April 17 19, Forum is part financed by Podlaskie Region

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1 Suwałki, POLAND April 17 19, 2013 Optimization of device construction and deposition technology of ta-c coatings using Taguchi method of experiment design Viktor Zavaleyev Koszalin University of Technology(Poland/Ukraine) Forum is part financed by Podlaskie Region

2 Koszalin University of Technology Institute of Technology and Education Optimization of device construction and deposition technology of ta-c coatings using Taguchi method of experiment design. Ph.D.St. Viktor Zavaleyev Prof. Jan Walkowicz 7 th th International Forum Science & Technology days Poland East. Transregional Co- operation and Eastern Partnership New materials and processes, Health, ICT, Energy, Environment Suwalki, April 17-19, 19, 2013

3 1. Introduction 2. Vacuum arc installation INOVAP C55CT 3. Venetian -blind filter 4. Plasma filtration using Venetian - blind filter 5. Modified installation C55CT 6. Cr ion etching method AEGD 7. Properties of DLC thin films 8. Application of ta-c coatings

4 Diamond- like carbon (DLC) Amorphous carbon thin films: - the lack of crystal structure, - hybridization of binding sp1, sp2, sp3, - different hydrogen contents. Introduction Amorphous carbon thin films containing hydrogen: type a-c:h and ta-c:h (tetrahedral content bonds sp 3 > 70%), - hydrogen content 20-60%. sp 3 Amorphous carbon thin films without hydrogen: type a-c and ta-c (tetrahedral content bonds sp 3 > 70%), strong dependence of the properties of a-c and ta-c thin films on sp 3 bonds content W. Jacob, W. Miller [1] [2] sp 2

5 Introduction Properties diamond like carbon thin films (DLC) Association German Engineers VDI 2840 [4] J.Robertson [3]

6 Introduction Optimal ion energy and substrate temperature on deposition ta-c coatings V.E. Strel nitskij et al.[5]

7 2. Vacuum arc installation INOVAP C55CT Parameters of DLC coating deposition: 1. DC current: 50 A 2. Working pressure: < 5x10-3 Pa 3. Puls current: 1400 A / 300µsec 4. BIAS: 80V 5. Process temperature: < 200 C W. Grimm et al. [6,7] Scheme DLC coating

8 Standard technological process Cr/DLCmono Scheme DLC coatings Cr/DLCmulti

9 3. Venetian - blind filter Ryabchikov and co-workers proposed transparent to the plasma, nested venetian-blind filter by designing the shield as concentric annuli. The annular filter system coefficient amounted to 7%. The linear version has the advantage that it can be scaled for large area-coatings, similar to the rectangular 90 -duct filter. More recently a somewhat larger version with a useable area of 30cm x 30cm was tested in Dresden, Germany. O. Zimmer [8,9] I. Ryabchikov et al.[10,11]

10 4. Plasma filtration using Venetian - blind filter Research: research plasma filtration efficiency, (distribution of microparticles on the substrate) the total ion current studies on the substrate, plan of the experiments and analyze results was developed using Taguchi method Orthogonal table L9 (3 3 ) Parameters value Experiments Parameter Parameter Parameter No Maximization of function η (S/N): the larger-thebetter the smaller-thebetter y optimized property, n number of measurements optimized properties.

11 5. Modified installation C55CT 1. Ion etching substrates method AEGD (Arc Enhanced Glow Discharge). 2. Venetian -blind filter

12 6. Cr ion etching method AEGD HSS samples were polished before ion etching: R a = 0.02 µm Etching parameters Standard ion etching t = 10 min R a = 0,03µm Ion etching method AEGD t = 10 min R a = 0,02µm Cathodic Cr The surface of Si sample after ion etching using AEGD method, Cr ion etching and Cr sublayer deposition

13 7. Properties of DLC thin films Hardness and Young's modulus of DLC coatings Raman spectrum XPS study in Linköping University : T1: sp2/sp3-53%/47% T2: sp2/sp3-38%/62% T3: sp2/sp3-42%/58%

14 Adhesion coatings - Rockwell test

15 Adhesion coatings scratch test Thickness DLC thin film - 0,8-1 µm Lc 1-15N, Lc 2-37N Thickness ta-c thin film - 0,2 µm Lc 1-4,37N, Lc 2-14,86N Thickness ta-c thin film - 0,05-0,07 µm Lc 1-3,61N, Lc 2-8,38N

16 Tools for industry 8. Application of ta-c coatings Anti-wear coatings into cutting tools J.Walkowicz[12] M. Hakovirta [13] Operational Programme Innovative Economy POIG Developmental Project No. UDA- POIG /08-00: Hybrid technologies for woodworking tools modification

17 Literature 1. W. Jacob and W. Miller On the structure of thin hydrocarbon films Appl. Phys. Lett., Vol. 63, No. 13,p J.Robertson Diamond-like amorphous carbon Materials Science and Engineering R 37 (2002), p V.E. Strel nitskij, Aksenov Handbook Diamond-like carbon films NSC Kharkiv Institute of Physics and Technology 2006, p M. Buschel, W. Grimm Influence of the pulsing of the current of a vacuum arc on rate and droplets Surface and Coatings Technology (2001) p W. Grimm, V. Weihnacht Properties of super-hard carbon films deposited by pulsed arc process Vacuum 85 (2010) p O. Zimmer, Magnetische und elektrische Steuerung der Vakuumbogenbeschichtung, Dissertation, Universitat Bochum, O. Zimmer Vacuum arc deposition by using a venetian blind particle filter. Surface and Coatings Technology 200 (2005) p I. Ryabchikov Repetitively pulsed vacuum arc ion and plasma sources and new methods of ion and ion-plasma treatment of materials. Surface & Coatings Technology 96 (1997) p A. I. Ryabchikov, I. B. Stepanov Investigations of forming metal-plasma flows filtered from microparticle fraction in vacuum arc evaporators Rev. Sci. Instrum., Vol. 69, No. 2, (1998) p J.Walkowicz, Vacuum and Plasma Surface Engineering VaPSE 2009, October 22-26, 2009 Hejnice, Czech Republic 13.M. Hakovirta, Diamond and Related Materials 8 (1999)

18 Thank you for your attention

19 Suwałki, POLAND April 17 19, 2013 Optimization of device construction and deposition technology of ta-c coatings using Taguchi method of experiment design Viktor Zavaleyev Koszalin University of Technology(Poland/Ukraine) Forum is part financed by Podlaskie Region