MAR K E T S EG M ENTS FO R O PTOS I C

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1 LASER GALVO SCANNING MIRRORS FAST STEERING MIRRORS O P TO S I C O P TO S I C SIC OPTIC S FOR SIC OPTIC S FOR HIGH-END LASER HIGH-END LASER OSCEESS S E S P R OP CR ES

2 S RE FTI LE R EFLEC NC GT I N G P E R MAN FO R M ANCE PER FOR CE We man u fac tu re h igh - perfor mance aser gavo scanning We ma n uf a c ture high - p e r forma n ce f ast ste e ring mirrors mi rro rs from 1 0 mm to 50 0mm aper tures for singe pair f rom 2 5 mm to 30 0 mm a p e r tures with a ra ng e of high co ns umption with a ran ge of high refective coatings. ref e c tive coatings. TH E ADVANTAG EN OTAGE F O PTOS PTIICCS: T H E A DVA OFIC O PO TOS O P T IC S Standard and custom designs Low moment of inertia Low moment of inertia Standard and custom designs Corrosion and wear resistant Low dynamic fatness Low dynamic fatness Corrosion and wear resistant Opticay finished to state-of-the-art Peak-to-Vaey (PV) Opticay finished to state of the art Peak-to-Vaey (PV) surface specifications High resonance frequency High resonance frequency surface specifications Outstanding optica surface quaity Fast therma stabiization Fast therma stabiization Outstanding optica surface quaity Customized coating service Lightweight Lightweight Customized coating service Integrated mechanica fasteners Integrated mechanica fasteners MAR K E T S EG M ENTS FO R O PTOS I C H I G H - EN N G M I R ROFO RSR O P TOSI C M ADRSC K EAN T SNEI GMENTS H IGH - E N D S C ANNI NG MI R R O R S High power aser materia processing at UV IR waveengths Directed energy: utra-high power aser system resonators High power aser materia processing at UV IR waveengths Airborne and space scanning systems, avionic microsateite mirrors for UVA s Directed energy: utra-high power aser system resonators Bio / medica ophthamoogy Airborne and space scanning systems, avionic microsateite mirrors for UVA s Streak camera-mirrors, targeting appication, high-speed photography Bio / medica ophthamoogy Security, reconnaissance, surveiance Streak camera-mirrors, targeting appication, high-speed photography Sensing appications LIDAR Security, reconnaissance, surveiance Microithography Sensing appications LIDAR Kinematic mounts and optica benches Microithography Kinematic mounts and optica benches

3 OPTOSIC OPT IC S OPTOSIC OPTICS FORFOR H IGHEND HIGH-END LASER P RO C ESSES LASER PROCESSES Mersen deveops and produces innovative scanning mirrors in a taiored Mersen deveops and produces innovative scanning with a gavanometer optosic+ ceramic materia (SiC = siicon carbide) for today s and future (gavo-scanning) mirror in a taiored optosic+ ceramic materia (SiC = appications. siicon carbide) for today s and future appications. Mirror products by optosic are the enabing components for Mirror products made bymade optosic are the enabing components for the high-speed optica technoogy as they are optimised in stiffness, the high speed gavo-scanning technoogy as they are optimised in ight weight and dynamic performance in order to move the stiffness, ight weight and dynamic performance in order to move the aser-beam in a fast, precise and reiabe way. aser-beam in a fast, precise and reiabe way. Ourquaified highy quaified team rey on numerous of experience Our highy team can rey can on numerous years of years experience within the aser industry from design up to production; within the aser industry from design up to production; thus wethus are we are the internationay eading suppier in this technoogy. the internationay eading suppier in this technoogy. WHY OPTOSIC+ MATERIAL FOR YOUR APPLICATION? WHY OPTOSIC+ MATERIAL FOR YOUR APPLICATION? optosic+ siicon carbide is an advanced ceramic materia deveoped for high-end in the and optica industries. This unique materia has the optosic+appications siicon carbide is aser an advanced ceramic materia deveoped for high endhighest combination of therma and mechanica stabiity of any materia which appications in the aser gavo-scanning industry. This unique materia has the highestcan be opticay poished making it perfect for high performance ightweight mirrors. combination of therma and mechanica stabiity of any materia which can be opticay poished making it perfect for high performance ightweight scan mirrors. Other appications for this ceramic optics are mounted on space and airborne systems Other appications for this ceramic optics on space and airborne systems for imaging ike aser targeting andmounted point to point communication. for imaging ike aser targeting and point to point communication. THE ADVANTAGE OF OPTOSIC MATERIAL: THE ADVANTAGE OF OPTOSIC MATERIAL: Uniform microstructure, dense High stiffness High dimensiona & therma stabiity High therma conductivity, ow CTE High stiffness Good radiation hardness High dimensiona & therma stabiity Low intrinsic stress High therma conductivity, ow CTE Good radiation hardness Low intrinsic stress Geometry near net shape Nontoxic (beryium repacement) Uniform microstructure, dense Vacuum and cryo usage Geometry near net shape Nontoxic (beryium repacement) Vacuum and cryo usage optosic+ is the materia optosic is the trademark of the company and the product optosic+ is the materia optosic is the trademark of the company and the product

