Micr ofiltr ation Pr oducts. For the Microelectronics Industry

Transcription

1 Micr ofiltr ation Pr oducts For the Microelectronics Industry

2 WARNING! FAILURE OR IMPROPER SELECTION OR IMPROPER USE OF THE PRODUCTS AND/OR SYSTEMS DESCRIBED HEREIN OR RELATED ITEMS CAN CAUSE DEATH, PERSONAL INJURY AND PROPERTY DAMAGE. This document and other information from Parker Hannifin Corporation, its subsidiaries and authorized distributors provide product and/or system options for further investigation by users having technical expertise. It is important that you analyze all aspects of your application and review the information concerning the product or system in the current product catalog. Due to the variety of operating conditions and applications for these products or systems, the user, through its own analysis and testing, is solely responsible for making the final selection for the products and systems and assuring that all performance, safety and warning requirements of the application are met.

3 INDEX INTRODUCTION... PRODUCT LINE OVERVIEW...7 WET ETCH AND CLEAN All-fluoropolymer Products Fluoroflow... Fluoroflow-HSA...3 Fluoroflow-Select...5 Fluoroflow-XL...7 Fluorocap...9 Fluorocap-Select... Fluorocap-XL...3 PTFE Membrane Products Chemflow-PE...5 Proflow II-E...7 Proflow II-E-Select...9 Proflow II-E Mini-Cartridges...3 Proflow II-E Mini-Capsules...33 PES Membrane Products Clariflow-WE...35 Clariflow-E...37 Clariflow-E-Select...39 Clariflow-E Mini-Cartridges...4 Clariflow-E Mini-Capsules...43 PLATING Clariflow-E...47 Clariflow-E-Select...49 Polyflow...5 CMP Polyflow-CMP...55 LITHOGRAPHY Polyflow Membrane...59 Polyflow Membrane-Select...6 Chemflow-PE...63 GENERAL Proflow II-G...67 Clariflow-G...69 Polyflow...7 Polyflow-G...73 Polyflow Mini-Cartridge...75 Polyflow Mini-Capsule...77 HOUSINGS Trufluor...8 Trufluor Fulflo NP...85 Filter Recommendations...87 Chemical Compatibility Chart...88

4 Parker Hannifin Leader in process fi ltration, separation and purifi cation With sales offi ces in 6 countries, distribution channels active in 63 countries, and manufacturing operations in 6 countries, Parker specializes in providing fi ltration and separation products to a wide variety of markets including the microelectronics, pharmaceutical, food and beverage, manufacturing, automotive, oil and gas, and defense industries. Manufacturing Excellence Parker Hannifi n Corporation is committed to manufacturing excellence. Our state-of-the-art manufacturing facility features: A fully equipped laboratory and testing center Certifi ed controlled cleanroom environments Outline History 984 All-fl uoropolymer fi lter cartridges 987 All-polypropylene depth cartridges for economical prefi ltration 994 Hydrophilic polyethersulfone (PES) membrane for liquid fi ltration applications 994 Hydrophobic PTFE membrane fi lters for general purpose gas and solvent purifi cation 997 PTFE membrane fi lters with HDPE structure to maintain chemical purity 998 Encapsulated all-fl uoropolymer cartridge for aggressive chemical fi ltration 3 SELECT pleat technology: optimizing effective fi ltration area to provide doubled lifetime 5 Ultraclean technology: leading the industry in cleanliness offering fi ltration products with <5ppb metals extractables level 5 Acquired by Parker Hannifi n Corporation 6 XF technology: provides superior fl ow rates 7 XL technology: new standard for fl ow and lifetime Quality Management and ISO 9 Quality is of paramount importance to Parker Advanced Filtration. All products are manufactured under controlled environmental conditions and are subjected to demanding programs of quality assurance. Parker Hannifin Corporation Filtration is ISO 9 certified.

5 Microelectronics: A Core Expertise The microelectronics industry is a rapidly growing world market that draws upon core areas of our fi ltration expertise. Included within this market are the broad range of electronics products that require highly effective filtration in their manufacturing processes. These products include: semiconductors fl at panel displays hard disk drives Through our Technical, R&D and Customer Service teams we offer a wide range of services to ensure total customer satisfaction. Technical Capabilities Our Technical Services team is dedicated to the needs of the microelectronics industry. We have an extensive range of state-of-the-art analytical instrumentation and a highly qualifi ed team of scientists and engineers generating innovative solutions to a wide variety of fi ltration needs. We strive to optimize our customers fi ltration applications by offering full technical support that includes: process failure analyses contamination analyses process and cost improvement audits on-site testing services Research and Development Our R&D teams are constantly working to innovate new products and discover technologies that will enhance the performance of process fi ltration, and thus keep us at the forefront of process fi ltration technology. Customer Service An experienced team of professionals dedicated to respond quickly and comprehensively to orders - both for standard and customized products and ensure their on-time delivery worldwide. 3

6 Microelectronics: Applications In the microelectronics Industry, fi lter process fall into three categories: Chemical Filtration Etching Si etch (HF/HN3/ Acetic Acid) SiO etch (BOE/BHF-HF/NH4F) Si3N4 etch (Hot H3PO4 up to 8 C) Al etch (H3PO4/HNO3/Acetic Acid) Stripping Hydroxy/amino based Glycol/NH4F based DMSO/amino based Cleaning Piranha (hot HSO4/HO up to 5 C) SC (NH4OH/H/HO up to 9 C) SC (HCL/HO/HO up to 9 C) Bulk chemical distribution Photochemical Filtration Photoresist applications l-line, g-line and DUV 48/93nm) Anit-refl ective coating applications (BARC/TARC) Solvent/Developing (<3% TMAH 97%H) Chemical Mechanical Planarization (CMP) Oxide Metal Moore s Law 4 years ago, Intel co-founder Gordon Moore issued a famous analysis that proposed the number of transistors on an integrated circuit (IC) doubled every 8 months. This analysis (often referred to as Moore s law) still holds true today. The number of transistors per chip now runs into the billions with line-widths < nanometers. The Microelectronics Market Microelectronics are found everywhere from consumer electronics to satellites, from corporate data centers to microwave ovens. The Microelectronics market is fast-paced and cyclical, driven by the constant demand to supply new products that are ever faster, with higher capacities and smaller footprints. The manufacturing of the newest generations of IC chips would not be possible without effective fi ltration. 4

7 Semiconductors: The fi lters used in semiconductor production processes need to provide the lowest possible levels of metals extractables and high particle retention effi ciencies. However, since these processes combine the use of aggressive chemicals and high process temperatures, we have developed a wide range of fl uoropolymer fi lters that possess high chemical and thermal resistance and are suited for all processes in the manufacturing of semiconductors. Our fl uoropolymer fi lters are available with the following options: XL: New standard for lifetime and fl ow rate SELECT - high surface area and fl ow rates Ultraclean - <5ppb metals extractables Wet-packed Capsules High particle retention effi ciencies Pirahha Cleaning Sequence Clean A HSO4 / HO Clean B Rinse HSO4 / (NH4)SO8 HOT UPDI Water Etch HO / HF Rinse UPDI Water 5

8 Hard Disk Media Crucial to the manufacture of disk media is the nickel-plating of the disks. This process is highly sensitive to both chemistry changes and interactions, and to contamination from high metallic dirt loadings. Understanding the plating requirements in the different parts of this process, we offer various ranges of fi lters: Fluoroflow: fl uoropolymer fi lters suitable for the aggressive chemical environment found in the plating process Fluoroflow SELECT: a high-fl ow version of Fluorofl ow with longer life Clariflow: polyethersulfone membrane fi lters that provide extremely high bath recovery rates during disk cleaning Clariflow SELECT: a high-fl ow version of Clarifl ow with longer life. All products enable high product yields and low reject rates, allowing for the lowest CPU (cost per unit). Aluminum Substrate Hard Coating and Lubricating Cleaning and Rinsing Mechanical Texturing Nickel Plating Polishing and CMP Flat Panel Displays Glass Substrate Cleaning Thin-film Deposition In the production of fl at panel displays, the highest priority is to remove particulate contamination from process chemicals, including a wide variety of photoresists, developers, etchants and other chemical strippers. Etching Photoresist Stripper Exposure & Development Test and Cleaning Photoresist Application Polyimide Film Printing To ensure consistent chemistry across all these chemistries, we offer ranges of filters that combine high flow capacities with high particle reduction efficiencies: Scribe and Breaking Scaling and Assembly Rubbing Polyflow: polypropylene depth media Polyflow membrane: polypropylene membrane Proflow: PTFE membrane LCD Inspection & End-Sealing Polarizer Attachment Testing of LCD Screen 6

9 Microfiltration Products Engineered for Microelectronic Applications At Parker we see every microelectronics application as an opportunity to provide a total fi ltration solution. We have this capability due to our constant drive to be at the leading edge of fi ltration technology. Our innovative engineering teams work closely with our dedicated worldwide support network resulting in unparalleled customer satisfaction. FLUOROFLOW % Fluoropolymer construction FLUOROCAP % Fluoropolymer capsules CHEMFLOW PE PTFE Membrane / High Density Polyethylene construction CLARIFLOW Polyethersulfone (PES) Membrane / Polypropylene construction PROFLOW II PTFE Membrane / Polypropylene construction POLYFLOW MEMBRANE Polypropylene Membrane / Polypropylene construction POLYFLOW Polypropylene absolute and nominal-rated depth media Polypropylene structure A wide variety of housings is available. Contact your Parker Filtration Sales Representative for more details. Parker offers a wide range of microfi ltration products for critical liquid and gas applications, with particle removal ratings from. to 4 micron. Our products will consistently meet your exacting performance and compatibility requirements even in processes using aggressive chemicals. Our products can offer metal extractables <5ppb. 7

10 Microfiltration Products Engineered for Microelectronic Applications Product line Available Configurations Filter Ratings (microns) SELECT* and Ultraclean Typical Applications FLUOROFLOW % Fluoropolymer Construction Cartridge.3,.5,.,.,.45, S XL U Critical fi ltration of aggressive acids, bases, strippers, and solvents Available for high temperature applications FLUOROCAP % Fluoropolymer Construction Capsules Capsule.3,.5,.,. S XL U Encapsulated fi lter for critical fi ltration of aggressive chemicals and process fl uids under harsh conditions where the introduction of contamination during cartridge change out is a concern Available for high temperature applications CHEMFLOW PE PTFE Membrane / High Density Polyethylene Structure Cartridge.3,.5,.,., S Purifi cation of photoresists, chemicals and etch baths Filtration of solvents, cleaning solutions CLARIFLOW Polyethersulfone (PES) Membrane / Mini Polypropylene Structure Cartridge Mini-Capsule Mini-Cartridge.,.4,.,.,.45,.65,.8 S Aqueous based chemicals; recirculating etch baths; UPW systems PROFLOW II PTFE Membrane / Polypropylene / Mini Structure Cartridge Mini-Capsule Mini-Cartridge.3,.5,.,.,.45, S Ultrapure chemicals and gas processing; photochemical processing Bulk chemical distribution POLYFLOW MEMBRANE Polypropylene Nominal Rated Membrane / Polypropylene Structure Cartridge.4,.7,.,. S Filtration of photochemicals and ultrapure chemicals Gas fi ltration POLYFLOW Polypropylene Absolute Rated Depth Media / Polypropylene Structure *Patent pending Cartridge Mini-Capsule Mini-Cartridge.6,.,.5, 5,,, 4 DI water prefi ltration Solvent and gas prefi ltration General fi ltration S SELECT Technology U Ultraclean Technology XL XL Technology S The revolutionary SELECT technology filter cartridges can improve and lower the costs of wafer processing. Imagine: up to 8% more effective fi ltration area with twice the throughput. All of this with a particle retention of >99.99% from a product that is cleanroom manufactured and tested. XL XL technology provides maximum fl ow rate and lifetime. It combines SELECT technology with a larger diameter cartridge (3.5") for the highest fl ows in the industry. U Ultraclean technology leads the microelectronics industry in cleanliness. Ultraclean is a proprietary process applied to electronics grade products. It provides a total metals extractables level of <5ppb. Ultraclean s low level of metals extractables provides users with a highly consistent manufacturing process and very low product reject rates. Parker Hannifin Corporation is committed to provide the highest quality product to our customers. To this end, our ISO 9 certified Quality System ensures that this occurs. At Parker Hannifin Corporation, we do our best to resolve all quality issues in a quick and timely manner. In addition, we strive to eliminate problems before they are seen. By taking this continuously proactive approach to the quality of all of our products, Parker Hannifin Corporation has the best product on the market at all times. 8

11 9 Wet Etch and Clean

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13 33 Fluoroflow All-fluoropolymer cartridge for aggressive applications The Fluorofl ow fi lter cartridge is our standard product for aggressive wet etch and clean applications. It provides good fl ow rates and on-stream life at an economical cost. The all-fl uoropolymer construction provides excellent chemical resistance for the most aggressive applications up to 5 C. It is available either ozone DI fl ushed and dried or wet-packed for quick installation. Benefits Economical Wet-pack option for quick installation All-fl uoropolymer for maximum chemical resistance % integrity tested for consistent quality Applications Wet etch and clean Phosphoric acid Sulfuric acid Hydrofluoric acid Nitric acid Piranha SC,SC NMP-based solvents Other high temperature or ozonated processes Parker Hannifin Corporation provides our customers with unsurpassed product consistency and cost-efficiency. Our experienced professionals can help you select the right solution for your application. For more information or to place an order, contact your local distributor. Information on product specifications, applications and chemical compatibility can be found on our web site at or through your nearest Parker Hannifin Corporation office. Parker Hannifin Corporation designs and manufactures an extensive line of innovative solutions for specific applications in the Microelectronics, Biopharmaceutical, Food and Beverage, Industrial and Chemical industries.

14 Fluoroflow Specifications Materials of Construction % Fluoropolymer construction Effective Filtration Area 6.8ft (.63m ) per nominal " (5mm) cartridge Metals Extractables* Standard: <ppb (total) Ultraclean: <5ppb (total) *in a % HNO3 extraction Performance Attributes Water Flow rates, Typical *.5μm.9gpm/psid (4.9lpm/mbar).μm.3gpm/psid (.7lpm/mbar).μm 3.gpm/psid (7.6lpm/mbar).45μm 4.7gpm/psid (5.8lpm/mbar).μm 6.7gpm/psid (36.9lpm/mbar) *Per (5mm) cartridge equivalent 7 Maximum Differential Pressure/ Temperature Forward 8psid 75ºF (4ºC) 55psid 67ºF (75ºC) 3psid 57ºF (5ºC) 5psid 3ºF (5ºC) Reverse 5psid 75ºF (4ºC) 5psid 5ºF (ºC) Cleanliness (particle shedding) Wet-packed < particles/ml >.μm after 7gal at gal/min TOC/Resistivity Rinse-up (wet-packed) TOC recovery within 3-5ppb of feed without additional rinse-up. Resistivity recovery within.4megohm-cm of feed after gpm Ordering Information Each cartridge is identified with a product number, pore size and lot number for traceability. and Dry and Dry U Ultraclean (pre-wet) K Kalrez Specifi cations are subject to change without notifi cation Fluorofl ow is a registered trademark of Parker Hannifi n Corporation. Viton and Kalrez are registered trademarks of E.I. DuPont de Nemours & Co., Inc. Chemraz is a registered trademark of Green, Tweed Inc. 8 Parker Hannifin Process Advanced Filtration Inc. All Rights Reserved SPEC -FS-8 Rev I 3/8

15 333 Fluoroflow -HSA Increased performance all-fluoropolymer cartridge for aggressive applications The Fluorofl ow -HSA fi lter cartridge provides good fl ow rates and on-stream life. The enhanced pleating provides more than 4% more surface area than our standard Fluorofl ow. This results in increased bath turnover and longer fi lter lifetime demanded by today s fabs. The allfl uoropolymer construction provides excellent chemical resistance for the most aggressive applications up to 8 C. Available wet-packed for quick installation or Ultraclean wetpacked which offers the lowest metals extractables in the industry. Benefits Increased fi ltration area for longer life Higher fl ow rates for increased bath turn over Wet-pack option for quick installation Ultraclean wet-pack option for absolute cleanliness All-fl uoropolymer for most maximum chemical resistance % integrity tested for consistent quality Applications Wet etch and clean Phosphoric acid Sulfuric acid Hydrofl uoric acid Nitric acid Piranha SC,SC NMP-based solvents Other high temperature or ozonated processes Parker Hannifin Corporation provides our customers with unsurpassed product consistency and cost-efficiency. Our experienced professionals can help you select the right solution for your application. For more information or to place an order, contact your local distributor. Information on product specifications, applications and chemical compatibility can be found on our web site at or through your nearest Parker Hannifin Corporation office. Parker Hannifin Corporation designs and manufactures an extensive line of innovative solutions for specific applications in the Microelectronics, Biopharmaceutical, Food and Beverage, Industrial and Chemical industries. 3

