LTCC gas viscosity sensor

Transcription

1 LTCC gas viscosity sensor Th. Maeder, N. Dumontier, C. Jacq, G. Corradini and P. Ryser Laboratoire de Production Microtechnique Ecole Polytechnique Fédérale de Lausanne EPFL - LPM, Station 17, CH-1015 Lausanne, Switzerland thomas.maeder@epfl.ch, lpm.epfl.ch/tf

2 Outline 1. Introduction - LTCC structuration & microfluidics 2. Gas viscosity sensor - measuring principle 3. Sensor construction - LTCC processing for fluidics 4. Results - thermal & functional characterisation 5. Conclusions & outlook Outline

3 Outline 1. Introduction - LTCC structuration & microfluidics 2. Gas viscosity sensor - measuring principle 3. Sensor construction - LTCC processing for fluidics 4. Results - thermal & functional characterisation 5. Conclusions & outlook Outline

4 1. Lausanne The EPFL : Ecole Polytechnique Fédérale de Lausanne Eidgenössische Technische Hochschule Lausanne Swiss Federal Institute of Technology in Lausanne Introduction

5 1. Lausanne Thick-film / LTCC / MEMS packaging lab Harsh environments Sensors & microfluidics (LTCC, TF-ceramic, TF-metal) Introduction Packaging

6 1. LTCC application examples Introduction

7 1. Why LTCC? Introduction

8 1. LTCC advantages T firing < 900 C --> allows use of silver conductors High-density packaging 3-D structuration Hermetic structures Reliable mechanical, thermal and electrical performance High volume, low cost fabrication Introduction

9 1. LTCC vs. alumina for sensors > Thermal, low-range mechanical sensors Introduction

10 LTCC & thick-film microfluidics Features Vias Channels Membranes Beams Three types 1) Glass sealing (TF) 2) Cutting & stacking 3) Sacrificial layer Introduction

11 LTCC microfluidics - cut & laminate Rel. large channels High flows Sensor: heater module Lamination quality LTCC microreactor Gas viscosity sensor - heater module Introduction

12 LTCC microfluidics - sacrificial carbon Low-flow channels for gases Membranes with low spacing Sensor: meander + membrane Channels: risk of clogging Membranes: process dependence Introduction

13 Outline 1. Introduction - LTCC structuration & microfluidics 2. Gas viscosity sensor - measuring principle 3. Sensor construction - LTCC processing for fluidics 4. Results - thermal & functional characterisation 5. Conclusions & outlook Outline

14 Sensor principle Pressure differential generated by heating / cooling Pressure measured by membrane sensor Pressure relaxation through meander

15 Determination of gas viscosity Purpose: identification of gas mixtures Simple sensor principle: time relaxation Robust measurement: no problems mit offset, Entirely thermal sensor (!T &!P): simple electronics Viscous gas Thin gas

16 Outline 1. Introduction - LTCC structuration & microfluidics 2. Gas viscosity sensor - measuring principle 3. Sensor construction - LTCC processing for fluidics 4. Results - thermal & functional characterisation 5. Conclusions & outlook Outline

17 Sensor construction in LTCC : 2 modules Base: membrane & meander - sacrificial carbon method Heater: membrane on rigid frame - cut & laminate method Heater module soldered onto base (thermal transfer) Sensor construction

18 Sensor construction in LTCC: heater Sensor construction

19 Outline 1. Introduction - LTCC structuration & microfluidics 2. Gas viscosity sensor - measuring principle 3. Sensor construction - LTCC processing for fluidics 4. Results - thermal & functional characterisation 5. Conclusions & outlook Outline

20 Heater characterisation Good correspondence with model Change = increase of air conductivity with temperature Some positive temperature drift at low power

21 Heater: origin of thermal drift Thermal resistance vs. weighted reference (block+lid) No hysterisis with these boundary conditions

22 Heater: transient behaviour Very fast resistor response time ("1 s) Heating faster than cooling due to TCR Additional delayed response due to lid, etc.

23 Heater: dependence on gas Some thermal losses in LTCC membrane Not perfectly cold wall

24 Membrane-base thermal resistance n-butane air Measurement vs. modelling in n butane, air & He Helium Nonlinear effect of distance (pressure) & gas th. conductivity Without pressure: thermal conductivity measurement Time relaxation. viscosity measurement

25 Viscosity sensor operation Periodic heating & cooling Pressure relaxation through meander

26 Viscosity sensor operation Relatively linear response around zero differential pressure Membrane-base contact at strongly negative!p

27 Viscosity sensor operation Heating t* = 41.1 s (air) Cooling t* = 37.1 s (air) Slight difference in time constant t* due to nonlinearity Can resolve He / air (!viscosity = 8%,!t* = 9%) Problems encountered with butane (clogging?)

28 6. Conclusions & outlook Features Simple thermal gas viscosity & th. conductivity sensor LTCC structuration for microfluidic device High sensitivity to viscosity: ca. 1-2% Issues Some drift: influence of heater on membrane Thermal compensation for viscosity Possible clogging of channels Outlook Capacitive measurement of pressure Protection against clogging (filter, special structures)

29 Merci Danke!