4 OPTOSIC+ MATERIAL FACTS OPTOSIC + BERYLLIUM HEAT CAPACITY Lower Higher THERMAL EXPANSION Lower Higher DYNAMIC STIFFNESS Higher Finished optica surfaces directy in the buk materia Lower COATABILITY Many ow stress coating choices Very good coatabiity Adhesion critica/ pea-off Issue contact ayer/ rejects POSTIVE TRADEOFFS Mechanicay and thermay stabe Unimited avaiabiity No waste og Safety: RoHS conformity Not therma optimum Restricted avaiabiity and traceabiity of disposas Toxic partices when puverized

5 SPECIAL COATINGS PROVEN ON OPTOSIC+ refectivity / % SCANcoat 1550-H s-po 55 p-po 55 p-po 35 s-po waveength / nm optosic Coating Name Nomina Waveength / nm Spectra Range Refectivity / % Scan Ange Range / SCANcoat UtraMAX HR 9,0µm + TR nm HR>99,7; TR>45 SCANcoat UtraMAX HR 3,5-5,5µm + TR nm HR>99,5; TR>45 SCANcoat 1940-H 1940 HR TR HR>99,5; TR>50 45 ± 13,5 SCANcoat 1550-H 1550 HR TR 650 HR>99,5; TR>50 SCANcoat 1080-H 1080 HR TR 633 HR>99,5; TR>30 41 ± 13,5 SCANcoat 1064-M HR TR 633 HR>99,5; TR>98 SCANcoat SiverMAX HR HR>98 SCANcoat Ag-M VIS-IR broadband HR HR HR HR450>93; HR633>96; HR1000>98 SCANcoat VIS-M HR (VIS) + HR HRvis>98; TR>96,5 SCANcoat 1617-H 1617 HR TR 633 HR>99,5 ; TR>80 45 ± 15 SCANcoat 1064-D 1064 HR TR ,5 ± 14 SCANcoat 1064-H HR TR ± 13 SCANcoat 1050-H 1050 HR TR ± 15 SCANcoat 1050-TB 1050 HR HR TR HR>99,5; TR>30 0 ± 5 SCANcoat 1030-Dxy 1030 HR TR 633 HR>99,5; TR>60 38,5/41 ± 13,5 SCANcoat 990-H HR TR ± 16 SCANcoat 960-H HR TR ± 16 SCANcoat H HR TR 633 HR>99,5; TR>80 45 ± 3,0 SCANcoat 532-H HR TR 633 HR>99,5; TR>50 41 ± 13 SCANcoat VIS-D durabe HR (VIS) protected surface HR>95 45 ± 30 optosic beam steering mirrors are designed for a variety of tip-tit appications using a setup with 45 as the ange of incidence (AoI) with standard coatings. For tip-tit appications using an 8 setup adjusted coatings are used. Proven SiC standard coating types are avaiabe and paired with stock avaiabiity from singe parts for tests up to arge quantities for OEM-suppies BECAUSE OF ow surface tension coating type H customer specific requirements approved package for shipment impemented quaity assurance YOUR BENEFITS minima surface deformation OEM-deveoped taiored specifications optic secured, visibe and identifiabe customer satisfaction

