QUANTUM EFFICIENCY MEASUREMENTS OF Mg FILMS PRODUCED BY PULSED LASER ABLATION DEPOSITION FOR HIGH BRIGHTNESS ELECTRON SOURCES*
|
|
- Augustine Cannon
- 6 years ago
- Views:
Transcription
1 QUANTUM EFFICIENCY MEASUREMENTS OF Mg FILMS PRODUCED BY PULSED LASER ABLATION DEPOSITION FOR HIGH BRIGHTNESS ELECTRON SOURCES* G.Gatti, L.Cultrera, F.Tazzioli, C.Vicario INFN-LNF A.Fiori University of Rome Tor Vergata, Chemical Science Department A. Perrone,C. Ristoscu University of Lecce, Physics Department and INFN *Work partially supported by the EU Commission in the sixth framework programme, contract no EUROFEL
2 NOWADAYS SITUATION IN PHOTOCATHODES QE VS. ROBUSTNESS LOOKING FOR COMPROMISES e.g. DIAMOND SEC. EMISSION METALS ARE RUGGED AND OFFER FASTEST RESPONSE (BLOW OUT?) BEST QE PERFORMANCE IN METAL PC REACHED BY Mg (UP TO 10-3 λ=266nm) PROBLEMS Mg ADHERENCE ON SUBSTRATE (Cu) IN RF-GUN ENVIRONMENT,DARK CURRENT (HIGH FIELD)
3 OUR GOALS ON Mg FILMS SYNTHETIZE A Mg PC TO WORK IN A RF-GUN FEATURES QE >10-4 SURFACE QUALITY (EMISSION DISTRIBUTION) LASER RADIATION RESISTANT HIGH FIELD RESISTANT (LOW DARK CURRENT ) RUGGEDNESS (SUBSTRATE ADHERENCE) ACTIVITIES WORKING ON VARIOUS LINES SPUTTERING MEASUREMENTS TO EVALUATE THIS WELL KNOWN TECHNIQUE & MAKE IMPROVEMENTS (VACUUM ARC DEPOSITION) -RESISTANT FILMS (POLLUTION & LASER) -BEST QE RESULTS UP TO NOW (BNL) -POOR ADHERENCE PLAD STUDYING & DEVELOPING NEW PC AND PROTECTIVE LAYERS BASED ON THIS PROMISING TECHNIQUE - GOOD FILM QUALITY - DIFFICULT TO REACH BIG THICKNESS - GOOD ADHERENCE - PRESENCE OF DROPLETS - MULTI LAYERS - THICKNESS CONTROL
4 QE MEASUREMENT SET-UP CATHODE HOLDER Camera SCOPE Computer Virtual Cathode UHV Chamber SEPARATOR GRID Pump LASER BEAM ELECTRONS Vacuum meter Quadrupled Nd:Yag (266nm) P < 10-8 mbar Normal Incidence E extrac Up To 1MV/m Photodiode Scope Ch.1 Scope Ch.2
5 SPUTTERING RESULTS 10µm Sputtered Mg Film On Cu Substrate (Koral Labs) Structural QE Measurement STARTING QE 0,5X10-5 E extr 1MV/m Spot Size 1mm 2 Radiation Resistent (AFM) (Maximum Depth of cleaning 0,6 µm) LASER CLEANING PROCEDURE LASER CLEANING PROCEDURE 1500 SHOTS 100µJ/mm 1500 SHOTS 100µJ/mm 2 2 (4GW/cm (4GW/cm 2 ) 2 ) AFM FINAL QE >1X10-4 -Successive Well Defined results Crystal up to 5X10 Structure -4 -Extremely Pollution (Hexagon Resistent shape) -Easy QE recovery (Thick Film) SEM 3rd Order Pol. Fit
6 PLAD TECHNIQUE HOW DEPOSITION DOES WORK? SET-UP - Xe Cl Laser (308 nm) 1. STRONG LASER PULSES ABLATE TARGET - τ pulse 30 ns - Incidence angle 45 - UHV Chamber (better than 10-7 mbar) - Online Mass Spectrometer - Target Rotation Frequency 1Hz - Up to 20J/cm 2 (0,6 GW/cm 2 ) fluence - Typical Target-Substrate Distance 5cm - Typical Spot Size 1mm 2 2. PLUME OF EJECTED MATERIAL SPREADS OUT FROM TARGET SURFACE 3. HIGH ENERGY PARTICLES IMPINGE ON THE SUBSTRATE (UP TO 50eV) ADVANTAGES HIGH FILM PURITY POSSIBILITY OF THICKNESS CONTROL (# PULSES) THIN PROTECTIVE FILMS POSSIBLE (TENS nm) MULTI LAYER DEPOSITION UNIFORM SURFACE GOOD ADHERENCE TO SUBSTRATE DRAWBACKS PRESENCE OF DROPLETS DIFFICULT LARGE THICKNESS IMPROVEMENTS
