Combinatorial RF Magnetron Sputtering for Rapid Materials Discovery: Methodology and Applications

Save this PDF as:
 WORD  PNG  TXT  JPG

Size: px
Start display at page:

Download "Combinatorial RF Magnetron Sputtering for Rapid Materials Discovery: Methodology and Applications"

Transcription

1 Combinatorial RF Magnetron Sputtering for Rapid Materials Discovery: Methodology and Applications Philip D. Rack,, Jason D. Fowlkes, and Yuepeng Deng Department of Materials Science and Engineering University of Tennessee

2 Outline Sputter Deposition Combinatorial Thin Film Sputtering System Process Model Combinatorial Applications Cr-Fe-Ni Phase Diagram Determination Cu-Ni Carbon Nanofiber Catalysts for PECVD Bulk Metallic Glass Alloy Development YAG:Gd Solid State UV Emitters Summary

3 Sputtering Substrate Angular Distribution I ( θ ) = I cos( θ ) Positive Glow 1V 45 Ar + Ar + Dark space Target V Self bias Target 9

4

5 Rf Magnetron Sputtering System Load-lock chamber

6 Simultaneous 3 Source Sputtering substrate Source 2 Source 1 Source 3

7 Angular Distribution Modified Cosine Distribution I ( θ ) = I ( θ ) cos n n~1 Film Thickness (nm) Ni Uniform Film Cu Uniform Position (cm) Target

8 θ substrate Ф Process Modeling r Input variables: Source power, voltage, current Material sputter yield Source tilt angle Substrate position Source time Determines substrate composition as a function of position cosθsinθdφdθ { 1[ ]} PtS n C P 36 9 ( n+ 1cos ) φcosθ j k i 3 j k i 3 sinθdφdθ Vq = = = = ntotal n = i = ΔrΔθ 2 j= 1 i= 1 j 1 i 1 2π r j = = i j

9 MATLab Process Model Binary Composition Profile Ternary Composition Profile Al Thickness Modeling Al Zr Cu Zr Cu

10 Fe-Ni-Cr Ternary Phase Diagrams Co-sputter Fe (16W), Cr (6W), Ni (6W) onto (1 1 2) single crystal sapphire substrates Anneal 2, 4, 6, 8 o C for 2 hours Rapid synchrotron fluorescence and XRD measurements Future Work: Nano-indentation

11 With Pharr et al. Non-Equilibrium Ternary Phase Diagrams (Fe-Ni-Cr) synchrotron beam 12 kev Fe Ni Cr CCD (diffraction) detector Fluorescenc e detector

12 Modeled versus Measured Composition Measured Composition Space Cr Modeled Composition Space Cr Fe Ni Fe Ni

13 Phase Diagram Temperature Evolution As deposited 2 o C 4 o C 6 o C 8 o C Equilibrium

14 Phase Analysis versus Temperature

15 Carbon Nanofiber Catalyst Cu-Ni Alloy Modeled Results Alloy Strip Deposited on Si Ni Cu With Klien et al. Atomic Percent (Cu & Ni) Measured Results Distance from Center (cm)

16 1 at% Cu Carbon Nanofiber Catalyst Cu-Ni Alloy 2 at% Cu 37 at% Cu 8 at% Cu 9 at% Cu PVX Si (15A) ITO (15A) 25nm Glass substrate With Klien et al. The morphology and shape of vertically aligned carbon nanofibers are a strong function of the composition of the Cu Ni catalyst particle that acts as the nucleation site for individual fiber growth. An optimum fiber geometry is realized at 8% Cu.

17 Experimental Procedure Sputtering Conditions Base Pressure 1.1x1-6 Torr Sputtering pressure: 3mTorr Argon Zirconium power: 225 W, Sputter yield:.7 Copper power: 5 W, Sputter yield: 2.3 Aluminum power: 26 W, Sputter yield: 1.2 Time: 2 hours Vacuum Anneal 1, 2, 3, 4, 5 o C for 1 minutes, 8 o C for 3 minutes XRD after each anneal

18 Composition Modeling Al Cu Al Zr Cu Zr

19 XRD Pattern of As-deposited Film 45 Al XRD integrated Intensity (arb. unit) Zr Cu Zr Cu θ (degree)

20 Position 1 11 Al Zr Cu Intensity (arb. unit) C 5C 4C 3C 2C 1C 1 5 as-deposited θ (degree)

21 XRD after 5 o C Anneal Inte n s ity ( arb. u nit) Zr Al Cu θ (degree) 1

22 XRD after 8 o C Anneal Intensity (au) Zr 2 Cu Cu Zr Cu-Rich Zr- Rich θ

23

24 Y 3 Al 5 O 12 (YAG) Sputter Deposition Initial sputtering conditions: Yttrium Aluminum Oxide gradient: Reactive Sputtering (metallic mode) Power (Y)= 8W; Power (Al)=12W Flow rate (Ar) = 25sccm; (O 2 ) = 1.4sccm Total pressure = 3mTorr Time = 3min Position (mm) Al/Y ~

25 Al/Y ratio and (Al+Y)/O ratio vs. position on gradient Yttrium Aluminum Oxide films Al / Y (Al+Y) / O Position (mm).65

26 X-ray Diffraction Intensity of YAG Thin Films 4 unannealed Intensity (a.u.) 3 2 YAG (4) YAG (42) 1C 1hrs annealed YAG (422) Theta (degree)

27 Sputtering YAG:Gd Yttrium Aluminum Garnet ( 4 layer): Reactive mode Power (Y) = 8W; Power (Al) = 13W; Flow rate (Ar)=25sccm; Flow rate (O 2 )=1.4 sccm; Total pressure = 3mTorr; Time = 12.5min Gadolinium ( 3 layer): Metallic mode Power (Gd) = 6W; Flow rate (Ar) = 2sccm; Total pressure = 3mTorr; Time = 4min or 8min

