CONTAMINATION CONTROL SOLUTIONS QUICKCHANGE CARTRIDGE AND DISPOSABLE FILTERS

Transcription

1 ONTMINTION ONTROL SOLUTIONS QUIKHNGE RTRIDGE ND DISPOSLE FILTERS Reliable nondewetting membrane technology in a prewet filter that delivers yield enabling particle protection, ease-of-use and rapid changeout

2 QUIKHNGE RTRIDGE ND DISPOSLE FILTERS the solution for aqueousbased chemical processes Overview Quickhange filters are designed for use in aqueous-based chemical systems where the risk of particle contamination cannot be tolerated. Entegris patented, nondewetting PTFE filter membrane delivers yield enabling performance by providing consistent retention properties. The Quickhange technology is proven to retain its nondewetting properties in outgassing chemistries and when chemical baths are drained or purged. Superior Filtration Efficiency and High Flow The combination of a nondewetting pleated membrane in a large filtration-area device allows Quickhange filters to maintain high flow, even with small pore sizes. Quickhange filters are available in a variety of retention ratings (.3 to. µm) and working membrane areas to provide high flow and superior filtration efficiency. y maintaining consistent flow rates in outgassing chemistries such as SPM, S1 and S, Quickhange filters can help stabilize process parameters and decrease system downtime. dditionally, Quickhange filters are available in disposable designs which eliminates handling of the filter element and decreases the possibility of contamination, making these filters ideal for critical applications that require highest purity liquids. Quickhange disposable filters feature a compact and easy-to-handle housing shell, which reduces potential exposure to hazardous chemicals during installation and disposal, and promotes a safer working environment. Quickhange disposable filters include the larger format hem-line I and hem-line II types as well as the smaller format 1, 15 and 3 point-of-use types. Less Handling, More leanliness and Safety Quickhange filters are delivered water-wet and require no IP prewetting prior to use, reducing filter change-out time. Without a prewetting requirement, Quickhange filters prevent alcohol/chemical interaction, avoid potential sources of contamination and eliminate the cost and inconvenience of hazardous waste disposal. Variety of Filtration Formats Quickhange filters are available in a variety of pleated cartridge and disposable filter formats to maximize installation flexibility and ease of retrofits. The use of several pleating designs and cartridge formats allows for various combinations of filter sizes and flow rate capabilities as outlined below: Filter Type Diameter Pleat Type Membrane rea Filter Design enefits T 7 mm Standard.9 m (9.7 ft ) Lowest cost, low flow filtration. Legacy (.75 ) and multi-round housing applications. TX 3 mm Standard 1.3 m (1 ft ) Low cost filtration with moderate flow. (3.5 ) needs. Legacy processes. TM 3 mm M-Pleat 1. m (19. ft ) Good value filtration for higher flow (3.5 ) recirculating applications. TE 3 mm M-Pleat. m (3.7 ft ) Most advanced, best value filtration. (3.5 ) Highest flow, viscous chemistries. Entegris, Inc.

3 QUIKHNGE RTRIDGE ND DISPOSLE FILTERS Features and enefits Features Nondewetting PTFE membrane Packaged in ultrapure DI water Minimized cost of ownership Variety of pleating designs Disposable filter options queous-based chemical compatibility enefits High-performance membrane prevents dewetting in air, during installation or chemical dumps/drains onsistent flow and retention in outgassing chemistries Eliminates prewetting and flushing cycles High-purity, clean and ready-to-use filter TM and TE high membrane format filters for high flow and extended filter lifetime Nondewetting membrane enables rapid filter changeout maximizing process uptime Reduces wear and tear of wet bench pumps minimizing maintenance costs T, TX, TM and TE filter designs for optimized flow/cost benefit Requires less space for changeout Incorporates no o-ring to avoid potential sources of contamination llows quick installation and minimizes downtime while limiting handling and exposure to hazardous chemicals Recommended for ambient temperature chemicals (including H SO, H 3 PO, HNO 3, Hl, NH OH, H O, TMH and ozonated water) and elevated temperature applications (including S1, S, SPM, nitride etch, metal etch and various other semi-aqueous resist strippers) Entegris, Inc. 3