7 PLAD QE Measurements STARTING WITH POOR QE QUADRATIC Mg FILM RESPONSE ON Cu SUBSTRATE (C) CLEANING OF 1mm 2 AREA WITH WITH 5000 C 4GW/cm PROTECTIVE 2 PULSES LAYER Mg THICKNESS 1µm C THICKNESS 20 nm SAMPLE 1 LASER SPOT SIZE BASE PRESSURE 0,9 mm 2 5X10-8 mbar INVESTIGATE PLAD QE & LAYER PROTECTION LASER FLUENCE 10 J/cm 2 # SHOTS FOR Mg 3X10 4 # SHOTS FOR C 3X10 3 TARGET DISTANCE 4,5cm E extr =1MV/m 4mm 2 SPOT SIZE Mg FILM ON Si (100) SUBSTRATE DEPOSITED WITH He CONFINMENT 3X10-4 Mg THICKNESS 2,5 µm SAMPLE 2 SAME QE AS SPUTTERING He PRESSURE LASER SPOT SIZE LASER FLUENCE # SHOTS FOR Mg 5X10-2 mbar 0,9 mm 2 10 J/cm 2 5X10 4 TARGET DISTANCE 3,5cm SEM :AMORPHOUS STRUCTURE OF FILM WITH DROPLETS EDX :RESIDUAL C ON THE CLEANED AREA EMISSION UNIFORMITY OVER SURFACE QE>3X10-4
8 PLAD RESULTS SAMPLE 2 Mg FILM ON Si (100) SUBSTRATE DEPOSITED WITH He CONFINMENT STEP 1: CLEANING FIRST AREA [1mm 2 WITH 1200 SHOTS AT 1,25GW/cm 2 ] STEP 2: QE MEASURING ON FIRST AREA Mg THICKNESS He PRESSURE LASER SPOT SIZE LASER FLUENCE # SHOTS FOR Mg TARGET DISTANCE 2,5 µm 5X10-2 mbar 0,9 mm 2 10 J/cm 2 5X10 4 3,5cm STEP 3: STRONG CLEANING ON A SECOND AREA [0,5 mm 2 WITH 100 SHOTS AT 20GW/cm 2 ] -Final QE 2x10-5 -Poor as expected STEP 4: MEASURING QE DISTRIBUTION OVER THE SECOND AREA [9 SUB-AREAS OF 0,04 mm 2 ]
9 PLAD QE Uniformity AVG AVG.. QE QE 6,94E-5 6,94E-5 STD STD DEV DEV 0,864 0,864 (12%) (12%)
10 PLAD QE Uniformity 2nd AREA MIN QE 5,76X10-5 MAX QE 8,02X10-5 AVG AVG.. QE QE 6,94E-5 6,94E-5 STD STD DEV DEV 0,864 0,864 (12%) (12%)
11 PLAD SEM AMORPHOUS STRUCTURE WITH DROPLETS 1st AREA MIDDLE ZONE FORMING CRYSTALS LOW ENERGY CLEANING 2nd AREA GRID DIFFRACTION PATTERN HIGH ENERGY CLEANING CRYSTAL STRUCTURE HEXAGON SHAPE
12 CONCLUSIONS -PROTECTIVE LAYER WORKS BUT NOT NECESSARY WITH THICK FILMS -THICK FILMS ARE FEASIBLE. IMPROVEMENT IN COURSE -PROVEN QE = 3X10-4 IS SUFFICIENT BUT CAN BE IMPROVED
13 FUTURE PLANS IMPROVEMENT OF PLAD Mg DEPOSITION ON RF-GUN FLANGE ARC DEPOSITION INTEREST IN OTHER MATERIALS
Status of Research on Deposition of Superconducting Films for RF Accelerating Cavities
Status of Research on Deposition of Superconducting Films for RF Accelerating Cavities J. Langner, L. Catani*, A. Cianchi*, K. Czaus, R. Mirowski, R. Russo*, M.J. Sadowski, S. Tazzari*, F. Tazzioli***,
More informationPreparation and characterization of nanostructured thermoelectric materials
QuickTime et un décompresseur TIFF (non compressé) sont requis pour visionner cette image. Preparation and characterization of nanostructured thermoelectric materials Laboratoire de Physique des Matériaux,
More informationAvailable online at ScienceDirect. Materials Today: Proceedings 2 (2015 )
Available online at www.sciencedirect.com ScienceDirect Materials Today: Proceedings 2 (2015 ) 5582 5586 International Conference on Solid State Physics 2013 (ICSSP 13) Thickness dependent optimization
More informationProgress in Use of Ultra-High Vacuum Cathodic Arcs for Deposition of Thin Film Superconducting Layers
SRF Progress in Use of Ultra-High Vacuum Cathodic Arcs for Deposition of Thin Film Superconducting Layers J. Langner 1, M.J. Sadowski 1, P. Strzyzewski 1, R. Mirowski 1, J. Witkowski 1, S. Tazzari 2, L.