28 SEM micrograph of multilayer Gd doped YAG thin films Gd-3 YAG-4 Gd-2 YAG-3 Gd-1 YAG-2 Si YAG-1

29 Gadolinium concentration vs. position for Gd doped Y 3 Al 5 O 12 films 14 Typical EDS Spectra 12 1 Gd_8min Gd at% Gd_4min Position (mm)

30 CL intensity vs. Gd concentration nm CL Intensity (a.u.) CL Intensity Wavelength (nm) Gd at.%

31 Mo Resistivity (μω cm) Binary Mo-W Electrodes (a) (b) (c) (d) Atomic fraction of W in MoW W Intensity / atomic fraction of W.15 W.2 W.35 W.45 W.5 W.55 W.65 W.75 W.8 W (a) 3 α-w, Mo (11), β-w (21) β-w (2) α-w (2) theta

Growth Of TiO 2 Films By RF Magnetron Sputtering Studies On The Structural And Optical Properties

Growth Of TiO 2 Films By RF Magnetron Sputtering Studies On The Structural And Optical Properties Journal of Multidisciplinary Engineering Science and Technology (JMEST) Growth Of TiO 2 Films By RF Magnetron Sputtering Studies On The Structural And Optical Properties Ahmed K. Abbas 1, Mohammed K. Khalaf

More information

Structure and optical properties of M/ZnO (M=Au, Cu, Pt) nanocomposites

Structure and optical properties of M/ZnO (M=Au, Cu, Pt) nanocomposites Solar Energy Materials & Solar Cells 8 () 339 38 Structure and optical properties of M/ (M=Au, Cu, Pt) nanocomposites U. Pal a,b, *, J. Garc!ıa-Serrano a, G. Casarrubias-Segura a, N. Koshizaki c, T. Sasaki

More information

High Resolution X-ray Diffraction

High Resolution X-ray Diffraction High Resolution X-ray Diffraction Nina Heinig with data from Dr. Zhihao Donovan Chen, Panalytical and slides from Colorado State University Outline Watlab s new tool: Panalytical MRD system Techniques:

More information

Nanocrystalline structure and Mechanical Properties of Vapor Quenched Al-Zr-Fe Alloy Sheets Prepared by Electron-Beam Deposition

Nanocrystalline structure and Mechanical Properties of Vapor Quenched Al-Zr-Fe Alloy Sheets Prepared by Electron-Beam Deposition Materials Transactions, Vol. 44, No. 10 (2003) pp. 1948 to 1954 Special Issue on Nano-Hetero Structures in Advanced Metallic Materials #2003 The Japan Institute of Metals Nanocrystalline structure and

More information

Metallization deposition and etching. Material mainly taken from Campbell, UCCS

Metallization deposition and etching. Material mainly taken from Campbell, UCCS Metallization deposition and etching Material mainly taken from Campbell, UCCS Application Metallization is back-end processing Metals used are aluminum and copper Mainly involves deposition and etching,

More information

Thin Film Characterizations Using XRD The Cases of VO2 and NbTiN

Thin Film Characterizations Using XRD The Cases of VO2 and NbTiN Thin Film Characterizations Using XRD The Cases of VO2 and NbTiN A thesis submitted in partial fulfillment of the requirement for the degree of Bachelor of Arts / Science in Physics from The College of

More information

Localized Corrosion of a 7075 Aluminum Alloy Exposed to KCl

Localized Corrosion of a 7075 Aluminum Alloy Exposed to KCl Localized Corrosion of a 7075 Aluminum Alloy Exposed to KCl Christopher F. Mallinson Department of Mechanical Engineering Sciences The Surface Analysis Laboratory Monday, 20 April 2015 1 Outline Introduction

More information

Specimen Preparation Technique for a Microstructure Analysis Using the Focused Ion Beam Process

Specimen Preparation Technique for a Microstructure Analysis Using the Focused Ion Beam Process Specimen Preparation Technique for a Microstructure Analysis Using the Focused Ion Beam Process by Kozue Yabusaki * and Hirokazu Sasaki * In recent years the FIB technique has been widely used for specimen

More information

AC Reactive Sputtering with Inverted Cylindrical Magnetrons

AC Reactive Sputtering with Inverted Cylindrical Magnetrons AC Reactive Sputtering with Inverted Cylindrical Magnetrons D.A. Glocker, Isoflux Incorporated, Rush, NY; and V.W. Lindberg and A.R. Woodard, Rochester Institute of Technology, Rochester, NY Key Words:

More information

Nanoindentation of La-Cr-O Thin Films

Nanoindentation of La-Cr-O Thin Films Nanoindentation of La-Cr-O Thin Films Anthony Coratolo1, Nina Orlovskaya1 Christopher Johnson2, Randall Gemmen2 1 Drexel University, Philadelphia, USA 2 National Energy Technology Laboratory, Morgantown,

More information

II. NEG THIN FILM DEPOSITION

II. NEG THIN FILM DEPOSITION Deposition of Non-Evaporable Getter Thin Films and Vacuum Pumping Performances Ankit Sur Engineering Department, Wayne State University, Detroit, MI 48202 The ERL (Energy Recovery Linac) proposed at Cornell

More information

Transmission Electron Microscopy (TEM) Prof.Dr.Figen KAYA

Transmission Electron Microscopy (TEM) Prof.Dr.Figen KAYA Transmission Electron Microscopy (TEM) Prof.Dr.Figen KAYA Transmission Electron Microscope A transmission electron microscope, similar to a transmission light microscope, has the following components along

More information

Relation Between Internal Stress and Surface Roughness of Titanium Nitride Films Deposited by HCD Ion Plating

Relation Between Internal Stress and Surface Roughness of Titanium Nitride Films Deposited by HCD Ion Plating No.22,28 65 Relation Between Internal Stress and Surface Roughness of Titanium Nitride Films Deposited by HCD Ion Plating Itsuo Ishigami Ken-ichi Miura Hideaki Hoshino Tomoyuki Mizukoshi (28 6 17 ) An

More information

Using a standard Penning Gauge as a powerful means of monitoring and feedback control

Using a standard Penning Gauge as a powerful means of monitoring and feedback control Gencoa - Dermot Monaghan Using a standard Penning Gauge as a powerful means of monitoring and feedback control Victor Bellido-González, Sarah Powell, Benoit Daniel, John Counsell, Dermot Monaghan Structure

More information

What if your diffractometer aligned itself?