4 QUIKHNGE RTRIDGE ND DISPOSLE FILTERS Product ttributes and Specifications T/TX/TM/TE 1/15/3 Materials Membrane Prewet, nondewetting PTFE Prewet, nondewetting PTFE Supports PF PF artridge o-ring options TEV (Teflon Encapsulated Viton), hemraz or Kalrez, Viton Extreme ETP N/ (disposables only) Shell (for disposables) PF (hem-line I and PF hem-line II type) Retention rating:.3 μm,.5 μm,.1 μm and. μm.3 μm,.5 μm,.1 μm and. μm Membrane area: T TX TM TE artridge connections: Maximum operating conditions: Metallic extractables: Particle shedding cleanliness: TO recovery (per 1 equivalent): Resistivity recovery (per 1 equivalent):.5 m (5. ft ) 1.9 m (9.7 ft ) 1. m (19. ft ) 3.7 m (9 ft ) 1.3 m (1 ft ). m ( ft ) ode (-) o-rings.3 µm.1 m (1.1 ft ) 1. m (19. ft ) 3. m (3. ft ). m (3.7 ft ). m (7. ft ) Max. operating.5 MPa (5. bar; 5 pressure.97 MPa (.97 bar; 1 Max. forward. MPa (. bar; 5 differential pressure.5 MPa (.5 bar; 7.5 Max. reverse.3 MPa (3.5 bar; 5 5 differential pressure.5 µm.1 m (1.1 ft ).1 µm.1 m (1.1 ft ) PF. m (1.9 ft ). m (1.3 ft ).13 m (1. ft ). µm.13 m (1. ft ) N/.5 m (. ft ).3 m (3. ft ).3 m (3. ft ).3 m (3. ft ). MPa (. bar; 5.19 MPa (1.9 bar; MPa (3.9 bar; MPa (1.9 bar; MPa (.9 bar; 5 Max. operating temperature 95 Device Standard UM Standard clean: to <1 μg/device artridge <5 μg/device <1 μg/device UM: to <3 μg/device Disposable <1 μg/device <3 μg/device <15 particles/1 ml. 5 L/min DI water flow artridge within 1 ppb of feed after L 1 L/min Disposable within 5 ppb of feed after 5 min 5 L/min Within.5 MΩ of feed after a L water 1 L/min <1 particles/1 ml. 5 L/min DI water flow Within 5 ppb of feed after 3 min 3. L/min Performance Data Hydraulic Performance for Disposable Products 1 Pressure Limit (PSI) 1 1 hem-line I hem-line II Temperature ( ) Entegris, Inc.

5 QUIKHNGE RTRIDGE ND DISPOSLE FILTERS Quickhange T artridge Filters Nominal Dimensions Ø95 mm (3.7 ) REF Ø9.9 mm (.75 ) mm (. ) REF Key adds. mm (.15 ) to length Length Overall ontrol Shoulder 13.3 mm (5.1 ) 115. mm (.53 ) 113. mm (.5 ) 1.3 mm (1.33 ) 5. mm (9.5 ) 3 mm (9.57 ) 9.3 mm (19. ) 79. mm (. ) 77. mm (.7 ) mm (9.7 ) 719. mm (.31 ) 717. mm (.3 ) Performance Data T 1 Filters T Filters µm.5 µm.1 µm. µm µm.5 µm.1 µm. µm Typical Flow Rate (L/min) 1 Typical Flow Rate (L/min) 1 T 3 Filters µm.5 µm.1 µm. µm Typical Flow Rate (L/min) 1 1 Ordering Information Q _ T _ K * artridge Length 1 = 1 = 3 = 3 Y =.3 µm Z =.5 µm V =.1 µm G =. µm O-ring 1 = TEV 1 = hemraz K1 = Kalrez 79 1 = E-ETP R1 = Kalrez 375 *Optional hemlock key attached to cartridge for use with hemlock housing ONLY Entegris, Inc. 5

6 QUIKHNGE RTRIDGE ND DISPOSLE FILTERS Quickhange TX, TM and TE artridge Filters Nominal Dimensions Ø95.3 mm (3.75 ) REF Ø3.3 mm (3.3 ) Key adds. mm (.15 ) to length filter length = 7.3 mm (5.1 ) 1 filter length =. mm (9.1 ) filter length = 71. mm (.5 ) Quickhange TX Performance Data TX Filters TX 1 Filters µm.5 µm.1 µm. µm µm.5 µm.1 µm. µm Typical Flow Rate (L/min) 1 Typical Flow Rate (L/min) 1 TX Filters 1 1 Ordering Information µm.5 µm.1 µm. µm Typical Flow Rate (L/min) Quickhange TX artridge Filters Q K * artridge Length STX = TX = 1 TX = Y =.3 µm Z =.5 µm V =.1 µm G =. µm O-ring 1 = TEV 1 = hemraz K1 = Kalrez 79 1 = E-ETP R1 = Kalrez 375 *Optional hemlock key attached to cartridge for use with hemlock housing ONLY Entegris, Inc.

