CYLINDER CONNECTORS.

Transcription

1 ULTR HIGH PURITY INSTRUMENTTION YLINDER ONNETORS

2 ylinder onnectors Uni-Lok ylinder onnectors are designed and manufactured for the connection of high purity gases in process applications. Features UHP(Ultra High Purity) grade 316LSS material with low Sulfur and Manganese for higher weldability in comply with SEMI F-20 Patented design with bearing for easy and safety installation Plug Gasket Gland earing Nut Electro polished internal surfaces and specially cleaned to meet ultra high purity system requirements Sliver plated female threads for easy of assembly, consistent make-up and prevention of galling Helium Leak Test Uni-Lok fittings are rated to a helium leak rate of less than 1x10-9 mbar.l/sec and tested in accordance with SEM STD and SEMI F1-96. Particle ontribution Test ccording to STM F Moisture ontribution Test ccording to SEM STD. ssembling ccording to SEMI E49.6. Packaging Each component is double bagged to ensure component cleanliness and to protect it from environmental contamination. Referenced specification : SEMI E49.1. leaning ll components are precisely cleaned with 18 MΩ deionized water after the passivation procedure. Reference specification : SEMI E

3 ylinder onnectors Gases ssignment Table GS DISS G JIS GS DISS G JIS mmonia R Hydrogen L rgon /23-R Hydrogen romide R rsenic Pentafluoride 642 Hydrogen hloride R rsine L Hydrogen Fluoride R oron Trichloride L Hydrogen Iodide oron Trifluoride L Hydrogen Selenide romochlorodifluoromethane 660 Hydrogen Sulfide romotrifluoromethane 660 Isobutane 510 utane L Isobutylene L arbon Dioxide Krypton /23-R arbon Monoxide L Neon /23-R arbonyl Sulfide 330 Nitrogen /23-R hlorine R Nitrous Oxide hlorine Trifluoride L Oxygen /23-R hlorodifluoromethane 660 Perfluonopropane hlorotrifluoromethane 660 Phosgene R Diborane L Phosphine Dichlorodifluoromethane PhosphorusPentafluoride Dichlorofluoromethane 660 Silane Dichlorosllane Silioon Tetrachloride 636 Dichlorotetrafluoroethane 660 Silicon Tetrafluoride Diethylzine Sulphur Dioxide , 16 Difluoroethylene L Sulphur Hexafluoride Dimethylzinc 726 Trichorosilane 636 Dimethylamine /26-L Trichlorotrifluoroethane Dimethylether L Trichlorofluoromethane 660 Disllane 632 Triethylaluminium Ethane L Trifluoromethane 660 Ethyl hloride L Trimethylamine L Ethylene L Tungsten Hexafluoride Fluorine R Vinyl romide L Germane Vinyl hloride L Halocarbons Vinyl Fluoride L Helium /23-R Xenon /26-L Sources : G V1 2005, JIS 8244/ , ISO/DOS This table is the reference only. 3

4 G & JIS Series G and JIS Series Materials of onstruction Plug Gasket Gland earing Nut Ordering Information Every cylinder connectors are ordered as assembled set. lso each parts of cylinder connector are ordered separately with the part numbers as shown below. G Series G No. Ordering Part Number ssembled Set Gland earing Nut Gasket Plug 296 U-296 UGL-08S X UM-0803R X UPG U-320 UGL-01S UR-01 UF-0830R UGT-01 UPG U-326 UGL-04S UR-01 UF-0830R X UPG U-330 UGL-01S UR-01 UF-0830L UGT-01 UPG U-350 UGL-05S UR-01 UF-0830L X UPG U-510 UGL-06S X UM-0880L X UPG U-540 UGL-09S UR-02 UF-0908R X UPG U-580 UGL-06S X UM-0960R X UPG U-590 UGL-06S X UM-0960L X UPG U-660 UGL-03S UR-02 UF-1035R UGT-03 UPG U-670 UGL-03S UR-02 UF-1035L UGT-03 UPG U-678 UGL-07S UR-02 UF-1035L UGT-01 UPG U-679 UGL-10S UR-02 UF-1035L UGT-05 UPG-679 JIS Series JIS No. Ordering Part Number ssembled Set Gland earing Nut Gasket Plug 21-14L U-J2114L UGL-11S UR-01 UF-JS21L UGT-02 UPG-21L 21-14R U-J2114R UGL-11S UR-01 UF-JS21R UGT-02 UPG-21R 22-14L U-J2214L UGL-02S UR-01 UF-JS22L UGT-02 UPG-22L 22-14R U-J2214R UGL-02S UR-01 UF-JS22R UGT-02 UPG-22R 23-14R U-J2314R UGL-02S UR-01 UF-JS23R UGT-02 UPG-23R 26-14L U-J2614L UGL-02S UR-02 UF-JS26L UGT-03 UPG-26L 26-14R U-J2614R UGL-02S UR-02 UF-JS26R UGT-03 UPG-26R 4

