International SEMATECH Technology Transfer # B-XFR

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1 300 mm Equipment Base Software Functionality Requirements Error Handling and Extended Scenarios: Selete/ISMT Computer Integrated Manufacturing (CIM) Base Functionality Requirements Collaboration, Phase 2, Rev. 2.0

2 and the logo are registered service marks of International SEMATECH, Inc., a wholly-owned subsidiary of SEMATECH, Inc. Product names and company names used in this publication are for identification purposes only and may be trademarks or service marks of their respective companies. 2001, Inc.

3 300 mm Equipment Base Software Functionality Requirements Error Handling and Extended Scenarios: Selete/ISMT Computer Integrated Manufacturing (CIM) Base Functionality Requirements Collaboration, Phase 2, Rev. 2.0 December 21, 2001 Abstract: Selete and (ISMT) are working together in a collaborative effort to support the implementation of 300 mm software requirements. The joint effort has resulted in a set of base equipment functional requirements and sample base equipment operational scenarios that encompass common requirements from the IC maker community. The resulting work is intended to provide guidance to equipment suppliers on the interpretation and application of the Computer Integrated Manufacturing (CIM) Global Joint Guidance and SEMI standards. The effort will provide reduced variations in operational requirements and encourage consistent implementations across all equipment. This document describes the operation and implementation of production equipment to help suppliers interpret the CIM Global Joint Guidance and SEMI standards. Only the most common configurations of production equipment are included; not all IC maker requirements or equipment types are covered. This revision reflects modifications to the scenarios based on standards updates. Keywords: 300 mm Wafers, Automated Materials Handling, Computer Integrated Manufacturing, Equipment Performance, Factory Automation, Failure Analysis, Software Integration, Standards Authors: Selete/ISMT Working Group: D. Bloss, P. Cross, L. Pivin (Intel), K. Gartland (IBM), G. Crispieri, Y. Kominato (Mitsubishi Electric), T. Katsuyama (NEC), M. Fujita, T. Masui (Selete), B. Crandell (TI), T. Miki (Toshiba), Y. Ohyama (Selete) Approvals: Gino C. Crispieri, Project Manager Information & Control Standards Jackie Ferrell, Program Manager for Guidelines & Standards Randy Goodall, Associate Director for Manufacturing Methods & Productivity Laurie Modrey, Technical Information Transfer Team Leader

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5 iii Table of Contents 1 EXECUTIVE SUMMARY INTRODUCTION Scope About This Document Position Section Descriptions Revision History Reference Documents Selete/ISMT CIM Collaboration mm Semiconductor Factory Guidelines SEMI Standards SEMI Ballots mm Software Test Methods EXTENDED SCENARIOS Multiple Products in A Carrier Base Functional Requirements Base Operational Procedure Base Communication Control Scenario Scenario Details Scenario Message Details FAILURE AND RECOVERY Overview Approach E84 Failures Description Types of E84 Errors Selected E84 Failures Slot Map Failure at FIMS Port Description Types of FIMS Port Slot Map Failure Selected Failures Internal Buffer Equipment Base Functional Requirements Carrier ID Read Failure Description Types of Failures Selected Failures Job Creation Failure Description Types of Failures Selected Failures... 54

6 iv 4.8 Docking/Clamping Failures Description Types of Failures Selected Failures GLOSSARY OF TERMS CONTACTS Selete Manufacturing Technology Research Department ISMT CIM Study Group... 66

7 v List of Figures Figure 1 E84 Failure (1 of 4) Figure 2 E84 Failure (2 of 4) Figure 3 E84 Failure (3 of 4) Figure 4 E84 Failures (4 of 4) Figure 5 Slot Map Failure at FIMS Port Fixed Buffer (1 of 5) Figure 6 Slot Map Failure at FIMS Port Fixed Buffer (2 of 5) Figure 7 Slot Map Failure at FIMS Port Fixed Buffer (3 of 5) Figure 8 Slot Map Failure at FIMS Port Fixed Buffer (4 of 5) Figure 9 Slot Map Failure at FIMS Port Fixed Buffer (5 of 5) Figure 10 Slot Map Failure at FIMS Port Internal Buffer (1 of 2) Figure 11 Slot Map Failure at FIMS Port Internal Buffer (2 of 2) Figure 12 Carrier ID Failure (1 of 4) Figure 13 Carrier ID Failure (2 of 4) Figure 14 Carrier ID Failure (3 of 4) Figure 15 Carrier ID Failure (4 of 4) Figure 16 Job Creation Failure (1 of 2) Figure 17 Job Creation Failure (2 of 2) Figure 18 Clamp/Dock Failures (1 of 3) Figure 19 Clamp/Dock Failures (2 of 3) Figure 20 Clamp/Dock Failures (3 of 3) Figure 21 Undock/Unclamp Failures (1 of 4) Figure 22 Undock/Unclamp Failures (2 of 4) Figure 23 Undock/Unclamp Failures (3 of 4) Figure 24 Undock/Unclamp Failures (4 of 4)... 65

8 vi List of Tables Table 1 Revision History... 3 Table 2 Base Functional Requirements for Multiple Products in a Carrier Scenario... 5 Table 3 Base Scenario for Multi Process Job Usage in Fixed Buffer Equipment... 8 Table 4 Base Functional Requirements for E84 TP3/TA4 Timeout Table 5 Base Functional Requirements for Slot Map Failure at FIMS Port: Fixed Buffer Equipment Table 6 Base Functional Requirements for Slot Map Failure at FIMS Port: Internal Buffer Table 7 Base Functional Requirements for Carrier ID Read Failure Table 8 Base Functional Requirements for Job Creation Failure Table 9 Base Function Requirements for Clamp/Dock and Undock/Unclamp Failures... 58