7 QUIKHNGE RTRIDGE ND DISPOSLE FILTERS Quickhange TM Performance Data Quickhange TE Performance Data TM 1 Filters µm..5 µm....1 µm. µm Typical Flow Rate (L/min) TE 1 Filters µm.5 µm.1 µm Typical Flow Rate (L/min) TM Filters µm..5 µm µm. µm Typical Flow Rate (L/min) TE Filters µm.5 µm..1.1 µm Typical Flow Rate (L/min) Ordering Information Quickhange TM artridge Filters STNDRD LEN Q K * artridge Length TM = 1 TM = O-ring 1 = TEV 1 = E-ETP 1 = hemraz Y =.3 µm V =.1 µm Z =.5 µm G =. µm K1 = Kalrez 79 R1 = Kalrez 375 Ordering Information Quickhange TE artridge Filters STNDRD LEN Q K * artridge Length TE = 1 TE = O-ring 1 = TEV 1 = E-ETP 1 = hemraz Y =.3 µm V =.1 µm Z =.5 µm K1 = Kalrez 79 R1 = Kalrez 375 Quickhange TM artridge Filters UM LEN Q _ M K * artridge Length M = 1 Y =.3 µm V =.1 µm Z =.5 µm O-ring 1 = TEV 1 = E-ETP *Optional hemlock key attached to cartridge for use with hemlock housing ONLY Quickhange TE artridge Filters UM LEN Q _ E K * artridge Length E = 1 Y =.3 µm O-ring 1 = TEV 1 = E-ETP Entegris, Inc. 7

8 QUIKHNGE RTRIDGE ND DISPOSLE FILTERS Quickhange T, TX, TM, TE hem-line I Disposable Filters Standard Vent LH: L-line 3 Super Type Pillar s TH: T-line 3 Super Type Pillar s 35 mm (1.3 ) mm (.3 ) 1 mm (.55 ) 9 mm (3.5 ) mm (.3 ) M P5 Depth 15 mm mm (.3 ) 3 mm ( ) 1 mm (.55 ) mm (.3 ) M P5 Depth 15 mm 5 mm (.9 ) mm ( ) Ø mm (.9 ) Ø mm (.5 ) Ø mm (. ) mm ( ) Ø mm (.9 ) Ø mm (.5 ) Ø mm (. ) TP: T-tube 3 Super Type Pillar s 3 mm ( ) 1 mm (.55 ) H: T-line 1 Super Type Pillar s 3 mm ( ) 1 mm (.55 ) M P5 Depth 15 mm 5.5 mm (1.7 ) mm (.3 ) mm (1.5 ) M P5 Depth 15 mm mm (1.5 ) mm (.3 ) 5 mm (.9 ) 33 mm (1.3 ) mm ( ) Ø mm (.9 ) Ø mm (.5 ) Ø mm (. ) mm ( ) Ø mm (.9 ) Ø mm (.5 ) Ø mm (. ) Entegris, Inc.

9 QUIKHNGE RTRIDGE ND DISPOSLE FILTERS T3: T-tube 3 Super 3 Type Pillar s 3 mm ( ) 1 mm (.55 ) TW: T-tube 3 Flowell Series s 3 mm ( ) 1 mm (.55 ) TF: T-tube 3 FlareLock II s 3 mm ( ) 1 mm (.55 ) mm (1.5 ) M P5 Depth 15 mm mm (1.5 ) mm (1.5 ) M P5 Depth 15 mm mm (1.5 ) mm (1.5 ) M P5 Depth 15 mm mm (1.5 ) 5 mm (.9 ) 5 mm (.9 ) 5 mm (.9 ) mm ( ) Ø mm (.9 ) Ø mm (.5 ) Ø mm (. ) mm ( ) Ø mm (.9 ) Ø mm (.5 ) Ø mm (. ) mm ( ) Ø mm (.9 ) Ø mm (.5 ) Ø mm (. ) Nominal Dimensions for hem-line I with Standard onfiguration (Height: ottom to enterline Disposable Type (Overall Height) Inlet ) (Inlet to Outlet*) LH: L-line: 3 inlet/outlet, T 1 mm ( ) 351 mm (13. ) 9 mm (3.5)* 1 vent/drain, TX 1 mm (11. ) mm (. ) 9 mm (3.5)* Super Type Pillar fittings TX/TM/TE 1 mm ( ) 351 mm (13. ) 9 mm (3.5 ) TH: T-line: 3 inlet/outlet, T 1 mm ( ) 51 mm (13. ) mm (7. ) 1 vent/drain, TX 1 mm (11. ) mm (. ) mm (7. ) Super Type Pillar fittings TX/TM/TE 1 39 mm (15. ) 335 mm (13. ) mm (7. ) TP: T-tube: 3 inlet/outlet, T 1 mm (. ) 33 mm (15. ) mm (1.55 ) 1 vent/drain, TX 1 5 mm (17.5 ) 37 mm (1.5 ) mm (1.55 ) Super Type Pillar fittings H: T-line: 1 inlet/outlet, TM/TE 1 1 mm (15. ) 31 mm (13. ) mm (7. ) 1 vent/drain, Super Type Pillar fittings T3: T-tube: 3 inlet/outlet, TX/TM/TE 1 mm (17.5 ) 37.5 mm (1.7 ) 7 mm (1.51 ) 1 vent/drain, Super 3 Type Pillar fittings TW: T-tube: 3 inlet/outlet, T 1 9 mm (17. ) 37 mm (1. ) 5 mm (9. ) 1 vent/drain, TX 317 mm (. ) mm (9.1 ) 5 mm (9. ) Flowell Series fittings TX/TM/TE 1 3 mm (17.1 ) 3 mm (1.17 ) 5 mm (9. ) TF: T-tube: 3 inlet/outlet, TX 313 mm (.3 ) mm (9.5 ) 5 mm (9. ) 1 vent/drain, TX/TM/TE 1 3 mm (17.1 ) 3 mm (1.17 ) 5 mm (9. ) FlareLock II fittings * L-line inlet to outlet length is inlet to centerline of outlet fitting. Entegris, Inc. 9