What if your diffractometer aligned itself? Ultima IV Perhaps the greatest challenge facing X-ray diffractometer users today is how to minimize time and effort spent on reconfiguring of the system for different applications. Wade Adams, Ph.D., Director,

More information

Synthesis and Evaluation of Electrocatalysts for Fuel Cells

Synthesis and Evaluation of Electrocatalysts for Fuel Cells Synthesis and Evaluation of Electrocatalysts for Fuel Cells Jingguang Chen Center for Catalytic Science and Technology (CCST) Department of Chemical Engineering University of Delaware Newark, DE 19711

More information

Supporting Information for Manuscript B516757D

Supporting Information for Manuscript B516757D Supporting Information for Manuscript B516757D 1. UV-Vis absorption spectra Absorbance (a.u.) 0.4 0.2 5F 6F 7F 0.0 300 400 500 Wavelength (nm) Figure S1 UV-Vis spectra of, 5F, 6F and 7F in CHCl 3 solutions

More information

Thin Films: Sputtering Systems (Jaeger Ch 6 & Ruska Ch 7,) Sputtering: gas plasma transfers atoms from target to substrate Can deposit any material

Thin Films: Sputtering Systems (Jaeger Ch 6 & Ruska Ch 7,) Sputtering: gas plasma transfers atoms from target to substrate Can deposit any material Thin Films: Sputtering Systems (Jaeger Ch 6 & Ruska Ch 7,) Sputtering: gas plasma transfers atoms from target to substrate Can deposit any material on any substrate (in principal) Start with pumping down

More information

Nanostructured Engineered Materials With High Magneto-optic Performance For Integrated Photonics Applications

Nanostructured Engineered Materials With High Magneto-optic Performance For Integrated Photonics Applications Edith Cowan University Research Online School of Engineering Publications 28 Nanostructured Engineered Materials With High Magneto-optic Performance For Integrated Photonics Applications Mikhail Vasiliev

More information

SUPPLEMENTARY INFORMATION

SUPPLEMENTARY INFORMATION In the format provided by the authors and unedited. ARTICLE NUMBER: 16178 DOI: 10.1038/NENERGY.2016.178 Enhanced Stability and Efficiency in Hole-Transport Layer Free CsSnI3 Perovskite Photovoltaics Supplementary

More information

Lecture Day 2 Deposition

Lecture Day 2 Deposition Deposition Lecture Day 2 Deposition PVD - Physical Vapor Deposition E-beam Evaporation Thermal Evaporation (wire feed vs boat) Sputtering CVD - Chemical Vapor Deposition PECVD LPCVD MVD ALD MBE Plating

More information

COMPATIBILITY OF THE ALTERNATIVE SEED LAYER (ASL) PROCESS WITH MONO- Si AND POLY-Si SUBSTRATES PATTERNED BY LASER OR WET ETCHING

COMPATIBILITY OF THE ALTERNATIVE SEED LAYER (ASL) PROCESS WITH MONO- Si AND POLY-Si SUBSTRATES PATTERNED BY LASER OR WET ETCHING COMPATIBILITY OF THE ALTERNATIVE SEED LAYER (ASL) PROCESS WITH MONO- Si AND POLY-Si SUBSTRATES PATTERNED BY LASER OR WET ETCHING Lynne Michaelson 1, Anh Viet Nguyen 2, Krystal Munoz 1, Jonathan C. Wang

More information

MINISTRY OF EDUCATION AND SCIENCE OF UKRAINE

MINISTRY OF EDUCATION AND SCIENCE OF UKRAINE MINISTRY OF EDUCATION AND SCIENCE OF UKRAINE National Technical University of Ukraine "Igor Sikorsky Kyiv Polytechnic Institute" Faculty of Physical Engineering Departments physics of metals 1 Student

More information

Characterization Of Aluminum Doped Zinc Oxide Thin Films For Photovoltaic Applications

Characterization Of Aluminum Doped Zinc Oxide Thin Films For Photovoltaic Applications University of Central Florida Electronic Theses and Dissertations Masters Thesis (Open Access) Characterization Of Aluminum Doped Zinc Oxide Thin Films For Photovoltaic Applications 2010 Bojanna P. Shantheyanda

More information

Study of Phase Evolution in Sputtered Al/Ru Bi-layers Nanocrystalline Thin Films

Study of Phase Evolution in Sputtered Al/Ru Bi-layers Nanocrystalline Thin Films Egypt. J. Solids, Vol. (32), No. (1), (2009 ) 89 Study of Phase Evolution in Sputtered / Bi-layers Nanocrystalline Thin Films I. K. El Zawawi 1, E.M. Abdelrazek 2, F. A. Saadallah 1, B. Mansour 1, M. Ebrahim

More information

Characterization of Phases in an As-cast Copper-Manganese- Aluminum Alloy

Characterization of Phases in an As-cast Copper-Manganese- Aluminum Alloy J. Mater. Sci. Technol., Vol.22 No.6, 2006 779 Characterization of Phases in an As-cast Copper-Manganese- Aluminum Alloy J.Iqbal, F.Hasan and F.Ahmad Department of Metallurgical and Materials Engineering,

More information

Nickel-induced crystallization of amorphous silicon

Nickel-induced crystallization of amorphous silicon University of Arkansas, Fayetteville ScholarWorks@UARK Mechanical Engineering Undergraduate Honors Theses Mechanical Engineering 5-2009 Nickel-induced crystallization of amorphous silicon Robert Fleming

More information

Thin Films & AR Coated. Viewports. Thin Film & AR Coated. Viewports

Thin Films & AR Coated. Viewports. Thin Film & AR Coated. Viewports Thin Films & AR Item Page Thin Film Coatings Introduction P 02 Kodial Zero Length with Anti-Reflective Coatings P 04 Kodial Zero Length with Anti-Reflective Coatings-Non-Magnetic P 07 Kodial Zero Length

More information

Session 1A4a AC Transport, Impedance Spectra, Magnetoimpedance

Session 1A4a AC Transport, Impedance Spectra, Magnetoimpedance Session 1A4a AC Transport, Impedance Spectra, Magnetoimpedance Magneto-impedance of [Co 40Fe 40B 20/Cu] Multilayer Films S. U. Jen, T. Y. Chou, C. K. Lo,.................................................................

