What is the history of this issue and ballot? It is the first ballot of 5386 which is approved on May of 2012 by Korea I&C committee

Transcription

1 Background Statement for SEMI Draft Document 5386 LINE ITEM REVISION TO SEMI E94-032, SPECIFICATION FOR CONTROL JOB MANAGEMENT ENHANCEMENT OF MATERIAL REDIRECTION MODE Notice: This background statement is not part of the balloted item. It is provided solely to assist the recipient in reaching an informed decision based on the rationale of the activity that preceded the creation of this Document. Notice: Recipients of this Document are invited to submit, with their comments, notification of any relevant patented technology or copyrighted items of which they are aware and to provide supporting documentation. In this context, patented technology is defined as technology for which a patent has issued or has been applied for. In the latter case, only publicly available information on the contents of the patent application is to be provided. What is the problem being solved? In the current standard, if Control Job were not completed, the Carrier Access State could not be changed to the CarrierComplete state. In case of using the Material Redirection Mode, it would make a loss time to unload the completed carrier. This proposal is intended to revise the restricted conditions of transition to CarrierComplete stage in E94 in terms of reducing the waste time at the load port. What is the history of this issue and ballot? It is the first ballot of 5386 which is approved on May of 202 by Korea I&C committee Who will this affect? How? Why? There is an impact to the suppliers or IC makers by this standard if they use material redirection mode in E94 because the proposal will lead to the change of CarrierComplete condition. Is this a change to an existing solution, or, is it a new activity? It is a revision to SEMI E Note in the proposals, the added text is typically highlighted in blue and underlined. Removed text is typically denoted in blue with double strikeout marks. These markings are for highlight in the ballot only. They are not proposed to be included in the updated standard. Where the proposals show text extracted from the existing standard, any references in the text are aligned with current section numbering. However, recognize that various proposals may add or remove sections, requiring adjustment of references. This ballot assumes that SEMI will adjust these references prior to publication. Revision Control This revision control records activity within the task force as well as formal submit and resubmit dates and results per SEMI. Entries have been made by the task force. Date Version Name Edits 27-Aug Hyungsu Kim First version of this line item placed into the template.

2 Review and Adjudication Information Task Force Adjudication Committee Adjudication Group: Korea GEM 300 TF meeting Korea I&C Technical Committee Date: Thursday, November 8, 202 Thursday, November 8, 202 Time & Time Zone: 3:00 5:30 6:00 8:00 Location: SEMI Korea office (Tentative) SEMI Korea office (Tentative) City, State/Country: Seoul, Korea Seoul, Korea Leader(s): Byoung Min Im (TEL), Jong Sub Shim (ASM), Chang Yul Cho (SEMES) Chul Hong Ahn (SK Hynix) Gun Woo Lee (Miracom) Hyungsu Kim (SAMSUNG SDS) Document Hyungsu Kim (SAMSUNG SDS) Hyungsu Kim (SAMSUNG SDS) Originator(s) Standards Staff: Natalie Shim (SEMI Korea) Natalie Shim (SEMI Korea)

3 Date: 9/0/202 SEMI Draft Document 5386 LINE ITEM REVISION TO SEMI E94-032, SPECIFICATION FOR CONTROL JOB MANAGEMENT ENHANCEMENT OF MATERIAL REDIRECTION MODE Purpose. This Specification describes equipment provided services to the factory that supports a high level of factory automation. These services provide capabilities for the host to coordinate processing and disposition of materials on production equipment. 2 Scope 2. This Specification may be applied to equipment that is compliant to SEMI E30 (GEM) NOTICE: SEMI Standards and Safety Guidelines do not purport to address all safety issues associated with their use. It is the responsibility of the users of the Documents to establish appropriate safety and health practices, and determine the applicability of regulatory or other limitations prior to use. 3 Limitations 3. This Standard presents a model of the ControlJob the model delineates the services (messages) and behavior of the ControlJob. The model is protocol independent. Thus, an ancillary standard must be selected in order to provide a complete implementation. 3.2 This Standard should not be applied to non-production equipment, such as, material transport systems or facilities (environmental) controllers. 3.3 This Specification applies to equipment for which the atomic unit of material is the same for all input and output carriers on the equipment. It may not apply to equipment which would perform operations such as slicing or to equipment or equipment configurations where the equipment does not handle carriers, as in the case of a stepper or scanner in a linked photolithography cell. 4 Referenced Standards and Documents 4. SEMI Standards and Safety Guidelines SEMI E30 Generic Model for Communications and Control of Manufacturing Equipment (GEM) SEMI E39 Object Services Standard: Concepts, Behavior, and Services SEMI E40 Standard for Processing Management 5 Terminology 5. Definitions 5.. control job defines a unit of work on equipment for one or more carriers. The work is described by a set of one or more process jobs to be applied to the material contained in the carriers de-queue the act of removing an item from a queue. The de-queue implies nothing about the status of the item after removal equipment the intelligent system that communicates with the host host the intelligent system that communicates with the equipment life cycle the processes and activities of something from its beginning (creation) to its ending Material Redirection Mode term for an equipment mode of operation in which substrates are redirected to a carrier slot other than the source carrier slot multi-module equipment equipment that has more than one distinct processing resource (e.g., chamber) Page Doc SEMI