10 QUIKHNGE RTRIDGE ND DISPOSLE FILTERS Quickhange T, TX, TM, TE hem-line I Disposable Filters With Modified Vent 3S: T-line 3 Super 3 Type Pillar s S: T-line 1 Super 3 Type Pillar s 3 mm ( ) mm (.3 ) 3 mm ( ) mm (.3 ) M P5 Depth mm mm (.3 ) M P5 Depth mm mm (.3 ) 33 mm (1.3 ) 5 mm (. ) 33 mm (1.3 ) Ø mm (.9 ) Ø mm (.9 ) mm ( ) Ø mm (.5 ) mm ( ) Ø mm (.5 ) Ø mm (. ) Ø mm (. ) Ø7 mm (5.1 ) Ø7 mm (5.1 ) Nominal Dimensions for hem-line I with Modified Vent onfiguration (Height: ottom to enterline Disposable Type (Overall Height) Inlet ) (Inlet to Outlet) 3S: T-line: 3 inlet/outlet, TM/TE 1 39 mm (15.7 ) 3 mm (13.39 ) 17 mm (.77 ) 1 vent/drain, Super 3 Type Pillar fittings S: T-line: 1 inlet/outlet, TM/TE 1 39 mm (15.7 ) 3 mm (13.39 ) mm (7.17 ) 1 vent/drain, Super 3 Type Pillar fittings 1 Entegris, Inc.

11 QUIKHNGE RTRIDGE ND DISPOSLE FILTERS Quickhange T, TX, TM, TE hem-line I Disposable Filters With ore Vent TH: T-line 3 Super Type Pillar s with ore Vent mm (.3 ) H: T-line 1 Super Type Pillar s with ore Vent 3 mm ( ) 1 mm (.55 ) mm (.3 ) Ø mm (.9 ) M P5 Depth 15 mm 3 mm ( ) 1 mm (.55 ) mm (.3 ).5 mm (.3 ) mm (.3 ) M P5 Depth 15 mm 1 mm (. ) 5 mm (.9 ) 33 mm (1.3 ) mm ( ) Ø mm (.9 ) Ø mm (.5 ) Ø mm (. ) mm ( ) Ø mm (.9 ) Ø mm (.5 ) Ø mm (. ) mm (1.5 ) ore vent mm (1.5 ) ore vent LH: L-line 3 Super Type Pillar s with ore Vent TW: T-tube 3 Flowell Series s with ore Vent M P5 Depth 15 mm Ø mm (.9 ) 3 mm ( ) mm (1.5 ) M P5 Depth 15 mm 1 mm (.55 ) mm (.3 ) mm (.3 ) 3 mm ( ) 1 mm (.55 ) 1 mm (. ) 5 mm (.9 ) 7 mm (.5 ) 5 mm (.9 ) mm ( ) Ø mm (.9 ) Ø mm (.5 ) Ø mm (. ) Inlet mm ( ) Outlet Ø mm (.9 ) Ø mm (.5 ) Ø mm (. ) ore vent mm (1.5 ) mm (1.5 ) ore vent Entegris, Inc. 11

12 QUIKHNGE RTRIDGE ND DISPOSLE FILTERS T3: T-tube 3 Super 3 Type Pillar s with ore Vent mm (1.5 ) M P5 Depth 15 mm TS: T-line 3 Super 3 Type Pillar s with ore Vent mm (.3 ) 3 mm ( ) 1 mm (.55 ) 3 mm ( ) 1 mm (.55 ) Ø mm (.9 ) mm (.3 ) M P5 Depth 15 mm 7.5 mm (3.9 ) 5 mm (.9 ) 1 mm (. ) 5 mm (.9 ) Inlet mm ( ) Outlet Ø mm (.9 ) Ø mm (.5 ) Ø mm (. ) mm ( ) Ø mm (.9 ) Ø mm (.5 ) Ø mm (. ) mm (1.5 ) ore vent mm (1.5 ) ore vent 3S: T-line 3 Super 3 Type Pillar s with ore Vent S: T-line 1 Super 3 Type Pillar s with ore Vent mm (.3 ) mm (.3 ) mm (.3 ) Ø mm (.9 ) mm (.3 ) 3 mm ( ) M P5 Depth mm 3 mm ( ) M P5 Depth mm 1 mm (. ) 33 mm (1.3 ) 1 mm (. ) 33 mm (1.3 ) mm ( ) Ø mm (.9 ) Ø mm (.5 ) Ø mm (. ) mm ( ) Ø mm (.9 ) Ø mm (.5 ) Ø mm (. ) ore vent ore vent mm (1.5 ) mm (1.5 ) Entegris, Inc.