9 1 EXECUTIVE SUMMARY IC makers require implementation of 300 mm production equipment based on the CIM Global Joint Guidance and SEMI standards. Selete and (ISMT) are working together in a collaborative effort to support the implementation of 300 mm software requirements. The joint effort has resulted in a set of base equipment functional requirements and sample base equipment operational scenarios that encompass common requirements from the IC maker community. The resulting work is intended to provide guidance to equipment suppliers on the interpretation and application of the CIM Global Joint Guidance and SEMI standards that will reduce variations in operational requirements and encourage consistent implementations across all equipment. The collaborative effort has been divided into phases: Phase 1 defines base requirements and examples of base operational scenarios for two sample equipment types: a fixed buffer single-wafer processing tool and an internal buffer batch processing tool. These base requirements reflect areas of commonality across the IC makers as well as identify areas where requirements and usage may differ because of the type of products being manufactured or because of different operational philosophies. Phase 1 for fixed buffer single-wafer processing tools was completed in April Phase 1 for internal buffer batch processing tools was completed in July (For Phase 1, see the ISMT and Selete document, 300 mm Equipment Base Software Functionality Requirements Fixed Buffer and Internal Buffer Type Equipment: Selete/International SEMATECH CIM Base Functionality Requirements Collaboration, Phase 1B on s website [ Phase 2 extends the Phase 1 requirements and sample scenarios by adding a sample extended capability scenario and sample failure/recovery scenarios. The extended capability scenario is Multiple Products in a Carrier. The Failure/Recovery scenarios include the following: AMHS Parallel I/O (E84) Failure Slot Map Failure at FIMS Port Carrier ID Read Failure Job Creation Failure Docking/Clamping Failure. These failure/recovery scenarios are representative examples of the types of failures seen on tools in all factories. Phase 2 publication was completed in October This document reflects revisions to the scenarios according to standards updates. Phase 3 provides a set of equipment test specifications for a representative sample set of typical equipment usage scenarios for roundtrip operations. Phase 3 publication was completed in December

10 2 2 INTRODUCTION 2.1 Scope This document describes the operation and implementation of production equipment to help suppliers interpret the CIM Global Joint Guidance and SEMI standards. Only the most common configurations of production equipment are included; not all IC maker requirements or equipment types are covered. 2.2 About This Document Position This document is intended for use by IC makers, software suppliers, and production equipment suppliers. IC makers should use this document for Providing guidance to equipment suppliers on the interpretation and application of the CIM Global Joint Guidance and SEMI standards Documenting specific functional requirements, operational scenarios, and test verification plans for 300 mm production equipment Software suppliers and production equipment suppliers should use this document for Identifying consensus and non-consensus functional requirements from the IC maker community Determining how the implementation of specific requirements will be verified Section Descriptions EXECUTIVE SUMMARY (Section 1) High level overview of the collaboration INTRODUCTION (Section 2) Discussion of details on the collaboration scope and document logistics EXTENDED SCENARIOS (Section 3) Additional scenarios that extend Phase 1 functionality FAILURE AND RECOVERY (Section 4) Key types of failures shown in flowchart format with examples of factory recovery. GLOSSARY OF TERMS (Section 5) Definition of key terms from the document CONTACTS (Section 6) Key contact information

11 Revision History Table 1 Revision History Revision Date Contents /18/2000 Phase 2 - Extended scenario and Failure/Recovery Flows /04/2001 Updates per SEMI standard changes 0701 cycle and further review of the recovery scenarios. 2.3 Reference Documents Selete/ISMT CIM Collaboration Phase 1 Rev.2.0 document mm Semiconductor Factory Guidelines General index for 300 mm program documents mm/guide.htm CIM Global Joint Guidance for 300 mm Semiconductor Factories Release Five Global Joint Guidance for 300 mm Semiconductor Factories mm Integrated Vision for Semiconductor Factories: Release Three SEMI Standards SEMI E Specification for 3 inch, 100 mm, 125 mm and 150 mm Plastic and Metal Wafer Carriers SEMI E SEMI Equipment Communications Standard 2 Message Content (SECS-II) SEMI E Generic Model for Communications and Control of Manufacturing Equipment (GEM) SEMI E High-Speed SECS Message Services (HSMS) Generic Services SEMI E Object Services Standard: Concepts, Behavior, and Services (OSS) SEMI E Standard for Processing Management SEMI E E Recipe Management Standard: Concepts, Behavior, and Service SEMI E47-95 Specification for 150 mm/200 mm Pod Handles SEMI E Provisional Specification for 300 mm Front Opening Interface Mechanical Standard (FIMS) SEMI E A Mechanical Specification for 300 mm Box Opener/Loader to Tool Standard (BOLTS-M) Interface SEMI E Specification for Enhanced Carrier Handoff Parallel I/O Interface

12 4 SEMI E Provisional Specification for Carrier Management (CMS) SEMI E Specification for Substrate Tracking SEMI E Provisional Specification for Control Job Management SEMI E The Carrier ID Reader/Writer Functional Standard: Specification of Concepts, Behavior, and Services SEMI E Provisional Specification for CIM Framework Material Transport and Storage Component SEMI E Provisional Specification for CIM Framework Scheduling Component SEMI E Provisional Guide for EFEM Functional Structure Model SEMI M Specification for Polished Monocrystalline Silicon Wafers Copies of these documents are available from SEMI. SEMI rth America (Headquarters) 3081 Zanker Road San Jose, California USA Tel: Fax: Web: SEMI Ballots Document 3115E Revisions to SEMI E87: Standard for Carrier Management Document 3098 Provisional Specification For Manual Handoff Operation Interface at E15.1 Load Port Copies of these documents are available from SEMI mm Software Test Methods 300 mm Operational Flowcharts mm /300_os_v09.pdf Index to Equipment Integration and Automation Testing Users Group Documents mm /methods.htm Important Information About These Documents mm /impinfo.htm

13 5 3 EXTENDED SCENARIOS 3.1 Multiple Products in A Carrier This scenario is almost the same as the scenario for fixed buffer-equipment verification. The difference is that a control job is sent for a carrier that has two process jobs instead of one. The two process jobs could represent two different products. te that the recipes and variable parameters provided for the two process jobs may or may not be the same Base Functional Requirements Table 2 details the Base Functional Requirements for this scenario. Table 2 Base Functional Requirements for Multiple Products in a Carrier Scenario # Function Variation GL or Std Fixed Buffer Single Wafer Base Scenario 1a Fixed buffer E101 EFEM Type 1b Internal buffer E101 2a Single Wafer 2b Unit Cycle Size 1 Carrier M Wafer Batch Op n.c. 2c N Carrier Batch 3 # of Load ports 2 or more Factory GJG 4a FOUP E47.1 Carrier Type 4b Open Cassette E1.9 Hw n.c. 5a Delivery Position Hw n.c. FOUP Clamping 5b Docked Position Hw n.c. 6a On Carrier Complete E87 Op n.c. FOUP Undocking Trigger 6b AMHS Triggered E87 Op n.c. 7a Automatic (AMHS) E84 Carrier Handoff 7b Manual (PGV) 3352 Hw n.c. 8a Read-Only (barcode) GL Hw n.c. 8b Carrier ID Type Electronic R/W (IR/RF) GL Hw n.c. 8c Electronic RO (RF) GL Hw n.c. 9a Carrier Delivery and Automatic E87 9b Pickup (Access Mode) Manual E87 10a Infrequent E87 Op n.c. Access Mode change 10b Frequent E87 Op n.c. 11a Host verify E87 Op n.c. Carrier ID Verification 11b Equipment Verify E87 Op n.c. 12a Bind E87 Op n.c. Load port Reservation 12b Reserve E87 Op n.c. 13 Slot Map Reader Confirm Wafer Exists E87