4 Date: 9/0/ production equipment equipment that measures or adds value to the product protocol independent for software, this means that the message descriptions are independent of delivery mechanisms Randomization process of moving material from a carrier source location to a carrier destination location in a mathematically random pattern. 5.. set-up a description of the current process capability of an equipment Slot Integrity Mode term for an equipment mode of operation in which all substrates are returned to the same source carrier and source slot after processing substrate basic unit of material on which work is performed to create a product. Examples include wafers, lead frames, CD s, die, flat panel displays, circuit boards, and disks substrate port the carrier location from which substrates are accessed by the equipment user start activities that are initiated on a system by another system or operator. Page 2 Doc SEMI

5 Date: 9/0/202 Line Item # - Enhancement of Material Redirection Mode. Line Item summary Add 2 standards in 4 Referenced Standards and Documents Change.3. Add R-9 and Table R-6 at the Related Information.2 Proposals.2. Proposal Add 2 standards in 4 Referenced Standards and Documents 4. SEMI Standards and Safety Guidelines SEMI E30 Generic Model for Communications and Control of Manufacturing Equipment (GEM) SEMI E39 Object Services Standard: Concepts, Behavior, and Services SEMI E40 Standard for Processing Management SEMI E87 Specification for Carrier Management (CMS) SEMI E90 Specification for Substrate Tracking.2.2 Proposal Revise A carrier that has been loaded onto the equipment may go through three stages : first, it is in the not accessed stage until it is accessed by a control job. When the carrier is at the substrate port and unloading of the substrates within the carrier begins, the carrier enters the in access stage. Once it enters this stage, it remains in this stage until all material has been returned to the carrier, no active control job exists that is using it and no control jobs in the queue exist that reference it. However, In the case of using Material Redirection Mode (Destination Map is not empty), Carrier Complete stage could be when the wafers that are not redirected have been returned to the carrier and there are no control jobs in the queue that reference it. The equipment shall provide a property of the carrier that shows the current stage of all carriers. The equipment shall provide a CarrierComplete or CarrierStopped event for each change in stage. The event when the carrier enters the in access stage informs the host that the carrier may not be removed from the equipment. The event when the carrier enters the completed stage informs the host that the carrier may be removed. Page 3 Doc SEMI

6 Date: 9/0/ Proposal Add R-9 and Table R-6 at the Related Information R-9 Material Redirection Mode R-8. Source carrier and Destination carrier are loaded to a tool that uses the material redirection mode. This example shows the transition of Carrier Accessing Status according to Control Job change. NOTE 7: CJS = Control Job State, PJS = Process Job State, CAS = Carrier Accessing Status. Table R-6 # Comment Dir Message CJS PJS Source CAS Dest CAS Create the process job. H->E PRJobCreateEnh (PRJobID=prj0, Mtrl=CS00, RecID=Rcp0) 2 PRJobCreateAck (PRJobID, PRJobStatus) 3 Request a control job. Material out specification maintains the wafer order from source carrier to destination carrier. H->E ControlJobCreate (CtrlJobID=cj0, ProcessingCtrlSpec=(prj0 ), ProcessOrderMgmt=ARRI VAL, MtrlOutSpec=( (CS00,(,2,3,4,5,6,7,8,9, 0,,2,3,4,5,6,7,8, 9,20,2,22,23,24,25)), (CS002,(,2,3,4,5,6,7,8,9, 0,,2,3, 4,5,6,7,8,9,20,2,22,23,24,25))),StartMethod= AUTO) 4 Request accepted. ControlJobCreateAck (CtrlJobID=cj0, JobStatus) 5 No CJ in selected state so the newly created job immediately transitions. 6 The equipment recognizes it and starts execution of the ControlJob. 7 ControlJob starts the ProcessJob; begins loading wafers to the processing modules. Event (CJSELECTED, CtrlJobID=cj0) Event (ControlJobStart, cj0) Event(PRJOBSETUP, prj0) 8 Event(Substrate Needs processing to In process, CS00_) 9 Event(Substrate Needs No state No state NOT- ACCESS QUEUED SELECTED EXECUTING In POOL ACTIVE/ SETUP ACTIVE/ PROCES SING IN-ACCESS NOT- ACCESS IN- ACCESS Page 4 Doc SEMI

7 Date: 9/0/202 # Comment Dir Message CJS PJS Source CAS Dest CAS processing to In process, CS00_2~CS00_24) Event(Substrate Needs processing to In process, CS00_25) Event(Substrate In process to Processing Complete, CS00_~CS00_24) Event(Substrate In process to Processing Complete, CS00_25) Event(ControlJobComplete d,cj0) COMPLETE ACTIVE/ PROCES SING COMPLE TE CARRIER COMPLETE CARRIER COMPLE TE NOTICE: Semiconductor Equipment and Materials International (SEMI) makes no warranties or representations as to the suitability of the Standards and Safety Guidelines set forth herein for any particular application. The determination of the suitability of the Standard or Safety Guideline is solely the responsibility of the user. Users are cautioned to refer to manufacturer s instructions, product labels, product data sheets, and other relevant literature, respecting any materials or equipment mentioned herein. Standards and Safety Guidelines are subject to change without notice. By publication of this Standard or Safety Guideline, SEMI takes no position respecting the validity of any patent rights or copyrights asserted in connection with any items mentioned in this Standard or Safety Guideline. Users of this Standard or Safety Guideline are expressly advised that determination of any such patent rights or copyrights, and the risk of infringement of such rights are entirely their own responsibility. Page 5 Doc SEMI