International Panel on Climate Change, IPCC ~5.8 9~88

Transcription

1 PFCs

2 1 PFCs International Panel on Climate Change, IPCC ~5.8 9~ United Nations Framework Convention on Climate Change, UNFCCC anthropogenic greenhouse gases 1997 Kyoto Protocol

3 PFCs

4 3 PFCs 1990 Intergovemmental Negotiating Committee for a Framework Convention on Climate Change INC/FCCC INC/FCCC United Nations Framework Convention on Climate Change, UNFCCC Kyoto Protocol CO2 CH4 N2O 1990 HFCS Marrakesh Accords

5 PFCs 4 Dry Etch Chemical Vapor Deposition, CVD Chamber 80% PECVD Plasma Enhance CVD Perfluorocarbon C-F CF4 C2F6 5% 6,500 9,200 CF4 C2F6 CO2 ( ) NF3 ( ) CF4 ( ) C2F6 ( ) ( ) C3F8 ( ) CHF3 ( ) C4F8 ( ) ( ) ,000 10,000 3,200 2, ,200 (GWP100) 1 10,800 5,700 11,900 22,200 8,600 12,000 10,000 "The IPCC Third Assessment Report: Climate Change 2001"

6 5 PFCs (1) (2) (3) PFCs (4) (5) Chemical Vapor Deposition CVD CVD 10% World Semiconductor Council, WSC % WSC 2005 GWP

7 PFCs 6 QMS close-cell FTIR Quadrupole Mass spectrometer, C2F6 CVD C2F6 F C C3F8 CF4 CF4 F Si SiF4 CVD SiF4 SiF4 CVD Quadrupole Mass Spectrometry QMS,Fourier Transform Infrared FTIR spectroscopy Gas Chromatography WorkIR UPS FTIR

8 7 PFCs PFC QMS FT-IR Gas chromatography ppm ppm ppm (seconds) (seconds) (30 seconds) MS F2,O2,N2 :Seventh Annual International Semicoductor Environmetal, Safety and Health Conference

9 PFCs 8 GWP GWP PECVD plasma enhance chmical vapor deposition 3M C3F8 CF4 C2F6 FTIR C2F6 CF4 10% Million Metric Tons of Carbon Equivalent,MMTCE C3F8 CF4 C2F6 70% C3F8 CVD F Central Glass CF3O F O-F C-F F CF3OF FCa

10 9 PFCs PFCs Gas Molecular Formula Atmospheric Life Time Years C/ F O H Boiling Point C L H HFE-227 CFOCHFCF Hexafluoropropene CF3CF=CF Hexafluoropropylene Oxide CF3CFCF2O Hexafluoroacetone CF3COCF Tetrafluoroethylene oxide CF2CF2OCH Hexafluoroisopropanol CF3 2CHOH HFE-216 CF3OCF=CF2 short HFE CF3CH2OCHF2 short HFE CHF2OCH2CF2CF3 short HFE CH3OCF2CF3 short HFE CF3CH2OCF2CF2H short HFE CHF2OCHFCF3 short L : Low Density Plasma; H: High Density Plasma 1998 Monterey PFC : Equivalent with Reference Gas; O: Slightly Lower Performance; : Additional Gas Required; X: No Good; : No Evaluation

11 PFCs 10 Applied Materials TEL Novellus Lam 3M Air Products ) Air Products C2F6 30%~70% PFC ( MMTCE ) CVD chamber clean 70% NF3 C2F6 Novellus TEL Applied Materials NF % FC 85% 99% NF3 200mm FC MMTCE (Fabs) 20~50% (Sputtering) CVD Novellus System CVD C2F6 C2F6 RF Radio Frequency (WF6 + 3H2 W + 6HF) CVD Novellus System Novellus Concept-2 Altus 200 mm FTIR

12 11 PFCs FC (FC) FC 0.02 % 4% FC 90% FC C2F6 CF4 80~95% NF3 CHF3 50% NF3 CHF3, N2 N2 PSA(pressure swing adsorption) PFC (CF3*,CF2*,C2F5*) N2 PFC SiF4

13 PFCs 12 (European Electronic Component Manufacturing Association, EECA) (Korea Semiconductor Industry Association, KSIA) Electronic Industries Association of Japan, EIAJ SEMATECH SEmiconductor MAnufacturing TECHnology 1997~ ~2003 dry cleaning 2003~ 2007 etching 2006~ H2 CH4 / 1200 CO2 HF COF2 Deltech CDO Eco Phoenix IV Edwards TPU ~750 Hitachi NF3 CF4 CHF3 C2F6 C3F8 C4F8 500~ % Pump FTIR/RGA Process Gases (SiH4, NF3) Local Scrubber Exhaust Pump N2 CH4 Air FTIR/RGA