13 QUIKHNGE RTRIDGE ND DISPOSLE FILTERS Nominal Dimensions for hem-line I with ore Vent onfiguration (Height: ottom to enterline Disposable Type (Overall Height) Inlet ) (Inlet to Outlet*) TH: T-line: 3 inlet/outlet, TM/TE 1 3 mm (15.3 ) 37 mm (.9 ) mm (7. ) 1 vent/drain, Super Type Pillar fittings H: T-line: 1 inlet/outlet, TM/TE mm (15.5 ) 33 mm (13.7 ) mm (7. ) 1 vent/drain, Super Type Pillar fittings LH: L-line: 3 inlet/outlet, TM/TE 1 35 mm (15. ) 3 mm (. ) 9 mm (3.5 ) 1 vent/drain, Super Type Pillar fittings TW: T-tube: 3 inlet/outlet, TM/TE 1 3 mm (17.1 ) 3 mm (1.17 ) 5 mm (9. ) 1 vent/drain, Flowell Series fittings T3: T-tube: 3 inlet/outlet, TM/TE 1 mm (17.5 ) 3 mm (1.1 ) 7 mm (1.51 ) 1 vent/drain, Super 3 Type Pillar fittings TS: T-line: 3 inlet/outlet, TM/TE 1 3 mm (15. ) 37 mm (.7 ) 17 mm (.77 1 vent/drain, Super 3 Type Pillar fittings 3S: T-line: 3 inlet/outlet, TM/TE 1 3 mm (15.3 ) 33 mm (13. ) 17 mm (.77 ) 1 vent/drain, Super 3 Type Pillar fittings S: T-line: 1 inlet/outlet, TM/TE 1 3 mm (15.3 ) 33 mm (13. ) mm (7.17 ) 1 vent/drain, Super 3 Type Pillar fittings * L-line inlet to outlet length is inlet to centerline of outlet fitting. Quickhange T Performance Data T 1 Disposable Filters with 3 / s µm.5 µm.1 µm. µm Typical Flow Rate (L/min) Entegris, Inc. 13

14 QUIKHNGE RTRIDGE ND DISPOSLE FILTERS Quickhange TX Performance Data TX Disposable Filters with 3 / s µm.5 µm.1 µm.. µm Typical Flow Rate (L/min) TX 1 Disposable Filters with 3 / s µm..5 µm..1 µm.. µm Typical Flow Rate (L/min) Quickhange TM Performance Data TM 1 Disposable Filters with 3 / s µm..1 µm..5 µm... µm Typical Flow Rate (L/min) TM 1 Disposable Filters with 1 s µm.5 µm.1 µm. µm Typical Flow Rate (L/min) Quickhange TE Performance Data TE 1 Disposable Filters with 3 / s µm.5 µm.1 µm Typical Flow Rate (L/min) TE 1 Disposable Filters with 1 s µm...5 µm.1 µm Typical Flow Rate (L/min) Entegris, Inc.

15 QUIKHNGE RTRIDGE ND DISPOSLE FILTERS Ordering Information Quickhange T hem-line I Disposable Filter STNDRD LEN Q D _ T 1 Z =.5 µm V =.1 µm G =. µm Quickhange TX hem-line I Disposable Filter STNDRD LEN Q D T X Size S = = 1 Y =.3 µm Z =.5 µm V =.1 µm G =. µm * available in LH, TH, TW, TF only LH TH TP TW LH TH TP T3 TW TF UM LEN Q D X Size S = = 1 Z =.5 µm V =.1 µm G =. µm LH TH Quickhange TM hem-line I Disposable Filter STNDRD LEN Q D _ T M LH Y =.3 µm TH Z =.5 µm T3 V =.1 µm TW G =. µm TF H Key UM LEN Q D _ M Z =.5 µm V =.1 µm G =. µm LH TH T3 TF Key Inlet/Outlet Vent/Drain Type 3S 3 1 T-line Super 3 Type Pillar TS 3 1 T-line Super 3 Type Pillar T3 3 1 T-tube Super 3 Type Pillar S 1 1 T-line Super 3 Type Pillar LH 3 1 L-line Super Type Pillar TH 3 1 T-line Super Type Pillar TP 3 1 T-tube Super Type Pillar H 1 1 T-line Super Type Pillar TF 3 1 T-tube FlareLock II TW 3 1 T-tube Flowell Series Entegris, Inc. 15