5 G & JIS Series Typical ssembly Type Gland + Male Nut + Female Plug Type Gland + Female Nut + Male Plug + earing + Gasket Type Gland + Female Nut + Male Plug + earing Nut Plug earing Nut Gasket Plug earing Nut Plug L L L G Series Overall Length Nut Plug Gasket G No. Type inch mm Hex Flat Material 296 U UNS-2-RH-EXT UNS-2-RH-INT X 320 U NGO-RH-INT NGO-RH-EXT PTFE/R 326 U NGO-RH-INT NGO-RH-EXT X 330 U NGO-LH-INT NGO-LH-EXT PTFE/R 350 U NGO-LH-INT NGO-LH-EXT X 510 U NGO-LH-EXT NGO-LH-INT X 540 U NGO-RH-INT NGO-RH-EXT X 580 U NGO-RH-EXT NGO-RH-INT X 590 U NGO-LH-EXT NGO-LH-INT X 660 U NGO-RH-INT NGO-RH-EXT PTFE/R 670 U NGO-LH-INT NGO-LH-EXT PTFE/R 678 U NGO-LH-INT NGO-LH-EXT PTFE 679 U NGO-LH-INT NGO-LH-EXT PTFE JIS Series Overall Length Nut Plug Gasket JIS No. Type inch mm Hex Flat Material L U-J2114L JIS L JIS L PTFE/R R U-J2114R JIS R JIS R PTFE/R L U-J2214L JIS22-14-OL JIS22-14-OL PTFE/R R U-J2214R JIS22-14-OR JIS22-14-OR PTFE/R R U-J2314R JIS R JIS R PTFE/R L U-J2614L JIS L JIS L PTFE/R R U-J2614R JIS R JIS R PTFE/R 3/8 and 1/2 Glands are available for every G & JIS series cylinder connectors. To order, add -06 for 3/8 and -08 for 1/2. Examples : U , G 350 ylinder onnector set with 3/8 Gland. 5

6 G & JIS Series Glands Type- D D UGL-06S 65.3 UGL-08S Type- D D UGL-01S 52.5 UGL-02S 55.5 UGL-03S 58.0 UGL-07S UGL-10S 66.7 Type- D UGL-11S 55.5 D UGL-04S 66.2 UGL-05S UGL-09S /8 and 1/2 Glands are available for every G & JIS series. To order, add -06 for 3/8 and -08 for 1/2. Examples : UGL-09S-08, 1/2 size G 540 Gland. earings UR UR Gaskets Gasket with 316SS Ring UGT UGT UGT Gasket without 316SS Ring UGT UGT PTFE instead of PTFE is available upon request. To order, add - TF to the end of part number. Example : UGT-02-TF 6

7 G & JIS Series Nuts Female Nuts (Hex) UF-0830L NGO-LH-INT UF-0830L NGO-LH-INT UF-0830R NGO-RH-INT UF-0830R NGO-RH-INT UF-0908R NGO-RH-INT UF-1035L NGO-LH-INT UF-1035L NGO-LH-INT UF-1035L NGO-LH-INT UF-1035R NGO-RH-INT UF-JS21L JIS L UF-JS21R JIS R UF-JS22L JIS22-14-OL UF-JS22R JIS22-14-OR UF-JS23R JIS R UF-JS26L JIS L UF-JS26R JIS R Male Nuts (Hex) UM-0803R UNS-2-RH-EXT UM-0880L NGO-LH-EXT UM-0960L NGO-LH-EXT UM-0960R NGO-RH-EXT 7