14 13 PFCs wave 3000 surface radical ETC Dry Scrubber C2F6 C3F8 CF4 100% 100% 70% IPCC Tier 2b IPCC CF4 C2F6 CHF3 C3F8 C-C4F8 NF3 Hot Tubes NT NT NT Fueled combustions Plasma (with additive H20 vapors) NT NT Plasma (with additive O2 vapors) NT NT Catalytic Cryogenic absorption 0.7 NT NT NT Membrane Separation 0.8 NT NT NT NT NT

15 PFCs 14 (Global Warming Potential, GWP) CO2 (CO2 GWP 1) radiative forcing (1) (2) (3) (Perfluorocarbons, PFCs) GWP GWP (Chemical Vapor Deposition, CVD) 300 SiH4 (Etching) CVD (Physical Vapor Deposition, PVD) Sputtering evaporation (Plasma Etching) Si SiO2 Si3N4

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18 International Panel on Climate Change, IPCC ~5.8 C 9~ United Nations Framework Convention on Climate Change, UNFCCC anthropogenic greenhouse gases 1997 Kyoto Protocol 38

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20 Intergovemmental Negotiating Committee for a Framework Convention on Climate Change, INC/FCCC INC/FCCC United Nations Framework Convention on Climate Change, UNFCCC Kyoto Protocol CO2 CH4 N2O 1990 HFCS Marrakesh Accords

21 CO2 C3F8 () C4F10 () C6F14 () CF3CH2F (HFCS) CF3CHF2 (HFCS) CHF3 (HFCS) ( ) (100 ) 1 22,200 8,600 8,600 9,000 1,600 3,800 14,800

22 5 OA C2F6, Global Warming Potential, GWP CO2 22,200 3,200

23 6 5 OSHA (Occupational Safety and Health Administrative) 8 Threshold Limit Value, TLV 1,000 ppm Department of Transportation, DOT) 39.6 psia

24 7 500 K 277 C, 440 F 800 C F

25

26 9

27 10 polyethylene HEPA / PCB cfm 3. 2%

28 11 MgO fluxes fluxes SO2 International Magnesium Association, IMA 2000 and Industrial Research, SINTEF Norwegian Foundation for Scientific Materials Technology Laboratory SINTEF CF3CH2F HFC-134a C4F9OCH3 HFE7100 C3F7COC2F5 FK(NOVEC-612TM) 1. HFC-134a HFE7100 FK(NOVEC-612TM) 2. protective gas mixtures CO2-5% dry air alone 710 C CO2-Air 99%

29 12

30 13 (Global Warming Potential, GWP) CO2 CO2 GWP 1 CFC-11 GWP 5,000 CFC-12 GWP 8,500, HCFCS HFCS GWP 93 12,100 GWP 22,200 radiative forcing (1) (2) (3) (Threshold Limit Value, TLV) 8 40 (Electric Arc)

31 14, ) ( A=Aluminum E=Rare Earth H=Thorium K=Zirconium M=Manganese ( ) A= B= C= D= E= Q= Silver S= Silicon T =Tin Z=Zinc W=Yttrium X1= ASTM AZ91D A=Aluminum, Z=Zinc 91 Aluminum 91% D

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33 HFCs

34 1 HFCs Ozone Depletion Potential, ODP CFCS HCFCS HFCS CFCS HCFCS HFCS CFCS HCFCS HFCS Global Warming Potential, GWP 1997 HFCS 2 HCFCS

35 HFCs 2... HCFCS

36 3 HFCs 1990 Intergovemmental Negotiating Committee for a Framework Convention on Climate Change INC/FCCC INC/FCCC United Nations Framework Convention on Climate Change, UNFCCC Kyoto Protocol CO2 CH4 N2O 1990 HFCS Marrakesh Accords

37 HFCs 4 HCFCS Technology and Economic Assessment Panel, TEAP 1999 "The Implication to the Montreal Protocol of the Inclusion of HCFCS and in the Kyoto Protocol" Ozone Depleting Substance, ODS HFCS HFCS ODSS HFCS HFCS 2 HFCS ODSS HFC-134a CFC-12 HFC-23 R-503 CFC-13 HFC-23 Oxide Etch HFCS 75 HFC-134a HFC-134a

38 5 HFCs

39 HFCs in-hg in-hg 8 in-hg

40 7 HFCs kg ~5

41 HFCs

42 9 HFCs / / / CFC-12 HFC-134a, HCFC-22 R-502 HCFC-22 CFC-115

43 HFCs V 220V 20 psig

44 11 HFCs in-Hg ( 1/3 )

45 HFCs 12 HFCS HFCS C C

46 13 HFCs ( )

47 HFCs 14 Global Warming Potential, GWP CO2 (CO2 GWP 1) radiative forcing (1) (2) (3) Ozone Depletion Potential, ODP CFC-11 CFC-11 ODP 1 CFCS HFCS ODP HCFCS ODP 0 ODP Ozone Depleting Substances, ODSS Hydrofluorocarbon, HFC CFCS HCFCS HFCS GWP HFC-134a GWP 1600 Perfluorocarbons, PFCs GWP GWP (Refrigerant)

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