16 QUIKHNGE RTRIDGE ND DISPOSLE FILTERS Ordering Information (continued) Quickhange TE hem-line I Disposable Filter STNDRD LEN Q D _ T E LH TH Y =.3 µm T3 Z =.5 µm TW V =.1 µm H TS UM LEN Q D _ E Y =.3 µm LH TH H Quickhange TM hem-line I Modified Vent Disposable Filter STNDRD LEN Q M _ T M Y =.3 µm Z =.5 µm V =.1 µm 3S S UM LEN Q M _ M Y =.3 µm 3S S Quickhange TE hem-line I Modified Vent Disposable Filter STNDRD LEN Q M _ T E Y =.3 µm Z =.5 µm V =.1 µm 3S S UM LEN Q M _ E Y =.3 µm 3S S Key Key Inlet/Outlet Vent/Drain Type 3S 3 1 T-line Super 3 Type Pillar TS 3 1 T-line Super 3 Type Pillar T3 3 1 T-tube Super 3 Type Pillar S 1 1 T-line Super 3 Type Pillar LH 3 1 L-line Super Type Pillar TH 3 1 T-line Super Type Pillar TP 3 1 T-tube Super Type Pillar H 1 1 T-line Super Type Pillar TF 3 1 T-tube FlareLock II TW 3 1 T-tube Flowell Series 1 Entegris, Inc.

17 QUIKHNGE RTRIDGE ND DISPOSLE FILTERS Ordering Information (continued) Quickhange TM hem-line I Disposable Filter with ore Vent STNDRD LEN Q V _ T M Y =.3 µm Z =.5 µm V =.1 µm G =. µm LH TH T3 TW H TS 3S S UM LEN Q V _ M Y =.3 µm TH TW TS 3S S Quickhange TE hem-line I Disposable Filter with ore Vent STNDRD LEN Q V _ T E Key Y =.3 µm Z =.5 µm V =.1 µm LH TH T3 TW H TS 3S S UM LEN Q V _ E Y =.3 µm TH TW TS 3S S Key Inlet/Outlet Vent/Drain Type 3S 3 1 T-line Super 3 Type Pillar TS 3 1 T-line Super 3 Type Pillar T3 3 1 T-tube Super 3 Type Pillar S 1 1 T-line Super 3 Type Pillar LH 3 1 L-line Super Type Pillar TH 3 1 T-line Super Type Pillar TP 3 1 T-tube Super Type Pillar H 1 1 T-line Super Type Pillar TF 3 1 T-tube FlareLock II TW 3 1 T-tube Flowell Series Entegris, Inc. 17

18 QUIKHNGE RTRIDGE ND DISPOSLE FILTERS Quickhange TX/TM/TE hem-line II Disposable Filters Flaretek s with 1 Vent/Drain Flowell Series s with 1 Vent/Drain Pillar Super 3 s Flaretek s with 1 Vent/Drain Flowell Series s with 1 Vent/Drain 13.1 mm (. ) 13.1 mm (. ) 13.1 mm (. ) 13.1 mm (. ) 13.1 mm (. ) 11 mm (.33 ) 11 mm (.33 ) 11 mm (.33 ) 11 mm (.33 ) 11 mm (.33 ) Nominal Dimensions for hem-line II onfigurations s Inlet/ Outlet Vent/ Drain mm (1. ) mm (1. ) mm (1. ) mm ( ) mm (1. ) mm ( ) Flaretek s Flowell Series s Super 3 Type Pillar s Filter 1 Filter Filter 1 Filter Filter 1 Filter 3. mm 35. mm. mm 357. mm (9.1 ) (13.59 ) (9.3 ) (1. ) 1.3 mm (9.5 ) 3.3 mm (9.5 ) 5. mm (9.5 ) 53.5 mm (9.9 ).9 mm (1.35 ) 35.3 mm (13.95 ) 35. mm (1.3 ) 33. mm (1.3 ) 3.5 mm (1.3 ) 375. mm (1. ) 1. mm (9.5 ) 5. mm (1. ) 53.5 mm (9.9 ) 35. mm (13.9 ) 37. mm (1.5 ) 3.1 mm (1.1 ) 1. mm (1.3 ) 35. mm (9.5 ) 3. mm (13.7 ) 1. mm (1.3 ). mm (1.55 ) 31. mm (15. ) Entegris, Inc.