16 Fluoroflow -HSA Specifications Materials of Construction % Fluoropolymer construction All components are thermally bonded to ensure integrity and reduce extractables. Effective Filtration Area 4.8ft² (.45 m²) 4" (mm) cartridge 9.8ft² (.9 m²) " (5mm) cartridge Performance Attributes Water Flow rates, Typical *.3μm.65gpm/psid (3.6lpm/ mbar).5μm.5gpm/psid (8.lpm/ mbar).μm 3.gpm/psid (7.6lpm/ mbar).μm 3.9gpm/psid (.5lpm/ mbar).45μm 7.gpm/psid (38.5lpm/ mbar).μm.gpm/psid (55.lpm/ mbar) *Per (5mm) cartridge equivalent Metals Extractables* Standard: <ppb (total) Ultraclean: <5ppb (total) *in a % HNO3 extraction Maximum Differential Pressure/ Temperature Forward: 8psid 75ºF (4ºC) 55psid 67ºF (75ºC) 3psid 57ºF (5ºC) 5psid 3ºF (5ºC) Forward HT option: psid 75ºF (4ºC) 75psid 67ºF (75ºC) 5psid 57ºF (5ºC) 5psid 356ºF (8ºC) Reverse: 5psid 75ºF (4ºC) 5psid 5ºF (ºC) Cleanliness (particle shedding) Wet-packed: < particles/ml >.μm after 7gal at gpm TOC/Resistivity Rinse-up (wet-packed) TOC recovery within 3-5ppb of feed without additional rinse-up. Resistivity recovery within.4megohm-cm of feed after gpm. Ordering Information Each cartridge is identified with a product number, pore size and lot number for traceability. Ultraclean (pre-wet) and dried and dried K Kalrez Specifications are subject to change without notification. Flourofl ow is a registered trademark of Parker Hannifi n Corporation. Viton and Kalrez are registered trademarks of E.I. DuPont de Nemours & Co., Inc. Chemraz is a registered trademark of Green, Tweed Inc. 8 Parker Hannifin Process Advanced Filtration Inc. All Rights Reserved SPEC-33-HSA Rev F 4/8 4

17 336 Fluoroflow -Select High performance all-fluoropolymer cartridge for aggressive applications The Fluorofl ow -SELECT fi lter cartridge provides exceptional fl ow rates and on-stream life. It utilizes our unique SELECT pleating technology that increases fi ltration area and fl ow rate by over 7% versus our standard Fluorofl ow. This results in increased bath turnover and longer fi lter lifetime demanded by today s fabs. The all-fl uoropolymer construction provides excellent chemical resistance for the most aggressive applications up to 8 C. Available wet-packed for quick installation or Ultraclean wetpacked which offers the lowest metals extractables in the industry. Benefits Large fi ltration area for longer life High fl ow rates for increased bath turn over Wet-pack option for quick installation Ultraclean wet-pack option for absolute cleanliness All-fl uoropolymer for maximum chemical resistance % integrity tested for consistent quality Applications Wet etch and clean Phosphoric acid Sulfuric acid Hydrofluoric acid Nitric acid Piranha SC,SC NMP-based solvents Other high temperature or ozonated processes Parker Hannifin Corporation provides our customers with unsurpassed product consistency and cost-efficiency. Our experienced professionals can help you select the right solution for your application. For more information or to place an order, contact your local distributor. Information on product specifications, applications and chemical compatibility can be found on our web site at or through your nearest Parker Hannifin Corporation office. Parker Hannifin Corporation designs and manufactures an extensive line of innovative solutions for specific applications in the Microelectronics, Biopharmaceutical, Food and Beverage, Industrial and Chemical industries. 5

18 Fluoroflow -Select Specifications Materials of Construction % Fluoropolymer construction All components are thermally bonded to ensure integrity and reduce extractables. Effective Filtration Area 6.ft (.56 m ) 4" (mm) cartridge.ft (. m ) " (5mm) cartridge Performance Attributes Water Flow rates, Typical *.3μm.85gpm/psid (4.7lpm/mbar).5μm.gpm/psid (.lpm/mbar).μm 4.gpm/psid (.6lpm/mbar).μm 4.6gpm/psid (5.3lpm/mbar).45μm.5gpm/psid (57.6lpm/mbar).μm 6.gpm/psid (87.8lpm/mbar) *Per (5mm) cartridge equivalent Metals Extractables* Standard: <ppb (total) Ultraclean: <5ppb (total) *in a % HNO3 extraction Maximum Differential Pressure/ Temperature Forward 8psid 75ºF (4ºC) 55psid 67ºF (75ºC) 3psid 57ºF (5ºC) 5psid 3ºF (5ºC) Forward HT option psid 75ºF (4ºC) 75psid 67ºF (75ºC) 5psid 57ºF (5ºC) 5psid 356ºF (8ºC) Reverse 5psid 75ºF (4ºC) 5psid 5ºF (ºC) Cleanliness (particle shedding) Wet-packed < particles/ml >.μm after 7gal at gal/min Dry-packed < particles/ml >.μm after gal at gal/min TOC/Resistivity Rinse-up (wet-packed) TOC recovery within 3-5ppb of feed without additional rinse-up. Resistivity recovery within.4megohm-cm of feed after gpm. Ordering Information Each cartridge is identified with a product number, pore size and lot number for traceability. Ultraclean (pre-wet) and dried and dried K Kalrez Specifi cations are subject to change without notifi cation Fluorofl ow is a registered trademark of Parker Hannifi n Corporation. Viton and Kalrez are registered trademarks of E.I. DuPont de Nemours & Co., Inc. Chemraz is a registered trademark of Green, Tweed Inc. 8 Parker Hannifin Process Advanced Filtration Inc. All Rights Reserved SPEC -FS-8 Rev I 3/8 6

19 3 9 Fluoroflow -XL Highest-performance all-fluoropolymer cartridge for aggressive applications The Fluorofl ow -XL fi lter cartridge is setting the new standard for exceptional fl ow rates and on-stream life. It utilizes a larger diameter cartridge (3.5 ) combined with our unique SELECT pleating technology that increases fi ltration area and fl ow rate by over 7%. This results in increased bath turnover and longer fi lter lifetime demanded by today s advanced 3mm fabs. The all-fl uoropolymer construction provides excellent chemical resistance for the most aggressive applications up to 8 C. Its integral fi lter design maximizes up-time with safe and simple change-outs. Available wet-packed for quick installation or Ultraclean wet-packed which offers the lowest metals extractables in the industry. Benefits Extra large fi ltration area for longer life Highest fl ow rates for maximum bath turn over Wet-pack option for quick installation Ultraclean option for absolute cleanliness All-fl uoropolymer for maximum chemical resistance % integrity tested for consistent quality Applications Wet etch and clean Phosphoric acid Sulfuric acid Hydrofl uoric acid Nitric acid Piranha SC,SC NMP-based solvents Other high temperature or ozonated processes Parker Hannifin Corporation provides our customers with unsurpassed product consistency and cost-efficiency. Our experienced professionals can help you select the right solution for your application. For more information or to place an order, contact your local distributor. Information on product specifications, applications and chemical compatibility can be found on our web site at or through your nearest Parker Hannifin Corporation office. Parker Hannifin Corporation designs and manufactures an extensive line of innovative solutions for specific applications in the Microelectronics, Biopharmaceutical, Food and Beverage, Industrial and Chemical industries. 7

20 Fluoroflow -XL Specifications Materials of Construction % Fluoropolymer construct All components are thermally bonded to ensure integrity and reduce extractables. Effective Filtration Area per " (5mm) Cartridge.5ft² (.4 m²).3μm.5ft² (.99 m²).5μm 8.5ft² (.7 m²).μm Performance Attributes Water Flow rates, Typical *.3μm.4gpm/psid (7.7lpm/mbar).5μm 3.3gpm/psid (8.lpm/mbar).μm 3.gpm/psid (7.3lpm/mbar) *Per (5mm) cartridge equivalent -inch (5mm) Typical Water Flow Rate (lpm) Metals Extractables* Standard: <3ppb (total) Ultraclean: <7ppb (total) *in a % HNO3 extraction Maximum Differential Pressure/ Temperature Forward: 7psid 75ºF (4 C) 5psid 67ºF (75 C) 3psid 57ºF (5ºC) 5psid 3ºF (5ºC) Forward HT option: 5psid (8ºC) Reverse: 5psid 75ºF (4ºC) 5psid 5ºF (ºC) Differential Pressure (psid) Cleanliness (particle shedding) Wet-packed: < particles/ml >.μm after 7gal at gpm Dry-packed: < particles/ml >.μm after gal at gpm Water Flow Rate (gpm).3.3μm.5.5μm..μm Differential Pressure (mbar) TOC/Resistivity Rinse-up (wet-packed) TOC recovery within 3-5ppb of feed without additional rinse-up. Resistivity recovery within.4megohm-cm of feed after gpm. Ordering Information Each cartridge is identified with a product number, pore size and lot number for traceability. FL End Fitting DESCRIPTION Flat Nominal Length 4 3 LENGTH 4" (mm) " (5mm) " (5mm) 3" (75mm) Filter Rating MICRON.3µm.5µm 5 7 K N O-Rings MATERIAL FEP-Encapsulated Viton* Chemraz Kalrez None E H* Options TEMPERATURE Electronic Standard (5 C Max) High Temperature (8 C Max) *H is only available in 4", " and " lengths Blank W U F Treatments DESCRIPTIONS UPW Flush and dried Wet Packed Ultraclean (pre-wet) Ozone Flush and dried Specifications are subject to change without notification. *Viton is a registered trademark of E.I. DuPont de Nemours & Co., Inc. 8 Parker Hannifin Process Advanced Filtration Inc. All Rights Reserved SPEC-FS-XL Rev B 3/ 8

21 5 Fluorocap All-fluoropolymer capsule for the most aggressive applications The Fluorocap encapsulated fi lter cartridge is our standard product for aggressive wet etch and clean applications. It provides good fl ow rates and on-stream life at an economical price. The all-fl uoropolymer construction provides excellent chemical resistance for the most aggressive applications up to 8 C. Its integral fi lter design maximizes up-time with safe and simple changeouts. Available wet-packed for quick installation or Ultraclean wet-packed which offers the lowest metals extractables in the industry. Benefits Economical Wide range of confi gurations and ratings Wet-pack option for quick installation Ultraclean option for absolute cleanliness All-fl uoropolymer for maximum chemical resistance % integrity tested for consistent quality Applications Wet etch and clean Hot phosphoric acid Sulfuric acid Hydrofl uoric acid Nitric acid Piranha SC,SC NMP-based solvents Other high temperature or ozonated processes Parker Hannifin Corporation provides our customers with unsurpassed product consistency and cost-efficiency. Our experienced professionals can help you select the right solution for your application. For more information or to place an order, contact your local distributor. Information on product specifications, applications and chemical compatibility can be found on our web site at or through your nearest Parker Hannifin Corporation office. Parker Hannifin Corporation designs and manufactures an extensive line of innovative solutions for specific applications in the Microelectronics, Biopharmaceutical, Food and Beverage, Industrial and Chemical industries. 9

22 Fluorocap Specifications Materials of Construction % Fluoropolymer construction All components are thermally bonded to ensure integrity and reduce extractables. Effective Filtration Area 9.8 ft² (.9m²) per " fi lter length Metals Extractables* Standard: <ppb (total) Ultraclean: <5ppb (total) *in a % HNO3 extraction Maximum Differential Pressure/ Temperature Forward: 8psid 75 F (4 C) Standard: 55psid 67 F (75 C) 3psid 57 F (5 C) 5psid 3 F (5 C) Forward: psid 75 F (4 C) HT Option: 75psid 67 F (75 C) 5psid 57 F (5 C) 5psid 356 F (8 C) Performance Attributes Water Flow rates, Typical*.3μm.65gpm/psid (3.3lpm/mbar).5μm.5gpm/psid (8.lpm/mbar).μm 3.gpm/psid (7.6lpm/mbar).μm 4.gpm/psid (.5lpm/mbar).45μm 6.6gpm/psid (36.lpm/mbar).μm 8.9gpm/psid (49.lpm/mbar) *Flow rates are for in-line Fluorocaps with 3/4 Parfl are fi ttings. Flow Direction Options T L R Cleanliness (particle shedding) Wet-packed: < particles/ml >.μm after 7gal at gpm TOC/Resistivity Rinse-up (wet-packed) TOC recovery within 3-5ppb of feed after gpm. Resistivity recovery within.4megohm-cm of feed after gpm. Reverse: 5psid 75 F (4 C) 5psid 5 F ( C) Ordering Information Each cartridge is identified with a product number, pore size and lot number for traceability. Y SP 3 Specifications are subject to change without notification. FluoroCap is a registered trademark of Parker Hannifi n Corporation. Parfl are is a trademark of Parker Hannifi n Corporation. FlareLock is a trademark of Fluoroware, Inc. 8 Parker Hannifin Process Advanced Filtration Inc. All Rights Reserved SPEC-FCAP Rev I 4/

23 53 Fluorocap -Select High performance all-fluoropolymer capsule for the most aggressive applications The Fluorocap -SELECT encapsulated fi lter cartridge provides exceptional fl ow rates and on-stream life. It utilizes our unique SELECT pleating that increases fi ltration area and fl ow by over 5% compared to our standard Fluorocap. This results in increased bath turnover and longer fi lter lifetime demanded by today s fabs. The all-fl uoropolymer construction provides excellent chemical resistance for the most aggressive applications up to 8 C. Its integral fi lter design maximizes up-time with safe and simple changeouts. Available wet-packed for quick installation or Ultraclean wet-packed which offers the lowest metals extractables in the industry. Benefits Large fi ltration area for longer life High fl ow rates for maximum bath turn over Wet-pack option for quick installation Ultraclean option for absolute cleanliness All-fl uoropolymer for maximum chemical resistance % integrity tested for consistent quality Applications Wet etch and clean Hot phosphoric acid Sulfuric acid Hydrofl uoric acid Nitric acid Piranha SC,SC NMP-based solvents Other high temperature or ozonated processes Parker Hannifin Corporation provides our customers with unsurpassed product consistency and cost-efficiency. Our experienced professionals can help you select the right solution for your application. For more information or to place an order, contact your local distributor. Information on product specifications, applications and chemical compatibility can be found on our web site at or through your nearest Parker Hannifin Corporation office. Parker Hannifin Corporation designs and manufactures an extensive line of innovative solutions for specific applications in the Microelectronics, Biopharmaceutical, Food and Beverage, Industrial and Chemical industries.

24 Fluorocap -Select Specifications Materials of Construction % Fluoropolymer construction All components are thermally bonded to ensure integrity and reduce extractables. Effective Filtration Area. ft² (.m²) per " (5mm) for.3 &.5μm.4 ft² (.m²) per " (5mm) for other ratings Metals Extractables* Standard: <ppb (total) Ultraclean: <5ppb (total) *in a % HNO3 extraction Maximum Differential Pressure/Temperature Forward: 8psid 75 F (4 C) Standard: 55psid 67 F (75 C) 3psid 57 F (5 C) 5psid 3 F (5 C) Forward: psid 75 F (4 C) HT Option: 75psid 67 F (75 C) 5psid 57 F (5 C) 5psid 356 F (8 C) Reverse: 5psid 75 F (4 C) 5psid 5 F ( C) Performance Attributes Water Flow rates, Typical *.3μm.85gpm/psid (4.6lpm/mbar).5μm.gpm/psid (.lpm/mbar).μm 4.gpm/psid (.5lpm/mbar).μm 4.6gpm/psid (5.3lpm/mbar).45μm 9.6gpm/psid (5.7lpm/mbar).μm 4.8gpm/psid (8.3lpm/mbar) * Flow rates shown are for FluoroCap fi lters with 3/4" Parfl are (in-line) fi ttings. Flow Direction Options T L R Differential Pressure (psid) -inch (5mm) Capsule Water Flow Rate (lpm) Cleanliness (particle shedding) Wet-packed: particles/ml >.μm after 7gal at gpm TOC/Resistivity Rinse-up (wet-packed) TOC recovery within 3-5ppb of feed after gpm. Resistivity recovery within.4megohm-cm of feed after gpm..3 m.5 m. m. m.45 m. m Water Flow Rate (gpm) 3 Differential Pressure ( mbar) Ordering Information Each cartridge is identified with a product number, pore size and lot number for traceability. F F Style DESCRIPTION In-Line C W U Treatment DESCRIPTION Dry Packed (STD) Ozonated UPW Flushed and et Packed Ultraclean C 4 Vent/Drain connections are /4" versions of the inlet/outlet fittings, except for codes K and W which are /" Pillar vent/drain fittings. H Options TEMPERATURE Flourocap-Standard (5 C max) High Temperature (8 C max) 3 4 Element Length Connections LENGTH DESCRIPTION DESCRIPTION 4" (mm) B 3/4" Buttweld K 3/4" Pillar 9 " (5mm) C 3/8" Parflare 9 P 3/4" MNPT " (5mm) D /" Parflare 9 3" (75mm) E 3/4" Parflare 9 " (5mm) (Short) F 3 3/4" Parflare G 3/8" Parflare H /" Parflare J 3/4" Flarelock Vent Alignment 4 ALIGNMENT Same Side 8 Opposite Side S D Filter Rating MICRON 93.3µm 95.5µm.µm.µm 4.45µm.µm T L R Style DESCRIPTION T-Style L-Style (Left) R-Style (Right) C W U Treatment DESCRIPTION Dry Packed (STD) Ozonated UPW Flushed and Wet Packed Ultraclean C F cannot be ordered with W connections. Inline only 3 T, L, R can only be ordered with F and W connections 4 Vent/Drain connections are /4" versions of the inlet/outlet fittings, except for codes K and W which are /" Pillar vent/drain fittings. 5 Specifications are subject to change without notification. FluoroCap is a registered trademark of Parker Hannifi n Corporation. Parfl are is a trademark of Parker Hannifi n Corporation. FlareLock is a trademark of Fluoroware, Inc. H Options TEMPERATURE Flourocap-Standard (5 C max) High Temperature (8 C max) Element Length LENGTH 4" (mm) " (5mm) Connections DESCRIPTION DESCRIPTION F 3 3 3/4" Parflare W 3/4" Pillar J 3/4" Flarelock Y 3/4" SP3 Vent Alignment 4 ALIGNMENT C 5 Centered Filter Rating MICRON 93.3µm 95.5µm.µm.µm 4.45µm.µm 8 Parker Hannifin Process Advanced Filtration Inc. All Rights Reserved SPEC-FCAP-SELECT Rev H 4/8