14 6 # Function Variation GL or Std Fixed Buffer Single Wafer Base Scenario 14a Slot Map Host Verify E87 Op n.c. 14b Verification Eqp Verify E87 Op n.c. 15 Substrate Tracking E90 16 Host Provides Wafer ID/ Content Map E87, E90 17 Wafer ID Reader E90 18a Process Job/Control Job Before delivery E94 Op n.c. 18b Creation and Carrier Delivery After delivery E94 19a 1 process 1 carrier E40,E94 19b Process Job/Control Job 1 process M carriers E40,E94 19c Usage N process 1 carrier E40,E94 19d N process M carriers E40,E94 Op n.c. 20 NPW Operation Managed by Control Job/Process Job E94 21 Slot-to-Slot Integrity E87 22 Wafer Carrier/ Slot Destination Location User provides E94 Op n.c. 23a host-initiated E30,E42 Recipe Download 23b operator-initiated E30,E42 24 Capacity Check 25a Slot Map Read Timing At load port Hw n.c. 25b At FIMS port Base Operational Procedure The sequence of actions is the same as for the Fixed Buffer Single Wafer Equipment Base Operational Procedure. The difference is that the message defining process jobs in Step 31 defines two process jobs, PJ1 and PJ2, and the Control Job then specifies both PJ1 and PJ2 for the same carrier. Wafers in slots 1 12 will be processed using the PJ1 process job, and wafers in slots will be processed using PJ2. The sequence of actions outlined here in the Base Operational Scenario were jointly developed by ISMT and Selete. They are as follows: 1. A host binds a known carrier to a load port on the equipment 2. The automated material handling system (AMHS) delivers the carrier to the specified load port. 3. The equipment reads the carrier ID of the newly arrived carrier. 4. The read carrier ID is compared to that specified in the initial bind command (from step #1), and if identical, equipment notifies the host of carrier ID verification success. 5. The front opening unified pod (FOUP) is docked, and its door is opened. 6. The FOUP slots are scanned by equipment.

15 7. The scan result is compared to the slot map specified in the initial bind command (from step #1), and if identical, equipment notifies the host of slot map verification success. 8. The host sends the recipes to the equipment. 9. The host requests the available control job queue space from equipment and available process job queue space. 10. The host creates process job(s) and a control job on the equipment 11. Control and first process job start. 12. Substrates from first process job are processed. 13. First process job completes. 14. Second process job starts. 15. Substrates from second process job are processed. 16. Process and control job complete. 17. The carrier is moved to the unload position 18. The AMHS picks up the carrier. 19. Load port is ready for next carrier Base Communication Control Scenario Scenario Assumptions The scenario on the following pages maps the requirements of the Base Operational Scenario to example SECS-II messages. This scenario is useful for showing the actual contents of the SECS communications between a host and equipment interface. Several assumptions were made in building this scenario. Those assumptions were as follows: 1. The access mode has been set to AUTO at some time before the scenario transactions begin. 2. This scenario does not show all state transitions for every state model for the associated standards, rather a subset that is relevant to the selected base functional requirements detailed. 3. Several pre-defined event reports are detailed in the scenario. It is assumed these event reports were created by standard E30 report creation mechanisms at some time before the beginning of the scenario transactions. These event reports have both VIDs and object attributes attached. 4. Process Job state model events are based on E30 events. PR Milestone events are not used in this scenario. 5. The PR Process Start attributes are set (process job initiates automatically if material is present). 6. There is no pre-conditioning or post-conditioning defined on process jobs. 7. The CJ Start Method attribute is set to AUTO (control job initiates automatically rather than waiting for host start). 8. This scenario shows one possible implementation. Because of the asynchronous nature of some of the messages, the delivery order of messages cannot be guaranteed. For instance, control job complete event report could arrive before or after carrier 7

16 8 complete event report. In this particular scenario, it was decided to show the control job complete event before the carrier complete event. 9. This scenario assumes the equipment is compliant to GEM (E30) and HSMS (E37). 10. Object attributes are accessible as equipment DVVALs (i.e., through S6F11 event reporting mechanisms) when events are triggered. 11. In this scenario, the numeric values assigned to the IDs for variables, events, and reports defined within the 300 mm standards were arbitrarily created for example purposes only, since actual numbering for VIDs, CEIDs, and RPTIDs is not standardized. In the SML layouts, these variables will be underlined for clarification purposes (e.g., QueueAvailableSpace). The actual numeric value of these variable, event, and report identifiers will vary from one implementation to the next Scenario Details The detailed sequences of messages exchanged by the equipment and the host are shown in Table 3. Table 3 Base Scenario for Multi Process Job Usage in Fixed Buffer Equipment # Description DIR SECS Message tes Host sends a Bind command containing CarrierID, PortID, Content Map and WaferID information (E87) Equipment responds with acknowledge of Bind Equipment notifies host of Port Association state model transition from t Associated to Associated Event (E87) Host acknowledges "Associated" Event Equipment notifies host of Port Reservation transition from t Reserved to Reserved Event (E87) Host acknowledges "Reserved" Event AMHS attempts material delivery (E84 handshake initiates) Equipment notifies Host that a carrier transfer begins with "Ready to Load" to "Transfer Blocked" Event (E87) Host acknowledges "Transfer Blocked" event AMHS completes material transfer (E84 handshake finish) H E H E S3F17 (Bind) S3F18 (Ack) H E S6F11 (Associated) Carrier Object is instantiated at this time. H E H E H E H E H E S6F12 (Ack) S6F11 (Reserved) S6F12 (Ack) S6F11 (TransferBlocked) S6F12 (Ack)

