Integrated Plasma Inc.

Transcription

1 Integrated Plasma Inc. IPI Local Scrubber IPI develops, manufactures and sells equipments and materials for the Industries of Semiconductor/Solar/LCD/LED. The Most Quality and Professional Scrubber Maker you can trust in Waste Gases Treatment and Environmental Protection Field. Integrated Plasma Inc. Since1990 Headquarters: No.8,alley13,Lane411,Chung-Hua Rd.,Hsin-Chu City300,Taiwan Tel: Fax: tbc.com.tw

2 Company profile IPI Environmental Expert, a professional local scrubbers manufacturer was established in 1990.IPI is a company that specialises in environmental technology. IPI develops,produces,sells,services environmental preservation equipment (air pollution control equipment), as well as solutions for the treatment and recycling of harmful gases, with the motto,keep our Environment Clean- Recycle Energy. IPI is a venture company that was founded 22 years ago.it is our credo to manufacture equipment to abate hazardous gases resulting from Semiconductor LSI,LCD,LED and Solar Photo Voltaic industries,as well as greenhouse gases and VOC emissions.

3 Company profile IPI is the first self-owned brand and have a number of patents company engaged in the manufacture of semiconductor local scrubber. The Law Concerning the Promotion of Measures to Cope with Global Warming, legislated under the Kyoto Protocol,was revised to enhance the effectiveness of environmental protection.this movement promoted restraint in the use of fossil fuels which leads ultimately to CO2 emissions and the culmination of artificial greenhouse gases(pfc,hfc,sf6). In addition,the Pollution Control Act was revised to promote restraint in the use of VOC(Volatile Organic Compound)emissions,which is the cause of photochemicals oxidants.ipi is intent on being part of the solution.

4 Company profile Company's capital amounted to NT$200 million, R & D team has 10 people led by President Mr. Wu Zongxue. R & D team of IPI works together with Industrial Technology Research Institute led by R.O.C Government to develop a wide range of local scrubber models for different processes of Semiconductor/Solar/LCD/LED. Mr.Wu, President of IPI constantly emphasis on growth is relying on constant innovation: Innovation is not just product innovation,but also employee ideas, management systems and manufacturing process innovation.

5 Company profile IPI won the 100th the Industrial Technology Award of Ministry of Economic Affairs for research and innovation with excellent results of anniversary of the founding of Republic of China exclusively. IPI won the National Invention Award. IPI won the Ministry of Economic Affairs Industrial Development Bureau of domestic environmental protection equipment, excellent quality award. IPI won first prize of the domestic sales volume of local scrubbers within these five years The technical capability of IPI local scrubber has reached international level.

6 Company profile IPI is the only one company that has the longterm cooperation relationship with ITRI(Industrial Technology Research Institute),INR(Institute of Nuclear Energy Research ) and the other government-related research institutes to improve environmental protection technology and waste gas treatment technology. IPI is the only one company designated to develop PLASMA and other related environmental technologies by the Industrial Development Center of Industrial Development Bureau of R.O.C.and TSMC(Taiwan Semiconductor Manufacturing Co.),and works together to make a contribution to environmental protection.

7 Company profile For IPI, safety and environmental protection are the foundation of our business. The company's eco-friendly sorbent technology safely removes hazardous waste gases without consumption of energy, water or fuel.there are no secondary emissions to the environment in the form of waste water or NOx. Moreover, all of our products are designed for lifetime serviceability and re-use.

8 Company profile IPI meets stringent environmental standards, is committed to meet the needs of various industries of semiconductor solar LED TFT-LCDs fuel cells micro-electromechanical,has a good performance in the production of scrubbers, has over 22 years of research and development production sales and services experiences,is a reliable partner of your company in the exhaust gas treatment.taiwan is the largest production area of semiconductor in the world,ipi is the largest scrubber manufacturer and supplier in Taiwan, which proves that the customers trust in IPI products and services.ipi has the highest market share in the local scrubber field in Taiwan.

9 Company profile According to market research firm IC Insights reports that Taiwan semiconductor monthly production capacity of 2,858,300 8-inch wafer scale is accounting for 21% of global wafer production capacity, surpassing Japan's 19.7%, South Korea 16.8%, mainland China 8.9%, Europe 8.1%. IPI is the largest Scrubber manufacturer in Taiwan and make an effort to become No.1 Scrubber supplier in the World. IPI continues to meet customer needs as the goal, continues to develop new products and technologies to meet customer process and demand. IPI is a research-based company. All of our products including chemical adsorbent particles, from concept to finished product stage through testing, are self-developed.