8 G & JIS Series Plugs Female Plugs (Hex) UPG UNS-2-RH-INT UPG NGO-LH-INT UPG NGO-RH-INT UPG NGO-LH-INT Male Plugs (Hex) UPG NGO-RH-EXT UPG NGO-RH-EXT UPG NGO-LH-EXT UPG NGO-LH-EXT UPG NGO-RH-EXT UPG NGO-RH-EXT UPG NGO-LH-EXT UPG NGO-LH-EXT UPG NGO-LH-EXT UPG-21R JIS R UPG-21L JIS L UPG-22R JIS22-14-OR UPG-22L JIS22-14-OL UPG-23R JIS R UPG-26R JIS R UPG-26L JIS L 8

9 DISS Series DISS Series Materials of onstruction Plug Gasket Gland earing Nut Ordering Information Every cylinder connectors are ordered as assembled set. lso each parts of cylinder connector are ordered separately with the part numbers as shown below. Ordering Part Number DISS No. ssembled Gasket Gland earing Nut Set Nickel PTFE Plug 632 U-D632 UGL-632 UR-02 UF-1035R UNGT-D UGT-D UPG U-D634 UGL-634 UR-02 UF-1035R UNGT-D UGT-D UPG U-D636 UGL-636 UR-02 UF-1035R UNGT-D UGT-D UPG U-D638 UGL-638 UR-02 UF-1035R UNGT-D UGT-D UPG U-D640 UGL-640 UR-02 UF-1035R UNGT-D UGT-D UPG U-D642 UGL-642 UR-02 UF-1035R UNGT-D UGT-D UPG U-D712 UGL-712 UR-02 UF-1130R UNGT-D UGT-D UPG U-D714 UGL-714 UR-02 UF-1130R UNGT-D UGT-D UPG U-D716 UGL-716 UR-02 UF-1130R UNGT-D UGT-D UPG U-D718 UGL-718 UR-02 UF-1130R UNGT-D UGT-D UPG U-D720 UGL-720 UR-02 UF-1130R UNGT-D UGT-D UPG U-D722 UGL-722 UR-02 UF-1130R UNGT-D UGT-D UPG U-D724 UGL-724 UR-02 UF-1130R UNGT-D UGT-D UPG U-D726 UGL-726 UR-02 UF-1130R UNGT-D UGT-D UPG U-D728 UGL-728 UR-02 UF-1130R UNGT-D UGT-D UPG-728 3/8 and 1/2 Glands are available for every DISS series cylinder connectors. To order, add -06 for 3/8 and -08 for 1/2. Examples : U-D712-08, DISS 712 ylinder onnector set with 1/2 Gland. 9

10 DISS Series Typical ssembly Gland + Male Nut + earing + Gasket + Female Plug L DISS No. 632 U-D U-D U-D U-D U-D U-D U-D U-D U-D U-D U-D U-D U-D U-D U-D728 Overall Length L Hex Flat inch mm inch mm NGO-RH-INT NGO-RH-INT Glands D 3/8 and 1/2 Glands are available for every DISS series. To order, add -06 for 3/8 and -08 for 1/2. Examples : UGL , 3/8 size DISS 632 Gland. UGL-632 UGL-634 UGL-636 UGL-638 UGL-640 UGL-642 UGL-712 UGL-714 UGL-716 UGL-718 UGL-720 UGL-722 UGL-724 UGL-726 UGL-728 D

11 DISS Series earing UR Gasket Material UGT-D PTFE UNGT-D Nickel Female Nut (Hex) UF-1035R NGO-RH-INT UF-1130R NGO-RH-INT Male Plug (Hex) UPG-632 UPG-634 UPG-636 UPG NGO-RH-EXT UPG-640 UPG-642 UPG-712 UPG-714 UPG UPG-718 UPG-720 UPG NGO-RH-EXT UPG-724 UPG-726 UPG

12