17 9 # Description DIR SECS Message tes Equipment notifies host that Material has arrived- "Material Received" Event (E30) Host acknowledges "Material Received" Event Equipment notifies host transition from "Reserved" to "t Reserved" Event (E87) Host acknowledges "t Reserved" event Equipment notifies host of "Carrier Clamped" event (E87) at load position. Host Acknowledges "Carrier Clamped" Event Equipment reads the Carrier ID (no event sent) (E99) Equipment notifies host of "ID t Read" to "ID Verification OK" event (E87) Host acknowledge "ID Verification OK" event Equipment notifies host of "Carrier Location Changed" event (E87) Host Acknowledges "Carrier Location Changed" event Carrier is Docked ( event Sent) Equipment opens the FOUP Door and sends "Carrier Opened" Event (E87) Host acknowledges "Carrier Opened" Event Equipment reads the Slot Map and verifies, sends "Slot Map t Read" to "Slot Map Verify OK" Event (E87) Host acknowledges "Slot Map Verify OK" Event Host requests to send multiblock recipe to tool(e30) Equipment acknowledges request to send multi-block recipe from host H E H E E H H E H E H E H E H E H E H E H E H E S6F11 (MaterialReceived) S6F12 (Ack) S6F11 (t Reserved) S6F12 (Ack) S6F11 (Carrier Clamped) S6F12 (Ack) S6F11 (ID VerificationOK) S6F12 (Ack) S6F12 (Carrier Location Changed) S6F12 (Ack) S6F11 (CarrierOpened) S6F12 (Ack) H E S6F11 (SlotMapVerifyOK) Equipment makes substrate tracking information available to the host (E90) when the equipment successfully reads slot map. H E H E H E S6F12 (Ack) S7F1 (ProcessProgramLoadInqui re) S7F2 (Ack)

18 10 # Description DIR SECS Message tes Host sends multi-block recipe to tool (E30) Equipment acknowledges receipt of multi-block recipe from host Step 23 to 26 are repeated for the necessary recipes Host requests Available Control Job Space (E30, E94) Equipment sends available Control Job queue Space Host requests available PJ Queue Space(E40) Equipment sends available PJ Queue Space Host issues PJ Multi Create Command (E40) Equipment acknowledges PJ Multi Create Command Equipment notifies host transition from creation to Process Job "Queued/Pooled" Event (E40) Host acknowledges Process Job "Queued/Pooled" Event Steps 33 and 34 are sent for each of the Process jobs being created Host issues CJ Create Command using object services (E94, E39) Equipment acknowledges Create Object Request Command Equipment sends CJ "Created" to "Queued" Event (E94) Host acknowledges Control Job Queued Event Equipment sends host CJ "Queued" to "Selected" Event (E94) Host acknowledges CJ "Queued" to "Selected" Event Equipment sends host CJ "Selected" to "Executing" Event (E94) Host acknowledges CJ "Executing" Event H E H E H E H E H E H E H E H E H E H E H E H E H E H E H E H E H E H E S7F3 (ProcessProgramSend) S7F4 (Ack) S1F3 (CJQueueSpace) S1F4 (CJQueueSpaceResponse) S16F21 (PRGet Space) S16F22 (PRGet SpaceResponse) S16F15 (PRJobMulti Create) S16F16 (Ack) S6F11 (Queue/Pooled) S6F12 (Ack) S14F9 (Create Object Request) S14F10 (Ack) S6F11 (Queued) S6F12 (Ack) S6F11 (Selected) S6F12 (Ack) S6F11 (Executing) S6F12 (Ack)

19 11 # Description DIR SECS Message tes Equipment sends host PJ "Queued/Pooled" to "Setting up" event (E40) Host acknowledges PJ "Setting Up" Event Wafers pulled from carrier, Carrier Accessing status transitions from "t Accessed" to "In Access" event (E87) Host acknowledges "In Access" event Equipment sends substrate "At Source" to "At Work" event (E90) Host acknowledges "At Work" event Equipment sends host PJ "Setting Up" to "Processing" event (E40) Host acknowledges PJ "Processing" event Equipment sends "Needs Processing" to "In Process" event (E90) Host acknowledges "In Process" Event Processing on substrate has been completed Equipment sends transition from substrate state model "In Process" to "Processed" event (E90) Host acknowledges Substrate "Processed" event Equipment sends host PJ transition from "Processing" to "Process Complete" event (E40) Host acknowledges PJ "Process Complete" event Equipment sends transition from substrate state model "At Work" to "At Destination" event (E90) H E S6F11 (Setting Up) This event only sent for the first substrates specified in the first (PJ1) and the second (PJ2) process jobs H E S6F12 (Ack) H E S6F11 (InAccess) This event is only sent for the first wafer in the carrier H E H E H E S6F12 (Ack) S6F11 (At Work) S6F12 (Ack) H E S6F11 (Processing) This event only sent for the first substrates specified in the first (PJ1) and the second (PJ2) process jobs H E S6F12 (Ack) H E S6F11 (In Process) Processing has initiated on substrate H E H E H E S6F12 (Ack) S6F11 (Processed) S6F12 (Ack) H E S6F11 (Process Complete) This event is only sent for the last substrate specified in the first (PJ1) and second (PJ2) process jobs after processing completes. H E S6F12 (Ack) H E S6F11 (At Destination) Substrate is returned to carrier

20 12 # Description DIR SECS Message tes Host acknowledges substrate " At Destination" event If last substrate from Process Job, equipment sends transition from PJ "Process Complete" to Process Job extinction event (E40) Host acknowledges Process Job Extinction event Steps are repeated for every wafer in the carrier If last process job, equipment sends transition from Control Job State Model "Executing" to "Completed" event (E94) Host acknowledges "Completed" event Equipment closes the carrier door and sends "Carrier Closed" event (E87) Host acknowledges "Carrier Closed" event Equipment sends host transition from Carrier Access state model "In Access" to "Carrier Complete" event (E87) Host acknowledges "Carrier Complete" event Equipment sends "Carrier Location Changed" event (E87) Host acknowledges "Carrier Location Changed" event Equipment notifies host of Port state model transition from "Transfer Blocked" to "Ready to Unload" Event (E87) Host acknowledges "Ready to Unload" event AMHS attempts material pickup (E84 handshake initiates) Equipment notifies host of Port state model transition from "Ready to Unload" to "Transfer Blocked" (E87) H E H E H E H E H E H E H E H E H E H E H E H E H E S6F12 (Ack) S6F11 (Process Job Extinction) S6F12 (Ack) S6F11 (Completed) S6F12 (Ack) S6F11 (CarrierClosed) S6F12 (Ack) S6F11 (CarrierComplete) S6F12 (Ack) S6F11 (Carrier Location Changed) S6F12 (Ack) S6F11 (Ready to Unload) S6F12 (Ack) S6F11 (Transfer Blocked) This event sent only is all substrates specified in the process job are processed. Sent with completion of all PJ1 substrates and with all PJ2 substrates.