10 Company profile IPI has a strong R & D team in Taiwan,cooperates with the Industrial Development Bureau, Industrial Technology Research Institute,Institute of Nuclear Energy Research,National Chiao Tung University, National Tsing Hua University and the world's largest semiconductor company,works together with doctor groups and experts to engage in research and development.ipi will become the No.1 scrubbers supplier in the world in the near future.

11 Company profile Having the President get the master of nuclear engineering department of National Tsing Hua University,the manager of electrical engineering get the master of famous national university,the manager of mechanical engineering graduated from National Taiwan University of Science and Technology, the manager of chemical engineering graduated from National Taipei University of Science and Technology,the Vice President studing DBA courses of the United States Preston University and get the EMBA of National Taiwan University of Science and Technology and MBA of National Chiao Tung University, the sales manager graduated from National Chiao Tung University and very excellent employees, all are great helpful for for research and development, supply chain management of IPI.

12 Company profile IPI is an R&D based company, supported by an international team of chemists, physicists and engineers, bringing with them many years of experience in materials handling and engineering. All of our products are developed in-house from the conception to the tested finished product stage. IPI can develop any customized design products or functions within a very short time,much earlier than the other companies. IPI can provide superior performance and excellent quality products to the customers within the expected delivery time, and work together the customer to reduce transportation costs and maintenance costs.

13 Company profile IPI operates the company by Toyota way and runs very efficiently and effectively.ipi is the only one professional local scrubber maker to do CNC lathe machining, CNC milling machining, welding, surface treatment, plastic box welding, electrical and electronic parts production and assembly, processing and assembly of piping, pharmacy production, assembly and testing of scrubbers in Taiwan.In order to ensure safety, reliability and ease of operation, key components are designed to meet the requirements of high-class scrubbers. IPI can be flexible, rapid, JIT to supply the customer scrubbers, delivery is superior to domestic and foreign suppliers.

14 Company profile IPI supply 24 hours on-call services much better than domestic and foreign peers in Taiwan. With regular maintenance and recovery of defects that are critical for functional maintenance of abatement system, IPI provides system performance with high abatement efficiency. The skilled engineering team of IPI takes a responsibility and provides prompt reliability on safety, stability and quality maintenance.

15 Company profile In order to maintain the abatement system s function and characteristics for long periods, it is required that you detect potential trouble early and to repair it by daily checks and regular maintenance. IPI provides preventive services to support a clean environment on customer s site through regular maintenance of abatement systems and handling any trouble or failure quickly and appropriately. To support a clean environment, IPI provides the following three services: Assured maintenance skills to keep our abatement systems reliable Prompt technical correspondence in times of trouble Specialist training support

16 Company profile With more than 22 years of experience serving the semiconductor industry, IPI is your reliable partner for exhaust gas abatement. More than 2,000 installations worldwide testify to customer confidence in IPI unique products and services. We continue to extend our competence to support developing markets such as the solar industry and photovoltaics as well as MEMS. The key elements which guarantee safety, reliability and ease of handling have been purpose-designed to meet the demands of tomorrow's advanced materials.

17 Company profile With the increasing emphasis on operating costs, the process technologies and precursor materials used for chip manufacture continue to diversify against the background of a maturing, globalized industry with increased emphasis on Cost-of-Ownership. At the same time, growing environmental awareness is demanding more efficient usage of materials and a reduction in factory emissions. The innovative product design and high quality manufacturing process of IPI has earned an excellent reputation.proud of our reputation for innovative product design and high-quality engineering, IPI is best prepared and fully committed to solving these exciting new challenges.we look forward to serving you tailor-made solutions to meet your needs in the years ahead. Hand in hand with you to strive for perfection.

18 Company profile IPI All models are certified by the SEMI-S2 safety certification, OHSAS18001 occupational health and safety management system,and ISO 9000 quality certification, Customers throughout the well-known companies of science parks in Taiwan, mainland China, Southeast Asia,etc. Company Name:Integrated Plasma Inc. Estabilished: 1990 Chairman: Mr.Wu Tsong-Hsueh President: Mr.Wu Tsong-Hsueh Number of employees:100 Capital: NT $ 200 million

19 Motto (1) R & D and innovation: Actively involved in research and development, and achievements converted to good product to provide customers a full range of products choices, to meet customer s needs, to meet challenge of the competitive market,to take the global field No.1 as the goal. (2) The quality is supreme: :Strictly control the product quality by TQC (Total Quality Management)and strive to Zero-Defect quality. Steadfast steady and honest management to provides the customer first-class product and service is the only goal.

20 Motto (3) Team cooperation: Righteousness Honesty Diligence Thriftiness, striving for perfection. The company s profit is created by the team results. Continually enhance all-round management potency.improve organizational functions, speed efficiency effectiveness flexibility to improve the effective use of resources, to achieve the enterprise and employees win-win state. (4)The courage to break: To become the leading international environmental protection equipment manufacturers as the goal.not self-limited,but active and effective marketing.efficient global logistics to create infinite.

