Recipe Management (RMS)

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5 Recipe Management (RMS)

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7 Manufacturing Execution (MES) Recipe Management (RMS)

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9 Manufacturing Execution (MES) Automated Material Handling (AMHS) Recipe Management (RMS)

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11 Manufacturing Execution (MES) Automated Material Handling (AMHS) Recipe Management (RMS) Equipment Tracking (ET)

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13 Manufacturing Execution (MES) Automated Material Handling (AMHS) Engineering Data Collection (EDC) Recipe Management (RMS) Equipment Tracking (ET)

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15 Engineering Data Collection (EDC) Manufacturing Execution (MES) Automated Material Handling (AMHS) Advanced Process Control (APC) Recipe Management (RMS) Equipment Tracking (ET)

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17 Test and QA Data Collection Engineering Data Collection (EDC) Manufacturing Execution (MES) Automated Material Handling (AMHS) Advanced Process Control (APC) Recipe Management (RMS) Equipment Tracking (ET)

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19 Test and QA Data Collection Engineering Data Collection (EDC) Manufacturing Execution (MES) Automated Material Handling (AMHS) Yield Analysis Advanced Process Control (APC) Recipe Management (RMS) Equipment Tracking (ET)

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21 Test and QA Data Collection Engineering Data Collection (EDC) Manufacturing Execution (MES) Automated Material Handling (AMHS) Yield Analysis Advanced Process Control (APC) Recipe Management (RMS) Scheduler Equipment Tracking (ET)

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23 Test and QA Data Collection Engineering Data Collection (EDC) Manufacturing Execution (MES) Automated Material Handling (AMHS) Yield Analysis Advanced Process Control (APC) Recipe Management (RMS) Scheduler Equipment Tracking (ET) Cycle Time Analysis (ECT Analyzers)

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25 Test and QA Data Collection Engineering Data Collection (EDC) Manufacturing Execution (MES) Automated Material Handling (AMHS) Yield Analysis Advanced Process Control (APC) Recipe Management (RMS) Scheduler Equipment Tracking (ET) Cycle Time Analysis (ECT Analyzers) Capacity Planner

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27 Test and QA Data Collection Engineering Data Collection (EDC) Manufacturing Execution (MES) Automated Material Handling (AMHS) Yield Analysis Advanced Process Control (APC) Recipe Management (RMS) Scheduler Equipment Tracking (ET) Cycle Time Analysis (ECT Analyzers) Capacity Planner Production Planner

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29 Test and QA Data Collection Engineering Data Collection (EDC) Manufacturing Execution (MES) Automated Material Handling (AMHS) Compliance Analyzer Yield Analysis Advanced Process Control (APC) Recipe Management (RMS) Scheduler Equipment Tracking (ET) Cycle Time Analysis (ECT Analyzers) Capacity Planner Production Planner

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31 Test and QA Data Collection Engineering Data Collection (EDC) Manufacturing Execution (MES) Automated Material Handling (AMHS) Compliance Analyzer Yield Analysis Advanced Process Control (APC) Recipe Management (RMS) Scheduler Equipment Tracking (ET) Cycle Time Analysis (ECT Analyzers) Capacity Planner Production Planner

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33 ECT vs. Tool Set Capital Cost, 14.5K WSPW of L52A ECT (days) $1,440 $1,450 $1,460 $1,470 $1,480 $1,490 $1,500 $1,510 $1,520 $1,530 $1,540 $1,550 $1,560 $1,570 $1,580 $1,590 $1,600 Capital Cost of Least-Cost Tool Set (millions)

34 ECT vs. Capital Cost of Tool Set, 29.5K WSPW of L52A ECT (days) ,800 2,820 2,840 2,860 2,880 2,900 2,920 2,940 2,960 Capital $ Spent on Tool Set (millions)

35 Entitlement Cycle Time vs. Tool Capital Cost for Various-Sized Fabs, L52A Entitlement Cycle Time (days) Equipment Capital Cost per WSPW (million $) 12K WSPW 14.5K 17K 19.5K 24.5K 29.5K 34.5K 39.5K 44.5K 49.5K 54.5K 59.5K

36 Tool Capital Cost for 50 Series Flash vs. ECT Fab Size Tool capital cost vs. ECT and fab size Tool Capital Cost per K WSPW (million $) ECT = 23 days 26 days 29 days 32 days 35 days 38 days 41 days Fab Size (K WSPW)

37 Demand Forecast System Factory Floor Systems Order Board Prioritized demands and build rules Factory capabilities and status Factory Plans (start and out schedules) Quotation & Order Entry System Product Availability Planning Engine Queries & Orders Quotes Material availability Material requirements Product structure and sourcing rules Customer Raw Materials System Bill of Materials System

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