21 13 # Description DIR SECS Message tes Host acknowledges "Transfer Blocked" event AMHS completes material pickup (E84 handshake completes) Equipment notifies host that material has departed from equipment "Material Removed" Event (E30) Host acknowledges "Material Sent" event Equipment notifies host of Port Association state model transition from Associated to t Associated Event (E87) Host acknowledges t Associated event Equipment notifies host of Port State Model transition from Transfer Blocked to Ready to Load event (E87) Host acknowledges Ready to Load event H E H E H E H E H E H E S6F12 (Ack) S6F11 (Material Removed) S6F12 (Ack) S6F11 (t Associated) S6F12 (Ack) S6F11 (ReadyToLoad) H E S6F12 (Ack) Equipment is ready to receive new material for processing.

22 Scenario Message Details 1. <S3F17 W <U4 0 <A "Bind" // Service Name <A "CARRIERXYZ" // Carrier ID <U1 1 // Port ID < A "ContentMap" // Content Map ( LotID - WaferIDs) <A "Lot123" <A "Wafer001 <A "Lot123" <A "Wafer002 : <A "Lot123" <A "Wafer024" <A "Lot123" <A "Wafer025" < A "Slot map" // Slot Map <U1 3 // Slot 1 Correctly Occupied <U1 3 // Slot 1 Correctly Occupied <U1 3 // Slot 1 Correctly Occupied : <U1 3 // Slot 1 Correctly Occupied <U1 3 // Slot 1 Correctly Occupied <A "Usage" //Content of this carrier, in this case, PRODUCT substrates <A "PRODUCT" 2. <S3F18 <U1 0

23 15 3. <S6,F11 W <U2 1 <U2 405 //Event = t Associated to Associated transition <U2 500 //Report 500 <A //GEM timestamp- CLOCK <U1 2 //PortTransfer State = Ready to Load <U1 1 //Port ID- 1 <A "CARRIERXYZ" //CarrierID <U1 0 //CarrierIDStatus Attribute- ID t Read <U1 0 //Slot MapStatus Attribute- Slot Map not Read <U1 1 // Port Association State VID- Load port associated <U1 0 // CarrierAccessing Status Attribute- Carrier t Accessed <U1 0 // Port Resevation State VID- Load port t reserved 4. <S6F12 <B[1/1] 0x00 5. <S6,F11 W <U2 1 <U2 805 //Event = t Reserved to Reserved transition <U2 500 //Report 500 <A //GEM timestamp- CLOCK <U1 2 // PortTransfer State=Ready to Load <U1 1 //Port ID- 1 <A "CARRIERXYZ" // CarrierID <U1 0 // CarrierIDStatus Attribute- ID t Read <U1 0 //Slot MapStatus Attribute- Slot Map not Read <U1 1 // Port Association State VID- Load port associated <U1 0 // CarrierAccessing Status Attribute- Carrier t Accessed <U1 1 // Port Resevation State VID- Load port Reserved 6. <S6F12 <B[1/1] 0x00

24 16 7. <S6,F11 W <U2 1 <U2 205 //Event = Ready to Load to Transfer Blocked transition <U2 500 //Report 500 <A //GEM timestamp- CLOCK <U1 1 // PortTransfer State=Transfer Blocked <U1 1 //Port ID- 1 <A "CARRIERXYZ" // CarrierID <U1 0 // CarrierIDStatus Attribute- ID t Read <U1 0 //Slot MapStatus Attribute- Slot Map not Read <U1 1 // Port Association State VID- Load port Associated <U1 0 // CarrierAccessing Status Attribute- Carrier t Accessed <U1 1 // Port Resevation State VID- Load port Reserved 8. <S6F12 <B[1/1] 0x00 9. <S6,F11 <U2 1 <U2 300 //Event = Material Received (GEM) <U2 500 //Report 500 <A //GEM timestamp- CLOCK <U1 1 // PortTransfer State=Transfer Blocked <U1 1 //PortID - 1 <A "CARRIERXYZ" // CarrierID <U1 0 // CarrierIDStatus Attribute- ID t Read <U1 0 //SlotMapStatus Attribute - Slot Map t Read <U1 1 // Port Association State VID- Load port Associated <U1 0 // Carrier AccessingStatus Attribute- Carrier t Accessed <U1 1 // Port Resevation State VID- Load port Reserved 10. <S6F12 <B[1/1] 0x00

25 <S6,F11 W <U2 1 <U2 806 //Event = Reserved to t Reserved transition <U2 500 //Report 500 <A //GEM timestamp- CLOCK <U1 1 // PortTransfer State=Transfer Blocked <U1 1 //Port ID- 1 <A "CARRIERXYZ" // CarrierID <U1 0 // CarrierIDStatus Attribute- ID t Read <U1 0 //Slot MapStatus Attribute- Slot Map not Read <U1 1 // Port Association State VID- Load port associated <U1 0 // CarrierAccessing Status Attribute- Carrier t Accessed <U1 0 // Port Resevation State VID- Load port t Reserved 12. <S6F12 <B[1/1] 0x <S6F11 W <U2 1 <U2 256 //Event = Carrier Clamped <U2 500 //Report 500 <A //GEM timestamp- CLOCK <U1 1 // PortTransfer State=Transfer Blocked <U1 1 //PortID - 1 <A "CARRIERXYZ" // CarrierID <U1 2 // CarrierIDStatus Attribute- ID t Read <U1 0 //SlotMapStatus Attribute Slot Map t Read <U1 1 // Port Association State VID- Load port associated <U1 0 // Carrier AccessingStatus Attribute- t accessed <U1 0 // Port Resevation State VID- Load port t reserved 14. <S6F12 <B[1/1] 0x00

26 <S6F11 W <U2 1 <U2 206 //Event = ID not read to ID Verification OK <U2 500 //Report 500 <A //GEM timestamp- CLOCK <U1 1 // PortTransfer State=Transfer Blocked <U1 1 //PortID - 1 <A "CARRIERXYZ" // CarrierID <U1 2 // CarrierIDStatus Attribute- ID Verification OK <U1 0 //SlotMapStatus Attribute Slot Map t Read <U1 1 // Port Association State VID- Load port associated <U1 0 // Carrier AccessingStatus Attribute- t accessed <U1 0 // Port Resevation State VID- Load port t reserved 16. <S6F12 <B[1/1] 0x <S6F11 W <U2 1 <U2 286 //Event = Carrier Location Changed <U2 500 //Report 500 <A //GEM timestamp- CLOCK <U1 1 // PortTransfer State=Transfer Blocked <U1 1 //PortID - 1 <A "CARRIERXYZ" // CarrierID <U1 2 // CarrierIDStatus Attribute- ID Verification OK <U1 0 //SlotMapStatus Attribute Slot Map t Read <U1 1 // Port Association State VID- Load port associated <U1 0 // Carrier AccessingStatus Attribute- t accessed <U1 0 // Port Resevation State VID- Load port t reserved 18. <S6F12 <B[1/1] 0x00