21 Competitive advantages Own brand of high-quality marketing team strategic marketing g semiconductor solar LCD / LED industrial layout High-quality R & D team of the Nuclear Mechanical Electrical Chemica quality production human&technology & service levels l integration of the Toyota-Way elastic and speedy production Fully meet customer demand for process integrity of the prod The pursuit of Zero-Defect in Total Quality Manage rmance manufacturers and leading research institutions and universities cooperation mode

22 Win-Win strategy Service Professional Innovation Responsibility Cooperative rule 1. Full range of equipment integrated services 2. Lower parts and customer operating costs (such as Idle Mode of water-saving,resource saving and PM cycle longer than other companies) 3. Central control system CMS service (such as the Interlock of safety chain) Control 1. Self-develop exhaust gas processing platform and technology 2. Own brand marketing 3. Effectively control the depletion of consumable/non-consumable components 4. Professional maintenance service team Processing efficiency Low-cost consuming High-tech services

23 Wet-Thermal-Wet Type SGA-310A Abatement Type Scrubber Type Dimensions (mm) Weight (kg) Capacity (LPM) Temperature (For Processing Gas) Max. No. of Inlet ports Inlet Port Type option Outlet Port Type SGA-310A Wet-Thermal-Wet 970W x 930D x 1850H ºC Up to 4 ISO80 (NW50 or KF80 Option) 1 x ISO100

24 Wet-Thermal-Wet Type SGA-310A Application & DRE:Target abatement gas 1.Flammable gases : SiH4>99%, PH3 >99%, SiH2Cl2>99%, TEOS>99%, GeH4>99% H2, DCS, etc 2.Water soluble gases : Cl2, HCl>99%, HF>99%, NH3 >99%, etc 3.PFCs : NF3 >95% 4. Toxic gases: B2H6>99% SiH2Cl2>99% TEOS>99% WF6>99% GeH4>99% TEPO>99% TEB>99% TMA>99% N2O Process: Solar Thin Film Etching Diffusion

25 Wet-Thermal-Wet Type SGA-310A Advantage: Electric heater type gas abatement system. Perfect abatement efficiency for flammable &water soluble gases Minimizing moisture vapor exhaust (Apply dry system) Excellent safety interlock system Longer maintains cycle.simple operation and easy maintenance time. Relatively lower operation cost(heater easy to PM) High corrosion resistance structure (Teflon coating lining) SEMI-S2 certified It is suitable for PFC abatement for CVD process,etc.., specially for NF3 Per Herter function to improve process efficiency Π type chamber design, improve waste gas retention time

26 Wet-Thermal-Wet Type SGA-310A Due to front and back scrubber, handles gas efficiently.watersoluble, hydrolysable gas and power dust are handled by front and back scrubber. Efficient decomposition of dangerous and toxic gas by thermal oxidation. We use electric heaters for thermal oxidizing decomposition. It is safe and secure. Safe and compact design. This series is safely designed for malfunction and safety warnings. It has a compact design for the front and back scrubbers, reactor and other necessary functions. Low running cost. Uses only electricity and water, therefore it is easy to manage, making it possible to reduce running cost dramatically. Environmental friendly. Does not use fossil fuel, therefore there is no CO2 emission and thermal energy waste. It is an environmentaly friedly machine. Install anywhere, including a clean room.

27 Wet-Thermal-Wet Type SGA-310A Suitable for handling deposition gas with a comparably low decomposition temperature. IPI series standard model:auto purifying function is a standard feature.easy maintenance

28 Wet-Thermal-Wet Type SGA-310B Abatement Type Scrubber Type Dimensions (mm) Weight (kg) Capacity (LPM) Temperature (For Processing Gas) Max. No. of Inlet ports Inlet Port Type option Outlet Port Type SGA-310B Wet-Thermal-Wet 1100W x 1100D x 1850H ºC Up to 4 ISO80 (NW50 or KF80 Option) 1 x ISO100

29 Wet-Thermal-Wet Type SGA-310B Application & DRE:Target abatement gas 1.Flammable gases : SiH4>99%, PH3 >99%, SiH2Cl2>99%, TEOS>99%, GeH4>99% H2, DCS, etc 2.Water soluble gases : Cl2, HCl>99%, HF>99%, NH3 >99%, etc 3.PFCs : NF3 >95% 4. Toxic gases: B2H6>99% SiH2Cl2>99% TEOS>99% WF6>99% GeH4>99% TEPO>99% TEB>99% TMA>99% N2O Process: Solar Thin Film Etching Diffusion

