emiconductor Manufacturing IoTfM Case Study A working example of the IoTfM in production.

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1 emiconductor Manufacturing IoTfM Case Study A working example of the IoTfM in production.

2 imetrix has Been an Expert in mproving Manufacturing Automation or 25 Years

3 $400 $300 $200 $100 $ Semiconductor Industry Revenue in Billions Source: Semiconductor Industry Associa7on *Inc Year $60.0 $50.0 $40.0 $30.0 $20.0 $10.0 $- $47.7 $28.0 $19.7 Semiconductor Equipment Billings in Billions Sources: SEMI and SEAJ $22.2 $18.1 $9.4 $40.5 $42.8 $29.5 $15.9 $39.9 $43.5 $36.9 $32.0 $39.5 $

4 emiconductor anufacturing pans the Globe e technology used by fabricators for e production of semiconductors comes om suppliers all over the world. Distribu7on of Fabricators by Region Rest of World Japan Americas China Europe

Moore s Law If home prices fell at the same rate as

a piece of candy If a smart phone were built using a

size of a car If fuel eﬃciency improved at the same

life on a tank of gas If skyscraper constructon fell in

today for the price of a PC If the size of that

5 Moore s Law If home prices fell at the same rate as transistors, you could purchase a home for the price of a piece of candy If a smart phone were built using a 1971 technology the phone s microprocessor would be the size of a car If fuel eﬃciency improved at the same rate as Moore s law you could drive a car your entre life on a tank of gas If skyscraper constructon fell in price at the pace of Moore s law you could buy one today for the price of a PC If the size of that skyscraper grew at the Moore s pace, it would be 35 Tmes the height of Everest

6 Modern fabs cost $5B+ wafer can take a 1,000 processes to produce A wafer takes 3-4 months to cycle through a plant A typical fab starts 50,000 wafers a month About 1,500 tools are required to produce a waf Around 200 diﬀerent tool OEMs provide the equipment for a fab

7 EMI Standards Node (nm) Process indow (C pk ) ey Applications SPC R2R FDC VM PDM Big Data ata Generated (MB/sec) Supporting SECS-II GEM GEM300 EDA I EDA II E164 EMI Standards

EMI miconductor Equipment and Materials ternational is the

chain for the micro- and nanoectronics industries,

LED Flat Panel Display (FPD) Micro-electromechanical systems

8 EMI miconductor Equipment and Materials ternational is the global industry sociation serving the manufacturing pply chain for the micro- and nanoectronics industries, including: Semiconductors Photovoltaics (PV) High-Brightness LED Flat Panel Display (FPD) Micro-electromechanical systems (MEMS) Printed and flexible electronics Related micro- and nano-electronics

9 ypical Factory System Architecture AMHS Factory Information and Control Systems APC, FDC RMS MES YMS MES, RMS Other DB SOA TCP/IP Equipment Integration Server Local DB Equipment Integration Server Local DB GEM Sensor Gateway GEM GEM GEM OEM Tool S S S OEM Tool OEM Tool OEM Tool

10 EDA/Interface A Opens Up a Whole New World of Information

devices of arbitrary size and complexity to securely ublish data to

11 DA In a Nutshell... DA is a suite of model-based communication standards that nables devices of arbitrary size and complexity to securely ublish data to multiple, distributed clients using standard ternet technologies. hat could be better suited for the IoT for manufacturing?

DA-Enhanced actory System Process Development

PHM VM Equipment IntegraTon Server Local DB

Retrofi^ed with Interface A OEM Tool Retrofi^ed

12 DA-Enhanced actory System Process Development Simulation Field Service Support AMC ACM ables remote viewing of the tool data. AMHS APC, FDC YMS RMS Factory Information and Control Systems MES MES, RMS Other DB Additional Applications Modeling DOE S/W Test PHM VM Equipment IntegraTon Server Local DB Equipment IntegraTon Server Local DB TCP/IP ~?? HTTP Control OEM Tool Integrated with Interface A Control Control Control OEM Tool, Retrofi^ed with Interface A OEM Tool Retrofi^ed with Interface A Sensor Gateway S S S FaciliTes Data Operator Input OEM Tool, with EDA

13 DA Takes Advantage of 30 Years of emiconductors Experience Ability to query the equipment for its metadata Multiple independent client application access Use of mainstream communications technologies Powerful event/alarm-based trace request structure Support for data-on-demand Performance monitoring and notification features Secure access (local and remote) Get the data you want when and where you need it.

14 nified Equipment odel e one element that is wafer specific eds to be modified for your industry. E164 M ConfiguraTon Sedngs

or don t Understand where all the time goes Attack variability and minimize its impact Build

16 DA Enables Factories to Give everything a voice: equipment, material, processes, people, and the context to make it powerful, allowing you to: Convert raw data to actionable information Know why things happen or don t Understand where all the time goes Attack variability and minimize its impact Build manufacturing domain knowledge Reduce time to money for new products Optimize performance, productivity, and profit.

17 ? erci nke ank you

Realizing Smart Manufacturing in Semiconductor Industry with SEMI Standards Alan Weber

Realizing Smart Manufacturing in Semiconductor Industry with SEMI Standards Alan Weber Vice President, New Product Innovations, Cimetrix Incorporated Realizing Smart Manufacturing in Semiconductor Industry