25 56 Fluorocap -XL Highest-performance all-fluoropolymer capsule for the most aggressive applications The Fluorocap -XL encapsulated fi lter cartridge is setting the new standard for exceptional fl ow rates and on-stream life. It utilizes a larger diameter cartridge combined with our unique SELECT pleating that increases fi ltration area by over 7%. This results in increased bath turnover and longer fi lter lifetime demanded by today s advanced 3mm fabs. The all-fl uoropolymer construction provides excellent chemical resistance for the most aggressive applications up to 8 C. Its integral fi lter design maximizes up-time with safe and simple change-outs. Available wetpacked for quick installation or Ultraclean wet-packed which offers the lowest metals extractables in the industry. Benefits Extra large fi ltration area for longer life Highest fl ow rates for maximum bath turn over Wet-pack option for quick installation Ultraclean option for absolute cleanliness All-fl uoropolymer for maximum chemical resistance % integrity tested for consistent quality Applications Wet etch and clean Hot phosphoric acid Sulfuric acid Hydrofl uoric acid Nitric acid Piranha SC, SC NMP-based solvents Other high temperature or ozonated processes Parker Hannifin Corporation provides our customers with unsurpassed product consistency and cost-efficiency. Our experienced professionals can help you select the right solution for your application. For more information or to place an order, contact your local distributor. Information on product specifications, applications and chemical compatibility can be found on our web site at or through your nearest Parker Hannifin Corporation office. Parker Hannifin Corporation designs and manufactures an extensive line of innovative solutions for specific applications in the Microelectronics, Biopharmaceutical, Food and Beverage, Industrial and Chemical industries. 3

26 Fluorocap -XL Specifications Materials of Construction % Fluoropolymer construction All components are thermally bonded to ensure integrity and reduce extractables. Effective Filtration Area per " (5mm) Cartridge.5ft² (.4 m²).3μm.5ft² (.99 m²).5μm 8.5ft² (.7 m²).μm Metals Extractables* Standard: <3ppb (total) Ultraclean: <7ppb (total) *in a % HNO3 extraction Maximum Differential Pressure/ Temperature Forward: 7psid 75ºF (4 C) Standard: 5psid 67ºF (75 C) 5psid 3ºF (5ºC) Forward HT option: 5psid (8ºC) Reverse: 5psid 75ºF (4ºC) 5psid 5ºF (ºC) Performance Attributes Water Flow rates, Typical *.3μm.gpm/psid (6.6lpm/mbar).5μm.7gpm/psid (4.9lpm/mbar).μm 6.5gpm/psid (35.8lpm/mbar) *Flow rates are for in-line Fluorocaps with 3/4 Parfl are fi ttings. Differential Pressure (psid) -inch (5mm) Typical Water Flow Rate (lpm) Cleanliness (particle shedding) Wet-packed: < particles/ml >.μm after 7gal at gpm TOC/Resistivity Rinse-up (wet-packed) TOC recovery within 3-5ppb of feed after gpm. Resistivity recovery within.4megohm-cm of feed after gpm..3μm Water Flow Rate (gpm).5μm.μm Differential Pressure (mbar) Ordering Information Each capsule is identified with a product number, pore size and lot number for traceability. F L - - Style DESCRIPTION F In-Line C W U Treatment DESCRIPTION Dry Padded (STD) Ozonated UPW Flushed and Wet Packed Ultraclean 4 Element Length DESCRIPTION 4" (mm) " (5mm) " (5mm) " (5mm) (Short) C H Options DESCRIPTION Standard (5 o C max) High Temperature (8 o C max) P H J Connections DESCRIPTION 3/4" Parflare /" Parflare 3/4" Flarelock Vent Alignment DESCRIPTION S Same Side D 8º Opposite Side Filter Rating MICRON 93.3µm 95.5µm F cannot be ordered with W connections. Inline only. 3 T and L can only be ordered with W or Y connections. L - C - Style DESCRIPTION T T-Style L L-Style (left) C W U Treatment DESCRIPTION Dry Padded (STD) Ozonated UPW Flushed and Wet Packed Ultraclean Element Length DESCRIPTION 4" (mm) " (5mm) C H Options DESCRIPTION Standard (5 o C max) High Temperature (8 o C max) W 3 Y 3 Connections DESCRIPTION 3/4 Pillar 3/4 SP 3 S D C Vent Alignment DESCRIPTION Same Side 8º Opposite Side Centered Filter Rating MICRON 93.3µm 95.5µm F cannot be ordered with W connections. Inline only. 3 T and L can only be ordered with W or Y connections. Specifications are subject to change without notification. 8 Parker Hannifin Process Advanced Filtration Inc. All Rights Reserved SPEC-FC-XL Rev C 3/ 4

27 Chemflow -PE Chemically-resistant cartridge for bulk and lower temperature applications The Chemfl ow -PE fi lter cartridge uses a PTFE membrane along with HDPE supports that provide an economical alternative to all-fl uoropolymer cartridges. It provides a high degree of retention and cleanliness along with good fl ow and lifetime. This fi lter is ideally suited for bulk chemical delivery and lower temperature wet processes (<6 C). It is available dry or wetpacked for quick installation. Benefits Good fl ow rates Long lifetime Wet-pack option for quick installation PTFE/ HDPE construction for chemical resistance % integrity tested in cleanroom environment Applications Bulk chemical delivery Acids, bases, solvents, photochemicals Wet etch and clean (< 6 C) Phosphoric acid Hydrofl uoric acid Nitric acid SC,SC Solvents Parker Hannifin Corporation provides our customers with unsurpassed product consistency and cost-efficiency. Our experienced professionals can help you select the right solution for your application. For more information or to place an order, contact your local distributor. Information on product specifications, applications and chemical compatibility can be found on our web site at or through your nearest Parker Hannifin Corporation office. Parker Hannifin Corporation designs and manufactures an extensive line of innovative solutions for specific applications in the Microelectronics, Biopharmaceutical, Food and Beverage, Industrial and Chemical industries. 5

28 Chemflow -PE Specifications Materials of Construction Membrane : PTFE Support Layers : HDPE Structure : HDPE Effective Filtration Area 8.3ft (.78m ) per " (5mm) cartridge Performance Attributes Water Flow rates, Typical *.5μm.8gpm/psid (4.39lpm/mbar).μm.gpm/psid (.53lpm/mbar).μm 3.8gpm/psid (.86lpm/mbar).μm gpm/psid (55.lpm/bar) * Per -inch (5mm) cartridge equivalent. Metals Extractables* Standard: <55ppb (total) *in a % HNO3 extraction -inch (5 mm) Cartridges Water Flow Rate (lpm) Maximum Differential Pressure/ Temperature Forward: 8psid 75ºF (4ºC) 5 4.5µm.µm 3 Reverse: 5psid 75ºF (4ºC) Maximum Operating Temperature 4ºF (6ºC) Cleanliness (particle shedding) Wet-packed: < particles/ml >.μm after 5gal at gpm Differential Pressure (psid) 3.µm.µm Differential Pressure (mbar) Data is from open bag and installed, no additional installation flushing. TOC/Resistivity Rinse-up (wet-packed) Water Flow Rate (gpm) TOC rinse-up to background plus 5ppb of feed after gpm. Resistivity rinseup to background minus. megohm-cm of feed after gpm. Ordering Information Each cartridge is identified with a product number, pore size and lot number for traceability. PE E A Insert Style DESCRIPTION None (Std) /" Shortened on Fitting End Fitting DESCRIPTION 6/Flat /Flat 6/Fin /Fin 3 4 Length LENGTH " (5mm) " (5mm) 3" (75mm) 4" (mm) Filter Rating 95 MICRON.5µm.µm.µm.µm 4 5 O-Ring Material MATERIAL Buna N EPDM Silicone Viton FEP Encapsulated Viton Blank W Options TREATMENT Standard Wet Packed Specifications are subject to change without notification. Chemflow is a registered trademark of Parker Hannifin Corporation. Viton is a registered trademark of E.I. DuPont de Nemours & Co., Inc. Cuno is a registered trademark of Cuno Inc. 8 Parker Hannifin Process Advanced Filtration Inc. All Rights Reserved SPEC-PE-Rev. H 3/8 6

29 35 Proflow II-E Chemically-resistant cartridge for ultrapure microelectronics fluids and gases The Profl ow II-E fi lter cartridge uses a PTFE membrane along with highpurity polypropylene supports that provide an economical alternative to all-fl uoropolymer cartridges. It provides a high degree of retention and cleanliness along with good fl ow and lifetime. This fi lter is ideally suited for ultrapure microelectronics fl uids and gases. The hydrophobic PTFE membrane serves as a highly effi cient barrier to insure low moisture content of gases. It is available dry or wetpacked for quick installation and lower extractables. Benefits Good liquid and gas fl ow rates Wet-pack option for quick installation PTFE/ PP construction for chemical resistance Wide variety of confi gurations and ratings % integrity tested in cleanroom environment Applications Bulk chemical delivery Acids, bases, solvents, photochemicals Wet etch and clean Dilute acids DI water (<8 C) Ultrapure electronics-grade gases Parker Hannifin Corporation provides our customers with unsurpassed product consistency and cost-efficiency. Our experienced professionals can help you select the right solution for your application. For more information or to place an order, contact your local distributor. Information on product specifications, applications and chemical compatibility can be found on our web site at or through your nearest Parker Hannifin Corporation office. Parker Hannifin Corporation designs and manufactures an extensive line of innovative solutions for specific applications in the Microelectronics, Biopharmaceutical, Food and Beverage, Industrial and Chemical industries. 7

30 Proflow II-E Specifications Materials of Construction Membrane : PTFE Support layers : Polypropylene Structure : Polypropylene Effective Filtration Area 4.6ft² (.43 m²) 5" (3mm) cartridges 9.3ft² (.86 m²) " (5mm) cartridges Performance Attributes Water Flow rates, Typical *.3μm.6gpm/psid (3.3lpm/mbar).5μm.8gpm/psid (4.39lpm/mbar).μm.7gpm/psid (9.33lpm/mbar) *Per -inch (5mm) cartridge equivalent..μm 3.gpm/psid (7.5lpm/mbar).45μm 7.6gpm/psid (4.7lpm/mbar).μm 9.gpm/psid (49.97lpm/mbar) Maximum Differential Pressure/ Temperature Forward: 8psid 75ºF (4ºC) 4psid 8ºF (8ºC) Reverse: 5psid 75ºF (4ºC) Cleanliness (particle shedding) Wet-packed: < particles/ml >.μm after 6gal at gpm Data as from open bag and installed, no additional installation fl ushing..3 TOC/Resistivity Rinse-up (wet-packed) TOC rinse-up to background plus 5ppb of feed after gpm. Resistivity rinse-up to background minus.megohm-cm of feed after gpm. Ordering Information Each cartridge is identified with a product number, pore size and lot number for traceability Specifications are subject to change without notification. Profl ow is a registered trademark of Parker Hannifi n Corporation. Vilton is a registered trademark of E.I. DuPont de Nemours & Co., Inc. Cuno is a registered trademark of Cuno Inc. 8 Parker Hannifin Process Advanced Filtration Inc. All Rights Reserved SPEC-3-P-II-E Rev I 4/8 8

31 353 Proflow II-E-Select High-performance cartridge for ultrapure microelectronics fluids and gases The Profl ow II-E-SELECT fi lter cartridge provides exceptional fl ow rates and on-stream life. It uses a PTFE membrane along with highpurity polypropylene supports that provide an economical alternative to all fl uoropolymer cartridges. With its unique SELECT pleating technology, the liquid fl ow rates are increased by up to 5% verses our standard Profl ow II-E. This fi lter is ideally suited for ultrapure microelectronics fl uids and gases. It is available dry or wetpacked for quick installation and lower extractables. Benefits Excellent liquid and gas fl ow rates Wet-pack option for quick installation PTFE/ PP construction for chemical resistance % integrity tested in cleanroom environment Applications Bulk chemical delivery Acids, bases, solvents, photochemicals Wet etch and clean Dilute acids DI water (<8 C) Ultrapure electronics-grade gases Parker Hannifin Corporation provides our customers with unsurpassed product consistency and cost-efficiency. Our experienced professionals can help you select the right solution for your application. For more information or to place an order, contact your local distributor. Information on product specifications, applications and chemical compatibility can be found on our web site at or through your nearest Parker Hannifin Corporation office. Parker Hannifin Corporation designs and manufactures an extensive line of innovative solutions for specific applications in the Microelectronics, Biopharmaceutical, Food and Beverage, Industrial and Chemical industries. 9

32 Proflow II-E-Select Specifications Materials of Construction Membrane : PTFE Support layers : Polypropylene Structure : Polypropylene All components are thermally bonded to ensure integrity and reduce extractables. Performance Attributes Water Flow rates, Typical *.3μm.8gpm/psid.5μm.3gpm/psid (7.4lpm/mbar).μm.6gpm/psid (4.7lpm/mbar).μm 3.5gpm/psid (9.lpm/mbar)* * Per -inch (5 mm) cartridge equivalent. Effective Filtration Area.4ft² (.5m²) per " (5mm) cartridge -inch (5mm) cartridge Water Flow Rate (lpm) Maximum Differential Pressure/ Temperature Forward: 7psid 68 F ( C) 4psid 8 F (8 C) m 4 Reverse: 4psid 68 F ( C) Cleanliness (particle shedding) Wet-packed: < particles/ml >.μm after 6gal at gpm Data as from open bag and installed, no additional installation fl ushing. TOC/Resistivity Rinse-up (wet-packed) TOC rinse-up to background plus 5ppb of feed after gpm. Resistivity rinse-up to background minus.megohm-cm of feed after gpm. Differential Pressure (psid) m Water Flow Rate (gpm). m. m Differential Pressure (mbar) Ordering Information Each cartridge is identified with a product number, pore size and lot number for traceability. PS E 5 6 A Insert Style DESCRIPTION None (Std) Encapsulated Stainless Steel Encapsulated Polysulfone /" Shortened on Fitting End Fitting DESCRIPTION 6/Flat /Flat 6/Fin /Fin 3 4 Length LENGTH " (5mm) " (5mm) 3" (75mm) 4" (mm) Filter Rating MICRON 93.3µm 95.5µm.µm.µm N O-Rings MATERIAL EPDM Silicone Viton FEP-Encapsulated Viton FEP-Encapsulated Silicone None Blank W Options TREATMENT Standard Wet Packed Specifications are subject to change without notification. Profl ow is a registered trademark of Parker Hannifi n Corporation. Vilton is a registered trademark of E.I. DuPont de Nemours & Co., Inc.. 8 Parker Hannifin Process Advanced Filtration Inc. All Rights Reserved SPEC-PS-E Rev F 4/8 3

33 3 4 6 Proflow II-E Mini-Cartridges Small-volume cartridge for ultrapure microelectronics fluids and gases The Profl ow II-E mini cartridge uses a PTFE membrane along with highpurity polypropylene supports that provide an economical alternative to all-fl uoropolymer cartridges. It provides a high degree of retention and cleanliness along with good fl ow and lifetime. This fi lter is ideally suited for ultrapure microelectronics fl uids and gases. The hydrophobic PTFE membrane serves as a highly effi cient barrier to insure low moisture content of gases. Its design uses an internal 6 O-ring that is available in several materials. Benefits Good liquid and gas fl ow rates PTFE/ PP construction for chemical resistance Secure internal O-ring seal % integrity tested in cleanroom environment Applications Wet etch and clean Dilute acids DI water (<8 C) Ultrapure electronics-grade gases Drying systems Parker Hannifin Corporation provides our customers with unsurpassed product consistency and cost-efficiency. Our experienced professionals can help you select the right solution for your application. For more information or to place an order, contact your local distributor. Information on product specifications, applications and chemical compatibility can be found on our web site at or through your nearest Parker Hannifin Corporation office. Parker Hannifin Corporation designs and manufactures an extensive line of innovative solutions for specific applications in the Microelectronics, Biopharmaceutical, Food and Beverage, Industrial and Chemical industries. 3

34 Proflow II-E Mini-Cartridges Specifications Materials of Construction Membrane : PTFE Support layers : Polypropylene Structure : Polypropylene All components are thermally bonded to ensure integrity and minimize extractables. Performance Attributes Water Flow rates, Typical.3μm.gpm/psid.5μm.4gpm/psid.45μm.6gpm/psid Effective Filtration Area 3.ft (.9m ) per D-size (5mm) cartridge Maximum Differential Pressure/ Temperature Forward: 7psid 75ºF (4ºC) 35psid 4ºF (6ºC) psid 67ºF (75ºC) Reverse: 3psid 75ºF (4ºC) Resistivity Rinse-up The rinse-up volume required for Profl ow-e mini-cartridges to reach 8megohm-cm resistivity is approximately gal (45.4 liters). Differential Pressure (psid) D-size (5mm) Mini-Cartridge Water Flow Rate (lpm) µm.µm 3 Differential Pressure (mbar) Water Flow Rate (gpm) Ordering Information Each cartridge is identified with a product number, pore size and lot number for traceability. 34 M D E M M Filter Rating MICRON.µm.µm µm.5µm 4.45µm.µm 4 N -Ring MATERIALS Buna N EPDM Silicone Viton None Specifications are subject to change without notification. Polyfl ow is a registered trademark of Parker Hannifi n Corporation. Viton is registered trademark of E.I. DuPont de Nemours & Co., Inc. 8 Parker Hannifin Process Advanced Filtration Inc. All Rights Reserved SPEC -34E-MC Rev G 4/8 3

