EEC Phase 2.5 Guideline Rollout e- Manufacturing Workshop December 3, 2002

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1 EEC Phase 2.5 Guideline Rollout e- Manufacturing Workshop December 3, 2002 Kinji Mokuya / Selete (mokuya@selete.co.jp) Karl Gartland / IBM (kgartlan@us.ibm.com) e-manufacturing Workshop Mokuya/Gartland Slide 1

2 Presentation Purpose Phase 2.5 Guidelines have reached full consensus The EE Capabilities discussed here today are needed to help us meet the ITRS goals for equipment productivity International SEMATECH and Selete/JEITA are collaborating in order to send a unified message e-manufacturing Workshop Mokuya/Gartland Slide 2

3 Contents Revised Guideline from Phase Single Point of Control at the Factory Level New Guidelines Phase SINGLE POINT OF CONTROL GUIDELINES 10.4 Logical Interface (ELI) 10.5 Performance Conditioning, Control and Configuration 8 RAMP-UP & MAINTENANCE SUPPORT CAPABILITY GUIDELINES 8.4 Maintenance Document Guideline 11 Process Specification Management Guidelines 11.1 Parameter Adjustment 11.2 Process Specification Management 11.3 Process Specification Verification e-manufacturing Workshop Mokuya/Gartland Slide 3

4 Revised Guideline from Phase 2.0 e-manufacturing Workshop Mokuya/Gartland Slide 4

5 Single Point of Control at the Factory Level (revised from Phase 2.0) Factory level systems must present a Single Point of Control to the production equipment. Additional control points may delegate to Factory Master Controller (FMC) Delegation done under device makers direction Functions defined by equipment logical interfaces device makers may assign all functions to a single application Single Point of Control at the Factory Level (revised from Phase 2) e-manufacturing Workshop Mokuya/Gartland Slide 5

6 New Guidelines Phase 2.5 e-manufacturing Workshop Mokuya/Gartland Slide 6

7 Logical Interface (ELI) Communication with the equipment shall be divided into separate logical interfaces Communication with these interfaces needs to be coordinated by SPOC* ). Divide up the responsibilities to reduce complexity. User chooses which clients access each ELI. access to ELIs may be limited to a single client. * ) SPOC:Single Point of Control e-manufacturing Workshop Mokuya/Gartland Slide 7

8 Logical Interface (ELI) Possible ELI s Job control and material management Parameter adjustment APC, EPC3 ( Performance Conditioning, Control, and Configuration) Delivery, material movement Data collection Data Collection definition» Sampling rate» Transmission rate Data Collection activation Data transmission e-manufacturing Workshop Mokuya/Gartland Slide 8

9 Logical Interface (ELI) Possible ELI s (continued) upload/download Real time interdiction EPC3 (Non-job parameter adjustment) e-manufacturing Workshop Mokuya/Gartland Slide 9

10 ELI/Master Controller Concept (Step 1) Factory network Factory Master Controller Conceptual Only Client 1 Job Control ELI 1 Job Control ELI 2 Real Time Interdiction Client 2 Real Time Interdiction Specify ELI Clients ELI 3 Data Collection Client 3 Data Collection The Factory Master Controller specifies to the equipment which clients will use which ELI s e-manufacturing Workshop Mokuya/Gartland Slide 10

11 ELI/Master Controller Concept (Step 2) Factory network Factory Master Controller Conceptual Only Client 1 Job Control ELI 1 Job Control ELI 2 Real Time Interdiction Client 2 Real Time Interdiction ELI 3 Data Collection Client 3 Data Collection ELI Clients communicate with the tool through their assigned ELI and may continue to coordinate with master controller. The master controller can disable any ELI connection. e-manufacturing Workshop Mokuya/Gartland Slide 11

12 Single Point to Single Point Configuration Factory network Client 1 Job Control Client 2 Real Time Interdiction Client 3 Data Collection Conceptual Only Factory Master Controller ELI 1 Job Control ELI 2 Real Time Interdiction ELI 3 Data Collection Host level Tool level ELI Clients communicate with the tool through a single factory master controller. e-manufacturing Workshop Mokuya/Gartland Slide 12

13 Performance Conditioning, Control and Configuration A standard interface for controlling equipment stability shall be provided by the supplier. The systems and algorithms used to achieve equipment performance conditioning, stability control and configuration may be provided by the equipment supplier, the IC maker, or third party supplier. Stability control examples are as follows: Minimization of machine-to-machine difference Minimization of chamber-to-chamber difference Performance deterioration due to consumables life Performance variation due to idle time between processing e-manufacturing Workshop Mokuya/Gartland Slide 13

14 Performance Conditioning, Control and Configuration Device makers want to understand the gradual change in equipment performance and the impact that change has on yield. Examples include consumables life, idle time between processing, etc. Process drift is a problem for devices with advanced process rules. It is not linked with a particular run. In the case multiple tools of the same type; machine to machine matching or chamber to chamber matching has to be managed to assure the process margin. e-manufacturing Workshop Mokuya/Gartland Slide 14