More information

12th International Workshop on RF Superconductivity. A.Frigo, G.Lanza, H.Padamsee, V.Palmieri, D.Tonini

12th International Workshop on RF Superconductivity. A.Frigo, G.Lanza, H.Padamsee, V.Palmieri, D.Tonini 12th International Workshop on RF Superconductivity A.Frigo, G.Lanza, H.Padamsee, V.Palmieri, D.Tonini CERN geometry C. Benvenuti, S. Calatroni, I.E. Campisi, P. Darriulat, M.A. Peck, R. Russo, A.-M. Valente,

More information

Thermal Evaporation. Theory

Thermal Evaporation. Theory Thermal Evaporation Theory 1. Introduction Procedures for depositing films are a very important set of processes since all of the layers above the surface of the wafer must be deposited. We can classify

More information

Ion-assist applications of broad-beam ion sources

Ion-assist applications of broad-beam ion sources Ion-assist applications of broad-beam ion sources H.R. Kaufman a and J.M.E. Harper b a Kaufman & Robinson, Inc., 1306 Blue Spruce Dr., Fort Collins, CO 80524; b University of New Hampshire, Dept. of Physics,

More information

Comparison of DC and RF sputtered aluminium-doped zinc oxide for photovoltaic applications

Comparison of DC and RF sputtered aluminium-doped zinc oxide for photovoltaic applications Loughborough University Institutional Repository Comparison of and sputtered aluminium-doped zinc oxide for photovoltaic applications This item was submitted to Loughborough University's Institutional

More information

Investigations on Properties of (ZnO:Al) Films Prepared by RF/DC Co-sputtering

Investigations on Properties of (ZnO:Al) Films Prepared by RF/DC Co-sputtering TELKOMNIKA, Vol.10, No.5, September 2012, pp. 947~952 e-issn: 2087-278X accredited by DGHE (DIKTI), Decree No: 51/Dikti/Kep/2010 947 Investigations on Properties of (ZnO:Al) Films Prepared by RF/DC Co-sputtering

More information

EFFECT OF DEPOSITION TIME ON CHEMICAL BATH DEPOSITION PROCESS AND THICKNESS OF BaSe THIN FILMS.

EFFECT OF DEPOSITION TIME ON CHEMICAL BATH DEPOSITION PROCESS AND THICKNESS OF BaSe THIN FILMS. Journal of Optoelectronics and Biomedical Materials Vol. 3 Issue 4, October-December 2011 p. 81-85 EFFECT OF DEPOSITION TIME ON CHEMICAL BATH DEPOSITION PROCESS AND THICKNESS OF BaSe THIN FILMS. N.A. OKEREKE

More information

Excimer Laser Annealing of Hydrogen Modulation Doped a-si Film

Excimer Laser Annealing of Hydrogen Modulation Doped a-si Film Materials Transactions, Vol. 48, No. 5 (27) pp. 975 to 979 #27 The Japan Institute of Metals Excimer Laser Annealing of Hydrogen Modulation Doped a-si Film Akira Heya 1, Naoto Matsuo 1, Tadashi Serikawa

More information

Roll-to-roll Technology for Transparent High Barrier Films

Roll-to-roll Technology for Transparent High Barrier Films Roll-to-roll Technology for Transparent High Barrier Films Presented at the AIMCAL Fall Technical Conference, October 19-22, 2008, Myrtle Beach, SC, USA Nicolas Schiller, John Fahlteich, Matthias Fahland,

More information

Fabrication and Properties of Nd(Tb,Dy)Co/Cr Films with Perpendicular Magnetic Anisotropy

Fabrication and Properties of Nd(Tb,Dy)Co/Cr Films with Perpendicular Magnetic Anisotropy Fabrication and Properties of (,Dy)/Cr Films with Perpendicular Magnetic Anisotropy Weiming Cheng 1,2, Xiangshui Miao * 1,2, Junbing Yan 2, Xiaomin Cheng 1,2 1 Department of Electronic cience and Technology,

More information

Alternative Methods of Yttria Deposition For Semiconductor Applications. Rajan Bamola Paul Robinson

Alternative Methods of Yttria Deposition For Semiconductor Applications. Rajan Bamola Paul Robinson Alternative Methods of Yttria Deposition For Semiconductor Applications Rajan Bamola Paul Robinson Origin of Productivity Losses in Etch Process Aggressive corrosive/erosive plasma used for etch Corrosion/erosion

More information

Simple method for formation of nanometer scale holes in membranes. E. O. Lawrence Berkeley National Laboratory, Berkeley, CA 94720

Simple method for formation of nanometer scale holes in membranes. E. O. Lawrence Berkeley National Laboratory, Berkeley, CA 94720 Simple method for formation of nanometer scale holes in membranes T. Schenkel 1, E. A. Stach, V. Radmilovic, S.-J. Park, and A. Persaud E. O. Lawrence Berkeley National Laboratory, Berkeley, CA 94720 When

More information

Database. Sept , 2014, Aachen, Germany. Thermo-Calc Anwendertreffen

Database. Sept , 2014, Aachen, Germany. Thermo-Calc Anwendertreffen Database Sept. 11-12, 2014, Aachen, Germany Thermo-Calc Anwendertreffen Thermodynamic and kinetic databases New Databases, June 2014 TCAL3 TCMG3 TCSLD2 TCSI1 TCNI7 MOBNI3 TCAL3.0 TCAL3.0 TCAL1.0 2011.05

More information

MANUSCRIPT COVER PAGE

MANUSCRIPT COVER PAGE MANUSCRIPT COVER PAGE Abstract ID: yclee11 or Program ID: EP406 Title of Paper: Microstructure and Phase Transformation of Zinc Titanate Thin Films Keywords: ZnTiO 3 ; thin film; amorphous; magnetron sputtering;