35 3 4 3 Proflow II-E Mini-Capsules Small-volume capsule for ultrapure microelectronics fluids and gases The Profl ow II-E mini-capsule uses a PTFE membrane along with highpurity polypropylene supports that provide an economical alternative to all-fl uoropolymer cartridges. It provides a high degree of retention and cleanliness along with good fl ow and lifetime. This fi lter is ideally suited for ultrapure microelectronics fl uids and gases. The hydrophobic PTFE membrane serves as a highly effi cient barrier to insure low moisture content of gases. Fast and easy change-outs are assured with the encapsulated design. Three sizes are available to match the application and minimize hold-up volume. Benefits Good liquid and gas fl ow rates PTFE/ PP construction for chemical resistance Fast and easy change-out Three capsule sizes % integrity tested Applications Wet etch and clean Dilute acids DI water (<8 C) Ultrapure electronics-grade gases Small-volume lab systems Parker Hannifin Corporation provides our customers with unsurpassed product consistency and cost-efficiency. Our experienced professionals can help you select the right solution for your application. For more information or to place an order, contact your local distributor. Information on product specifications, applications and chemical compatibility can be found on our web site at or through your nearest Parker Hannifin Corporation office. Parker Hannifin Corporation designs and manufactures an extensive line of innovative solutions for specific applications in the Microelectronics, Biopharmaceutical, Food and Beverage, Industrial and Chemical industries. 33

36 Proflow II-E Mini-Capsules Specifications Materials of Construction Membrane : PTFE Support layers : Polypropylene Structure : Polypropylene Housing : Polypropylene All components are thermally bonded to ensure integrity and minimize extractables. Effective Filtration Area H = Half-size.ft (.m ) per 4.8" (mm) capsule S = Standardsize.ft (.m ) per 6.38" (6mm) capsule D = Double-size 3.ft (.9m ) per 7.9" (mm) capsule Maximum Differential Pressure/ Temperature Forward: 7psid 75ºF (4ºC) 35psid 4ºF (6ºC) psid 67ºF (75ºC) Reverse: 3psid 75ºF (4ºC) Resistivity Rinse-up The rinse-up volume required for double-size Profl ow-e capsules to reach 8megohm-cm resistivity is approximately gal (45.4 liters). Performance Attributes Water Flow Rates, Typical Differential Pressure (psid) Differential Pressure (psid).µm Proflow II-E Water Flow Rate (lpm) Half Standard Double 3 4 Water Flow Rate (gpm) Water Flow Rate (lpm) µm Proflow II-E Half Standard Double 3 3 Differential Pressure (mbar) Differential Pressure (mbar) Water Flow Rate (gpm) Ordering Information Each cartridge is identified with a product number, pore size and lot number for traceability. 34 C E Size Inlet/Outlet Filter Rating Vent -Ring H S D DESCRIPTION Half Size Standard Size Double Size B H S D P J K G CONNECTION /4" Hose Barb /" Hose Barb /" Sanitary Flange Quick Disconnect /4" NPT (Male) /" NPT (Male) 3 /8" NPT (Female) Swagelok /" MICRON. µm. µm 93.3 µm 95.5 µm 4.45 µm. µm 4 N Z MATERIAL Buna N EPDM Silicone Viton None No vents * Select code for both Inlet and Outlet Specifications are subject to change without notification. Polyfl ow is a registered trademark of Parker Hannifi n Corporation. Viton is registered trademark of E.I. DuPont de Nemours & Co., Inc. Swagelok is a registered trademark of The Crawford Fitting Company. 8 Parker Hannifin Process Advanced Filtration Inc. All Rights Reserved SPEC -34 CAPS-E Rev F 4/8 34

37 Clariflow -WE Economical hydrophilic PES membrane cartridges for aqueous applications Clarifl ow - WE cartridges provide an economical way to fi lter fl uids used in microelectronics such as DI water and aqueous-based chemicals. Constructed of the same high-quality materials as Clarifl ow -E or E-SELECT, these cartridges are suited to less demanding applications with respect to fl ow and lifetime. The combination of hydrophilic PES membrane and a high-purity, allpolypropylene support structure results in a very low level of ionic and organic extractables, broad chemical compatibility, and resistance to particle shedding. Every cartridge is fabricated in a clean room environment, pre-fl ushed with 8 megohm-cm ultrapure DI water, and % integrity tested in an ISOcertifi ed facility. Benefits Economical fi ltration High-retention hydrophilic membrane Broad chemical compatibility for multiple applications % integrity tested Applications BOE Dilute HF POU DI rinse Bulk DI water systems Copper plating Ni plating Hard disk wash processes Other dilute acids and bases Parker Hannifin Corporation provides our customers with unsurpassed product consistency and cost-efficiency. Our experienced professionals can help you select the right solution for your application. For more information or to place an order, contact your local distributor. Information on product specifications, applications and chemical compatibility can be found on our web site at or through your nearest Parker Hannifin Corporation office. Parker Hannifin Corporation designs and manufactures an extensive line of innovative solutions for specific applications in the Microelectronics, Biopharmaceutical, Food and Beverage, Industrial and Chemical industries. 35

38 Clariflow -WE Specifications Materials of Construction Membrane : Polyethersulfone Support layers : Polypropylene Structure : Polypropylene Effective Filtration Area 5.4ft²(.5m²) per " (5mm) cartridge Performance Attributes Water Flow rates, Typical *.4μm.7gpm/psid (3.84lpm/mbar).μm.3gpm/psid (7.4lpm/mbar).μm.6gpm/psid (4.7lpm/mbar).45μm 3.8gpm/psid (.86lpm/mbar) *Per (5mm) cartridge equivalent Maximum Differential Pressure/ Temperature Forward: 8psid 75ºF (4ºC) 4psid 8ºF (8ºC) Reverse: 5psid 75ºF (4ºC) 5 -inch (5mm) Cartridges Water Flow Rate (lpm) Bulk Packaging 3 Bulk packaged in case quantities to reduce material disposal " 8 per carton " per carton 3" per carton 4" 9 per carton Differential Pressure (psid) 4 3.4µm.µm.µm.45µm Differential Pressure (mbar) Water Flow Rate (gpm) Ordering Information Each cartridge is identified with a product number, pore size and lot number for traceability. 5 W E Insert Style DESCRIPTION No Insert (standard) 5 Encapsulated 36 SS Insert 6 Encapsulated Polysulfone Insert A /" Shortened on Fitting G H R End Fittings DESCRIPTION DOE (CUNO ) DOE 6\Flat \Flat /Internal/Flat 6\Fin \Fin /Internal/Recessed End cap 3/Recessed End cap (Ametek) /Recessed End cap 3 4 Nominal Length LENGTH " (5mm) " (5mm) 3" (75mm) 4" (,mm) All cartridges are.75" (69 mm) in diameter. Filter Rating MICRON 94.4µm.µm.µm 4.45µm 6.65µm Gasket/O-Rings 4 5* 6* N *O-rings only MATERIAL Buna N EPDM Silicone Viton Encapsulated Viton Encapsulated Silicone None Thickness (Gaskets Only) THICKNESS." (5mm).5" (3mm) 4 ()." (5mm) & ().5" (3mm) N None Specifications are subject to change without notification. Clarifl ow is a registered trademark of Parker Hannifi n Corporation. Viton is a registered trademark of E.I. DuPont de Nemours & Co., Inc. Cuno is a registered trademark of Cuno Inc. 8 Parker Hannifin Process Advanced Filtration Inc. All Rights Reserved SPEC-5WS Rev G 4/8 36

39 6 Clariflow -E Hydrophilic PES membrane cartridges for aqueous applications Clarifl ow -E cartridges are optimized for use in microelectronics applications such as DI water and aqueous-based chemicals. The unique mirroredanisotropic PES (Polyethersulfone) membrane has exceptionally high fl ow rates and on-stream lifetime while providing consistent removal of both organic and inorganic particulates. The combination of hydrophilic PES membrane and a high-purity, all-polypropylene support structure results in a very low level of ionic and organic extractables, broad chemical compatibility, and resistance to particle shedding. Every cartridge is fabricated in a clean room environment, pre-fl ushed with 8 megohm-cm ultrapure DI water, and % integrity tested in an ISO-certifi ed facility. Benefits High-retention hydrophilic membrane High fl ow rate Broad chemical compatibility for multiple applications Long on-stream life % integrity tested Applications BOE Dilute HF POU DI rinse Bulk DI water systems Copper plating Ni plating Hard disk wash processes Other dilute acids and bases Parker Hannifin Corporation provides our customers with unsurpassed product consistency and cost-efficiency. Our experienced professionals can help you select the right solution for your application. For more information or to place an order, contact your local distributor. Information on product specifications, applications and chemical compatibility can be found on our web site at or through your nearest Parker Hannifin Corporation office. Parker Hannifin Corporation designs and manufactures an extensive line of innovative solutions for specific applications in the Microelectronics, Biopharmaceutical, Food and Beverage, Industrial and Chemical industries. 37

40 Clariflow -E Specifications Materials of Construction Membrane : Polyethersulfone Support layers : Polypropylene Structure : Polypropylene Effective Filtration Area 6.8ft²(.63m²) per " (5mm) cartridges Maximum Differential Pressure/ Temperature Forward: 8psid 75ºF (4ºC) 4psid 8ºF (8ºC) Reverse: 5psid 75ºF (4ºC) Cleanliness (particle shedding) Dry-packed: < particles/ml >.μm after 6gal at gpm Data as from open bag and installed, no additional installation fl ushing. Resistivity Rinse-up Resistivity rinse-up to background minus.megohm-cm of feed after gpm. Performance Attributes Water Flow rates, Typical *.μm.5gpm/psid (.75lpm/mbar).4μm.gpm/psid (5.49lpm/mbar).μm.8gpm/psid (9.88lpm/mbar).μm 3.7gpm/psid (.3lpm/mbar).45μm 4.8gpm/psid (6.35lpm/mbar).65μm 8.9gpm/psid (48.86lpm/mbar).8μm 9.5gpm/psid (5.6lpm/mbar) * Per -inch (5 mm) cartridge equivalent. Differential Pressure (psid) 6 4 -inch (5mm) Cartridges Water Flow Rate (lpm) µm.4µm.µm.65µm.µm.45µm 4 3 Differential Pressure (mbar).8µm Water Flow Rate (gpm) Ordering Information Each cartridge is identified with a product number, pore size and lot number for traceability. 5 E Insert Style End Fitting DESCRIPTION DESCRIPTION None (STD) DOE (CUNO ) 5 6 Encapsulated 36L Stainless Steel Encapsulated * 3* DOE 6/Flat /Flat A Polysulfone 6 /Internal/Flat /" Shortened 7* 6/Fin on Fitting 8* /Fin G /Internal/Recessed Endcap H 3/Recessed Endcap (Ametek) R /Recessed Endcap * 5" cartridges are available in these configurations 5" cartridges are available in.4 through.8 m ratings. 3 O-rings only. Nominal Length LENGTH 5" (3mm) " (5mm) " (5mm) 3" (75mm) 4" (,mm) Filter Rating MICRON 9.µm 94.4µm.µm.µm 4.45µm 6.65µm 8.8µm Gasket/O-Rings 6 3 N MATERIAL Buna N EPDM Silicone Viton FEP Encapsulated Viton FEP Encapsulated Silicone None Thickness (Gaskets Only) 4 N THICKNESS." (5mm).5" (3mm) ()." (5mm) & ().5" (3mm) No Gasket Specifications are subject to change without notification. Clarifl ow is a registered trademark of Parker Hannifi n Corporation. Vilton is a registered trademark of E.I. DuPont de Nemours & Co., Inc. Cuno is a registered trademark of Cuno Inc. 8 Parker Hannifin Process Advanced Filtration Inc. All Rights Reserved SPEC-5E Rev L 4/8 38

41 6 Clariflow -E-Select High-performance hydrophilic PES membrane cartridges for aqueous applications Clarifl ow - E-SELECT cartridges are optimized for use in microelectronics applications such as DI water and aqueousbased chemicals. The unique mirroredanisotropic PES (Polyethersulfone) membrane has exceptionally high fl ow rates and on-stream lifetime while providing consistent removal of both organic and inorganic particulates. The innovative SELECT pleating provides increased performance over competitive cartridges. Membrane area is increased by over 5% while fl ows are 4% higher within the same footprint. The result is one of the longest lasting cartridges on the market. The combination of hydrophilic PES membrane and a high-purity, all-polypropylene support structure results in a very low level of ionic and organic extractables, broad chemical compatibility, and resistance to particle shedding. Every cartridge is fabricated in a clean room environment, pre-fl ushed with 8 megohm-cm ultrapure DI water, and % integrity tested in an ISO-certifi ed facility. Benefits High-retention hydrophilic membrane Unique SELECT pleating technology High fl ow rates for increased bath turnover Broad chemical compatibility for multiple applications Wide range of confi gurations and ratings Reduced overall cost of fi ltration % integrity tested Applications BOE Dilute HF POU DI rinse Bulk DI water systems Copper plating Ni plating Hard disk wash processes Other dilute acids and bases Parker Hannifin Corporation provides our customers with unsurpassed product consistency and cost-efficiency. Our experienced professionals can help you select the right solution for your application. For more information or to place an order, contact your local distributor. Information on product specifications, applications and chemical compatibility can be found on our web site at or through your nearest Parker Hannifin Corporation office. Parker Hannifin Corporation designs and manufactures an extensive line of innovative solutions for specific applications in the Microelectronics, Biopharmaceutical, Food and Beverage, Industrial and Chemical industries. 39

42 Clariflow -E-Select Specifications Materials of Construction Membrane : Polyethersulfone Support Layers : Polypropylene Structure : Polypropylene Effective Filtration Area 8.8ft² (.8m²).μm pore size per " (5mm) cartridge.3ft² (.96m²) other pore sizes per " (5mm) cartridge Performance Attributes Water Flow rates, Typical *.μm.9gpm/psid (4.94lpm/mbar).4μm.9gpm/psid (.43lpm/mbar).μm.6gpm/psid (4.7lpm/mbar).μm 5.gpm/psid (8.55lpm/mbar) * Per -inch (5 mm) cartridge equivalent. Maximum Differential Pressure/ Temperature Forward: 7psid C (68 F) 4psid 8 C (8 F) Reverse: 4psid C (68 F) Cleanliness (particle shedding) Dry-packed: < particles/ml >.μm after 6gal at gpm Data as from open bag and installed, no additional installation fl ushing. Resistivity Rinse-up Resistivity rinse-up to background minus.megohm-cm of feed after gpm. Ordering Information Each cartridge is identified with a product number, pore size and lot number for traceability. Specifications are subject to change without notification. Clarifl ow is a registered trademark of Parker Hannifi n Corporation. Viton is a registered trademarks of E.I. DuPont de Nemours & Co., Inc. 8 Parker Hannifin Process Advanced Filtration Inc. All Rights Reserved SPEC -CS-SELECT Rev E 4/8 4

43 57 Clariflow -E Mini-Cartridges Small-volume Hydrophilic PES membrane cartridges for aqueous applications Clarifl ow -E mini-cartridges are optimized for use in small-volume microelectronics applications such as DI water and aqueous-based chemicals. The unique mirroredanisotropic PES (Polyethersulfone) membrane has exceptionally high fl ow rates and on-stream lifetime while providing consistent removal of both organic and inorganic particulates The combination of hydrophilic PES membrane and a high-purity, all-polypropylene support structure results in a very low level of ionic and organic extractables, broad chemical compatibility, and resistance to particle shedding. Its design uses an internal 6 O-ring available in several materials. Benefits High-retention hydrophilic membrane High fl ow rate Broad chemical compatibility for multiple applications Secure internal O-ring seal % integrity tested Applications Aqueous electronics chemicals Small-volume lab systems DI water Parker Hannifin Corporation provides our customers with unsurpassed product consistency and cost-efficiency. Our experienced professionals can help you select the right solution for your application. For more information or to place an order, contact your local distributor. Information on product specifications, applications and chemical compatibility can be found on our web site at or through your nearest Parker Hannifin Corporation office. Parker Hannifin Corporation designs and manufactures an extensive line of innovative solutions for specific applications in the Microelectronics, Biopharmaceutical, Food and Beverage, Industrial and Chemical industries. 4

44 Clariflow -E Mini-Cartridges Specifications Materials of Construction Membrane : Polyethersulfone Support Layers : Polypropylene Structure : Polypropylene Effective Filtration Area.5ft (.3m ) per D-size (5mm) cartridge Maximum Differential Pressure/ Temperature Forward: 7psid 75ºF (4ºC) 35psid 4ºF (6ºC) psid 67ºF (75ºC) Reverse: 3psid 75ºF (4ºC) Performance Attributes Water Flow Rates, Typical Differential Pressure (psid) D-size (5mm) Mini-Cartridge Water Flow Rate (lpm) µm.4µm.µm.µm.45µm 3 Differential Pressure (mbar) Water Flow Rate (gpm) *Values for fl uids with viscosity of cp. Ordering Information Each cartridge is identified with a product number, pore size and lot number for traceability. 5 M D E M M Filter Rating MICRON.µm.µm 99.µm 94.4µm 4.45µm -Ring MATERIAL Buna N EPDM Silicone 4 Viton N None Specifications are subject to change without notification. Clarifl ow is a registered trademark of Parker Hannifi n Corporation. Viton is registered trademark of E.I. DuPont de Nemours & Co., Inc. 8 Parker Hannifin Process Advanced Filtration Inc. All Rights Reserved SPEC -5 E-MC Rev G 4/8 4