6 OPTOSIC MIRRORS ULTRA-HIGH PERFORMANCE WITH FAST STEERING MIRRORS IN SIC MATERIAL optosic beam steering mirrors are designed for a variety of tip-tit appications. These mirrors are manufactured as optosic+ grade, a unique Siicon Carbide, to give optimum stiffness, dynamic fatness and high resonant frequencies under high torque oadings whie offering very ow for a moving appications where processing speed and precise performance is paramount. optosic steering mirrors are standard poished to interferometric controed refective-wavefront-error of e.g. 1/2* (2*.1/8 on request). Furthermore, we are abe to manufacture in accordance to customer specifications. FSM-R FSM-R 90 FSM-R 110 FSM-R 130 FSM-R Tota Thickness 11, , , ,5 179 Optica axis, hight above CoG 449 3, , , ,46 FSM-T FSM-T 25 FSM-T 31 FSM-T 36 FSM-T 41 25, ,5 1,5 1,5 1,5 Tota Thickness 6,5 3,6 6,5 4,8 6,5 6,0 6,5 7,5 1,31 4,28 6,95 Optica axis, hight above CoG 2,07 1,74 1,54 1,38 FSM-RT FSM-RT 31 FSM-RT 65 FSM-RT ,0 2,0 3,8 Tota Thickness 4,1 3,5 9, , ,78 62, Optica axis, hight above CoG 1,10 2,00 6,53 FSM-3 FSM-3_54 FSM-3_62 54*75 62*86 Tota Thickness 8,6 35,6 8,6 45, Optica axis, hight above CoG 2,08 1,9 FSM-4 FSM-R 90 FSM-R 110 VALID FOR ALL 54*75 62*86 AoI = Ange of Incidence ( ) = 45 +/-3 CoG = Center of Gravity Tota Thickness 8,6 37,4 8,6 47,6 CA = Cear aperture for optica Spec CA < FS-dimension FS = face-sheet Optica axis, hight above CoG 2,33 2,1 FT = tota / fina thickness

7 WHY OPTOSIC+ IN OPTICAL SYSTEMS? MATERIAL COMPARISON WITH FOM (figure of merit) Buk Density / Young s Moduus / E Fract. Toughness / KiC Fexura strength 3pt-bend /σb mean specific heat at 20 C / Cp Therma conductivity / k CTE 2 ( C) / Diamond Beryium S-200FH Siicon Auminium INVAR Zerodur optosic+ AZnMg Cu0,5 BK7 Fusedsiica -Gas 6061-T Ni DKO N-BK7 FS SiC-ceramic g/cm 3 3,52 1,85 2,33 2,78 8, ,20 3,17 GPa (MPa-m1/2) MPa J/(g*K) W/m*K ppm/k , , ,5 20 0,9 1,3 1, ,95 0,685 0,86 0,5 0,8 0,86 0,79 0, ,46 1,11 1, ,4 2,6 27 0,5 0,01 7 0,5 FOM ( optosic) = k * E / (α * ρ * Cp) Re units 1,248,495 1,549 5, , ,249 Specific Stiffness E / ρ 324,6 159,5 63,5 25,2 18,5 35,7 32,7 32,7 13 Therma Stabiity k / α 2000,0 18,9 57,7 4,4 26,0 146,0 0,2 2,6 60,0 SCANNER FOM scanner FOM- optosic Zerodur Siicon optosic INVAR Auminium BK7 Fused siica Beryium Specific Stiffness E/ρ MERSEN QUALITY CONTROL Mersen products are quaity controed at three separate stages: Post-sintering aspect ratio toerance and micro-crack inspection. Inspected parts are traceabe with unique ID markings for product type and seria number. Post-poishing metroogy and interferometry Post-coating refection, environmenta, abrasion and adhesion tests We do provide every product with a unique ID number to ensure the traceabiity in our quaity contro system.

8 G LO BA L E XP ERT I N ELEC TR I C A L GPLOOWBEARL AENXDP E CT RE IC AR DT VAI N N CEELDE M AT RA I ALL S P O W E R A N D A D VA N C E D M AT E R I A L S MERSEN Deutschand Hoding GmbH & Co. KG Businesspark Geb MERSEN Deutschand Hoding GmbH & Co. KG Rupert-Mayer-Str. 44 Businesspark Geb D Munich - Germany Rupert-Mayer-Str. 44 te: +49Munich (0) D Germany fax: +49 (0) emai: te: +49optosic@mersen.com (0) web:+49 fax: (0) emai: optosic@mersen.com web: W W W. M E R S E N. CO M W W W. M E R S E N. C O M

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