More informationGrowth Of TiO 2 Films By RF Magnetron Sputtering Studies On The Structural And Optical Properties
Journal of Multidisciplinary Engineering Science and Technology (JMEST) Growth Of TiO 2 Films By RF Magnetron Sputtering Studies On The Structural And Optical Properties Ahmed K. Abbas 1, Mohammed K. Khalaf
More informationSTRUCTURE AND MORPHOLOGY OF INDIUM NITRIDE THIN FILMS GROWN BY PLASMA ASSISTED PLD: THE IMPACT OF NITROGEN FLOW AND SUBSTRATE TEMPERATURE
Romanian Reports in Physics, Vol. 65, No. 1, P. 213 218, 2013 PLASMA PHYSICS STRUCTURE AND MORPHOLOGY OF INDIUM NITRIDE THIN FILMS GROWN BY PLASMA ASSISTED PLD: THE IMPACT OF NITROGEN FLOW AND SUBSTRATE
More informationALUMINIUM NITRIDE THIN FILMS GROWN BY PLASMA ASSISTED PULSED LASER DEPOSITION *
Romanian Reports in Physics, Vol. 66, No. 4, P. 1118 1124, 2014 ALUMINIUM NITRIDE THIN FILMS GROWN BY PLASMA ASSISTED PULSED LASER DEPOSITION * D.-M. MARIN 1, F. STOKKER-CHEREGI 2, M. DUMITRU 2, V. ION
More informationThe growth of patterned ceramic thin films from polymer precursor solutions Göbel, Ole
University of Groningen The growth of patterned ceramic thin films from polymer precursor solutions Göbel, Ole IMPORTANT NOTE: You are advised to consult the publisher's version (publisher's PDF) if you
More informationSTRUCTURE OF BULK AND THIN FILMS OF POLY-METHYL- METHACRYLATE (PMMA) POLYMER PREPARED BY PULSED LASER DEPOSITION
Journal of Optoelectronics and Advanced Materials Vol. 4, No. 4, December 22, p. 965-97 STRUCTURE OF BULK AND THIN FILMS OF POLY-METHYL- METHACRYLATE (PMMA) POLYMER PREPARED BY PULSED LASER DEPOSITION
More informationMICROFABRICATION OF OPTICALLY ACTIVE InO X MICROSTRUCTURES BY ULTRASHORT LASER PULSES
Journal of Optoelectronics and Advanced Materials Vol. 4, No. 3, September 2002, p. 809-812 MICROFABRICATION OF OPTICALLY ACTIVE InO X MICROSTRUCTURES BY ULTRASHORT LASER PULSES Foundation for Research
More informationSubstrate surface effect on the structure of cubic BN thin films from synchrotron-based X-ray diffraction and reflection
Substrate surface effect on the structure of cubic BN thin films from synchrotron-based X-ray diffraction and reflection X.M. Zhang, W. Wen, X.L.Li, X.T. Zhou published on Dec 2012 PHYS 570 Instructor
More informationThin Films: Sputtering Systems (Jaeger Ch 6 & Ruska Ch 7,) Can deposit any material on any substrate (in principal) Start with pumping down to high
Thin Films: Sputtering Systems (Jaeger Ch 6 & Ruska Ch 7,) Can deposit any material on any substrate (in principal) Start with pumping down to high vacuum ~10-7 torr Removes residual gases eg oxygen from
More informationIvan Bazarov Physics Department, Cornell University. Fundamental processes in III-V photocathodes; application for high-brightness photoinjectors
Ivan Bazarov Physics Department, Cornell University Fundamental processes in III-V photocathodes; application for high-brightness photoinjectors 07/21/09 I.V. Bazarov, III-V Photocathodes, ERL09 2 Contents
More informationVacuum deposition of TiN
J.Lorkiewicz DESY.27.10.02 Vacuum deposition of TiN (TiN coating of high power coupler elements as an anti-multipactor remedy at DESY) The scope of the project: - reducing secondary electron emission and
More informationThin Films: Sputtering Systems (Jaeger Ch 6 & Ruska Ch 7,) Sputtering: gas plasma transfers atoms from target to substrate Can deposit any material
Thin Films: Sputtering Systems (Jaeger Ch 6 & Ruska Ch 7,) Sputtering: gas plasma transfers atoms from target to substrate Can deposit any material on any substrate (in principal) Start with pumping down
More informationMODEL 1051 TEM Mill ION MILLING. Ion milling is used on physical science. specimens to reduce thickness to electron
MODEL 1051 TEM Mill A state-of-the-art ion milling and polishing system offering reliable, high performance specimen preparation. It is compact, precise, and consistently produces high-quality transmission
More informationJournal of Chemical and Pharmaceutical Research, 2017, 9(1): Research Article
Available online www.jocpr.com Journal of Chemical and Pharmaceutical Research, 2017, 9(1):163-167 Research Article ISSN : 0975-7384 CODEN(USA) : JCPRC5 Synthesis and Characterization of Carbon Nano Spheres
More informationLOW TEMPERATURE PHOTONIC SINTERING FOR PRINTED ELECTRONICS. Dr. Saad Ahmed XENON Corporation November 19, 2015
LOW TEMPERATURE PHOTONIC SINTERING FOR PRINTED ELECTRONICS Dr. Saad Ahmed XENON Corporation November 19, 2015 Topics Introduction to Pulsed Light Photonic sintering for Printed Electronics R&D Tools for
More informationCombinatorial RF Magnetron Sputtering for Rapid Materials Discovery: Methodology and Applications
Combinatorial RF Magnetron Sputtering for Rapid Materials Discovery: Methodology and Applications Philip D. Rack,, Jason D. Fowlkes, and Yuepeng Deng Department of Materials Science and Engineering University
More informationMetallization deposition and etching. Material mainly taken from Campbell, UCCS
Metallization deposition and etching Material mainly taken from Campbell, UCCS Application Metallization is back-end processing Metals used are aluminum and copper Mainly involves deposition and etching,
More informationEUV Source Supplier Update, Gigaphoton
EUV Source Supplier Update, Gigaphoton Hakaru Mizoguchi EUV Source Workshop 6 May, 2007 Baltimore, MD, USA Acknowledgments A part of this work was performed under the management of EUVA in the NEDO's R&D
More informationTransmission Mode Photocathodes Covering the Spectral Range
Transmission Mode Photocathodes Covering the Spectral Range 6/19/2002 New Developments in Photodetection 3 rd Beaune Conference June 17-21, 2002 Arlynn Smith, Keith Passmore, Roger Sillmon, Rudy Benz ITT