45 Clariflow -E Mini-Capsules Encapsulated PES membrane filters for microelectronics applications Clarifl ow -E capsules fi lter high-quality water and solvents in semiconductor and microelectronics applications. The mirrored anisotropic polyethersulfone (PES) membrane provides superior fl uid fl ow rates, extended on-stream life, and highly effi cient removal of organic and inorganic particulates that can impact process quality. Clarifl ow-e capsules are available in a variety of sizes and endfi tting combinations enabling users select the best confi guration for their system requirements. The encapsulated design maximizes effi ciency by providing faster, easier change-out without laborious cleaning procedures. Eliminating the need to open reusable housings for cartridge replacement minimizes the chance of introducing contamination into the process, and promotes safety by reducing the risk of exposure to potentially hazardous fl uids. Benefits Reduce process down time, chance of contamination and risk of exposure to hazardous materials Low extractables shorten start-up time High fl ow rate reduces processing time Improved design prevents vent caps from disconnecting under pressure Applications Deionized water at point-of-use Aqueous chemical fl uids Parker Hannifin Corporation provides our customers with unsurpassed product consistency and cost-efficiency. Our experienced professionals can help you select the right solution for your application. For more information or to place an order, contact your local distributor. Information on product specifications, applications and chemical compatibility can be found on our web site at or through your nearest Parker Hannifin Corporation office. Parker Hannifin Corporation designs and manufactures an extensive line of innovative solutions for specific applications in the Microelectronics, Biopharmaceutical, Food and Beverage, Industrial and Chemical industries. 43

46 Clariflow -E Mini-Capsules Specifications Materials of Construction Membrane : Polyethersulfone Support layers : Polypropylene Structure : Polypropylene Housing : Polypropylene All components are thermally bonded to ensure integrity and reduce extractables. Effective Filtration Area H = Half-size.9ft (.8m ) per 4.8" (mm) capsule S = Standardsize.8ft (.6m ) per 6.38" (6mm) capsule D = Double-size.5ft (.3m ) per 7.9" (mm) capsule Maximum Differential Pressure/ Temperature Forward: 7psid 75ºF (4ºC) 35psid 4ºF (6ºC) psid 67ºF (75ºC) Reverse: 3psid 75ºF (4ºC) Resistivity Rinse-up The rinse-up volume required for double-size Clarifl ow -E capsules to reach 8megohm-cm resistivity is approximately gal (45.4 liters). Performance Attributes Water Flow Rates, Typical Differential Pressure (psid) Differential Pressure (psid) Half Standard.µm Clariflow-E Water Flow Rate (lpm) Double Water Flow Rate (gpm) *With.5 inch sanitary flange inlet / outlet fittings µm Clariflow-E Water Flow Rate (lpm) Half Standard 3 4 Double Differential Pressure (mbar) Differential Pressure (mbar) Water Flow Rate (gpm) *With.5 inch sanitary flange inlet / outlet fittings 3 4 Ordering Information Each cartridge is identified with a product number, pore size and lot number for traceability. 5 C E Size Inlet/Outlet Filter Rating Vent -Ring H S D DESCRIPTION Half Size Standard Size Double Size B H S D P J K G CONNECTION /4" Hose Barb /" Hose Barb /" Sanitary Flange Quick Disconnect /4" NPT (Male) /" NPT (Male) 3 /8" NPT (Female) Swagelok /" MICRON. µm. µm 4 N Z MATERIAL Buna N EPDM Silicone Viton None No vents * Select code for both Inlet and Outlet Specifications are subject to change without notification. Polyfl ow is a registered trademark of Parker Hannifi n Corporation. Viton is registered trademark of E.I. DuPont de Nemours & Co., Inc. Swagelok is a registered trademark of The Crawford Fitting Company. 8 Parker Hannifin Process Advanced Filtration Inc. All Rights Reserved SPEC -34 CAPS-E Rev F 4/8 44

47 45 Plating

48 46

49 6 Clariflow -E Hydrophilic PES membrane cartridges for aqueous applications Clarifl ow -E cartridges are optimized for use in microelectronics applications such as DI water and aqueous-based chemicals. The unique mirroredanisotropic PES (Polyethersulfone) membrane has exceptionally high fl ow rates and on-stream lifetime while providing consistent removal of both organic and inorganic particulates. The combination of hydrophilic PES membrane and a high-purity, all-polypropylene support structure results in a very low level of ionic and organic extractables, broad chemical compatibility, and resistance to particle shedding. Every cartridge is fabricated in a clean room environment, pre-fl ushed with 8 megohm-cm ultrapure DI water, and % integrity tested in an ISO-certifi ed facility. Benefits High-retention hydrophilic membrane High fl ow rate Broad chemical compatibility for multiple applications Long on-stream life % integrity tested Applications BOE Dilute HF POU DI rinse Bulk DI water systems Copper plating Ni plating Hard disk wash processes Other dilute acids and bases Parker Hannifin Corporation provides our customers with unsurpassed product consistency and cost-efficiency. Our experienced professionals can help you select the right solution for your application. For more information or to place an order, contact your local distributor. Information on product specifications, applications and chemical compatibility can be found on our web site at or through your nearest Parker Hannifin Corporation office. Parker Hannifin Corporation designs and manufactures an extensive line of innovative solutions for specific applications in the Microelectronics, Biopharmaceutical, Food and Beverage, Industrial and Chemical industries. 47

50 Clariflow -E Specifications Materials of Construction Membrane : Polyethersulfone Support layers : Polypropylene Structure : Polypropylene Effective Filtration Area 6.8ft²(.63m²) per " (5mm) cartridges Maximum Differential Pressure/ Temperature Forward: 8psid 75ºF (4ºC) 4psid 8ºF (8ºC) Reverse: 5psid 75ºF (4ºC) Cleanliness (particle shedding) Dry-packed: < particles/ml >.μm after 6gal at gpm Data as from open bag and installed, no additional installation fl ushing. Resistivity Rinse-up Resistivity rinse-up to background minus.megohm-cm of feed after gpm. Performance Attributes Water Flow rates, Typical *.μm.5gpm/psid (.75lpm/mbar).4μm.gpm/psid (5.49lpm/mbar).μm.8gpm/psid (9.88lpm/mbar).μm 3.7gpm/psid (.3lpm/mbar).45μm 4.8gpm/psid (6.35lpm/mbar).65μm 8.9gpm/psid (48.86lpm/mbar).8μm 9.5gpm/psid (5.6lpm/mbar) * Per -inch (5 mm) cartridge equivalent. Differential Pressure (psid) 6 4 -inch (5mm) Cartridges Water Flow Rate (lpm) µm.4µm.µm.65µm.µm.45µm 4 3 Differential Pressure (mbar).8µm Water Flow Rate (gpm) Ordering Information Each cartridge is identified with a product number, pore size and lot number for traceability. 5 E Insert Style End Fitting DESCRIPTION DESCRIPTION None (STD) DOE (CUNO ) 5 6 Encapsulated 36L Stainless Steel Encapsulated * 3* DOE 6/Flat /Flat A Polysulfone 6 /Internal/Flat /" Shortened 7* 6/Fin on Fitting 8* /Fin G /Internal/Recessed Endcap H 3/Recessed Endcap (Ametek) R /Recessed Endcap * 5" cartridges are available in these configurations 5" cartridges are available in.4 through.8 m ratings. 3 O-rings only. Nominal Length LENGTH 5" (3mm) " (5mm) " (5mm) 3" (75mm) 4" (,mm) Filter Rating MICRON 9.µm 94.4µm.µm.µm 4.45µm 6.65µm 8.8µm Gasket/O-Rings 6 3 N MATERIAL Buna N EPDM Silicone Viton FEP Encapsulated Viton FEP Encapsulated Silicone None Thickness (Gaskets Only) 4 N THICKNESS." (5mm).5" (3mm) ()." (5mm) & ().5" (3mm) No Gasket Specifications are subject to change without notification. Clarifl ow is a registered trademark of Parker Hannifi n Corporation. Vilton is a registered trademark of E.I. DuPont de Nemours & Co., Inc. Cuno is a registered trademark of 3M Cuno, Inc. 8 Parker Hannifin Process Advanced Filtration Inc. All Rights Reserved SPEC-5E Rev L 4/8 48

51 6 Clariflow -E-Select High-performance hydrophilic PES membrane cartridges for aqueous applications Clarifl ow - E-SELECT cartridges are optimized for use in microelectronics applications such as DI water and aqueousbased chemicals. The unique mirroredanisotropic PES (Polyethersulfone) membrane has exceptionally high fl ow rates and on-stream lifetime while providing consistent removal of both organic and inorganic particulates. The innovative SELECT pleating provides increased performance over competitive cartridges. Membrane area is increased by over 5% while fl ows are 4% higher within the same footprint. The result is one of the longest lasting cartridges on the market. The combination of hydrophilic PES membrane and a high-purity, all-polypropylene support structure results in a very low level of ionic and organic extractables, broad chemical compatibility, and resistance to particle shedding. Every cartridge is fabricated in a clean room environment, pre-fl ushed with 8 megohm-cm ultrapure DI water, and % integrity tested in an ISO-certifi ed facility. Benefits High-retention hydrophilic membrane Unique SELECT pleating technology High fl ow rates for increased bath turnover Broad chemical compatibility for multiple applications Wide range of confi gurations and ratings Reduced overall cost of fi ltration % integrity tested Applications BOE Dilute HF POU DI rinse Bulk DI water systems Copper plating Ni plating Hard disk wash processes Other dilute acids and bases Parker Hannifin Corporation provides our customers with unsurpassed product consistency and cost-efficiency. Our experienced professionals can help you select the right solution for your application. For more information or to place an order, contact your local distributor. Information on product specifications, applications and chemical compatibility can be found on our web site at or through your nearest Parker Hannifin Corporation office. Parker Hannifin Corporation designs and manufactures an extensive line of innovative solutions for specific applications in the Microelectronics, Biopharmaceutical, Food and Beverage, Industrial and Chemical industries. 49

52 Clariflow -E-Select Specifications Materials of Construction Membrane : Polyethersulfone Support Layers : Polypropylene Structure : Polypropylene Effective Filtration Area 8.8ft² (.8m²).μm pore size per " (5mm) cartridge.3ft² (.96m²) other pore sizes per " (5mm) cartridge Performance Attributes Water Flow rates, Typical *.μm.9gpm/psid (4.94lpm/mbar).4μm.9gpm/psid (.43lpm/mbar).μm.6gpm/psid (4.7lpm/mbar).μm 5.gpm/psid (8.55lpm/mbar) * Per -inch (5 mm) cartridge equivalent. Maximum Differential Pressure/ Temperature Forward: 7psid C (68 F) 4psid 8 C (8 F) Reverse: 4psid C (68 F) Cleanliness (particle shedding) Dry-packed: < particles/ml >.μm after 6gal at gpm Data as from open bag and installed, no additional installation fl ushing. Resistivity Rinse-up Resistivity rinse-up to background minus.megohm-cm of feed after gpm. Ordering Information Each cartridge is identified with a product number, pore size and lot number for traceability. Specifications are subject to change without notification. Clarifl ow is a registered trademark of Parker Hannifi n Corporation. Viton is a registered trademarks of E.I. DuPont de Nemours & Co., Inc. 8 Parker Hannifin Process Advanced Filtration Inc. All Rights Reserved SPEC -CS-SELECT Rev E 4/8 5

53 3 Polyflow Absolute-rated polypropylene depth cartridges for electronics applications Polyfl ow cartridges are optimized for use in electronics applications. They feature a random-fi ber polypropylene depth matrix that provides excellent retention effi ciencies and onstream life. The unique calendering process produces depth media with an absolute rating and superior dirt-holding capacity. These cartridges are thermally bonded from % virgin polypropylene to ensure a high level of cleanliness and chemical compatibility. Benefits High-retention depth matrix High fl ow rate Wide variety of confi gurations and ratings Economical prefi ltration Applications Solder plating Prefiltration of electronics-grade chemicals DI water Parker Hannifin Corporation provides our customers with unsurpassed product consistency and cost-efficiency. Our experienced professionals can help you select the right solution for your application. For more information or to place an order, contact your local distributor. Information on product specifications, applications and chemical compatibility can be found on our web site at or through your nearest Parker Hannifin Corporation office. Parker Hannifin Corporation designs and manufactures an extensive line of innovative solutions for specific applications in the Microelectronics, Biopharmaceutical, Food and Beverage, Industrial and Chemical industries. 5

54 Polyflow Specifications Materials of Construction Depth media : Polypropylene Support layers : Polypropylene Structure : Polypropylene Performance Attributes Water Flow rates, Typical *.6μm 4.gpm/psid (3.3lpm/mbar).μm 5.gpm/psid (7.4lpm/mbar).5μm 3.5gpm/psid (74.lpm/mbar) 5.μm 6.gpm/psid (4.7lpm/mbar).μm 4.gpm/psid (9.6lpm/mbar).μm 5.gpm/psid (74.4lpm/mbar) 4.μm 6.gpm/psid (39.3lpm/mbar) Effective Filtration Area.4ft² (. m²) 5" (3mm) cartridges 4.9ft² (.46 m²) " (5mm) cartridges Filtration Efficiency The.6μm offers typical retention up to 99% effi cient..μm,.5μm, 5μm, μm, μm, and 4μm are up to 99.9% effi cient at specifi ed pore size. Cartridge Extractables NVR < 35mg per " (5mm) cartridge Maximum Differential Pressure/ Temperature Forward: 8psid 75ºF (4ºC) Reverse: 4psid 75ºF (4ºC) 5psid 4ºF (6ºC) Maximum Operating Temperature 6ºF (7ºC) *Per -inch (5 mm) cartridge equivalent. Differential Pressure (psid) inch (5mm) Cartridges Water Flow Rate (lpm) µm Water Flow Rate (gpm).µm.µm.5µm 5.µm.µm 4.µm Differential Pressure (mbar) Ordering Information Each cartridge is identified with a product number, pore size and lot number for traceability. Insert Style DESCRIPTION None (STD) 5 Encapsulated 36L Stainless Steel 6 Encapsulated Polysulfone A /" Shortened on Fitting G H R End Fitting DESCRIPTION DOE (CUNO ) DOE 6/Flat /Flat /Internal/Flat 6/Fin /Fin /Internal/Recessed Endcap 3/Recessed Endcap (Ametek) /Recessed Endcap Nominal Length LENGTH 5" (5mm) " (5mm) " (5mm) 3" (75mm) 4" (,mm) Filter Rating MICRON 6.6µm.µm 5.5µm 5 5.µm.µm.µm 4 4.µm 4 5* 6* Gasket/O-Rings N None *O-rings only MATERIAL Buna N EPDM Silicone Viton FEP Encapsulated Viton FEP Encapsulated Silicone Thickness (Gaskets Only) THICKNESS." (5mm).5" (3mm) 4 ()." (5mm) & ().5" (3mm) N No Gasket Specifications are subject to change without notification. Polyfl ow is a registered trademark of Parker Hannifi n Corporation. Viton is registered trademark of E.I. DuPont de Nemours & Co., Inc. Cuno is a registered trademark of 3M Cuno, Inc. 8 Parker Hannifin Process Advanced Filtration Inc. All Rights Reserved SPEC --P Rev J 4/8 5

55 53 CMP

56 54

57 Polyflow -CMP All-polypropylene nominalrated depth cartridges for CMP slurry filtration Polyfl ow -CMP depth cartridges have been developed to reduce post-cmp defectively by removing undesirable large particles and gels from a wide variety of CMP slurries. Its high dirt-loading, random-fi ber depth media provides consistent particle retention in ratings from. μm to 3 μm without removing a signifi cant amount of smaller working particles. The cartridges are thermally bonded from % virgin polypropylene to ensure low extractables and chemical compatibility with both acidic and alkaline slurries. Confi gurations are available in lengths from 5" to 4" with fi tting options. The specially-designed depth media maximizes fl ow rate and service life to reduce downtime associated with change-outs. Benefits Removes undesirable large particles while retaining working slurry particles Chemically compatible with both acidic and alkaline slurries High fl ow rate and long service life reduce system downtime Superior particle retention protects downstream fi lters and reduces overall fi ltration costs Applications Colloidal silica CMP slurry POU, distribution loop and supply Oxide Copper Polysilicon Parker Hannifin Corporation provides our customers with unsurpassed product consistency and cost-efficiency. Our experienced professionals can help you select the right solution for your application. For more information or to place an order, contact your local distributor. Information on product specifications, applications and chemical compatibility can be found on our web site at or through your nearest Parker Hannifin Corporation office. Parker Hannifin Corporation designs and manufactures an extensive line of innovative solutions for specific applications in the Microelectronics, Biopharmaceutical, Food and Beverage, Industrial and Chemical industries. 55

