Improve quality and enhance process integrity

Transcription

1 Expand your lead Improve quality and enhance process integrity camline forum US September 28, 2017, 08:30 17:00 + Morning Session: Process Integrity + Afternoon Session: Supply Chain Quality Venue:

2 08:30 09:00 Reception and coffee RM Process Integrity September 28, 08:30 13:00 Morning Session Welcome by camline Heinz Linsmaier CEO, camline GmbH, Germany Foyer 09:15 09:45 Keynote: Welcome by CNSE and SUNY As CNSE Executive Vice President of Innovation and Technology, Michael Liehr focuses on the creation of new business opportunities, develops and manages pertinent administrative and infrastructure operations required to support their establishment, and manages integrated industry-university consortia and public-private partnerships. Dr. Liehr will welcome the forum participants and present an overview of SUNY research activities at Albany. Dr. Michael Liehr VP Innovation & Technology, CNSE, Albany, US Industry 4.0 & IoT supported by camline solutions Summary of the camline forum 2016 in Germany This presentation will be a summary of the camline forum that took place in Dresden, Germany, in This summary will bring you an overview how camline s solutions for manufacturing efficiency and quality will support your roadmap to Industry 4.0. Jochen Kinauer Director Channel Sales, camline GmbH, Germany Access Control Recipe Object RM Context Resolution

3 Fab Line Yield Improvement via the Recipe Management Business Process GLOBALFOUNDRIES Fab 10 has reviewed and summarized the results from nonconforming fab events since 2009 through a weekly review meeting. When put into a Pareto, Recipe Management was identified as the second most prolific contributor to reduce wafer scraps. The RM team used these data to improve the RM subprocesses that were the true root cause of the events. Events from the weekly meeting were analyzed by the RM Team, who worked closely with process engineers to put corrective actions in place. These activities reduced recipe related events by 85 %, costs lost to scrap 86 %, and wafer losses by 92 %. James P. Bowne Senior Member of the Technical Staff: Process Control Engn., Globalfoundries Fab10, East Fishkill, NY, US RM 6.1 / 7 new features You will get to know an overview about the latest Recipe Management features of the current version 6.1 and the future version 7. You can provide priority feedback on proposed future RM enhancements according to your ideas and expectations. Dan Cogut Department Manager RM, camline GmbH, Germany 10:15 10:45 Lunch and networking Foyer 12:00 13:00 verify approved new Life Cycle productive obsolete Versions Branches Decoding Visualization

4 SPACE Supply Chain Quality September 28, 13:00 17:00 Afternoon Session 13:00 CNSE line visit Foyer 14:30 15:00 Incoming Line of Defense: Integral Element of Supplier Quality Management As the semiconductor industry continues to accelerate technology development for future nodes and executes on High Volume Manufacturing (HVM), materials quality controls have become one of key priorities. The Zero Excursion and Zero defect mission is the mantra for high volume manufacturing and is dependent on minimizing the variations across all material parameters. Within the supplier quality management, the focus is no longer limited to supplier-customer engagement but extends beyond to the sub-suppliers including raw material and component suppliers. The incoming line of defense that allows managing quality controls at every link within the supply chain needs to be established. Furthermore, business to business (B2B) data management and transfer of information is essential across the entire integrated supply chain. Benefits and challenges associated with establishing the incoming line of defense across entire supply chain will be presented. Pawitter Mangat Director Global Incoming Quality Globalfoundries Fab8, Malta, NY, US Quality control and assurance in global supply chain Entegris (ENTG) is a $1.2B maker of specialty chemicals, filtration, and advanced materials handling solutions serving the global TIER 3 TIER 2 ecoa ecoa DELIVER DELIVER CQM SQM CQM

5 electronics market. Headquartered in Massachusetts, the company employs approximately 3,500 employees worldwide and has manufacturing, sales, and analytical operations in 10 countries. For decades, the semiconductor industry has relied on shrinking line widths to enhance device performance. However, new generations of semiconductors, such as 3D NAND memory chips, rely increasingly on the use of more esoteric materials which are difficult to handle and are easily contaminated. These advancements have made the manufacturing of semiconductors even more challenging, requiring levels of purity so pure they are measured in part per quadrillion. For more than 50 years, Entegris has been a key supplier to the industry, providing a unique array of advanced chemicals and materials, as well as filters and handling solutions to achieve these levels of purity throughout the highly complex manufacturing process. Variations in the manufacturing process including raw materials can have extreme effects to the performance of Entegris customer s products and processes. Since 2012, Entegris is engaged in an in-debt improvement quality program with camline where the last initiatives are related to customer quality relationship. We will review at a high level the roadmap of our camline project and new initiatives on how camline is helping Entegris manage the global supply chain. Eliza Chin VP Quality, Global Quality and camline Systems Entegris, Billerica, MA, US SQM 4 and SPACE 7.2 new features This session will present highlights of SPACE 7.2 and the actual feature wish list collected from customers for SPACE 8. camline will introduce these features to the audience and finish with an outlook on SQM 4. Bryan Ng VP Business Development, camline Pte Ltd, Singapore 15:30 Closing remarks Heinz Linsmaier CEO, camline GmbH, Germany 16:45 17:00 TIER 1 OEM ecoa DELIVER SQM CQM SQM Quality Data SPACE

6 Issued: :44:32 Participants Manufacturing decision makers Project, quality, production, and supply chain managers Engineers from high-tech industries, i. e. semiconductor, automotive, advanced materials, aerospace, electronics, medical devices, MEMS, nanotechnology, solar, etc. R&D technology development experts IT representatives involved in data processing and analyses for process, quality, and production engineering The attendance at the seminars is free of charge. Scope In this full-day event, camline, along with leading manufacturing partners, will demonstrate how manufacturing application visions are supported by specific software solutions and considerations. You will observe first-hand the presentation of application case details from various industrial manufacturers and their ongoing cooperative efforts with partner camline. Development highlights of camline s sophisticated Suite modules SPACE and RM will also be presented for discussion. Networking Ample time will be available for attendees to interact directly with all speakers, senior camline technical staff, and colleagues from your industry. Refreshments and a buffet lunch will be provided for all attendees. Venue Colleges of Nanoscale Science and Engineering (CNSE) 257 Fuller Rd, Albany, NY 12203, USA Parking will be available and signposted Contact camline info@camline.com Registration at Software Solutions for Manufacturing Excellence