More informationConversion efficiency of 6.X nm Emitted from Nd:YAG and CO 2 Laser Produced Plasma
S29, Tuesday Morning Conversion efficiency of 6.X nm Emitted from Nd:YAG and CO 2 Laser Produced Plasma Shinsuke Fujioka 1 1 Institute of Laser Engineering, Osaka University!! H. Nishimura 1, M. Miyake
More informationDamage Threats and Response of Final Optics for Laser-Fusion Power Plants
Damage Threats and Response of Final Optics for Laser-Fusion Power Plants M. S. Tillack 1, S. A. Payne 2, N. M. Ghoniem 3, M. R. Zaghloul 1 and J. F. Latkowski 2 1 UC San Diego, La Jolla, CA 92093-0417
More informationHigh Power Gas Discharge and Laser Produced Plasma Sources for EUV Lithography
High Power Gas Discharge and Laser Produced Plasma Sources for EUV Lithography U. Stamm, I. Ahmad, I. Balogh, H. Birner, D. Bolshukhin, J. Brudermann, S. Enke, F. Flohrer, K. Gäbel, S. Götze, G. Hergenhan,
More informationRadiation Damage of Polycrystalline CVD Diamond with Graphite Electrical Contacts
Radiation Damage of Polycrystalline CVD Diamond with Graphite Electrical Contacts E. Alemanno 1,2, M. Martino 1,2, A.P. Caricato 1,2, M. Corrado 1,2, C. Pinto 1,2, S. Spagnolo 1,2, G. Chiodini 2, R. Perrino
More informationLecture 12. Physical Vapor Deposition: Evaporation and Sputtering Reading: Chapter 12. ECE Dr. Alan Doolittle
Lecture 12 Physical Vapor Deposition: Evaporation and Sputtering Reading: Chapter 12 Evaporation and Sputtering (Metalization) Evaporation For all devices, there is a need to go from semiconductor to metal.
More informationSpecimen Preparation Technique for a Microstructure Analysis Using the Focused Ion Beam Process
Specimen Preparation Technique for a Microstructure Analysis Using the Focused Ion Beam Process by Kozue Yabusaki * and Hirokazu Sasaki * In recent years the FIB technique has been widely used for specimen
More informationOptical Coatings. Photonics 4 Luxury Coatings , Genève. Dr. Andreas Bächli Head of Optical Coatings at RhySearch, Buchs (SG)
Optical Coatings Photonics 4 Luxury Coatings 21.06.2017, Genève Dr. Andreas Bächli Head of Optical Coatings at RhySearch, Buchs (SG) RhySearch The Research- and Innovation Center in the Rhine Valley RhySearch
More informationGrowth of Nd:YAG films by the pulsed laser deposition method
Surface and Coatings Technology 176 (2004) 385 390 Growth of Nd:YAG films by the pulsed laser deposition method a b, a c Slawomir { Kulesza, Roman T. Rumianowski *, Franciszek Rozploch {, Roman S. Dygdala
More informationII. NEG THIN FILM DEPOSITION
Deposition of Non-Evaporable Getter Thin Films and Vacuum Pumping Performances Ankit Sur Engineering Department, Wayne State University, Detroit, MI 48202 The ERL (Energy Recovery Linac) proposed at Cornell
More informationTransmission Kikuchi Diffraction in the Scanning Electron Microscope
Transmission Kikuchi Diffraction in the Scanning Electron Microscope Robert Keller, Roy Geiss, Katherine Rice National Institute of Standards and Technology Nanoscale Reliability Group Boulder, Colorado
More information3 Pulsed laser ablation and etching of fused silica
3 Pulsed laser ablation and etching of fused silica 17 3 Pulsed laser ablation and etching of fused silica Material erosion caused by short laser pulses takes place far from equilibrium and may be based
More informationExcimer Laser Annealing of Hydrogen Modulation Doped a-si Film
Materials Transactions, Vol. 48, No. 5 (27) pp. 975 to 979 #27 The Japan Institute of Metals Excimer Laser Annealing of Hydrogen Modulation Doped a-si Film Akira Heya 1, Naoto Matsuo 1, Tadashi Serikawa
More informationTransmission Electron Microscopy (TEM) Prof.Dr.Figen KAYA
Transmission Electron Microscopy (TEM) Prof.Dr.Figen KAYA Transmission Electron Microscope A transmission electron microscope, similar to a transmission light microscope, has the following components along
More informationLarge-Area Commercial Pulsed Laser Deposition
CHAPTER 9 Large-Area Commercial Pulsed Laser Deposition JIM GREER PVD Products, Wilmington, Massachusetts 9.1 INTRODUCTION It has been over a decade since the publication of Pulsed Laser Deposition of
More information12th International Workshop on RF Superconductivity. A.Frigo, G.Lanza, H.Padamsee, V.Palmieri, D.Tonini
12th International Workshop on RF Superconductivity A.Frigo, G.Lanza, H.Padamsee, V.Palmieri, D.Tonini CERN geometry C. Benvenuti, S. Calatroni, I.E. Campisi, P. Darriulat, M.A. Peck, R. Russo, A.-M. Valente,
More informationLONG-TERM SURVIVAL OF GRAZING-INCIDENCE METAL MIRRORS FOR LASER FUSION. M. S. Tillack and J. E. Pulsifer
LONG-TERM SURVIVAL OF GRAZING-INCIDENCE METAL MIRRORS FOR LASER FUSION M. S. Tillack and J. E. Pulsifer UC San Diego Center for Energy Research: 9500 Gilman Drive #0417, La Jolla, CA, 92093-0417, mtillack@ucsd.edu
More informationEnabling Technology in Thin Wafer Dicing
Enabling Technology in Thin Wafer Dicing Jeroen van Borkulo, Rogier Evertsen, Rene Hendriks, ALSI, platinawerf 2G, 6641TL Beuningen Netherlands Abstract Driven by IC packaging and performance requirements,
More informationProject III. 4: THIN FILM DEVICES FOR LARGE AREA ELECTRONICS
Project III. 4: THIN FILM DEVICES FOR LARGE AREA ELECTRONICS Project leader: Dr D.N. Kouvatsos Collaborating researchers from other projects: Dr D. Davazoglou Ph.D. candidates: M. Exarchos, L. Michalas
More informationTribological properties of diamond-like carbon films deposited by pulsed laser arc deposition
Vol 16 No 12, December 2007 c 2007 Chin. Phys. Soc. 1009-1963/2007/16(12)/3790-08 Chinese Physics and IOP Publishing Ltd Tribological properties of diamond-like carbon films deposited by pulsed laser arc
More informationCharacterization of laser-material interaction during laser cladding process P.-A. Vetter,* J. Fontaine,* T. Engel," L. Lagrange,& T.