58 Polyflow -CMP Specifications Materials of Construction Depth media : Polypropylene Support layers : Polypropylene Structure : Polypropylene All components are thermally bonded to ensure integrity and to reduce extractables. Nominal Filter Ratings.μm,.5μm, μm, 3μm, 5m, μm, and 3μm Effective Filtration Area 3.6ft² (.33 m²) per " (5mm) cartridge Maximum Differential Pressure/ Temperature Forward: 8psid 75ºF (4ºC) Reverse: 4psid 75ºF (4ºC) 5psid 4ºF (6ºC) Maximum Operating Temperature 6ºF (7ºC) Performance Attributes Water Flow rates, Typical *.μm 4.gpm/psid (3.3lpm/mbar).5μm.gpm/psid (6.4lpm/mbar).μm 33.gpm/psid (8.lpm/mbar) 3.μm 7.gpm/psid (384.lpm/mbar) 5.μm 7.gpm/psid (384.lpm/mbar).μm 7.gpm/psid (384.lpm/mbar) 3.μm 7.gpm/psid (384.lpm/mbar) *Per -inch (5 mm) cartridge equivalent. Differential Pressure (psid) inch (5mm) Cartridge Water Flow Rate (lpm) µm Retention Efficiency Retention Efficiency in % µm.µm Filter Rating µm.5 µm. µm 3. µm 5. µm Differential Pressure (mbar) Water Flow Rate (gpm) 3, 5, & 3µm Ordering Information Each cartridge is identified with a product number, pore size and lot number for traceability. CMP Style DESCRIPTION None A /" Shortened on Fitting G HR End Fitting DESCRIPTION DOE (CUNO ) DOE 6/Flat /Flat /Internal/Flat 6/Fin /Fin /Internal/Recessed End cap 3/RecessedEnd cap (Ametek) /Recessed End cap Specifications are subject to change without notification. Polyfl ow is a registered trademark of Parker Hannifi n Corporation. Viton is registered trademark of E.I. DuPont de Nemours & Co., Inc. Cuno is a registered trademark of Cuno Inc. Nominal Length LENGTH 5" (5mm) " (5mm) " (5mm) 3" (75mm) 4" (,mm) Filter Rating MICRON.µm 5.5µm.µm 3 3.µm 5 5.µm.µm 3 3.µm Gasket/O-Rings 4 5* 6* N None *O-Rings only MATERIAL Buna N (Standard) EPDM Silicone Viton FEP Encapsulated Viton FEP Encapsulated Silicone Gasket Thickness 4 N DESCRIPTION." (5mm).5" (3mm) ()." (5mm) & ().5" (3mm) None 8 Parker Hannifin Process Advanced Filtration Inc. All Rights Reserved SPEC -PCMP Rev B 4/8 56

59 Lithography

60

61 4 Polyflow Membrane Polypropylene membrane cartridges for microelectronics Polyfl ow Membrane cartridges are optimized for use in microelectronics applications such as bulk chemicals and photoresists. The all-polypropylene construction is an economical alternative to fl uoropolymer-based cartridges. Every cartridge is fabricated in a clean room environment, pre-fl ushed with 8 megohm-cm ultrapure DI water, and % integrity tested in an ISOcertifi ed facility. Benefits High-retention membrane Wide range of confi gurations and ratings % integrity tested Applications Bulk photoresist Bulk electronics grade chemicals Parker Hannifin Corporation provides our customers with unsurpassed product consistency and cost-efficiency. Our experienced professionals can help you select the right solution for your application. For more information or to place an order, contact your local distributor. Information on product specifications, applications and chemical compatibility can be found on our web site at or through your nearest Parker Hannifin Corporation office. Parker Hannifin Corporation designs and manufactures an extensive line of innovative solutions for specific applications in the Microelectronics, Biopharmaceutical, Food and Beverage, Industrial and Chemical industries. 59

62 Polyflow Membrane Specifications Materials of Construction Membrane : Polypropylene Support layers : Polypropylene Structure : Polypropylene Effective Filtration Area 7.7ft (.7m ).4 pore size per " (5mm) cartridge 6.6ft (.6m ).7 pore size per " (5mm) cartridge* 7.7ft (.7m ). pore size per " (5mm) cartridge 7.7ft (.7m ). pore size per " (5mm) cartridge * double layers of membrane Metals Extractables* <5ppb (total) *in a % HNO 3 extraction Maximum Differential Pressure/ Temperature Forward: 8psid 75 F (4 C)* 4psid 8 F (8 C) Reverse: 4psid 75 F (4 C) 6 psid (4. 75 F for.4μm Cleanliness (particle shedding) Wet-packed < particles/ml >.μm after gal at gpm Data from bag open and installed, no additional installation fl ushing. Performance Attributes Water Flow rates, Typical *.4μm.4gpm/psid (.lpm/mbar).7μm.35gpm/psid (.9lpm/mbar).μm.7gpm/psid (3.8lpm/mbar).μm.8gpm/psid (.3lpm/mbar) * Per -inch (5 mm) cartridge equivalent. Differential Pressure (psid) inch (5mm) cartridge Water Flow Rate (lpm) m.4 m Water Flow Rate (gpm) TOC/Resistivity Rinse-up (wet-packed) TOC rinse-up to background plus 5ppb of feed after gpm.. m. m Differential Pressure (mbar) Resistivity rinse-up to background minus.megohm-cm of feed after gpm. Ordering Information Each cartridge is identified with a product number, pore size and lot number for traceability. 4 Insert Style DESCRIPTION No Insert (Standard) 5 Encapsulated Stainless Steel 6 Encapsulated Polysulfone A /" Shortened on Fitting End Fitting DESCRIPTION DOE (CUNO ) DOE 6\Flat 3 \Flat 7 6\Fin 8 \Fin Nominal Length LENGTH " (5mm) " (5mm) 3" (75mm) 4" (mm) 3 4 Filter Rating MICRON 94.4µm.µm.µm.7µm 4 5* N Gasket/O-Rings MATERIAL Buna N EPDM Silicone Viton FEP-Encapsulated Viton None * O-rings only 4 N Thickness (Gaskets Only) THICKNESS." (5mm).5" (3mm) ()." (5mm) & ().5" (3mm) None Options TREATMENT Blank Standard EW Wet Packed Specifications are subject to change without notification. Polyfl ow is a registered trademark of Parker Hannifi n Corporation. Viton is a registered trademarks of E.I. DuPont de Nemours & Co., Inc. Cuno is a registered trademarks of Cuno, Inc. 8 Parker Hannifin Process Advanced Filtration Inc. All Rights Reserved SPEC-4-PM Rev J 4/8 6

63 5 Polyflow Membrane-Select High-performance polypropylene membrane cartridges for microelectronics Polyfl ow MEMBRANE-SELECT cartridges are optimized for use in microelectronics applications such as bulk chemicals and photoresists. The all-polypropylene construction is an economical alternative to fl uoropolymer-based cartridges. The innovative SELECT pleating provides increased performance over competitive cartridges. Membrane area is increased by about 3% while fl ows are more than 5% higher within the same footprint. The result is one of the longest-lasting cartridges on the market. Every cartridge is fabricated in a clean room environment, pre-fl ushed with 8 megohm-cm ultrapure DI water, and % integrity tested in an ISOcertifi ed facility. Benefits High-retention membrane Unique SELECT pleating technology High fl ow rates Wide range of confi gurations and ratings % integrity tested Applications Bulk photoresist Bulk electronics grade chemicals Parker Hannifin Corporation provides our customers with unsurpassed product consistency and cost-efficiency. Our experienced professionals can help you select the right solution for your application. For more information or to place an order, contact your local distributor. Information on product specifications, applications and chemical compatibility can be found on our web site at or through your nearest Parker Hannifin Corporation office. Parker Hannifin Corporation designs and manufactures an extensive line of innovative solutions for specific applications in the Microelectronics, Biopharmaceutical, Food and Beverage, Industrial and Chemical industries. 6

64 Polyflow Membrane-Select Specifications Materials of Construction Membrane : Polypropylene Support layers : Polypropylene Structure : Polypropylene Effective Filtration Area.5ft (.7m ).4 pore size per " (5mm) cartridge 8.4ft (.78m ).7 pore size per " (5mm) cartridge*.ft (.94m ). pore size per " (5mm) cartridge 9.8ft (.88m ). pore size per " (5mm) cartridge * double layers of membrane Metals Extractables* <5ppb (total) *in a % HNO 3 extraction Maximum Differential Pressure/ Temperature Forward: 7psid 68 F ( C)* 4psid 58 F (7 C) Reverse: 3psid 68 F ( C) 6 psid (4. 68 F for.4μm Performance Attributes Water Flow rates, Typical *.4μm.65gpm/psid (3.6lpm/mbar).7μm.55gpm/psid (3.lpm/mbar).μm.gpm/psid (6.5lpm/mbar).μm 3.gpm/psid (6.5lpm/mbar) * Per -inch (5 mm) cartridge equivalent. Differential Pressure (psid) Per -inch (5mm) Cartridge Water Flow Rate (lpm) m.4 m. m. m Differential Pressure (mbar) Cleanliness (particle shedding) Wet-packed < particles/ml >.μm after gal at gpm Data as from bag open and installed, no additional installation fl ushing Water Flow Rate (gpm) TOC/Resistivity Rinse-up (wet-packed) TOC rinse-up to background plus 5ppb of feed after gpm. Resistivity rinse-up to background minus.megohm-cm of feed after gpm. Ordering Information Each cartridge is identified with a product number, pore size and lot number for traceability. MS E Insert Style DESCRIPTION No Insert (Std.) 5 Encapsulated Stainless Steel 6 Encapsulated Polysulfone A /" Shortened on Fitting End Fitting DESCRIPTION 6/Flat /Flat 6/Fin /Fin 3 4 Length LENGTH " (5mm) " (5mm) 3" (75mm) 4" (mm) Filter Rating 94 MICRON.4µm.µm.µm.7µm 4 5 N O-Rings MATERIAL Buna EPDM Silicone Viton FEP-Encapsulated Viton None Blank W Options TREAMENT Standard Wet Pack Specifications are subject to change without notification. Polyfl ow is a registered trademark of Parker Hannifi n Corporation. Viton is a registered trademarks of E.I. DuPont de Nemours & Co., Inc. 8 Parker Hannifin Process Advanced Filtration Inc. All Rights Reserved SPEC-PMS-SELECT Rev E 4/8 6

65 Chemflow -PE Chemically-resistant cartridge for bulk and lower temperature applications The Chemfl ow -PE fi lter cartridge uses a PTFE membrane along with HDPE supports that provide an economical alternative to all-fl uoropolymer cartridges. It provides a high degree of retention and cleanliness along with good fl ow and lifetime. This fi lter is ideally suited for bulk chemical delivery and lower temperature wet processes (<6 C). It is available dry or wetpacked for quick installation. Benefits Good fl ow rates Long lifetime Wet-pack option for quick installation PTFE/ HDPE construction for chemical resistance % integrity tested in cleanroom environment Applications Bulk chemical delivery Acids, bases, solvents, photochemicals Wet etch and clean (< 6 C) Phosphoric acid Hydrofl uoric acid Nitric acid SC,SC Solvents Parker Hannifin Corporation provides our customers with unsurpassed product consistency and cost-efficiency. Our experienced professionals can help you select the right solution for your application. For more information or to place an order, contact your local distributor. Information on product specifications, applications and chemical compatibility can be found on our web site at or through your nearest Parker Hannifin Corporation office. Parker Hannifin Corporation designs and manufactures an extensive line of innovative solutions for specific applications in the Microelectronics, Biopharmaceutical, Food and Beverage, Industrial and Chemical industries. 63

66 Chemflow -PE Specifications Materials of Construction Membrane : PTFE Support Layers : HDPE Structure : HDPE Effective Filtration Area 8.3ft (.78m ) per " (5mm) cartridge Performance Attributes Water Flow rates, Typical *.5μm.8gpm/psid (4.39lpm/mbar).μm.gpm/psid (.53lpm/mbar).μm 3.8gpm/psid (.86lpm/mbar).μm gpm/psid (55.lpm/bar) * Per -inch (5mm) cartridge equivalent. Metals Extractables* Standard: <55ppb (total) *in a % HNO3 extraction -inch (5 mm) Cartridges Water Flow Rate (lpm) Maximum Differential Pressure/ Temperature Forward: 8psid 75ºF (4ºC) 5 4.5µm.µm 3 Reverse: 5psid 75ºF (4ºC) Maximum Operating Temperature 4ºF (6ºC) Cleanliness (particle shedding) Wet-packed: < particles/ml >.μm after 5gal at gpm Differential Pressure (psid) 3.µm.µm Differential Pressure (mbar) Data is from open bag and installed, no additional installation flushing. TOC/Resistivity Rinse-up (wet-packed) Water Flow Rate (gpm) TOC rinse-up to background plus 5ppb of feed after gpm. Resistivity rinseup to background minus. megohm-cm of feed after gpm. Ordering Information Each cartridge is identified with a product number, pore size and lot number for traceability. PE E A Insert Style DESCRIPTION None (Std) /" Shortened on Fitting End Fitting DESCRIPTION 6/Flat /Flat 6/Fin /Fin 3 4 Length LENGTH " (5mm) " (5mm) 3" (75mm) 4" (mm) Filter Rating 95 MICRON.5µm.µm.µm.µm 4 5 O-Ring Material MATERIAL Buna N EPDM Silicone Viton FEP Encapsulated Viton Blank W Options TREATMENT Standard Wet Packed Specifications are subject to change without notification. Chemflow is a registered trademark of Parker Hannifin Corporation. Viton is a registered trademark of E.I. DuPont de Nemours & Co., Inc. Cuno is a registered trademark of Cuno Inc. 8 Parker Hannifin Process Advanced Filtration Inc. All Rights Reserved SPEC-PE-Rev. H 3/8 64

67 65 General

68 66

69 354 Proflow II-G Hydrophobic PTFE membrane for general purpose gas and solvent purification Profl ow II-G cartridges provide an economic alternative for general applications where reliable gas and liquid fl ow rates are required. With 5.6 square feet of expanded PTFE membrane, Profl ow II-G is a highly effi cient hydrophobic barrier, for the production of dry gas, and will effectively purify aggressive liquids and organic solvents. Profl ow II-G cartridges are manufactured under cleanroom conditions and integrity tested before shipment to assure consistent performance and quality. Benefits Reliable air and liquid fl ow rates for effective performance Broad chemical compatibility enables use in many applications Broad range of micron ratings for user convenience Superior hydrophobicity for long life in vent/air applications Integrity tested to ensure quality Applications Photoresists Compressed gas Non-sterile venting Electronic grade solvents Hot deionized water (less than 8 C) Parker Hannifin Corporation provides our customers with unsurpassed product consistency and cost-efficiency. Our experienced professionals can help you select the right solution for your application. For more information or to place an order, contact your local distributor. Information on product specifications, applications and chemical compatibility can be found on our web site at or through your nearest Parker Hannifin Corporation office. Parker Hannifin Corporation designs and manufactures an extensive line of innovative solutions for specific applications in the Microelectronics, Biopharmaceutical, Food and Beverage, Industrial and Chemical industries. 67

70 Proflow II-G Specifications Materials of Construction Membrane : PTFE Support layers : Polypropylene Structure : Polypropylene Effective Filtration Area 5.6ft² (.5 m²) per " (5mm) cartridge Performance Attributes Water Flow rates, Typical *.5μm.6gpm/psid (3.9lpm/mbar).μm.gpm/psid (6.59lpm/mbar).μm.5gpm/psid (3.73lpm/mbar).45μm 5.gpm/psid (8.lpm/mbar).μm 6.gpm/psid (34.4lpm/mbar) *Per -inch (5 mm) cartridge equivalent. Maximum Differential Pressure/ Temperature Forward: 8psid 75ºF (4ºC) 4psid 8ºF (8ºC) Reverse: 5psid 75ºF (4ºC) Cleanliness (particle shedding) Wet-packed: < particles/ml >.μm after 6gal at gpm Data as from open bag and installed, no additional installation fl ushing. TOC/Resistivity Rinse-up (wet-packed) TOC rinse-up to background plus 5ppb of feed after gpm. Resistivity rinse-up to background minus.megohm-cm of feed after gpm. Differential Pressure (psid) inch (5mm) Cartridge Water Flow Rate (lpm) µm.µm.µm.45µm.µm 5 5 Differential Pressure (mbar) Water Flow Rate (gpm) Ordering Information Each cartridge is identified with a product number, pore size and lot number for traceability. 3 G Application TREATMENT 4 Standard 6 Flushed with 8 Megohm DI Water Insert Style DESCRIPTION No Insert 5 (Standard) Encapsulated 6 Stainless Steel Encapsulated Polysulfone A /" Shortened on Fitting End Fitting DESCRIPTION DOE (Cuno ) DOE 6/Flat 3 /Flat 6 /Internal/Flat 7 6/Fin 8 /Fin G /Internal/ Recessed End cap H 3/Recessed Endcap (Ametek) R /Recessed End cap Filter Rating Gasket/O-Rings Gaskets MICRON MATERIAL THICKNESS 95.5µm Buna N." (5mm).µm EPDM.5" (3mm).µm Silicone 4 ()." (5mm) & 4.45µm 4 Viton ().5" (3mm) Nominal Length.µm 5* FEP-Encapsulated Viton N No Gasket LENGTH 6* FEP-Encapsulated " (5mm) Silicone " (5mm) N None 3 3" (75mm) *O-Rings only 4 4" (mm) Specifications are subject to change without notification. Profl ow II is a registered trademark of Parker Hannifi n Corporation. Vilton is a registered trademark of E.I. DuPont de Nemours & Co., Inc. Cuno is a registered trademark of Cuno Inc. 8 Parker Hannifin Process Advanced Filtration Inc. All Rights Reserved SPEC-3-P-II-G Rev I 4/8 68