19 QUIKHNGE RTRIDGE ND DISPOSLE FILTERS Quickhange TX hem-line II Disposable Filters Performance Data TX Disposable Filters with 3 / s µm.5 µm µm. µm Typical Flow Rate (L/min) 1 TX Disposable Filters with 1 / s µm µm.1 µm. µm Typical Flow Rate (L/min) 1 TX Disposable Filters with 3 / s µm.5 µm µm µm Typical Flow Rate (L/min) 1 TX Disposable Filters with 1 s µm.5 µm µm. µm Typical Flow Rate (L/min) Entegris, Inc. 19

20 QUIKHNGE RTRIDGE ND DISPOSLE FILTERS Quickhange TX 1 hem-line II Disposable Filters Performance Data TX 1 Disposable Filters with 3 / s µm. µm µm µm Typical Flow Rate (L/min) 1 TX 1 Disposable Filters with 1 / s µm µm µm. µm Typical Flow Rate (L/min) 1 TX 1 Disposable Filters with 3 / s µm µm µm. µm Typical Flow Rate (L/min) 1 TX 1 Disposable Filters with 1 s µm..5 µm...1 µm. µm Typical Flow Rate (L/min) Entegris, Inc.

21 QUIKHNGE RTRIDGE ND DISPOSLE FILTERS Quickhange TM 1 hem-line II Disposable Filters Performance Data TM 1 Disposable Filters with 3 / s µm...3 µm.5 µm. µm Typical Flow Rate (L/min) 1 TM 1 Disposable Filters with 1 / s µm.5 µm µm µm Typical Flow Rate (L/min) 1 TM 1 Disposable Filters with 3 / s µm.5 µm.1 µm. µm Typical Flow Rate (L/min) 1 TM 1 Disposable Filters with 1 s µm.5 µm µm. µm Typical Flow Rate (L/min) 1 Entegris, Inc. 1

22 QUIKHNGE RTRIDGE ND DISPOSLE FILTERS Quickhange TE 1 hem-line II Disposable Filters Performance Data TE 1 Disposable Filters with 3 / s µm µm.1 µm Typical Flow Rate (L/min) 1 TE 1 Disposable Filters with 1 / s µm µm µm Typical Flow Rate (L/min) 1 TE 1 Disposable Filters with 3 / s µm µm.1 µm Typical Flow Rate (L/min) 1 TE 1 Disposable Filters with 1 s µm.5 µm...1 µm Typical Flow Rate (L/min) Entegris, Inc.

23 QUIKHNGE RTRIDGE ND DISPOSLE FILTERS Ordering Information Quickhange TX hem-line II Disposable Filter STNDRD LEN Q D _ S T X Y =.3 µm Z =.5 µm V =.1 µm G =. µm 1F F F F UM LEN Q D _ S X Z =.5 µm V =.1 µm F F Quickhange TX 1 hem-line II Disposable Filter STNDRD LEN Q D _ T X Y =.3 µm Z =.5 µm V =.1 µm G =. µm 1F F F F W W UM LEN Q D _ X Z =.5 µm V =.1 µm G =. µm F F F Quickhange TM 1 hem-line II Disposable Filter STNDRD LEN Q D _ T M Y =.3 µm Z =.5 µm V =.1 µm G =. µm 1F F F F W W UM LEN Q D _ M Y =.3 µm Z =.5 µm V =.1 µm *vailable for.3 and.5 µm only. F F* F Key Key Inlet/Outlet Vent/Drain 1F 3 1 Flaretek F 1 1 Flaretek F 3 1 Flaretek F 1 1 Flaretek OW 3 1 Flowell Series W 1 1 Flowell Series Entegris, Inc. 3

24 QUIKHNGE RTRIDGE ND DISPOSLE FILTERS Ordering Information (continued) Quickhange TE 1 hem-line II Disposable Filter STNDRD LEN Q D _ T E _ Key Y =.3 µm Z =.5 µm V =.1 µm 1F F F F W W FFM OFFM WWM WWM PPM PPM Key Inlet/Outlet Vent/Drain 1F 3 1 Flaretek F 1 1 Flaretek F 3 1 Flaretek F 1 1 Flaretek OW 3 1 Flowell Series W 1 1 Flowell Series FFM 3 1 Flaretek FFM 1 1 Flaretek UM LEN Q D _ E WWM 3 1 Flowell Series WWM 1 1 Flowell Series Y =.3 µm Z =.5 µm V =.1 µm PPM 3 1 Super 3 Type Pillar PPM 1 1 Super 3 Type Pillar F W W Entegris, Inc.