More information

This article was originally published in a journal published by Elsevier, and the attached copy is provided by Elsevier for the author s benefit and for the benefit of the author s institution, for non-commercial

More information

Supporting Information

Supporting Information Supporting Information Fast-Response, Sensitivitive and Low-Powered Chemosensors by Fusing Nanostructured Porous Thin Film and IDEs-Microheater Chip Zhengfei Dai,, Lei Xu,#,, Guotao Duan *,, Tie Li *,,

More information

Applications of Successive Ionic Layer Adsorption and Reaction (SILAR) Technique for CZTS Thin Film Solar Cells

Applications of Successive Ionic Layer Adsorption and Reaction (SILAR) Technique for CZTS Thin Film Solar Cells NANO VISION An International Open Free Access, Peer Reviewed Research Journal www.nano-journal.org ISSN 2231-2579 (Print) ISSN 2319-7633 (Online) Abbr: Nano Vision. 2013, Vol.3(3): Pg.235-239 Applications

More information

Microstructure and Microhardness of an Al-Zr-Ti-Fe Alloy

Microstructure and Microhardness of an Al-Zr-Ti-Fe Alloy Proceedings of the 12th International Conference on Aluminium Alloys, September 5-9, 2010, Yokohama, Japan 2010 2010 The Japan Institute of Light Metals pp. 1004-1008 1004 Microstructure and Microhardness

More information

Preparation of Bi-Based Ternary Oxide Photoanodes, BiVO 4,

Preparation of Bi-Based Ternary Oxide Photoanodes, BiVO 4, Preparation of Bi-Based Ternary Oxide Photoanodes, BiVO 4, Bi 2 WO 6 and Bi 2 Mo 3 O 12, Using Dendritic Bi Metal Electrodes Donghyeon Kang, a, Yiseul Park, a, James C. Hill, b and Kyoung-Shin Choi a,*

More information

INFLUENCE OF LASER ABLATION ON STAINLESS STEEL CORROSION BEHAVIOUR

INFLUENCE OF LASER ABLATION ON STAINLESS STEEL CORROSION BEHAVIOUR INFLUENCE OF LASER ABLATION ON STAINLESS STEEL CORROSION BEHAVIOUR Michal ŠVANTNER a, Martin KUČERA b, Šárka HOUDKOVÁ c, Jan ŘÍHA d a University of West Bohemia, Univerzitní 8, 306 14 Plzeň, msvantne@ntc.zcu.cz

More information

In-Situ Characterization During MOVPE Growth of III-Nitrides using Reflectrometry

In-Situ Characterization During MOVPE Growth of III-Nitrides using Reflectrometry 18 Annual Report 1999, Dept. of Optoelectronics, University of Ulm In-Situ Characterization During MOVPE Growth of III-Nitrides using Reflectrometry Christoph Kirchner and Matthias Seyboth The suitability

More information

CHARACTERIZING CRYSTALLINE CHROMIUM OXIDE THIN FILM GROWTH PARAMETERS

CHARACTERIZING CRYSTALLINE CHROMIUM OXIDE THIN FILM GROWTH PARAMETERS 64 Rev.Adv.Mater.Sci. 24(2010) K. 64-68 Abu-Shgair, H.H. Abu-Safe, A. Aryasomayajula, B. Beake and M.H. Gordon CHARACTERIZING CRYSTALLINE CHROMIUM OXIDE THIN FILM GROWTH PARAMETERS Khaleel Abu-Shgair 1,

More information

Thermal Annealing Effects on the Thermoelectric and Optical Properties of SiO 2 /SiO 2 +Au Multilayer Thin Films

Thermal Annealing Effects on the Thermoelectric and Optical Properties of SiO 2 /SiO 2 +Au Multilayer Thin Films American Journal of Materials Science 2015, 5(3A): 31-35 DOI: 10.5923/s.materials.201502.05 Thermal Annealing Effects on the Thermoelectric and Optical Properties of SiO 2 /SiO 2 +Au Multilayer Thin Films

More information

Synthetic antiferromagnet with Heusler alloy Co 2 FeAl ferromagnetic layers

Synthetic antiferromagnet with Heusler alloy Co 2 FeAl ferromagnetic layers Synthetic antiferromagnet with Heusler alloy Co 2 FeAl ferromagnetic layers X. G. Xu, D. L. Zhang, X. Q. Li, J. Bao, Y. Jiang State Key Laboratory for Advanced Metals and Materials, School of Materials

More information

PEFC cathode electrocatalysts: model system study

PEFC cathode electrocatalysts: model system study PEFC cathode electrocatalysts: model system study Debbie Myers, Xiaoping Wang, Nancy Kariuki, Suhas Niyogi, Jennifer Mawdsley, and Dave Carter Argonne National Laboratory W.A. Goddard, III, B. Merinov,

More information

The growth of patterned ceramic thin films from polymer precursor solutions Göbel, Ole

The growth of patterned ceramic thin films from polymer precursor solutions Göbel, Ole University of Groningen The growth of patterned ceramic thin films from polymer precursor solutions Göbel, Ole IMPORTANT NOTE: You are advised to consult the publisher's version (publisher's PDF) if you

More information

Cu(In,Ga)Se 2 FILM FORMATION FROM SELENIZATION OF MIXED METAL/METAL-SELENIDE PRECURSORS

Cu(In,Ga)Se 2 FILM FORMATION FROM SELENIZATION OF MIXED METAL/METAL-SELENIDE PRECURSORS Cu(In,Ga)Se 2 FILM FORMATION FROM SELENIZATION OF MIX METAL/METAL-SELENIDE PRECURSORS Rui Kamada, William N. Shafarman, and Robert W. Birkmire Institute of Energy Conversion University of Delaware, Newark,