27 <S6F11 W <U2 1 <U2 220 //Event = Carrier Opened <U2 500 //Report 500 <A //GEM timestamp- CLOCK <U1 1 // PortTransfer State=Transfer Blocked <U1 1 //PortID - 1 <A "CARRIERXYZ" // CarrierID <U1 2 // CarrierIDStatus Attribute- ID Verification OK <U1 0 //SlotMapStatus Attribute Slot Map t Read <U1 1 // Port Association State VID- Load port associated <U1 0 // Carrier AccessingStatus Attribute- t accessed <U1 0 // Port Resevation State VID- Load port t reserved 20. <S6F12 <B[1/1] 0x <S6F11 W <U2 1 <U2 207 //Event = Slot Map t Read to Slot Verification OK <U2 500 //Report 500 <A //GEM timestamp- CLOCK <U1 1 // PortTransfer State=Transfer Blocked <U1 1 //Port ID- 1 <A "CARRIERXYZ" // CarrierID <U1 2 // CarrierIDStatus Attribute- Carrier ID Verification OK <U1 2 //SlotMap Status Attribute- Slot Map Verification OK <U1 1 // Port Association State VID- Load port associated <U1 0 // Carrier Accessing Status Attribute - Carrier t Accessed <U1 0 // Port Resevation State VID- Load port t reserved 22. <S6F12 <B[1/1] 0x00

28 <S7F1 W <A RECIPE1 // Host wants to download this recipe. Requests permission. <U <S7F2 <B 0x <S7F3 W <A RECIPE1 <B 0xFF 0xFF 0xFF 0xFF 0xFF 0xFF 0xFF 0xFF 0xFF 0xFF 0xFF 0xFF : : 0xFF 0xFF 0xFF 0xFF 0xFF 0xFF 26. <S7F4 <B 0x <S1F3 W <U // Request for Control Job Queue space, QueueAvailable Space 28. <S1F4 <U2 8 // equipment has room for 8 more control jobs 29. <S16F21 W // Send request for process job queue space 30. <S16F22 <U2 12 // Available process job queue space

29 <S16F15 W //Multiple process job create <U4 0 <A "PROCESSJOB1" // Process Job ID <B 0x0D // Material format code- Carrier=FOUP <A "CARRIERXYZ" // Carrier ID <U1 1 // Slot 1 <U1 2 // Slot 2 <U1 3 // Slot 3 : <U1 11 // Slot 11 <U1 12 // Slot 12 <U1 1 // Recipe Method, no recipe tuning <A RECIPE1 // Recipe name to apply // recipe tuning parameters <BOOL 1 // SETS start method to autostart <U4 // CEID to pause process job for <A "PROCESSJOB2" // Process Job ID <B 0x0D // Material format code- Carrier=FOUP <A "CARRIERXYZ" // Carrier ID <U1 13 // Slot 13 <U1 14 // Slot 14 <U1 15 // Slot 15 : <U1 24 // Slot 24 <U1 25 // Slot 25 <U1 1 // Recipe Method, no recipe tuning <A RECIPE2 // Recipe name to apply // recipe tuning parameters <BOOL 1 // SETS start method to autostart <U4 // CEID to pause process job for 32. <S16F16 <A "PROCESSJOB1" <A "PROCESSJOB2"

30 22 <U <S6F11 W <U2 1 <U2 600 //Event= Process Job created to QUEUED/POOLED <U2 700 //Report 700 <A //GEM timestamp- CLOCK <A PROCESSJOB1 //OBJID <U1 0 // PRJobState attribute- QUEUED/POOLED <A RECIPE1 // recipe ID for this process job 34. <S6F12 <B[1/1] 0x00

31 <S14F9 W <A " " // ObjSpec- Control Job object specifier <A "ControlJob //Object Type- Control Job <A ObjID // attribute Object ID <A CONTROLJOB1 //Object ID <A ProcessingCtrlSpec //attribute for attaching PRjobs <A PROCESSJOB1 <A "PROCESSJOB2" <A CarrierInputSpec //Carrier Input Spec attr- list of MID <A CARRIERXYZ <A MtrlOutSpec // attribute which maps src to dest //empty list since unicassette <A ProcessOrderMgmt //attribute for process job order <A LIST <A StartMethod // Start Method <BOOL 1 // AutoStart set to True 36. <S14F10 <A "ControlJob:CONTROLJOB1" <U1 0

32 <S6F11 W <U2 1 <U2 800 //Event= Control Job Created to QUEUED <U2 600 //Report 600 <A //GEM timestamp- CLOCK <A CONTROLJOB1 //OBJID <U1 0 // Control Job attribute- QUEUED 38. <S6F12 <B[1/1] 0x <S6F11 W <U2 1 <U2 801 //Event= Control Job QUEUED to SELECTED <U2 600 //Report 600 <A //GEM timestamp- CLOCK <A CONTROLJOB1 //OBJID <U1 1 // Control Job attribute- SELECTED 40. <S6F12 <B[1/1] 0x <S6F11 W <U2 1 <U2 803 //Event= Control Job SELECTED to EXECUTING <U2 600 //Report 600 <A //GEM timestamp- CLOCK <A CONTROLJOB1 //OBJID <U1 3 // Control Job attribute- EXECUTING 42. <S6F12 <B[1/1] 0x00

33 <S6F11 W <U2 1 <U2 603 //Event= Process Job QUEUED/POOLED to SETTING UP <U2 700 //Report 700 <A //GEM timestamp- CLOCK <A PROCESSJOB1 //OBJID <U1 1 // PRJobState attribute- SETTING UP <A RECIPE1 // recipe ID for this process job 44. <S6F12 <B[1/1] 0x <S6F11 W <U2 1 <U2 208 //Event = Carrier t Accessed to In Access <U2 500 //Report 500 <A //GEM timestamp- CLOCK <U1 1 // PortTransfer State=Transfer Blocked <U1 1 //PortID - 1 <A "CARRIERXYZ" // CarrierID <U1 2 // CarrierIDStatus Attribute- ID Verification OK <U1 2 //SlotMapStatus Attribute Slot Map Verification OK <U1 1 // Port Association State VID- Load port associated <U1 1 // Carrier AccessingStatus Attribute- In Access <U1 0 // Port Resevation State VID- Load port t reserved 46. <S6F12 <B[1/1] 0x00