Characterization of laser-material interaction during laser cladding process P.-A. Vetter,* J. Fontaine,* T. Engel," L. Lagrange,& T. Marchione^ f^, BID de /a rzcfozre ^7000 France ABSTRACT The interaction
More informationUnderstanding Optical Coatings For Military Applications
Understanding Optical Coatings For Military Applications By Trey Turner, Chief Technology Officer, REO Virtually all optical components used in military applications, such as target designation, rangefinding
More informationHiPIMS Technology: advantages and disadvantages
Vacuum plasma technology HiPIMS Technology: advantages and disadvantages Cr - DC Cr - HiPIMS Alessandro Patelli alessandro.patelli@venetonanotech.it Outline 1. What is HiPIMS Ti target surface 2. What
More informationAdvances in Intense Pulsed Light Solutions For Display Manufacturing. XENON Corporation Dr. Saad Ahmed Japan IDW 2016
Advances in Intense Pulsed Light Solutions For Display Manufacturing XENON Corporation Dr. Saad Ahmed Japan IDW 2016 Talk Outline Introduction to Pulsed Light Applications in Display UV Curing Applications
More informationAFM and AUGER investigations ofas-deposited and heat treated copper coatings on glassy carbon surfaces with titanium intermediate layers
Vacuum 71 (2003) 293 298 AFM and AUGER investigations ofas-deposited and heat treated copper coatings on glassy carbon surfaces with titanium intermediate layers E. Neubauer a,b, *, C. Eisenmenger-Sittner
More informationMODEL SEM Mill. Two independently adjustable TrueFocus ion sources
MODEL 1060 SEM Mill A state-of-the-art ion milling and polishing system. It is compact, precise, and consistently produces high-quality scanning electron microscopy (SEM) samples for a wide variety of
More information11.3 Polishing with Laser Radiation
196 E. Willenborg 11.3 Polishing with Laser Radiation Edgar Willenborg The surface roughness of a part or product strongly influences its properties and functions. Among these can be counted abrasion and
More informationCitation JOURNAL OF APPLIED PHYSICS (1995),
Title Copper nitride thin films prepared sputtering Author(s) MARUYAMA, T; MORISHITA, T Citation JOURNAL OF APPLIED PHYSICS (1995), Issue Date 1995-09-15 URL http://hdl.handle.net/2433/43537 Copyright
More informationThermal Evaporation. Theory
Thermal Evaporation Theory 1. Introduction Procedures for depositing films are a very important set of processes since all of the layers above the surface of the wafer must be deposited. We can classify
More informationThin film silicon technology. Cosimo Gerardi 3SUN R&D Tech. Coordinator
Thin film silicon technology Cosimo Gerardi 3SUN R&D Tech. Coordinator 1 Outline Why thin film Si? Advantages of Si thin film Si thin film vs. other thin film Hydrogenated amorphous silicon Energy gap
More informationManaging Anode Effects and Substrate Heating from Rotatable Sputter Targets
Managing Anode Effects and Substrate Heating from Rotatable Sputter Targets Frank Papa*, Dermot Monaghan**, Victor Bellido- González**, and Alex Azzopardi** *Gencoa Technical & Business Support in US,
More informationPLEASE SCROLL DOWN FOR ARTICLE. Full terms and conditions of use:
This article was downloaded by: [Universita' di Trento] On: 15 September 2010 Access details: Access Details: [subscription number 908206914] Publisher Taylor & Francis Informa Ltd Registered in England
More informationDEPOSITION OF Al 2 O 3 ON CERAMIC SUBSTRATES BY PECVD METHOD. Lucie Špirková a Vlastimil Brožek a Jean Durand b
DEPOSITION OF Al 2 O 3 ON CERAMIC SUBSTRATES BY PECVD METHOD Lucie Špirková a Vlastimil Brožek a Jean Durand b a) Institute of Chemical Technology, 166 28 Prague, Czech Republic b) Laboratoire des Matériaux