71 63 Clariflow -G Hydrophilic Polyethersulfone (PES) membrane for aqueous liquid filtration applications Clarifl ow -G cartridges are designed for general-purpose use in the fi ltration of high-purity liquids and aqueous chemicals. The mirrored-anisotropic Polyethersulfone (PES) membrane is inherently hydrophilic and has a pore morphology that delivers exceptionally high fl ow rates. Because there are no added surfactants or wetting agents, and the support layers and structure are all-polypropylene, the fi lter exhibits low extractables, broad chemical compatibility and good resistance to hydrolysis. Benefits High fl ow rate reduces processing time Broad chemical compatibility allows use in most applications Low differential pressure reduces system wear and tear Chemical fi ltration Applications Chemical fi ltration Liquid clarifi cation Recirculating fl uids General use water fi ltration Deionized water systems Parker Hannifin Corporation provides our customers with unsurpassed product consistency and cost-efficiency. Our experienced professionals can help you select the right solution for your application. For more information or to place an order, contact your local distributor. Information on product specifications, applications and chemical compatibility can be found on our web site at or through your nearest Parker Hannifin Corporation office. Parker Hannifin Corporation designs and manufactures an extensive line of innovative solutions for specific applications in the Microelectronics, Biopharmaceutical, Food and Beverage, Industrial and Chemical industries. 69

72 Clariflow -G Specifications Materials of Construction Membrane : Polyethersulfone Support layers : Polypropylene Structure : Polypropylene Effective Filtration Area 6.8ft² (.63m²) per " (5mm) cartridge Performance Attributes Water Flow rates, Typical *.4μm.gpm/psid (5.9lpm/mbar).μm.8gpm/psid (9.88lpm/mbar).μm 3.7gpm/psid (.3lpm/mbar) *Per -inch (5 mm) cartridge equivalent..45μm 4.8gpm/psid (6.35lpm/mbar).65μm 9.gpm/psid (5.5lpm/mbar).8μm 9.5gpm/psid (5.6lpm/mbar) Maximum Differential Pressure/ Temperature Forward: Reverse: 8psid 75ºF (4ºC) 4psid 8ºF (8ºC) 5psid 75ºF (4ºC) Maximum Operating Temperature 6ºF (7ºC) Ordering Information Each cartridge is identified with a product number, pore size and lot number for traceability. Clarifl ow is a registered trademark of Parker Hannifi n Corporation. Vilton is a registered trademark of E.I. DuPont de Nemours & Co., Inc. Cuno is a registered trademark of Cuno Inc. 8 Parker Hannifin Process Advanced Filtration Inc. All Rights Reserved SPEC-5G Rev J 5/8 7

73 3 Polyflow Absolute-rated polypropylene depth cartridges for electronics applications Polyfl ow cartridges are optimized for use in electronics applications. They feature a random-fi ber polypropylene depth matrix that provides excellent retention effi ciencies and onstream life. The unique calendering process produces depth media with an absolute rating and superior dirt-holding capacity. These cartridges are thermally bonded from % virgin polypropylene to ensure a high level of cleanliness and chemical compatibility. Benefits High-retention depth matrix High fl ow rate Wide variety of confi gurations and ratings Economical prefi ltration Applications Solder plating Prefiltration of electronics-grade chemicals DI water Parker Hannifin Corporation provides our customers with unsurpassed product consistency and cost-efficiency. Our experienced professionals can help you select the right solution for your application. For more information or to place an order, contact your local distributor. Information on product specifications, applications and chemical compatibility can be found on our web site at or through your nearest Parker Hannifin Corporation office. Parker Hannifin Corporation designs and manufactures an extensive line of innovative solutions for specific applications in the Microelectronics, Biopharmaceutical, Food and Beverage, Industrial and Chemical industries. 7

74 Polyflow Specifications Materials of Construction Depth media : Polypropylene Support layers : Polypropylene Structure : Polypropylene Performance Attributes Water Flow rates, Typical *.6μm 4.gpm/psid (3.3lpm/mbar).μm 5.gpm/psid (7.4lpm/mbar).5μm 3.5gpm/psid (74.lpm/mbar) 5.μm 6.gpm/psid (4.7lpm/mbar).μm 4.gpm/psid (9.6lpm/mbar).μm 5.gpm/psid (74.4lpm/mbar) 4.μm 6.gpm/psid (39.3lpm/mbar) Effective Filtration Area.4ft² (. m²) 5" (3mm) cartridges 4.9ft² (.46 m²) " (5mm) cartridges Filtration Efficiency The.6μm offers typical retention up to 99% effi cient..μm,.5μm, 5μm, μm, μm, and 4μm are up to 99.9% effi cient at specifi ed pore size. Cartridge Extractables NVR < 35mg per " (5mm) cartridge Maximum Differential Pressure/ Temperature Forward: 8psid 75ºF (4ºC) Reverse: 4psid 75ºF (4ºC) 5psid 4ºF (6ºC) Maximum Operating Temperature 6ºF (7ºC) *Per -inch (5 mm) cartridge equivalent. Differential Pressure (psid) inch (5mm) Cartridges Water Flow Rate (lpm) µm Water Flow Rate (gpm).µm.µm.5µm 5.µm.µm 4.µm Differential Pressure (mbar) Ordering Information Each cartridge is identified with a product number, pore size and lot number for traceability. Insert Style DESCRIPTION None (STD) 5 Encapsulated 36L Stainless Steel 6 Encapsulated Polysulfone A /" Shortened on Fitting G H R End Fitting DESCRIPTION DOE (CUNO ) DOE 6/Flat /Flat /Internal/Flat 6/Fin /Fin /Internal/Recessed Endcap 3/Recessed Endcap (Ametek) /Recessed Endcap Nominal Length LENGTH 5" (5mm) " (5mm) " (5mm) 3" (75mm) 4" (,mm) Filter Rating MICRON 6.6µm.µm 5.5µm 5 5.µm.µm.µm 4 4.µm 4 5* 6* Gasket/O-Rings N None *O-rings only MATERIAL Buna N EPDM Silicone Viton FEP Encapsulated Viton FEP Encapsulated Silicone Thickness (Gaskets Only) THICKNESS." (5mm).5" (3mm) 4 ()." (5mm) & ().5" (3mm) N No Gasket Specifications are subject to change without notification. Polyfl ow is a registered trademark of Parker Hannifi n Corporation. Viton is registered trademark of E.I. DuPont de Nemours & Co., Inc. Cuno is a registered trademark of Cuno Inc. 8 Parker Hannifin Process Advanced Filtration Inc. All Rights Reserved SPEC --P Rev J 4/8 7

75 Polyflow -G All-polypropylene nominalrated depth cartridges for economical prefiltration Polyfl ow -G depth media has been developed for a wide variety of general process applications from fl uid clarifi cation to general prefi ltration. Its high dirt-loading, random-fi ber polypropylene depth media provides consistent particle retention. Polyfl ow -G is thermally bonded from % virgin polypropylene to ensure clean fi ltrates and excellent chemical and thermal compatibility in the most demanding processing conditions. Polyfl ow -G leads in overall reduction of fi ltration costs when compared to spunbonded, stringwound, and nominally-rated pleated prefi lter cartridges. Its longer fi ltration life reduces downtime due to fewer change-outs. Benefits High fl ow rate and long service life reduce processing time Broad chemical compatibility allows use in most applications Thermally bonded construction minimizes extractables for cleaner fi ltrates Applications Solvent fi ltration Liquid clarifi cation Recirculating liquids General water fi ltration Reagent grade chemicals RO/DI prefi ltration Waste water Parker Hannifin Corporation provides our customers with unsurpassed product consistency and cost-efficiency. Our experienced professionals can help you select the right solution for your application. For more information or to place an order, contact your local distributor. Information on product specifications, applications and chemical compatibility can be found on our web site at or through your nearest Parker Hannifin Corporation office. Parker Hannifin Corporation designs and manufactures an extensive line of innovative solutions for specific applications in the Microelectronics, Biopharmaceutical, Food and Beverage, Industrial and Chemical industries. 73

76 Polyflow -G Specifications Materials of Construction Depth media : Polypropylene Support layers : Polypropylene Structure : Polypropylene All components are thermally bonded to ensure integrity and to reduce extractables. Performance Attributes Water Flow rates, Typical *.μm 4.gpm/psid (3.3lpm/mbar).5μm.gpm/psid (6.4lpm/mbar).μm 33.gpm/psid (8.lpm/mbar) 3.μm 7.gpm/psid (384.lpm/mbar) *Per -inch (5 mm) cartridge equivalent. 5.μm 7.gpm/psid (384.lpm/mbar).μm 7.gpm/psid (384.lpm/mbar) 3.μm 7.gpm/psid (384.lpm/mbar) Nominal Filter Ratings.μm,.5μm, μm, 3μm, μm, and 3μm Effective Filtration Area 3.6ft² (.33 m²) per " (5mm) cartridge Cartridge Extractables NVR < 35mg per " (5mm) cartridge Biological Safety All components meet USP specifi cations for Class VI-ºC Plastics criteria. Maximum Differential Pressure/ Temperature Forward: 8psid 75ºF (4ºC) Reverse: 4psid 75ºF (4ºC) 5psid 4ºF (6ºC) Differential Pressure (psid) inch (5mm) Cartridge Water Flow Rate (lpm) µm.5µm.µm Differential Pressure (mbar) Maximum Operating Temperature 6ºF (7ºC) Water Flow Rate (gpm) 3, 5, & 3µm Ordering Information Each cartridge is identified with a product number, pore size and lot number for traceability. PG Style DESCRIPTION None A /" Shortened on Fitting G HR End Fitting DESCRIPTION DOE (CUNO ) DOE 6/Flat /Flat /Internal/Flat 6/Fin /Fin /Internal/Recessed End cap 3/RecessedEnd cap (Ametek) /Recessed End cap Polyfl ow is a registered trademark of Parker Hannifi n Corporation. Viton is registered trademark of E.I. DuPont de Nemours & Co., Inc. Cuno is a registered trademark of Cuno Inc. Nominal Length LENGTH 5" (5mm) " (5mm) " (5mm) 3" (75mm) 4" (,mm) Filter Rating MICRON.µm 5.5µm.µm 3 3.µm 5 5.µm.µm 3 3.µm Gasket/O-Rings 4 5* 6* N None *O-Rings only MATERIAL Buna N (Standard) EPDM Silicone Viton FEP Encapsulated Viton FEP Encapsulated Silicone Gasket Thickness 4 N DESCRIPTION." (5mm).5" (3mm) ()." (5mm) & ().5" (3mm) None 8 Parker Hannifin Process Advanced Filtration Inc. All Rights Reserved SPEC -PG Rev H 4/8 74

77 Polyflow Mini-Cartridges Small-volume polypropylene depth cartridges for electronics applications Polyfl ow mini-cartridges are optimized for use in small-volume applications such as DI water and aqueous-based chemicals. They feature a randomfi ber polypropylene depth matrix that provides excellent retention effi ciencies. The unique calendering process produces depth media with superior dirt-holding capacity that extends useful life. Its design uses an internal 6 O-ring that is available in several materials. Benefits High-retention depth matrix High fl ow rate Economical prefi ltration Secure internal O-ring seal Applications Prefiltration of electronics-grade chemicals Small-volume lab systems DI water Parker Hannifin Corporation provides our customers with unsurpassed product consistency and cost-efficiency. Our experienced professionals can help you select the right solution for your application. For more information or to place an order, contact your local distributor. Information on product specifications, applications and chemical compatibility can be found on our web site at or through your nearest Parker Hannifin Corporation office. Parker Hannifin Corporation designs and manufactures an extensive line of innovative solutions for specific applications in the Microelectronics, Biopharmaceutical, Food and Beverage, Industrial and Chemical industries. 75

78 Polyflow Mini-Cartridges Specifications Materials of Construction Depth Media : Polypropylene Support Layers : Polypropylene Structure : Polypropylene Effective Filtration Areas.9ft (.8m ) per 5" (5mm) cartridge (.6μm).6ft (.5m ) per 5" (5mm) cartridge (.μm).ft (.9m ) per 5" (5mm) cartridge (.5μm).ft (.m ) per 5" (5mm) cartridge (5.4μm) Performance Attributes FILTER RATING.6µm.µm.5µm 5.µm NOMINAL EFA ft cm TYPICAL WATER FLOW RATE* TYPICAL AIR FLOW RATE gpm/psid lpm/mbar scfm/psid Cubic Meters 3 /hr/ mbar Filtration Efficiency The.6μm offers typical retention effi ciency of up to 97-99%..μm,.5μm, 5.μm, and.μm are 99.9% effi cient at the specifi ed pore size..µ m.µ m 4.µ m Cartridge Extractables NVR < 3mg per " (5mm) cartridge *For fluids with viscosity of cp. Maximum Differential Pressure/ Temperature Forward: 7psid 75ºF (4ºC) 35psid 4ºF (6ºC) psid 67ºF (75ºC) Reverse: 3psid 75ºF (4ºC) Ordering Information Each cartridge is identified with a product number, pore size and lot number for traceability. M D E M M Filter Rating MICRON.6µm.µm.5µm 5.µm.µm.µm 4 4.µm 4 6 N -Ring MATERIAL Buna N EPDM Silicone Viton FEP Encap Silcone None Specifications are subject to change without notification. Polyfl ow is a registered trademark of Parker Hannifi n Corporation. Viton is registered trademark of E.I. DuPont de Nemours & Co., Inc. 8 Parker Hannifin Process Advanced Filtration Inc. All Rights Reserved SPEC --MC Rev H 4/8 76

79 Polyflow Mini-Capsules Encapsulated filters with polypropylene depth matrix for small-volume prefiltration applications Polyfl ow Capsules feature a randomfi ber polypropylene depth matrix that provides superior retention effi ciencies. In addition, the unique calendering process produces depth media with unsurpassed dirt-holding capacity that extends fi lter service life. Longer life leads to increased savings by requiring fewer fi lter changeouts. Polyfl ow capsules are available in three sizes, enabling users to match the fi lters to actual batch sizes and minimize the hold-up volume. Cost savings result from the reduction of lost product, and by scaling the process properly to avoid excess fi lter capacity. The encapsulated design maximizes effi ciency by providing faster, easier change-out without laborious cleaning procedures. Eliminating the need to open reusable housings for cartridge replacement minimizes the chance of introducing contamination into the process, and promotes safety by reducing the risk of exposure to potentially hazardous fl uids. Benefits High fl ow rate reduces processing time Long service life minimizes change out frequency Broad chemical compatibility enables use in most applications High retention effi ciency provides excellent protection for downstream fi lters Non-pyrogenic (per LAL test) for use in critical applications Custom ordering option allows different inlet/outlet fi ttings for specifi c needs Applications Solvent and reagent grade chemicals Lab scale RO/DI pre-fi ltration Recirculating liquids General water fi ltration Vent fi ltration Parker Hannifin Corporation provides our customers with unsurpassed product consistency and cost-efficiency. Our experienced professionals can help you select the right solution for your application. For more information or to place an order, contact your local distributor. Information on product specifications, applications and chemical compatibility can be found on our web site at or through your nearest Parker Hannifin Corporation office. Parker Hannifin Corporation designs and manufactures an extensive line of innovative solutions for specific applications in the Microelectronics, Biopharmaceutical, Food and Beverage, Industrial and Chemical industries. 77

80 Polyflow Mini-Capsules Specifications Materials of Construction Depth media : Polypropylene Support layers : Polypropylene Structure : Polypropylene Housing : Polypropylene All components meet USP-XXIV Class VI- C criteria, and are thermally bonded to ensure integrity and reduce extractables. Effective Filtration Area See table for details. Filtration efficiency.μm,.5μm, 5.μm, and.μm are 99.9% efficient at the specified pore size. The.6μm capsule offers typical retention efficiency of up to 97-%. Performance Attributes FILTER RATING.6µm.µm.5µm 5µm CAPSULE SIZE Half Standard Double Half Standard Double Half Standard Double Half Standard Double NOMINAL EFA ft cm TYPICAL WATER FLOW RATE* TYPICAL AIR FLOW RATE gpm/psid lpm/mbar scfm/psid Nm 3 /hr/mbar Cartridge extractables NVR < 3mg per (5mm) capsule µm Half Standard Double Autoclavable and sanitizable May be autoclaved for up to 5 cycles at 75 F (35 C), or sanitized using most common cleaning agents. *For fluids with viscosity of cp, and capsules with sanitary fittings. Maximum Differential Pressure/ Temperature Forward: 7psid 75ºF (4ºC) 35psid 4ºF (6ºC) psid 67ºF (75ºC) Reverse: 3psid 75ºF (4ºC) Ordering Information Each cartridge is identified with a product number, pore size and lot number for traceability. C Size Style Inlet/Outlet Filter Rating Vent -Ring H S D DESCRIPTION Half Size Standard Size Double Size B E DESCRIPTION Biological Electronics B H S D P J K G CONNECTION /4" Hose Barb /" Hose Barb /" Sanitary Flange Quick Disconnect /4" NPT (Male) /" NPT (Male) 3 /8" NPT (Female) Swagelok /" MICRON.6 µm. µm.5 µm 5. µm. µm 4 N Z MATERIAL Buna N EPDM Silicone Viton None No vents Specifications are subject to change without notification. Polyfl ow is a registered trademark of Parker Hannifi n Corporation. Viton is registered trademark of E.I. DuPont de Nemours & Co., Inc. Swagelok is a registered trademark of The Crawford Fitting Company. 8 Parker Hannifin Process Advanced Filtration Inc. All Rights Reserved SPEC -34 CAPS-E Rev F 4/8 78