More information

DIFFRACTION METHODS IN MATERIAL SCIENCE. Lecture 7

DIFFRACTION METHODS IN MATERIAL SCIENCE. Lecture 7 DIFFRACTION METHODS IN MATERIAL SCIENCE PD Dr. Nikolay Zotov Tel. 0711 689 3325 Email: zotov@imw.uni-stuttgart.de Room 3N16 Lecture 7 Practicum 15.12.2016 15:15 Room 3P2! Lectures 16.12.2016 11:00 Room

More information

High-Resolution, Electrohydrodynamic Inkjet Printing of Stretchable, Metal Oxide Semiconductor Transistors with High Performances

High-Resolution, Electrohydrodynamic Inkjet Printing of Stretchable, Metal Oxide Semiconductor Transistors with High Performances Electronic Supplementary Material (ESI) for Nanoscale. This journal is The Royal Society of Chemistry 2016 ` Electronic Supplementary Information High-Resolution, Electrohydrodynamic Inkjet Printing of

More information

EuNiO 3. thin films- growth and characterization. Home Search Collections Journals About Contact us My IOPscience

EuNiO 3. thin films- growth and characterization. Home Search Collections Journals About Contact us My IOPscience Home Search Collections Journals About Contact us My IOPscience thin films- growth and characterization This content has been downloaded from IOPscience. Please scroll down to see the full text. 2011 J.

More information

EE40 Lec 22. IC Fabrication Technology. Prof. Nathan Cheung 11/19/2009

EE40 Lec 22. IC Fabrication Technology. Prof. Nathan Cheung 11/19/2009 Suggested Reading EE40 Lec 22 IC Fabrication Technology Prof. Nathan Cheung 11/19/2009 300mm Fab Tour http://www-03.ibm.com/technology/manufacturing/technology_tour_300mm_foundry.html Overview of IC Technology

More information

Available online at ScienceDirect. Materials Today: Proceedings 2 (2015 )

Available online at  ScienceDirect. Materials Today: Proceedings 2 (2015 ) Available online at www.sciencedirect.com ScienceDirect Materials Today: Proceedings 2 (2015 ) 5582 5586 International Conference on Solid State Physics 2013 (ICSSP 13) Thickness dependent optimization

More information

Optical Coatings. Photonics 4 Luxury Coatings , Genève. Dr. Andreas Bächli Head of Optical Coatings at RhySearch, Buchs (SG)

Optical Coatings. Photonics 4 Luxury Coatings , Genève. Dr. Andreas Bächli Head of Optical Coatings at RhySearch, Buchs (SG) Optical Coatings Photonics 4 Luxury Coatings 21.06.2017, Genève Dr. Andreas Bächli Head of Optical Coatings at RhySearch, Buchs (SG) RhySearch The Research- and Innovation Center in the Rhine Valley RhySearch

More information

Transmission Kikuchi Diffraction in the Scanning Electron Microscope

Transmission Kikuchi Diffraction in the Scanning Electron Microscope Transmission Kikuchi Diffraction in the Scanning Electron Microscope Robert Keller, Roy Geiss, Katherine Rice National Institute of Standards and Technology Nanoscale Reliability Group Boulder, Colorado

More information

Plasma Activated EB-PVD of Titanium and its Compounds by Means of Large Area SAD

Plasma Activated EB-PVD of Titanium and its Compounds by Means of Large Area SAD AIMCAL 2005 Myrtle Beach, SC, USA, October 19th, 2005 Plasma Activated EB-PVD of Titanium and its Compounds by Means of Large Area SAD E. Reinhold, C. Steuer VON ARDENNE Anlagentechnik GmbH, Dresden, Germany

More information

MEMS prototyping using RF sputtered films

MEMS prototyping using RF sputtered films Indian Journal of Pure & Applied Physics Vol. 45, April 2007, pp. 326-331 MEMS prototyping using RF sputtered films Sudhir Chandra, Vivekanand Bhatt, Ravindra Singh, Preeti Sharma & Prem Pal* Centre for

More information

EBSD Basics EBSD. Marco Cantoni 021/ Centre Interdisciplinaire de Microscopie Electronique CIME. Phosphor Screen. Pole piece.

EBSD Basics EBSD. Marco Cantoni 021/ Centre Interdisciplinaire de Microscopie Electronique CIME. Phosphor Screen. Pole piece. EBSD Marco Cantoni 021/693.48.16 Centre Interdisciplinaire de Microscopie Electronique CIME EBSD Basics Quantitative, general microstructural characterization in the SEM Orientation measurements, phase

More information

Novel concept of rechargeable battery using iron oxide nanorods. anode and nickel hydroxide cathode in aqueous electrolyte

Novel concept of rechargeable battery using iron oxide nanorods. anode and nickel hydroxide cathode in aqueous electrolyte Supplementary Information for: Novel concept of rechargeable battery using iron oxide nanorods anode and nickel hydroxide cathode in aqueous electrolyte Zhaolin Liu *, Siok Wei Tay and Xu Li Institute

More information

Journal of Chemical and Pharmaceutical Research, 2017, 9(1): Research Article

Journal of Chemical and Pharmaceutical Research, 2017, 9(1): Research Article Available online www.jocpr.com Journal of Chemical and Pharmaceutical Research, 2017, 9(1):163-167 Research Article ISSN : 0975-7384 CODEN(USA) : JCPRC5 Synthesis and Characterization of Carbon Nano Spheres

More information

Substrate surface effect on the structure of cubic BN thin films from synchrotron-based X-ray diffraction and reflection

Substrate surface effect on the structure of cubic BN thin films from synchrotron-based X-ray diffraction and reflection Substrate surface effect on the structure of cubic BN thin films from synchrotron-based X-ray diffraction and reflection X.M. Zhang, W. Wen, X.L.Li, X.T. Zhou published on Dec 2012 PHYS 570 Instructor

More information

Amorphous Silicon Solar Cells

Amorphous Silicon Solar Cells The Birnie Group solar class and website were created with much-appreciated support from the NSF CRCD Program under grants 0203504 and 0509886. Continuing Support from the McLaren Endowment is also greatly