More informationHigh Efficiency Integrated Solar Energy Converter
High Efficiency Integrated Solar Energy Converter Research findings on photon enhanced thermionic emission SES2050 seminar 21.10. 22.10.2015, Oslo, Norway Aapo Varpula, Jyrki Tervo VTT Technical Research
More informationMINISTRY OF EDUCATION AND SCIENCE OF UKRAINE
MINISTRY OF EDUCATION AND SCIENCE OF UKRAINE National Technical University of Ukraine "Igor Sikorsky Kyiv Polytechnic Institute" Faculty of Physical Engineering Departments physics of metals 1 Student
More informationEQUIPMENT AND SYSTEM FOR VACUUM COATING METALLIZING, SPUTTERING, PLASMA and PECVD. Hybrid system KOLZER DGK 36
email : carlo.gennari@fastwebnet.it web site : http://carlogennariforni.beepworld.it/kolzer.htm EQUIPMENT AND SYSTEM FOR VACUUM COATING METALLIZING, SPUTTERING, PLASMA and PECVD Hybrid system KOLZER DGK
More informationCoatings. Ion Assisted Deposition (IAD) process Advance Plasma Source (APS) plasma-ion assisted Deposition. Coatings on Optical Fibers
Anti-Reflection Custom Ion Assisted Deposition (IAD) process Advance Plasma Source (APS) plasma-ion assisted Deposition Anti-Reflection on Optical Fibers OptoSigma supplies a wide selection of optical
More informationAtomic Oxygen-Resistant, Static-Dissipative, Pinhole-Free Coatings for Spacecraft
Physical Sciences Inc. VG10-109 Atomic Oxygen-Resistant, Static-Dissipative, Pinhole-Free Coatings for Spacecraft Michelle T. Schulberg, Robert H. Krech, Frederick S. Lauten Physical Sciences Inc. Roy
More informationHigh Resolution X-ray Diffraction
High Resolution X-ray Diffraction Nina Heinig with data from Dr. Zhihao Donovan Chen, Panalytical and slides from Colorado State University Outline Watlab s new tool: Panalytical MRD system Techniques:
More informationPlasma Activated EB-PVD of Titanium and its Compounds by Means of Large Area SAD
AIMCAL 2005 Myrtle Beach, SC, USA, October 19th, 2005 Plasma Activated EB-PVD of Titanium and its Compounds by Means of Large Area SAD E. Reinhold, C. Steuer VON ARDENNE Anlagentechnik GmbH, Dresden, Germany
More informationLecture Day 2 Deposition
Deposition Lecture Day 2 Deposition PVD - Physical Vapor Deposition E-beam Evaporation Thermal Evaporation (wire feed vs boat) Sputtering CVD - Chemical Vapor Deposition PECVD LPCVD MVD ALD MBE Plating
More informationLow Divergence atomic beam using laser ablation of thin film
Low Divergence atomic beam using laser ablation of thin film Kamlesh Alti, Susanta Das, Bulumani Kalita, Pratima Agarwal and Alika Khare* Department of Physics Indian Institute of Technology Guwahati,
More informationMaterials Characterization
Materials Characterization C. R. Abernathy, B. Gila, K. Jones Cathodoluminescence (CL) system FEI Nova NanoSEM (FEG source) with: EDAX Apollo silicon drift detector (TE cooled) Gatan MonoCL3+ FEI SEM arrived
More informationNovel Solutions for ESD Sensitive Devices
Novel Solutions for ESD Sensitive Devices Chris Schreiber Magnecomp cschreiber@magnecomp.com Safely Dissipating ESD Problem Static Charging is created by either Tribocharging or Induction and the uncontrolled
More informationEXCIMER LASER ANNEALING FOR LOW- TEMPERATURE POLYSILICON THIN FILM TRANSISTOR FABRICATION ON PLASTIC SUBSTRATES
EXCIMER LASER ANNEALING FOR LOW- TEMPERATURE POLYSILICON THIN FILM TRANSISTOR FABRICATION ON PLASTIC SUBSTRATES G. Fortunato, A. Pecora, L. Maiolo, M. Cuscunà, D. Simeone, A. Minotti, and L. Mariucci CNR-IMM,
More informationR&D ACTIVITIES AT ASSCP-BHEL,GURGAON IN SOLAR PV. DST-EPSRC Workshop on Solar Energy Research
R&D ACTIVITIES AT -BHEL,GURGAON IN SOLAR PV at the DST-EPSRC Workshop on Solar Energy Research (22 nd 23 rd April, 2009) by Dr.R.K. Bhogra, Addl. General Manager & Head Email: cpdrkb@bhel.co.in Dr.A.K.