25 QUIKHNGE RTRIDGE ND DISPOSLE FILTERS Quickhange 1 Disposable Filters Nominal Dimensions Performance Data 13 mm (.5 ) 57 mm (. ) 15.5 mm (. ) 1 Disposable Filters Super Type Pillar fittings mm (.7 ) Flaretek compatible fittings 17 mm (5.79 ).3 µm 1..5 µm....1 µm. 1 3 Typical Flow Rate (L/min) Ordering Information STNDRD LEN Q D _ 1 P Y =.3 µm Z =.5 µm V =.1 µm P F Key Key Inlet/Outlet Vent/Drain P mm mm Super Type Pillar F 1 1 Flaretek Entegris, Inc. 5

26 QUIKHNGE RTRIDGE ND DISPOSLE FILTERS Quickhange Plus 15 Disposable Filters Nominal Dimensions 1. mm (5.5 ) 3. mm ( ) mm Super Type Pillar s. mm (3.31 ) 9. mm (3.5 ) 15. mm (.5 ) 3 Flaretek ompatible s 3. mm ( ) 3. mm ( ). mm (3.31 ) 9. mm (3.5 ) Performance Data 15 Disposable Filters µm µm µm. µm Typical Flow Rate (L/min) 1 3. mm ( ) Ordering Information 135. mm (5.3 ) mm Super 3 Type Pillar s 31. mm ( ). mm (3.31 ) 9. mm (3.5 ) 11. mm (5.55 ) 3 Super 3 Type Pillar s 31. mm ( ). mm (3.31 ) 9. mm (3.5 ) STNDRD LEN Q 1 5 _ Pleating Type P =.5 µm,.1 µm,. µm M =.3 µm PY =.3 µm PZ =.5 µm PV =.1 µm DG =. µm S 3S P 3F 31. mm ( ) 31. mm ( ) UM LEN Q P _ 1 5 Key Key Inlet/Outlet Vent/Drain P mm mm Super Type Pillar 3F 3 1 Flaretek S mm mm Super 3 Type Pillar 3S 3 1 Super 3 Type Pillar Y =.3 µm Z =.5 µm V =.1 µm S 3F Entegris, Inc.

27 QUIKHNGE RTRIDGE ND DISPOSLE FILTERS Quickhange Plus 3 Disposable Filters Nominal Dimensions mm Super Type Pillar s 3 / Flaretek ompatible s 1 / Super Type Pillar s 3. mm ( ) 3. mm ( ) 3. mm ( ) 19. mm (7. ). mm (3.31 ) 9. mm (3.5 ). mm (. ). mm (3.31 ) 9. mm (3.5 ). mm (.3 ). mm (3.31 ) 9. mm (3.5 ) 3. mm ( ) 3. mm ( ) 3. mm ( ) mm Super 3 Type Pillar s 31. mm ( ) 3/ Super 3 Type Pillar s 1/ Super 3 Type Pillar s 31. mm ( ) 31. mm ( ) 9. mm (7. ). mm (3.31 ) 9. mm (3.5 ) 19. mm (7. ). mm (3.31 ) 9. mm (3.5 ) 199. mm (7. ). mm (3.31 ) 9. mm (3.5 ) Performance Data 31. mm ( ) 3 Disposable Filters Typical mm and 3 / s µm.5 µm µm. µm Typical Flow Rate (L/min) mm ( ) 31. mm ( ) 3 Disposable Filters Typical 1 / s µm...5 µm...1 µm. µm Typical Flow Rate (L/min) Entegris, Inc. 7

28 Ordering Information STNDRD LEN Q 3 _ Pleating Type P =.5 µm,.1 µm,. µm M =.3 µm PY =.3 µm PZ =.5 µm PV =.1 µm DG =. µm S 3S S P P 3F UM LEN Q P _ 3 Y =.3 µm Z =.5 µm V =.1 µm S S P 3F Key Key Inlet/Outlet Vent/Drain P mm mm Super Type Pillar 3F 3 1 Flaretek P 1 1 Super Type Pillar S mm mm Super 3 Type Pillar 3S 3 1 Super 3 Type Pillar S 1 1 Super 3 Type Pillar For More Information Please call your Regional ustomer Service enter today to learn what Entegris can do for you. Visit and select the ustomer Service link for the center nearest you. Terms and onditions of Sale ll purchases are subject to Entegris Terms and onditions of Sale. To view and print this information, visit Entegris website at and select the Legal Notices link from the footer found on the home page. Entegris, hemlock, Flaretek, FlareLock, Quickhange and hem-line TM are trademarks of Entegris, Inc. Teflon is a registered trademark of E.I. du Pont de Nemours and ompany. hemraz is a registered trademark of Greene, Tweed & o. Viton, Viton Extreme TM and Kalrez are trademarks of DuPont Dow Elastomers. Flowell is a registered trademark of Flowell orporation. Pillar is a registered trademark of Nippon Pillar Packaging ompany, Ltd. ENTEGRIS, IN. orporate Headquarters 9 oncord Road illerica, M 1 US ustomer Service Tel ustomer Service Fax In North merica Entegris, Inc. ll rights reserved Printed in US ENT-91