More information

Lecture 19 Microfabrication 4/1/03 Prof. Andy Neureuther

Lecture 19 Microfabrication 4/1/03 Prof. Andy Neureuther EECS 40 Spring 2003 Lecture 19 Microfabrication 4/1/03 Prof. ndy Neureuther How are Integrated Circuits made? Silicon wafers Oxide formation by growth or deposition Other films Pattern transfer by lithography

More information

Fabrication of Ru/Bi 4-x La x Ti 3 O 12 /Ru Ferroelectric Capacitor Structure Using a Ru Film Deposited by Metalorganic Chemical Vapor Deposition

Fabrication of Ru/Bi 4-x La x Ti 3 O 12 /Ru Ferroelectric Capacitor Structure Using a Ru Film Deposited by Metalorganic Chemical Vapor Deposition Mat. Res. Soc. Symp. Proc. Vol. 784 2004 Materials Research Society C7.7.1 Fabrication of Ru/Bi 4-x La x Ti 3 O 12 /Ru Ferroelectric Capacitor Structure Using a Ru Film Deposited by Metalorganic Chemical

More information

Figure 2.3 (cont., p. 60) (e) Block diagram of Pentium 4 processor with 42 million transistors (2000). [Courtesy Intel Corporation.

Figure 2.3 (cont., p. 60) (e) Block diagram of Pentium 4 processor with 42 million transistors (2000). [Courtesy Intel Corporation. Figure 2.1 (p. 58) Basic fabrication steps in the silicon planar process: (a) oxide formation, (b) selective oxide removal, (c) deposition of dopant atoms on wafer, (d) diffusion of dopant atoms into exposed

More information

Technological Aspects of Metal Nanopowders

Technological Aspects of Metal Nanopowders PHYSICS and CHEMISTRY of NANOMATERIALS, lecture 6 Alexander A. Gromov gromov@tpu.ru Chair of Silicates and Nanomaterials, Faculty of Chemical Technology, Tomsk Polytechnic University, RUSSIA Technological

More information

Dynamics of Crystallization and Melting under Pressure

Dynamics of Crystallization and Melting under Pressure prakapenka@cars.uchicago.edu Dynamics of Crystallization and Melting under Pressure Vitali Prakapenka GSECARS, University of Chicago, Chicago 1 The world s deepest borehole in Sakhalin is 12,345 m (40,502

More information

Study on Properties of Silicon Oxycarbide Thin Films Prepared by RF Magnetron Sputtering Tao Chen a, Maojin Dong, Jizhou Wang,Ling Zhang and Chen Li

Study on Properties of Silicon Oxycarbide Thin Films Prepared by RF Magnetron Sputtering Tao Chen a, Maojin Dong, Jizhou Wang,Ling Zhang and Chen Li Study on Properties of Silicon Oxycarbide Thin Films Prepared by RF Magnetron Sputtering Tao Chen a, Maojin Dong, Jizhou Wang,Ling Zhang and Chen Li Science and Technology on Surface Engineering Laboratory,

More information

Sputter Coating. Technical Brief

Sputter Coating. Technical Brief Sputter Coating Technical Brief Document Number TB-SPUTTER Issue 2 (01/02) Introduction HP000107 Quorum Technologies Ltd main sales office: South Stour Avenue Ashford Kent U.K. Tel: ++44(0) 1233 646332

More information

CREOL, The College of Optics & Photonics, University of Central Florida

CREOL, The College of Optics & Photonics, University of Central Florida Metal Substrate Induced Control of Ag Nanoparticle Plasmon Resonances for Tunable SERS Substrates Pieter G. Kik 1, Amitabh Ghoshal 1, Manuel Marquez 2 and Min Hu 1 1 CREOL, The College of Optics and Photonics,

More information

Anomaly of Film Porosity Dependence on Deposition Rate

Anomaly of Film Porosity Dependence on Deposition Rate Anomaly of Film Porosity Dependence on Deposition Rate Stephen P. Stagon and Hanchen Huang* Department of Mechanical Engineering, University of Connecticut, Storrs, CT 06269 J. Kevin Baldwin and Amit Misra

More information

Preparation and characterization of nanostructured thermoelectric materials

Preparation and characterization of nanostructured thermoelectric materials QuickTime et un décompresseur TIFF (non compressé) sont requis pour visionner cette image. Preparation and characterization of nanostructured thermoelectric materials Laboratoire de Physique des Matériaux,

More information

Vertically aligned Ni magnetic nanowires fabricated by diblock-copolymer-directed Al thin film anodization

Vertically aligned Ni magnetic nanowires fabricated by diblock-copolymer-directed Al thin film anodization Vertically aligned Ni magnetic nanowires fabricated by diblock-copolymer-directed Al thin film anodization Researcher: Kunbae (Kevin) Noh, Graduate Student, MAE Dept. and CMRR Collaborators: Leon Chen,

More information

Substrate Effect, Pile-Up and Sink-In Factors during Thin Film Nanoindentation. Kevin Russell Schwieker

Substrate Effect, Pile-Up and Sink-In Factors during Thin Film Nanoindentation. Kevin Russell Schwieker Substrate Effect, Pile-Up and Sink-In Factors during Thin Film Nanoindentation by Kevin Russell Schwieker A thesis submitted to the Graduate Faculty of Auburn University in partial fulfillment of the requirements

More information

A Comparison Between the Behavior of. Nanorod Array and Planar Cd(Se, Te)

A Comparison Between the Behavior of. Nanorod Array and Planar Cd(Se, Te) 21 Chapter 2 A Comparison Between the Behavior of Nanorod Array and Planar Cd(Se, Te) Photoelectrodes 1 2.1 Introduction The II-VI semiconductors CdSe and CdTe are appropriate materials for testing the

More information

Nanorods For Solar Water Oxidation.

