% Memory 24% Product Line Extensions 29% Base Product 71% Medium Current 24% High Current 14% High Energy 62% 7

8 Why Customers Choose Purion 8

9 The Products 9

10 The Purion Platform The Center of the Axcelis Strategy Common platform and control system Innovative scanned spot beam architectures with advanced energy filters Advanced source technology 10

11 Axcelis Purion Products All Built on a High-Performance Common Platform Enhanced Scanned Spot Beam Technology Common Purion Platform 500WPH End Station Vector TM Control System Eterna TM ELS4 Source Purion H RF Linear Accelerator Technology High Energy High Energy Purion XE Energy Filter Based Beamline Technology Purion M Three Unique and Enabling Beamlines Integrated with a Common High Performance Platform 11

12 The Purion Product Family Built on the Common Purion Platform Shipped 100 th Purion System in May 2017 High Current ~60% of TAM Scanned Spot Beam High Energy ~20% of TAM Linear Accelerator Medium Current ~20% of TAM Hybrid Filtration * Source Company and Gartner Estimates 12

13 Purion Driving Customer Innovation Through Product Extensions and New Applications Capabilities 13

14 The Implant Market Opportunity 14

15 US $M Strong Memory Combined with Mature Process Spending Drives Implant Market Growth Ion Implant TAM 1,100 1, GARTNER ESTIMATE 2015 GARTNER ESTIMATE 2016 AXCELIS ESTIMATE 2017 AXCELIS ESTIMATE 2018 AXCELIS ESTIMATE 2019 GARTNER ESTIMATE 2020 GARTNER ESTIMATE * Source Company Estimates and Gartner April 2017 Forecast 15

16 Ion Implant Capital Spending Axcelis Strategic Objectives Aligned with Markets Market Segment Devices Produced Implant Opportunity* per 100K wspm Est. Percent of Implant CAPEX* Memory NAND ~37 Total Implanters ~10 HE ~20 HC ~7 MC 44% DRAM ~55 Total Implanters ~3 HE ~40 HC ~12 MC Leading Chipmakers Samsung SK Hynix Micron Toshiba Intel Mature Process Technology >28nm Image Sensors MEMS Comms Analog Power ucontroller 200mm HE in Image Sensor and Power Devices Purion H and M Used and Legacy Tools 41% tsmc GLOBALFOUNDRIES TowerJazz UMC SMIC ST Many more Leading Edge Foundry/Logic (FinFET) CPU SOC Graphics Comms ~30-40 Total Implanters ~25-30 HC ~5-10 MC 15% Intel tsmc Samsung GLOBALFOUNDRIES * Source IC Knowledge and company estimates Opportunity varies by process, customer and node HE = high energy, HC = high current, MC = medium current 16

17 Gross Margin Improvement Program 17

18 The Impact of Mix and Initiatives on Gross Margin Gross Margin Improvement Driven by Improving Systems Margins on the Common Purion Platform Supply Chain Optimization Systems Mix Volume Warranty and Install Evaluation Tools New Products Cost out Engineering Service Manufacturing Efficiency Tiered Pricing Gross Margin >40% 18

19 Systems Margin Improvement Gross Margins Driven by Product Maturity, Volume and Cost Out Initiatives Cost Out Initiatives Fueling Steady Margin Improvement Systems Margin Point Improvement (4 Quarter Rolling Average) 14% 12% 10% 8% 6% 4% 2% 0% Q1/15 Q2/15 Q3/15 Q4/15 Q1/16 Q2/16 Q3/16 Q4/16 Q1/17 Product Maturity Drives Systems Margins Average Systems Margins to Achieve Corporate Goals PH PXE PH PM PM PM PXE PH PXE $360M - $380M $450M $550M Target Business Model Revenue 19

20 Financials 20

21 Q Results Revenue Q $86.9M Gross Margin 40.0% Combined R&D and SG&A Expenses Operating Profit $24.0M $10.7M EPS $0.29 Total Cash $76.2M Debt $0 Inventory $115.6M 21

22 Q Financial Outlook (as of May 4, 2017) As Guided Revenue ~$100M Gross Margin ~38% Combined R&D and SG&A Expenses ~$26M Operating Profit $12M-$13M EPS $0.30-$0.35 Total Cash ~$100M On July 11, 2017, management reiterated Q revenue guidance of ~$100M, and stated that Q EPS is expected to be at the high end of the range of $

23 Investment Thesis Purion is driving significant revenue growth and propelling Axcelis towards implant market share leadership Axcelis is well positioned in key markets Memory Highest implant capital intensity Mature process technology Large installed base of Axcelis legacy tools Keen interest in Purion Customers want to give equal business to two strong implant suppliers to drive innovation Our business model will deliver higher earnings and generate significant cash 23

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