More informationImprovement of Laser Fuse Processing of Fine Pitch Link Structures for Advanced Memory Designs
Improvement of Laser Fuse Processing of Fine Pitch Link Structures for Advanced Memory Designs Joohan Lee, Joseph J. Griffiths, and James Cordingley GSI Group Inc. 60 Fordham Rd. Wilmington, MA 01887 jlee@gsig.com
More informationPractical 2P8 Transmission Electron Microscopy
Practical 2P8 Transmission Electron Microscopy Originators: Dr. N.P. Young and Prof. J. M. Titchmarsh What you should learn from this practical Science This practical ties-in with the lecture course on
More informationTransactions on Engineering Sciences vol 2, 1993 WIT Press, ISSN
A study of thin-film continuous coating process by vapour deposition P. Gimondo," F. Arezzo,* B. Grifoni,* G. Jasch& "Centra Sviluppo Materiali SpA, Via di Castel & Von Ardenne Anlagentchnik GmbH, Plattleite
More informationJEOL JXA-8200 Superprobe
JEOL JXA-8200 Superprobe Electron gun Liq N 2 for EDS Electron gun Condenser lens Optical Microscope Optical Microscope EDS WDS SE Liq N 2 EDS BSE Objective lens WDS Sample exchange chamber Stage High
More informationIntroduction to Electron Backscattered Diffraction. TEQIP Workshop HREXRD Feb 1 st to Feb 5 th 2016
Introduction to Electron Backscattered Diffraction 1 TEQIP Workshop HREXRD Feb 1 st to Feb 5 th 2016 SE vs BSE 2 Ranges and interaction volumes 3 (1-2 m) http://www4.nau.edu/microanalysis/microprobe/interact-effects.html
More informationMODEL TEM Mill. Two independently adjustable TrueFocus ion sources
MODEL 1050 TEM Mill A state-of-the-art ion milling and polishing system. It is compact, precise, and consistently produces high-quality transmission electron microscopy (TEM) specimens with large electron
More informationSUPPLEMENTARY INFORMATION
In the format provided by the authors and unedited. ARTICLE NUMBER: 16178 DOI: 10.1038/NENERGY.2016.178 Enhanced Stability and Efficiency in Hole-Transport Layer Free CsSnI3 Perovskite Photovoltaics Supplementary
More informationEFFECT OF OPERATING TEMPERATURE ON STRUCTURE PROPERTIES OF TIC X NANOPARTICLE COATING APPLIED BY PACVD
2nd International Conference on Ultrafine Grained & Nanostructured Materials (UFGNSM) International Journal of Modern Physics: Conference Series Vol. 5 (2012) 728 736 World Scientific Publishing Company
More informationStudy on Properties of Silicon Oxycarbide Thin Films Prepared by RF Magnetron Sputtering Tao Chen a, Maojin Dong, Jizhou Wang,Ling Zhang and Chen Li
Study on Properties of Silicon Oxycarbide Thin Films Prepared by RF Magnetron Sputtering Tao Chen a, Maojin Dong, Jizhou Wang,Ling Zhang and Chen Li Science and Technology on Surface Engineering Laboratory,
More informationThin Films & AR Coated. Viewports. Thin Film & AR Coated. Viewports
Thin Films & AR Item Page Thin Film Coatings Introduction P 02 Kodial Zero Length with Anti-Reflective Coatings P 04 Kodial Zero Length with Anti-Reflective Coatings-Non-Magnetic P 07 Kodial Zero Length
More informationDynamics of Laser Ablation for Thin Film Growth by Pulsed Laser DeDosition
Note: This is a preprint of paper being submitted for publication. Contents of this paper should not be quoted nor referred to without permission ot the author(s). Dynamics of Laser Ablation for Thin Film
More informationEBSD Basics EBSD. Marco Cantoni 021/ Centre Interdisciplinaire de Microscopie Electronique CIME. Phosphor Screen. Pole piece.
EBSD Marco Cantoni 021/693.48.16 Centre Interdisciplinaire de Microscopie Electronique CIME EBSD Basics Quantitative, general microstructural characterization in the SEM Orientation measurements, phase
More informationSupporting Information. Low temperature synthesis of silicon carbide nanomaterials using
Supporting Information Low temperature synthesis of silicon carbide nanomaterials using solid-state method Mita Dasog, Larissa F. Smith, Tapas K. Purkait and Jonathan G. C. Veinot * Department of Chemistry,
More informationFrom Vacuum to Atmosphere and back an in-house Process Chain for Different Products
From Vacuum to Atmosphere and back an in-house Process Chain for Different Products Dr. Steffen Günther Vacuum coating low pressure 10-1 10-4 Pa (10-3 10-6 mbar) unhindered particle movement no unintended
More informationYttrium iron garnet surface modification during pulsed laser ablation deposition
Materials Science-Poland, Vol. 22, No. 2, 2004 Yttrium iron garnet surface modification during pulsed laser ablation deposition NOOR BAA YAH IBRAHIM 1*, CHRIS EDWARDS 2, STUART B. PALMER 2 1 PPFG, Fakulti
More informationFrom Eye to Insight. Leica EM ACE. Coater Family
From Eye to Insight Leica EM ACE Coater Family EM ACE COATERS A Coater Family to cover all your needs. Developed in cooperation with leading scientists, the EM ACE coaters cover all the requirements for
More informationSputtered Zinc Oxide Films for Silicon Thin Film Solar Cells: Material Properties and Surface Texture
Poster FVS Workshop 2002 Sputtered Zinc Oxide Films for Silicon Thin Film Solar Cells: Material Properties and Surface Texture Texture etching of sputtered ZnO:Al films has opened up a variety of possibilities