81 Housings

82

83 Trufluor High purity and rugged design for aggressive chemical filtration The simple, yet rugged design of the TruFluor fi ltration housing is an excellent solution to any aggressive chemical fi ltration problem. The two-piece design allows for ease of installation and a positive seal. Benefits High purity PFA construction Also available in PVDF Broad chemical compatibility Extremely low extractables Available in 4" and " versions Standard ¼" gauge connections upstream and downstream Applications High purity acids and bases Aggressive chemical fi ltration Acid etch and BOE Photomask and Photoresist Chemicals Solvents Developers Parker Hannifin Corporation provides our customers with unsurpassed product consistency and cost-efficiency. Our experienced professionals can help you select the right solution for your application. For more information or to place an order, contact your local distributor. Information on product specifications, applications and chemical compatibility can be found on our web site at or through your nearest Parker Hannifin Corporation office. Parker Hannifin Corporation designs and manufactures an extensive line of innovative solutions for specific applications in the Microelectronics, Biopharmaceutical, Food and Beverage, Industrial and Chemical industries. 8

84 Trufluor Specifications Materials of Construction Head and Bowl : High purity PFA O-Ring : FEP Encapsulated Viton NPT Plugs : High purity PFA Threaded Head Inserts : PTFE coated 36 Stainless steel Mounting Bracket Adapter : High purity PFA (" model only) Connections Inlet/Outlet: ¾" NPT or Butt-Weld Vent and Drain: ¼" NPT Maximum Operating Specifications PF4: 65psid 3ºF (95ºC) 75psid 68ºF (ºC) PVDF 3ºF (95ºC) 68ºF (ºC) Housing Flow Rate (Liquid): (" model only) Differential Pressure (psid) Housing Differential Pressure vs. Liquid Flow Rate Flow Rate (lpm) Flow Rate gpm) Differential Pressure (mbar) Ordering Information Each cartridge is identified with a product number, pore size and lot number for traceability. TFH 4 N 8 N T TFH TVH Model DESCRIPTION TruFluor TruFluor PVDF 4 Bowl Length DESCRIPTION 4" " N W Connection Type Connection Size Drain/Vent Type DESCRIPTION DESCRIPTION DESCRIPTION NPT 8 3/4" N NPT Butt Weld W Butt Weld Drain/Vent Size DESCRIPTION /4" T Seal Material DESCRIPTION FEP Encapsulated Viton¹ Trademark of E.I. du Pont de Nemours and Co. Additional changes apply 3 These models are PVDF construction Specifications are subject to change without notification. 8 Parker Hannifin Process Advanced Filtration Inc. All Rights Reserved Bulletin C-353 Rev 4/8 8

85 35 Trufluor + High purity PFA filter housing The Trufl uor + fi lter housing is designed for maximum chemical resistance and high purity for microelectronics applications. Constructed of PFA (wetted parts) and PVDF (non-wetted parts), this housing is compatible with the most aggressive chemistries. The high-purity materials of construction and cleanroom packaging insure a high level of cleanliness. The housing consists of a stationary bowl and locking ring that provides a positive seal and easy fi lter replacement. It is compatible with our Fluorofl ow line of all-fl uoropolymer cartridges including the large-diameter Fluorofl ow -XL in lengths of, and 3 inches. Benefits Excellent chemical resistance High-purity construction Packaged in cleanroom High fl ow rates Compatible with.75" and 3.5" diameter cartridges Applications Wet etch and clean (9 C or less) Photochemicals DI water Parker Hannifin Corporation provides our customers with unsurpassed product consistency and cost-efficiency. Our experienced professionals can help you select the right solution for your application. For more information or to place an order, contact your local distributor. Information on product specifications, applications and chemical compatibility can be found on our web site at or through your nearest Parker Hannifin Corporation office. Parker Hannifin Corporation designs and manufactures an extensive line of innovative solutions for specific applications in the Microelectronics, Biopharmaceutical, Food and Beverage, Industrial and Chemical industries. 83

86 Trufluor + Specifications Materials of Construction Head and Bowl : High Purity PFA O-Ring : FEP Encapsulated Viton Locking Ring : PVDF (non-wetted part) Connections Inlet/Outlet 3/4" or " Flare 3/4" or " Butt-Weld Vent/Drain /4" Flare /4" Butt-Weld /4" NPTF 3/8" Closed 3/8" Flare Maximum Operating Specifications 5 psig (3.4 bar) at 94 F (9 C) psig (6.9 bar) at 77 F (5 C) Cartridge Configurations Supported " /Flat End Cap SS Reinforced /Flat End Cap " /Flat End Cap SS Reinforced /Flat End Cap 3" /Flat End Cap SS Reinforced /Flat End Cap Dimensional Data " Filter Differential Pressure (psid) HOUSING STYLE OVERALL WIDTH OVERALL LENGTH 3/4" Butt-Weld Pipe 9." /.9 cm 6." / 4.6 cm 3/4" Flare.5" / 6.7 cm 9.5" / 49.5 cm " Butt-Weld Pipe 9." /.9 cm 6." / 4.6 cm " Flare." / 7.9 cm 9.5" / 49.5 " Filter HOUSING STYLE OVERALL WIDTH OVERALL LENGTH 3/4" Butt-Weld Pipe." / 3.5 cm 5.7" / 65.3 cm 3/4" Flare.5" / 6.7 cm 9.3" / 74.4 cm " Butt-Weld Pipe 9." /.9 cm 5.7" / 65.3 cm " Flare." / 7.9 cm 9.3" / " Filter HOUSING STYLE OVERALL WIDTH OVERALL LENGTH 3/4" Butt-Weld Pipe." / 3.5 cm 35.5" / 9. cm 3/4" Flare.5" / 6.7 cm 39." / 99.3 cm " Butt-Weld Pipe 9." /.9 cm 35.5" / 9. cm " Flare." / 7.9 cm 39." / Flow Rate (lpm) /4 Port Port Differential Pressure (mbar) Water Flow Rate (gpm) Ordering Information Each cartridge is identified with a product number, pore size and lot number for traceability. TFP T 3 Bowl Length DESCRIPTION (54mm) (58mm) 3 (76mm) Connection Type F W DESCRIPTION Flare Buttweld Trademark of E.I. du Pont de Nemours and Co. Additional changes apply 8 Connection LENGTH 3/4" (9.5mm) (5.4mm) C F W N Drain/Vent Type DESCRIPTION Closed² Flare² Butt-Weld NPTF Drain/Vent Size DESCRIPTION /4 (6.35mm) T Seal Material DESCRIPTION FEP Encapsulated Viton¹ Specifications are subject to change without notification. TruFluor is a registered trademark of Parker Hannifi n Corporation Viton is registered trademark of E.I. DuPont de Nemours & Co., Inc. 8 Parker Hannifin Process Advanced Filtration Inc. All Rights Reserved C-35 Rev B 4/8 84

87 C Fulflo NP Natural Polypropylene filter housings for electronicsgrade chemicals The Fulfl o fi lter housings are designed for high purity electronics applications. Its natural polypropylene construction provides good chemical compatibility and cleanliness. These housings offer an economical alternative to stainless steel or PFA for less aggressive chemistries. They are available in both - and -inch lengths and both single- and double-open end designs. A secure head-to-shell O-ring ensures effective sealing while a positive stop design prevents overtightening. Benefits High-purity construction Versatile design Economical Good fl ow rates Applications Bulk chemical delivery of electronics-grade chemicals CMP slurries Plating solutions DI water Parker Hannifin Corporation provides our customers with unsurpassed product consistency and cost-efficiency. Our experienced professionals can help you select the right solution for your application. For more information or to place an order, contact your local distributor. Information on product specifications, applications and chemical compatibility can be found on our web site at or through your nearest Parker Hannifin Corporation office. Parker Hannifin Corporation designs and manufactures an extensive line of innovative solutions for specific applications in the Microelectronics, Biopharmaceutical, Food and Beverage, Industrial and Chemical industries. 85

88 Fulflo NP Specifications Materials of Construction Vessel % natural FDA grade polypropylene Head-to-shell -4 O-Ring: Standard (Industrial Grade): Viton* Optional (FDA Grade): Buna-N, EPDM, Silicone, FEP encapsulated silicone Pressure Relief Button O-Ring: Buna-N only Vessel Assembly Dimensions: Maximum Recommended Operating Conditions: Temperature: 5 F (5 psi (6.9 bar) Pressure: 5 psi (.3 75 O F ( O C) Flow Rate: 6 gpm (3 lpm) for in vessel gpm (45 lpm) for in vessel Recommended Cartridge Dimensions: NP: -3/8 in to -3/4 in O.D. x in I.D. x 9-5/8 in to 9-3/6 in long NP: -3/8 in to -3/4 in O.D. x in I.D. x 9-7/8 in to -/6 in long Connection Dimensions: Inlet/Outlet: 3/4 in (9 mm) NPTF Vent/Drain: /4 in (6.4 mm) NPTF Cartridge Seal Designs: TC : Single-Open-End with O-ring receptacle DO : Double-Open-End with knife edge seal; also accepts 3 O-ring seal cartridge (PR code) Vessel with pressure relief button Vessel without pressure relief button Compatible Chemicals (5 F max. temp.) Acetic Acid 5% Acetone 99.5% Ammonium Fluoride 4% Ammonium Hydroxide % Hydrochloric Acid 37% Hydrofluoric Acid 49%, 5% Nitric Acid % Phosphoric Acid 85% Potassium Hydroxide 45% Sodium Hydroxide 5% Tetrachloroethylene 99.% Ordering Information Each cartridge is identified with a product number, pore size and lot number for traceability. Vessel with /4 NPT vent and drain Standard Vessel Assemblies NP-DO-N-V NP-DO-N-V NP-DO-R-V NP-DO-R-V NP-D-DV-V NP-DO-DV-V NP-TC-N-V NP-TC-N-V NP-TC-R-V NP-TC-R-V NP-TC-DV-V NP-TC-DV-V Vessel Type NP Shell Length = = Cartridge Seal Design DO = Double-Open-End (gasket seal) TC = Single-Open-End ( O-ring) D = N = R = V = Vent/Drain Options /4 Femal NPT Drain (plugged No Vent, Drain or Pressure Relief Button Pressure Relief Button** /4 in Female NPT Vent (plugged) E = L = N = S = V = Head-to-Shell 4 O-Ring EPDM (FDA grade) FEP/silicone (FDA grade) Buna-N (FDA grade) Silicone (FDA grade) Viton* (Industrial grade) ** Pressure Relief Button ( R ) not recommended for hazard fl uid applications. Specifications are subject to change without notification. *Viton is a registered trademark of E.I. DuPont de Nemours & Co., Inc. 8 Parker Hannifin Process Advanced Filtration Inc. All Rights Reserved SPEC-C355-Rev. B 4/8 86

89 Filter Recommendation by Application Application Etching Residue Removal Cleaning Photochemical Filtration CMP Chemicals Primary Choice Filter Family Secondary Choice Si etch HF/HNO3/acetic acid Chemfl ow Profl ow SiO etch BOE/BHF-HF/NH4F Clariflow Fluorofl ow Si3N4 etch H3PO4 Fluorocap AI etch H3PO4/HNO3/acetic acid Fluorofl ow Hydroxy/amine based Glycol/NH4F based DMSO/amine based NMP, glycol amine, etc. Glycol, NH4F DMSO/amine, EL/ pentamone Chemfl ow (<6 C), Fluorofl ow (>6 C) Chemfl ow (<6 C), Fluorofl ow (>6 C) Profl ow (<6 C), Fluorofl ow (>6 C) Profl ow-e (<6 C) Fluorofl ow (>6 C) Profl ow-e (<6 C) Fluorofl ow (>6 C) Chemfl ow-e (<6 C) Fluorofl ow (>6 C) Pirahha HSO4/HO Fluorocap Fluorofl ow XF SC NH4OH/HO/HO Fluorofl ow SC HCI/HO/HO Fluorofl ow Cu, Ni, Au, etc. Photoresist Developing Oxide Copper Metal compound/acid or base/buffer Photo sensitive agent/ polymer resin Clarifl ow (<6 C), Fluorofl ow (>6 C) Polyfl ow M Chemfl ow PE Fluorofl ow Profl ow Polyflow G Polyflow G DI Rinsing HO Clarifl ow (<6 C), Fluorofl ow (>6 C) Ozonatde DI Rinsing HO/O3 Fluorofl ow Polyfl ow M (<6 C) Fluorofl ow (>6 C) Chemfl ow SELECT Pleating Technology Bath recovery rate is related to a fi lter s fl ow capacity. However, space availability in process baths is limited, thus there is always a constant challenge to increase the surface area and the fl ow capacity of the fi lter without increasing its size. Our revolutionary SELECT pleating utilizes an innovative pleat-design that not only increases the effective fi ltration area, but also greatly increases the fl ow-rate as compared to conventional types of pleating. SELECT pleating effectively offers up to 8% more fi ltration area, which translates into twice the fl ow capacity. Bath recovery can thus be signifi cantly improved and costs lowered. Ultraclean Leads the Microelectronics Industry in Cleanliness To improve product quality and yield, our R&D and design teams have successfully developed the revolutionary Ultraclean cleaning process. This proprietary process is applied to electronics grade products to provide a total metals extractables level of <5ppb. Ultraclean s low levels of metals extractables provide users with a highly consistent manufacturing process and thus very low product reject rates. SELECT-Pleating core guard standard pleating 87

90 Chemical Compatibility Chart Microelectronics Industry This chemical compatibility chart uses a rating system: A, B, C and F (most compatible to least) and is an easy way of rating a filter based solely on its chemical compatibility. However, all chemical compatibility guides are intended as general reference documents. By their nature, they cannot address the wide ranges of process parameters and their interactions. These include variations in temperature, pressure, chemical concentration, solid or liquid phase, ph level, and solubility. As each of these parameters is changed, so a material s resistance to chemical attack can be affected. Due to this variability, we recommend that users contact our Technical Services team in order to confirm the suitability and chemical resistance of a proposed filter material for each application. Our Technical Services team will undertake a compatibility evaluation and provide a product recommendation. FILTERS O-RINGS HOUSINGS A = Recommended B = Conditionally recommended C = Non-critical applications at ambient F = Do not use Fluorofl ow FluoroCap Profl ow II Chemfl ow PE Polyfl ow Membrane Polyfl ow Clarifl ow Chemrez Tefl on Encapsulated Viton Viton EPR Silicone Buna PFA Stainless Steel PVC Acetic Acid (5-8%) A A C C A A C A A A A F B A A A Acetic Acid Glacial A A B C B B C A A F B F B A C B Acetone (Dimethylketone) A A A C A A F A A F A F F A A A Ammonium Fluoride A A B A B B A A A A A F B A F B Ammonium Hydroxide A A A C A A A A A B A A B A C A Aqua Regia A A F F F F F A A F F F F A F F BOE; NH4F:HF A A A B A B A A A A F F F A F A Carbon Tetrachloride A A F F F F F A A A F A F A B F Citric Acid A A A A A A B A A A A A F A A C Chrom Phos; (3::.) HO:H3PO4:CRO A A B B C C F A A C F F F A C F Coating Aquator AZ A A A B C C F A A F C F F A A B Copper Sulfate A A A C A A A A A A A A A A A A Dimethyl Sulfoxide (DMSO) A A A B A A F A A F A F F A A F EGMEA A A B B B C F A A F F F F A B F EKC (Strip) Pyrollidone, n-methyl (NMP) to 4 C A A C C C C F A A F B F F A A B EKC (Strip) Pyrollidone, n-methyl (NMP) 4-5 C A A F F F F F A A F F F F A A F Ethanol A A A A A A A A A B A A A A A A Freon TF A A B C C C F A A B F F F A A C Hexamethyldisilazane (HMDS) A A B C B C F A A F F F F A C F Hydrochloric Acid (5-3%) A A A A A A A A A A A F B A F A Hydrofl uoric Acid (-49%) A A A A A A A A A A C F C A A A Hydrofl uoric Acid 5% A A A B F F B A A A F F F A A F Hyrdofl uoric Acid (conc.) cold A A C C A A F A A A F F F A B A Hydrogen Peroxide (3-%) A A A A A A A A A A B A B A A A Hyrdogen Peroxide (-3%) A A A A A A B A A A B A F A A A Hydrogen Peroxide (3-9%) A A A B A A F A A A F B F A A A Isopropyl Alcohol (IPA) A A A A A A A A A A B A B A A A Methanol A A A A A A B A A C B B B A A A Methylene Chloride A A B C F F F A A B F F F A A F Methyl Ethyl Ketone (MEK) A A B C F F F A A F A F F A A F Mixed Acid Etch; (HNO3<%:HF:CH3:COH) A A C F C C F A A C F F F A B F Negative Resist A A C C F F F A A A F F F A A F Nitric Acid (-35%) A A A F A A B A A A B A F A A A Nitric Acid (5-7%) A A F F F F F A A A F F F A A F Nitric Acid (conc.) A A F F F F F A A B F A F A C F NOE; NH4F:H: Ethylene Glycol/Surfactant A A A A C C A A A C C F C A F C P-Etch; (9:5:3) DI H:HF:HNO3 A A B F C C F A A B F F F A B C 88