Nanorods For Solar Water Oxidation. Effect of Oxygen Evolution Catalysts On Hematite Nanorods For Solar Water Oxidation. Young-Rae Hong *a, Zhaolin Liu *a, Sharifah Fatanah B. S. A. Al-Bukhari ab, Coryl Jing Jun Lee ab, Daniel L. Yung ac,

More information

Annealing Effect on Elastic Constant of Ultrathin Films Studied by Acoustic-Phonon Resonance Spectroscopy

Annealing Effect on Elastic Constant of Ultrathin Films Studied by Acoustic-Phonon Resonance Spectroscopy 1st International Symposium on Laser Ultrasonics: Science, Technology and Applications July 16-18 28, Montreal, Canada Annealing Effect on Elastic Constant of Ultrathin Films Studied by Acoustic-Phonon

More information

Thin Solid Films Received 28 May 1997; accepted 6 November 1997

Thin Solid Films Received 28 May 1997; accepted 6 November 1997 0040-6090r98r$19.00 q 1998 Elsevier Science S.A. All rights reserved. Ž. Thin Solid Films 323 1998 265 269 Growth of CuIn Se layer on CuInSe films and its effect on the 2 photovoltaic properties of In

More information

Mohammad Anwar Karim Id :

Mohammad Anwar Karim Id : Department of Mechanical and Industrial Engineering ME 8109 Casting and Solidification of Materials EFFECTS OF RAPID SOLIDIFICATION ON MICROSTRUCTURE AND PROPERTIES OF AL, MG & TI ALLOYS Winter 2012 Presented

More information

2007 PLACE Conference September 16-20 St Louis, MO Nano-Composite Polymer Optical Coatings Vampire Optical Coatings, Inc. Tom Faris vcoat@copper.net Introduction What is a nano-composite polymer coating?

More information

Thin Film Scattering: Epitaxial Layers

Thin Film Scattering: Epitaxial Layers Thin Film Scattering: Epitaxial Layers 6th Annual SSRL Workshop on Synchrotron X-ray Scattering Techniques in Materials and Environmental Sciences: Theory and Application May 29-31, 2012 Thin films. Epitaxial

More information

Sputtered Zinc Oxide Films for Silicon Thin Film Solar Cells: Material Properties and Surface Texture

Sputtered Zinc Oxide Films for Silicon Thin Film Solar Cells: Material Properties and Surface Texture Poster FVS Workshop 2002 Sputtered Zinc Oxide Films for Silicon Thin Film Solar Cells: Material Properties and Surface Texture Texture etching of sputtered ZnO:Al films has opened up a variety of possibilities

More information

Neutron Detector development at the ILL Based on 3 He and alternative convertors

Neutron Detector development at the ILL Based on 3 He and alternative convertors Neutron Detector development at the ILL Based on 3 He and alternative convertors Bruno Guerard Basic principles of 3He neutron gas detectors outline The golden age of 3 He detectors (~2000 20) shown with

More information

Americium alloys with gold and copper

Americium alloys with gold and copper IOP Conference Series: Materials Science and Engineering Americium alloys with gold and copper To cite this article: V M Radchenko et al 2010 IOP Conf. Ser.: Mater. Sci. Eng. 9 012093 View the article

More information

Solution-processed CdS thin films from a single-source precursor

Solution-processed CdS thin films from a single-source precursor Electronic Supplementary Information: Solution-processed CdS thin films from a single-source precursor Anthony S. R. Chesman,* a Noel W. Duffy, a Alessandro Martucci, b Leonardo De Oliveira Tozi, a Th.

More information

Steric Effects on the. Transition in YH x

Steric Effects on the. Transition in YH x Steric Effects on the Metallic-Mirror Mirror to Transparent-Insulator Transition in YH x Troy C. Messina Department of Physics University of Texas at Austin Final Defense 22 November 2002 Outline Introduction

More information

Vacuum Equipment for TCO and AR Coatings Deposition by Reactive Magnetron Sputtering

Vacuum Equipment for TCO and AR Coatings Deposition by Reactive Magnetron Sputtering Vacuum Equipment for TCO and AR Coatings Deposition by Reactive Magnetron Sputtering E. Yadin; V. Kozlov; E. Machevskis, Sidrabe, Inc., 17 Krustpils str.,riga, LV1073, Latvia. Tel: +371 7249806, Fax: +371

More information

Small-angle X-ray scattering (SAXS) with synchrotron radiation

Small-angle X-ray scattering (SAXS) with synchrotron radiation Small-angle X-ray scattering (SAXS) with synchrotron radiation Martin Müller Institut für Experimentelle und Angewandte Physik der Christian-Albrechts-Universität zu Kiel Introduction to small-angle scattering

More information

Surface Analysis of Electrochromic Switchable Mirror Glass Based on Magnesium-Nickel Thin Film in Accelerated Degradation Test

Surface Analysis of Electrochromic Switchable Mirror Glass Based on Magnesium-Nickel Thin Film in Accelerated Degradation Test Materials Transactions, Vol. 52, No. 3 (2011) pp. 464 to 468 #2011 The Japan Institute of Metals Surface Analysis of Electrochromic Switchable Mirror Glass Based on Magnesium-Nickel Thin Film in Accelerated

More information

HiPIMS Deposition of Metal and Oxide Coatings

HiPIMS Deposition of Metal and Oxide Coatings HiPIMS Deposition of Metal and Oxide Coatings 1 GT West, 1 PJ Kelly, 1 P Barker, 2 JW Bradley and 2 A Mishra 1. Surface Engineering Group, Manchester Metropolitan University, UK 2. Electrical Engineering

More information

Process steps for Field Emitter devices built on Silicon wafers And 3D Photovoltaics on Silicon wafers

Process steps for Field Emitter devices built on Silicon wafers And 3D Photovoltaics on Silicon wafers Process steps for Field Emitter devices built on Silicon wafers And 3D Photovoltaics on Silicon wafers David W. Stollberg, Ph.D., P.E. Research Engineer and Adjunct Faculty GTRI_B-1 Field Emitters GTRI_B-2

More information

Paradee Leerungnawarat. Department of Materials Science and Engineering

Paradee Leerungnawarat. Department of Materials Science and Engineering Paradee Leerugawarat Departmet of Materials Sciece ad Egieerig Itroductio What is SiC? Why SiC? SiC has may advatages over Si. It is widely used for high power, high temperature electroic devices. Why

More information