34 <S6F11 W <U2 1 <U2 401 //Event= Substrate goes from AT SOURCE to AT WORK <U2 530 //Report 530 <A //GEM timestamp- CLOCK <A Lot123 //Lot ID <A "Wafer001" //WaferID attribute <A "Location 1" // Substrate loc attribute- Equip dependent <U1 0 // Substrate Processing - Needs Processing <U1 1 // Substrate State - At Work <A "PRODUCT" // Substrate Usage - Product Wafer 48. <S6F12 <B[1/1] 0x <S6F11 W <U2 1 <U2 604 //Event= Process Job SETTING UP to PROCESSING <U2 700 //Report 700 <A //GEM timestamp- CLOCK <A PROCESSJOB1 //OBJID <U1 3 // PRJobState attribute- PROCESSING <A RECIPE1 // recipe ID for this process job 50. <S6F12 <B[1/1] 0x00

35 <S6F11 W <U2 1 <U2 402 //Event= Substrate goes from NEEDS PROCESSING to IN PROCESS <U2 530 //Report 530 <A //GEM timestamp- CLOCK <A Lot123 //Lot ID <A "Wafer001" //WaferID attribute <A "Location 2" // Substrate loc attribute- Equip dependent <U1 1 // Substrate Processing - In Process <U1 1 // Substrate State - At Work <A "PRODUCT" // Substrate Usage - Product Wafer 52. <S6F12 <B[1/1] 0x <S6F11 W <U2 1 <U2 403 //Event= Substrate goes from IN PROCESS to PROCESSED <U2 530 //Report 530 <A //GEM timestamp- CLOCK <A Lot123 //Lot ID <A "Wafer001" //WaferID attribute <A "Location 1" // Substrate loc attribute- Equip dependent <U1 2 // Substrate Processing - Processed <U1 1 // Substrate State - At Work <A "PRODUCT" // Substrate Usage - Product Wafer 54. <S6F12 <B[1/1] 0x00

36 <S6F11 W <U2 1 <U2 605 //Event= Process Job PROCESSING to PROCESS COMPLETE <U2 700 //Report 700 <A //GEM timestamp- CLOCK <A PROCESSJOB1 //OBJID <U1 4 // PRJobState attribute- PROCESS COMPLETE <A RECIPE1 // recipe ID for this process job 56. <S6F12 <B[1/1] 0x <S6F11 W <U2 1 <U2 405 //Event= Substrate goes from AT WORK to DESTINATION <U2 530 //Report 530 <A //GEM timestamp- CLOCK <A Lot123 //Lot ID <A "Wafer001" //WaferID attribute <A "Location 3" // Substrate loc attribute- Equip dependent <U1 2 // Substrate Processing - Processed <U1 2 // Substrate State - At Destination <A "PRODUCT" // Substrate Usage - Product Wafer 58. <S6F12 <B[1/1] 0x00

37 <S6F11 W <U2 1 <U2 609 //Event= Process Job PRJobComplete <U2 700 //Report 700 <A //GEM timestamp- CLOCK <A PROCESSJOB1 //OBJID <U1 4 // PRJob attribute- PROCESS COMPLETE <A RECIPE1 // recipe ID for this process job 60. <S6F12 <B[1/1] 0x <S6F11 W <U2 1 <U2 805 //Event= Control Job EXECUTING to COMPLETED <U2 600 //Report 600 <A //GEM timestamp- CLOCK <A CONTROLJOB1 //OBJID <U1 5 // Control Job attribute- COMPLETED 62. <S6F12 <B[1/1] 0x00

38 <S6F11 W <U2 1 <U2 222 //Event= Carrier Closed <U2 500 //Report 500 <A //GEM timestamp- CLOCK <U1 1 // PortTransfer State=Transfer Blocked <U1 1 //PortID - 1 <A "CARRIERXYZ" // CarrierID <U1 2 // CarrierIDStatus Attribute- Carrier ID Verification OK <U1 2 //SlotMap Status Attribute- Slot Map Verification OK <U1 1 // Port Association State VID- Load port associated <U1 1 // Carrier Accessing Status Attribute - Carrier Accessed <U1 0 // Port Resevation State VID- Load port t reserved 64. <S6F12 <B[1/1] 0x <S6F11 W <U2 1 <U2 227 //Event= Carrier Accessing In Access to Carrier Complete <U2 500 //Report 500 <A //GEM timestamp- CLOCK <U1 12 // PortTransfer State=Transfer Blocked <U1 1 //PortID - 1 <A "CARRIERXYZ" // CarrierID <U1 2 // CarrierIDStatus Attribute- Carrier ID Verification OK <U1 2 //SlotMap Status Attribute- Slot Map Verification OK <U1 1 // Port Association State VID- Load port associated <U1 2 // Carrier Accessing Status Attribute - Carrier Completed <U1 0 // Port Resevation State VID- Load port t reserved 66. <S6F12 <B[1/1] 0x00

39 <S6F11 W <U2 1 <U2 286 //Event = Carrier Location Changed <U2 500 //Report 500 <A //GEM timestamp- CLOCK <U1 1 // PortTransfer State=Transfer Blocked <U1 1 //PortID - 1 <A "CARRIERXYZ" // CarrierID <U1 2 // CarrierIDStatus Attribute- ID Verification OK <U1 0 //SlotMapStatus Attribute Slot Map Verification OK <U1 1 // Port Association State VID- Load port associated <U1 0 // Carrier AccessingStatus Attribute- t accessed <U1 0 // Port Reservation State VID- Load port t reserved 68. <S6F12 <B[1/1] 0x <S6F11 W <U2 1 <U2 208 //Event = Transfer Blocked to Ready to Unload transition <U2 500 //Report 500 <A //GEM timestamp- CLOCK <U1 3 // PortTransfer State=Ready to Unload <U1 1 //Port ID- 1 <A "CARRIERXYZ" // CarrierID <U1 2 // CarrierIDStatus Attribute- ID Validation OK <U1 2 //Slot MapStatus Attribute- Slot Map Validation OK <U1 1 // Port Association State VID- Load port Associated <U1 2 // CarrierAccessing Status Attribute- Carrier Completed <U1 0 // Port Reservation State VID- Load port t reserved 70. <S6F12 <B[1/1] 0x00