More informationSimple method for formation of nanometer scale holes in membranes. E. O. Lawrence Berkeley National Laboratory, Berkeley, CA 94720
Simple method for formation of nanometer scale holes in membranes T. Schenkel 1, E. A. Stach, V. Radmilovic, S.-J. Park, and A. Persaud E. O. Lawrence Berkeley National Laboratory, Berkeley, CA 94720 When
More informationLOT. Contents. Introduction to Thin Film Technology. Chair of Surface and Materials Technology
Introduction to Thin Film Contents 1. Introduction and Application Examples (2h) 2. Preparation of Thin Films by PVD (Physical Vapor Deposition) (6h) 2.1 Vacuum Technique (1h) 2.1.1 Kinetics of Gases 2.1.2
More informationaverage diameter = 3 nm, from PlasmaChem) was mixed in NLCs to produce QDembedded
Electronic Supplementary Material (ESI) for RSC Advances. This journal is The Royal Society of Chemistry 2014 Supporting information Experimental Section The blended CLC-monomer materials used to fabricate
More informationOptical and Electrical Characterization of CuO Thin Films as Absorber Material for Solar Cell Applications
American Journal of Condensed Matter Physics 16, 6(1): 1-6 DOI: 1.5923/j.ajcmp.11.1 Optical and Electrical Characterization of CuO Thin Films as Absorber Material for Solar Cell Applications K. S. Wanjala
More informationIn-process Monitoring and Adaptive Control for Laser Spot and Seam Welding of Pure Titanium
In-process Monitoring and Adaptive Control for Laser Spot and Seam Welding of Pure Titanium Yousuke KAWAHITO*, Masayuki KITO* and Seiji KATAYAMA* * Osaka University, Joining and Welding Research Institute
More informationSEMATECH Symposium Korea 2012 Practical Analysis Techniques of Nanostructured Semiconductors by Electron Microscopy
SEMATECH Symposium Korea 2012 Practical Analysis Techniques of Nanostructured Semiconductors by Electron Microscopy Jun-Mo Yang, Ph.D. Measurement & Analysis Team National NanoFab Center, Korea Introduction
More informationMODEL PicoMill TEM specimen preparation system. Achieve ultimate specimen quality free from amorphous and implanted layers
MODEL 1080 PicoMill TEM specimen preparation system Combines an ultra-low energy, inert gas ion source, and a scanning electron column with multiple detectors to yield optimal TEM specimens. POST-FIB PROCESSING
More informationHigh Throughput Laser Processing of Guide Plates for Vertical Probe Cards Rouzbeh Sarrafi, Dana Sercel, Sean Dennigan, Joshua Stearns, Marco Mendes
High Throughput Laser Processing of Guide Plates for Vertical Probe Cards Rouzbeh Sarrafi, Dana Sercel, Sean Dennigan, Joshua Stearns, Marco Mendes IPG Photonics - Microsystems Division Outline Introduction
More informationNanocrystalline structure and Mechanical Properties of Vapor Quenched Al-Zr-Fe Alloy Sheets Prepared by Electron-Beam Deposition
Materials Transactions, Vol. 44, No. 10 (2003) pp. 1948 to 1954 Special Issue on Nano-Hetero Structures in Advanced Metallic Materials #2003 The Japan Institute of Metals Nanocrystalline structure and
More informationEFFICIENCY AND PRODUCTIVITY INCREASE OF SOLAR-CELLS AND -MODULES BY INNOVATIVE LASER APPROACHES
EFFICIENCY AND PRODUCTIVITY INCREASE OF SOLAR-CELLS AND -MODULES BY INNOVATIVE LASER APPROACHES PD Dr. Alexander Horn, V. Schütz, J. Gonzalez, C.C. Kalmbach Photovoltaics Group Dpt. for Production and
More informationVisualization and Control of Particulate Contamination Phenomena in a Plasma Enhanced CVD Reactor
Visualization and Control of Particulate Contamination Phenomena in a Plasma Enhanced CVD Reactor Manabu Shimada, 1 Kikuo Okuyama, 1 Yutaka Hayashi, 1 Heru Setyawan, 2 and Nobuki Kashihara 2 1 Department
More informationSYNOPSIS OF A THESIS. to be submitted by A. KARUPPASAMY. for the award of the degree DOCTOR OF PHILOSOPHY
SYNOPSIS OF STUDIES ON THE PHYSICAL PROPERTIES AND ELECTROCHROMIC PERFORMANCE OF PURE AND TITANIUM DOPED TUNGSTEN OXIDE THIN FILMS PREPARED BY DC MAGNETRON SPUTTERING A THESIS to be submitted by A. KARUPPASAMY
More informationIn-situ Heating Characterisation Using EBSD
Webinar In-situ Heating Characterisation Using EBSD Speakers Dr. Ali Gholinia Dr. Neil Othen Dr. Jenny Goulden Topics Introduction to EBSD Why do in-situ experiments? EBSD equipment requirements for in-situ
More information6.8 Magnetic in-plane anisotropy of epitaxially grown Fe-films on vicinal Ag(001) and Au(001) with different miscut orientations
C. Epitaxial Growth 6.8 Magnetic in-plane anisotropy of epitaxially grown Fe-films on vicinal Ag(001) and Au(001) with different miscut orientations M. Rickart, A.R. Frank, J. Jorzick, Ch. Krämer, S.O.
More informationFabrication of Ru/Bi 4-x La x Ti 3 O 12 /Ru Ferroelectric Capacitor Structure Using a Ru Film Deposited by Metalorganic Chemical Vapor Deposition
Mat. Res. Soc. Symp. Proc. Vol. 784 2004 Materials Research Society C7.7.1 Fabrication of Ru/Bi 4-x La x Ti 3 O 12 /Ru Ferroelectric Capacitor Structure Using a Ru Film Deposited by Metalorganic Chemical
More information