Flexible electronics a thin film approach. Joe Pimenoff Beneq

Transcription

1 Flexible electronics a thin film approach Joe Pimenoff Beneq

2 Severe semantics Thin films are thin material layers ranging from fractions of a nanometre to several micrometres in thickness. Electronic semiconductor devices and optical coatings are the main applications benefiting from thin film construction Functional Materials. Tekes 2

3 Thin Film Equipment Thin Film Coating Services Lumineq Displays Functional Materials. Tekes 3

4 Company in brief Established: 2005 Business units: Markets addressed: - Thin Film Equipment - Thin Film Coating Services - Lumineq Displays All emerging and growing thin film markets, including solar photovoltaics, organic and flexible electronics and flat glass coating Personnel: 140 Main office: Coating center: Sales: Sales network: Vantaa, Finland Espoo, Finland China, Germany, USA and Russia 30+ sales representatives worldwide 20+ distributors worldwide Functional Materials. Tekes 4

5 For industry and research Equipment for thin film coating TFS 200 ~ 9.5 s Functional Materials. Tekes 5

6 Source: IDTechEx, Dresden, April, 2008 Thin films, why the big fuss? Market growth of thin film-enabled industries Beneq markets Functional Materials. Tekes 6

7 Our strategy Identifying your opportunity Finding the solutions Building the equipment Beneq Turning Innovations into Success Functional Materials. Tekes 7

8 New equipment project Patent Patent Customer C $$$ New Equipment Project Customer A Customer B Patent Patent Identify! Understand! Commercialize! Customer A Functional Materials. Tekes 8

9 Atomic layer deposition Properties Sequential deposition Vapor phase ALD sequential (digital) deposition of Al 2 O 3. Benefits (e.g.) Conformal Pinhole-free Nanoscale accuracy Functional Materials. Tekes 9

10 Enter Functional Materials Goal: commercialize Roll-to-Roll ALD Markets: OLED (display and lighting) and flexible PV Driver 1 (OLED): encapsulation and barrier films needed to enable longer device lifetime Driver 2 (OLED): reduce cost of ultra barrier films Solution 1 (OLED): ALD, some 10 s of nm s of Al 2 O 3 Solution 2 (OLED): Roll-to-Roll ALD, based on spatial ALD concept Functional Materials. Tekes 10

11 Milestones in scaling Large-area ALD Large area Roll-to-roll Large batch Batch > 0.05 m 2 /min > 0.5 m 2 /min > 10 m 2 /min Functional Materials. Tekes 11

12 Key system features 1. Vacuum R2R process Web 500 mm wide Web speed 2 m/min 2. Web tensioned on drum 3. Proprietary ALD coating head Functional Materials. Tekes 12

13 Al 2 O 3 film performance Position (cm) Thickness (nm) Uniformity: +/- 2% 2 52, , , , , ,0 Film thickness uniformity target +/-5% reached WVTR g/(m m/min (nonoptimized process) Functional Materials. Tekes 13

14 Commercial outcome September 2012: ALD system sold to leading OLED customer for development of flexible OLED products April 2013: ALD R&D system sold to Fraunhofer COMEDD for OLED thin film encapsulation (del. Q3/2013) February 2013: World s first scale-up Roll-to-Roll ALD system delivered to Advanced Surface Technology Research Laboratory (ASTRaL, Lappeenranta Univ. of Techn.) July 2013: Roll-to-Roll ALD system sold to CPI in UK for demanding moisture barrier applications. (del. Q2/2014) CPI: UK-based technology innovation hub and part of the High Value Manufacturing Catapult. first goal: flexible barrier encapsulation second goal: flexible plastic electronics Q4/2013: Third Roll-to-Roll unit sold. Currently in build phase Functional Materials. Tekes 14

15 Technology outlook Scaling to 1+ meter widths Second generation system currently under construction Collaboration with the Centre for Process Innovation (UK) Facilitates rapid technology engagement with industry Roadmap for R2R ALD Growing beyond 500 mm, line-integration Further web speed improvement Functional Materials. Tekes 15

16 Thank you! Functional Materials. Tekes 16