15 Contents Revised Guideline from Phase Single Point of Control at the Factory Level New Guidelines Phase SINGLE POINT OF CONTROL GUIDELINES 10.4 Logical Interface (ELI) 10.5 Performance Conditioning, Control and Configuration 8 RAMP-UP & MAINTENANCE SUPPORT CAPABILITY GUIDELINES 8.4 Maintenance Document Guideline 11 Process Specification Management Guidelines 11.1 Parameter Adjustment 11.2 Process Specification Management 11.3 Process Specification Verification e-manufacturing Workshop Mokuya/Gartland Slide 15

16 Maintenance Document Guideline Operation and Maintenance documents shall be provided in a standardized electronic format along with all the supplementary information required to read this electronic document. This set of information shall be maintained and accurate. Documentation inaccessible at the point of need difficult to navigate, and not always current. Move from hardcopy medium to electronic medium e-manufacturing Workshop Mokuya/Gartland Slide 16

17 Process Specification Management Guidelines These guidelines are intended to address the management of recipes and/or other elements, which control processing. These guidelines augment currently defined standards (Process Job/Control Job) governing the run-time adjustment of variable parameters e-manufacturing Workshop Mokuya/Gartland Slide 17

18 Process Specification Management Overview Sequence (Reference by Name) Run(Etch) Run(Strip) Run(Pre-Treat) Process Description (Resolution of name to ID) Etch = ID1 Strip = ID2 Reference by ID Module ID1 Module ID2 Pre-Treat = ID3 Module ID3 s are multipart. s often refer to each other by name, this can lead to significant recipe integrity problems. Reference by ID resolves integrity problems but can lead to additional management overhead. This is a fundamental problem in process specification management. e-manufacturing Workshop Mokuya/Gartland Slide 18

19 Process Specification Management Overview Factory Information and Control System All elements of process definiton are verified for correctness, completeness when they are created, and validated and prior to execution. Process Management Guideline # 3 All elements of process definiton are available for transfer to and management by the Factory Information and Control System Process Management Guideline # 2 Endpoint Algorithm Module Module Module Sequence Control Function These are both possible verification functions Endpoint Algorithm Module Module Module Sequence /Process Element Editor Function (may be standalone or part of FICS) User Creates module recipes, sequence recipes, and other elements of process definition. Selects parameters for external adjustment. Process Management Guideline #1 e-manufacturing Workshop Mokuya/Gartland Slide 19

20 Parameter Adjustment Any parameter supporting value assignment by a user during the definition of a process element must be adjustable by both on- and off-equipment software systems. Process Engineers are able to specify fixed values for parameters in recipes or other process definition elements Some parameters adjust the process on a run by run basis. Any parameter whose value is manually assignable is also assignable by the Factory System. The selection of which parameters are available is selectable by the user. e-manufacturing Workshop Mokuya/Gartland Slide 20

21 Process Specification Management All elements that define control or affect the execution or outcome of a process or metrology run on a piece of equipment must all be available to be managed. The Factory Information and Control System is the system of record. FICS must be able to manage all of the artifacts that contribute to or control the manufacture of product. Where factory level systems are not available, other means shall be provided. Process elements may include equipment constants/settings, recipe parameters, recipes, data collection plans, fault detection plans, APC algorithms, endpoint algorithms, metrology images, etc. e-manufacturing Workshop Mokuya/Gartland Slide 21

22 Process Specification Verification Verification of process elements must be supported. Verification may include checks for validity, integrity, correctness and completeness of process parameter settings. Verifying the integrity of process elements avoids potentially unsafe operation of the equipment. Validation may include insuring that the process to be executed exactly matches the processing requested. e-manufacturing Workshop Mokuya/Gartland Slide 22

23 Proposed Engineering Guideline Phasing Strategy Previous Previous Guidelines Guidelines EEC EEC Big Big Picture Picture EEC EEC Framework Framework Engineering Engineering Data Data Sharing Sharing Engineering Engineering Responsibility Responsibility Sharing Sharing Standards Standards e-diagnostics e-diagnostics Maintenance Maintenance Support Support Ramp-up Ramp-up Support Support Phase Phase Guidelines Guidelines SEMICON SEMICON Japan Japan Single Single Point Point of of Control Control (SPOC) (SPOC) Phase Phase Guidelines Guidelines SEMICON SEMICON West West Logical Logical Interfaces Interfaces (ELI) (ELI) Run-to-Run Run-to-Run Control Control (R2R) (R2R) Fault Fault Detection Detection and and Classification Classification (FDC) (FDC) Download Download and and Parameterization Parameterization Enhanced Enhanced e-diagnostics e-diagnostics Machine-to-Machine Machine-to-Machine Matching Matching Phase Phase 3 Guidelines Guidelines Direction Direction needed needed from from ITRS ITRS IM IM and and Standalone Standalone Metrology Metrology Operation Operation Integrated Integrated or or Linked Linked Operations Operations Predictive Predictive Maintenance Maintenance Spare Spare Parts Parts Management Management Data Data Mining Mining Procurement Procurement Yield Yield Management Management e-manufacturing Workshop Mokuya/Gartland Slide 23

24 Future Activity Need ITRS inputs to trigger Phase 3 items Guideline development ISMT & JEITA/Selete continue EEC collaboration Put the most of effort on Standardization Identify/adopt existing standards for implementation Creation of any missing standards Implementation! e-manufacturing Workshop Mokuya/Gartland Slide 24

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