40 <S6F11 W <U2 1 <U2 209 //Event = Ready to Unload to Transfer Blocked transition <U2 500 //Report 500 <A //GEM timestamp- CLOCK <U1 1 // PortTransfer State=Transfer Blocked <U1 1 //Port ID- 1 <A "CARRIERXYZ" // CarrierID <U1 2 // CarrierIDStatus Attribute- ID Validation OK <U1 2 //Slot MapStatus Attribute- Slot Map Validation OK <U1 1 // Port Association State VID- Load port Associated <U1 2 // CarrierAccessing Status Attribute- Carrier Completed <U1 0 // Port Reservation State VID- Load port t reserved 72. <S6F12 <B[1/1] 0x <S6F11 W <U2 1 <U2 303 //Event = Material Removed (GEM) <U2 500 //Report 500 <A //GEM timestamp- CLOCK <U1 1 // PortTransfer State=Transfer Blocked <U1 1 //PortID - 1 <A "CARRIERXYZ" // CarrierID <U1 2 // CarrierIDStatus Attribute- ID verification OK <U1 2 //SlotMapStatus Attribute - Slot Map Verification OK <U1 1 // Port Association State VID- Load port Associated <U1 2 // Carrier AccessingStatus Attribute- Carrier Completed <U1 0 // Port Resevation State VID- Load port t Reserved 74. <S6F12 <B[1/1] 0x00

41 <S6F11 W <U2 1 <U2 237 //Event= Port Associated to t Associated <U2 500 //Report 500 <A //GEM timestamp- CLOCK <U1 1 // PortTransfer State=Transfer Blocked <U1 1 //PortID - 1 <A "" // CarrierID NULL <U1 // CarrierIDStatus Attribute- NULL <U1 //SlotMap Status Attribute- NULL <U1 0 // Port Association State VID- Load port not associated <U1 // Carrier Accessing Status Attribute - NULL <U1 0 // Port Resevation State VID- Load port t reserved 76. <S6F12 <B[1/1] 0x <S6F11 W <U2 1 <U2 209 //Event = Transfer Blocked to Ready to Load transition <U2 500 //Report 500 <A //GEM timestamp- CLOCK <U1 2 // PortTransfer State=Ready to Load <U1 1 //Port ID- 1 <A "" // CarrierID NULL <U1 // CarrierIDStatus Attribute- NULL <U1 //Slot MapStatus Attribute- NULL <U1 0 // Port Association State VID- Load port not Associated <U1 // CarrierAccessing Status Attribute- NULL <U1 0 // Port Reservation State VID- Load port t reserved 78. <S6F12 <B[1/1] 0x00

42 34 4 FAILURE AND RECOVERY 4.1 Overview The 300 mm semiconductor manufacturing factory will be highly automated. It will be an integrated system requiring little or no operator intervention when operating under normal or business as usual situations. The factory control system, commonly called the Manufacturing Execution System (MES), will use information generated by the production equipment, the transport system, and the scheduling system to run the factory. This includes selecting carriers for delivery to and from production equipment, delivering to and picking up from the production equipment, set up, and process execution. Experience teaches us that in the complex world of semiconductor manufacturing, no factory runs business as usual completely. Many process, equipment, and material problems are found on a daily basis. In the highly automated 300 mm factory, recovery from these problems quickly and with minimal effort is required to maximize the huge investments these factories represent. At a high level, all errors or exceptions can be thought of as occurring within the following five step sequence: 1. Factory or equipment operations running normally ( business as usual ) 2. An abnormal incident, error, or exception occurs 3. The error is detected by a. The equipment b. The host system c. An operator or technician monitoring the line 4. The error, the error condition, or cause of the problem is fixed 5. The factory is restored to normal operations The requirements on equipment for step one are partially described in the Global Joint Guidelines, the Vision document, the SEMI standards, and each IC makers individual equipment specifications. The Selete/ISMT collaboration effort has defined a small example list of the kind of errors that might occur and are listed in this document. The methods of error detection are numerous and not addressed for all errors. Only a few examples are included. The method of fixing the errors is specific to the errors, the equipment, and the factory where the equipment is operated. IC makers encourage equipment and MES suppliers to develop solutions that reduce the amount of manual intervention required, but acknowledge the inevitability of manual intervention for many of the problems expected in the factory. The flowcharts included in this document are primarily directed at addressing step five, returning the factory to business as usual. 4.2 Approach For each type of failure addressed in Phase 2, a list of possible variations of the basic type is included. For example, for parallel I/O failures, SEMI E84 defines ten timeouts, four for the active equipment and six for the passive equipment. In addition to these timeouts, a parallel I/O can fail in other ways. These are all listed in Section 4.3.

43 Rather than use the traditional message flow called scenarios, the section on failures uses flowcharts in a way similar to that used for operational flows for testing. [Ref: EIATUG URL to operational flows]. Flowcharts can show multiple possible paths, or scenarios, and more than one type of failure within a single flow. For each flowchart, a Base Functional Requirements table is provided to show the variation(s) shown in the particular flow. For this table, a variation for a specific Base Functional Requirement is checked only if it is explicitly shown in the flowchart. If none of the variations are checked, then the flowchart should apply to a scenario using any of the variations. If all of the variations of a Base Functional Requirement are checked, then the flowchart includes all of them explicitly. Each type of failure contains a description of the failure and a list of the different ways that type of failure can occur. Where multiple variations exist, there is an explanation of why specific variations were selected for further development as a flowchart. In the operational flowchart itself, the actors are Operator, Host, AMHS, and the Equipment (production equipment). message flow scenarios are necessary for the error recovery, but the flowchart indicates the interactions among the actors, including any messages sent. 4.3 E84 Failures Description E84 failures include those that occur at the start of, or during, a parallel I/O transaction based on SEMI E84. There are basically two major types: one where the production equipment signals a problem by using either HO_AVBL or ES, and one that is based on timeouts at either the production equipment or the AMHS equipment or both Types of E84 Errors Different failure modes affect equipment type and the timing of failure on recovery options. 1. Handoff Interlock Abnormal Equipment detects abnormal conditions in the handoff. This may indicate interference of the AMHS with the equipment in the handoff conflict area. 2. Handoff Unavailable Equipment is not available for material handoff operation to the AMHS 3. Emergency Stop Request Inform Emergency Stop Request to the AMHS. This signal is normally ON. The production equipment may turn this signal OFF at any time before a transaction or during a transaction to indicate that the AMHS should immediately halt all activity. In particular, an overhead hoist must halt immediately. 35