Handbook of Optical Constants of Solids

Transcription

1 Handbook of Optical Constants of Solids Edited by EDWARD D. PALIK Naval Research Laboratory Washington, D.C. ACADEMIC PRESS, INC. Harcourt Brace Jovanovich, Publishers Boston San Diego New York London Sydney Tokyo Toronto

2 I Contents List of Contributors Preface xv xvii Part I DETERMINATION OF OPTICAL CONSTANTS Chapter 1 Chapter 2 Introductory Remarks EDWARD D. PAUK II. The Chapters III. The Critiques IV. The Tables V. The Figures of the Tables VI. General Remarks Basic Parameters for Measuring Optical Properties ROY F. POTTER II. Intrinsic Material Parameters in Terms of Optical Constants III. Reflectance, Transmittance, and Absorptance of Layered Structures IV. The General Lamelliform Phase Coherency Throughout V. The General Lamelliform Phase Incoherency in Substrate VI. Summary Appendix A. Basic Formulas for Fresnel Coefficients Appendix B. General Formulas for the Case of a Parallel-Sided Slab Appendix С Reflectance, R Jk aij-k Interface Appendix D. Reflectance of Single Layer on Each Side of a Slab and Single Layer on Either Side of a Slab Appendix E. Critical Angle of Incidence Definition of Terms Chapter 3 Dispersion Theory, Sum Rules, and Their Application to the Analysis of Optical Data D. Y. SMITH II. Optical Sum Rules and Their Physical Interpretation

3 VIII Contents Chapter 4 Chapter 5 Chapter 6 Chapter 7 III. Finite-Energy Sum Rules IV. Sum Rules for Reflection Spectroscopy V. Analysis of Optical Data and Sum-Rule Applications VI. Summary Measurement of Optical Constants in the Vacuum Ultraviolet Spectral Region W. R. HUNTER II. General Discussion of Reflectance Methods III. Reflectance Method for Two Media The Accurate Determination of Optical Properties by Ellipsometry D. E. ASPNES I. Reflection Techniques; Background and Overview II. Measurement Configurations III. Accurate Determination of Optical Properties: Overlayer Effects IV. Living with Overlayers V. Eliminating Overlayers VI. Bulk and Thin-Film Effects; Effective-Medium Theory VII. Conclusion Interferometric Methods for the Determination of Thin-Film Parameters JOSEPH SHAMIR II. Basic Principles III. Nonlaser Interferometers IV. Kösters-Prism Interferometers V. A Self-Calibrating Method VI. Surface Effects VII. Conclusions Thin-Film Absorptance Measurements Using Laser Calorimetry P. A. TEMPLE II. Single-Layer Films III. Wedged-Film Laser Calorimetry IV. Electric-Field Considerations in Laser Calorimetry V. Entrance versus Exit Surface Films

4 Contents ix VI. Experimental Determination of a f, e rf, and a fs Chapter 8 Complex Index of Refraction Measurements at Near-Millimeter Wavelengths GEORGE J. SIMONIS II. Fourier Transform Spectroscopy III. Free-Space Resonant Cavity IV. Mach-Zehnder Interferometer V. Direct Birefringence Measurement VI. Overmoded Nonresonant Cavity VII. Crystal Quartz as Index Reference VIII. Conclusion Chapter 9 i. п. in. IV. The Quantum Extension of the Drude-Zener Theory in Polar Semiconductors B. JENSEN Introduction Quantum Theory of Free-Carrier Absorption Theoretical Results Comparison with Experimental Data Appendix Chapter 10 Interband Absorption Mechanisms and Interpretation DAVID W. LYNCH II. One-Electron Model III. Electron-Hole Interaction, Excitons IV. Local Field Effects V. Examples General Chapter 11 Optical Properties of Nonmetallic Solids for Photon Energies below the Fundamental Band Gap SHASHANKA S. MITRA II. Infrared Dispersion by Polar Crystals III. Kramers-Kronig Dispersion Relations IV. Determination of Absorption Coefficient in the Intermediate Region V. Absorption Coefficient in the Transparent Regime VI. Multiphonon Absorption

5 VII. VIII. Part II Subpart 1 Infrared Absorption by Defects and Disorders Infrared Dispersion by Plasmons CRITIQUES Metals Contents i. и. in. IV. vi. VII. VIII. IX. XI. XII. Comments on the Optical Constants of Metals and an Introduction to the Data for Several Metals DAVID W. LYNCH AND W. R. HUNTER Introduction Anomalous Skin Effect Copper (Cu) Gold (Au) Iridium (Ir) Molybdenum (Mo) Nickel (Ni) Osmium (Os) Platinum (Pt) Rhodium (Rh) Silver (Ag) Tungsten (W) The Optical Properties of Metallic Aluminum D. Y. SMITH, E. SHILES, AND MITIO INOKUTI I. General Features II. Optical Measurements and Sample Conditions III. Tabulated Data Subpart 2 Semiconductors Cadmium Telluride (CdTe) 409 EDWARD D. PAUK 413

6 xi Gallium Arsenide (GaAs) EDWARD D. PALIK Gallium Phosphide (GaP) A. BORGHESI AND G. GUIZZETTI Germanium (Ge) ROY F. POTTER Indium Arsenide (InAs) EDWARD D. PALIK AND R. T. HOLM Indium Antimonide (InSb) R. T. HOLM Indium Phosphide (InP) 0. J. GLEMBOCKI AND H. PILLER Lead Selenide (PbSe) G. BAUER AND H. KRENN Lead Sulfide (PbS) G. GUIZZETTI AND A. BORGHESI Lead Telluride (PbTe) G. BAUER AND H. KRENN Silicon fsh 547 DAVID F. EDWARDS 552

7 xii Contents Silicon (Amorphous) (a-si) 571 H. PILLER 573 Silicon Carbide (SiC) 587 W. J. CHOYKE AND EDWARD D. PALIK 589 Zinc Sulfide (ZnS) 597 EDWARD D. PALIK AND A. ADDAMIANO 602 Subpart 3 Insulators Arsenic Selenide (As 2 Se 3 ) 623 D. J. TREACY 625 Arsenic Sulfide (As 2 S 3 ) D. J. TREACY Cubic Carbon (Diamond) DAVID F. EDWARDS AND H. R. PHILIPP Lithium Fluoride (LiF) EDWARD D. PALIK AND W. R. HUNTER Lithium Niobate (LiNb0 3 ) EDWARD D. PALIK Potassium Chloride (KCl) 703 EDWARD D. PALIK 706

8 Contents xiii Silicon Dioxide (Si0 2 ), Type a (Crystalline) 719 H. R. PHILIPP 721 Silicon Dioxide (Si0 2 ) (Glass) 749 H. R. PHILIPP 752 Silicon Monoxide (SiO) (Noncrystalline) 765 H. R. PHILIPP 766 Silicon Nitride (Si 3 N 4 ) (Noncrystalline) 771 H. R. PHILIPP 772 Sodium Chloride (NaCI) 775 J. E. ELDRIDGE AND EDWARD D. PAUK 779 Titanium Dioxide (Ti0 2 ) (Rutile) 795 M. W. RIBARSKY 798