30 Wet-Thermal-Wet Type SGA-310B Advantage: Electric heater type gas abatement system. Perfect abatement efficiency for flammable &water soluble gases Minimizing moisture vapor exhaust (Apply dry system) Excellent safety interlock system Longer maintains cycle.simple operation and easy maintenance time. Relatively lower operation cost(heater easy to PM) High corrosion resistance structure (Teflon coating lining) SEMI-S2 certified It is suitable for PFC abatement for CVD process,etc.., specially for NF3 Per Herter function to improve process efficiency Π type chamber design, improve waste gas retention time

31 Wet-Thermal-Wet Type SGA-310B Due to front and back scrubber, handles gas efficiently Water-soluble, hydrolysable gas and power dust are handled by front and back scrubber. Efficient decomposition of dangerous and toxic gas by thermal oxidation We use electric heaters for thermal oxidizing decomposition. It is safe and secure. Safe and compact design This series is safely designed for malfunction and safety warnings. It has a compact design for the front and back scrubbers, reactor and other necessary functions. Low running cost Uses only electricity and water, therefore it is easy to manage, making it possible to reduce running cost dramatically. Environmental friendly Does not use fossil fuel, therefore there is no CO2 emission and thermal energy waste. It is an environmentaly friedly machine. Install anywhere, including a clean room

32 Wet-Thermal-Wet Type SGA-310B Suitable for handling deposition gas with a comparably low decomposition temperature. IPI series standard model:auto purifying function is a standard feature.easy maintenance *SGA-310BH:HDP Etch(CPVC+SUS for Inlet Tank)(OPTION)

33 Wet-Thermal-Wet Type SGA-310BS Abatement Type Scrubber Type Dimensions (mm) Weight (kg) Capacity (LPM) Temperature (For Processing Gas) Max. No. of Inlet ports Inlet Port Type option Outlet Port Type SGA-310BS Wet-Thermal-Wet 950W x 950D x 1850H ~850ºC Up to 4 ISO80 (NW50 or KF80 Option) 1 x ISO100

34 Wet-Thermal-Wet Type SGA-310BS Application & DRE:Target abatement gas 1.Flammable gases : SiH4>99%, PH3 >99%, SiH2Cl2>99%, TEOS>99%, GeH4>99% H2, DCS, etc 2.Water soluble gases : Cl2, HCl>99%, HF>99%, NH3 >99%, etc 3.PFCs : NF3 >95% 4. Toxic gases: B2H6>99% SiH2Cl2>99% TEOS>99% WF6>99% GeH4>99% TEPO>99% TEB>99% TMA>99% N2O Process: Solar Thin Film Etching Diffusion

35 Wet-Thermal-Wet Type SGA-310BS Advantage: Electric heater type gas abatement system. Perfect abatement efficiency for flammable &water soluble gases Minimizing moisture vapor exhaust (Apply dry system) Excellent safety interlock system Longer maintains cycle.simple operation and easy maintenance time. Relatively lower operation cost(heater easy to PM) High corrosion resistance structure (Teflon coating lining) SEMI-S2 certified It is suitable for PFC abatement for CVD process,etc.., specially for NF3 Per Herter function to improve process efficiency Π type chamber design, improve waste gas retention time

36 Wet-Thermal-Wet Type SGA-310BS Due to front and back scrubber, handles gas efficiently Water-soluble, hydrolysable gas and power dust are handled by front and back scrubber. Efficient decomposition of dangerous and toxic gas by thermal oxidation We use electric heaters for thermal oxidizing decomposition. It is safe and secure. Safe and compact design This series is safely designed for malfunction and safety warnings. It has a compact design for the front and back scrubbers, reactor and other necessary functions. Low running cost Uses only electricity and water, therefore it is easy to manage, making it possible to reduce running cost dramatically. Environmental friendly Does not use fossil fuel, therefore there is no CO2 emission and thermal energy waste. It is an environmentaly friedly machine. Install anywhere, including a clean room

37 Wet-Thermal-Wet Type SGA-310BS Suitable for handling deposition gas with a comparably low decomposition temperature. IPI series standard model:auto purifying function is a standard feature.easy maintenance

38 Burn type of ECS-3000B Abatement Type Scrubber Type Dimensions (mm) Weight (kg) Capacity (LPM) Temperature (For Processing Gas) Max. No. of Inlet ports Inlet Port Type option Outlet Port Type ECS-3000B Burn-Wet 1000W x 850D x 1965H ºC(Up to 1400ºC) Up to 8 NW50 1 x ISO100

39 Burn type of ECS-3000B Application & DRE:Target abatement gas 1. PFCs : NF3>99%, C2F6>95%, SF6>95%, CF4>90%, C3F8>95%, etc 2. Flammable gases : SiH4>99%, PH3>99%, TEOS>99%, H2>99%, DCS, etc 3. Water soluble gases : Cl2, HCl>99%, HF, NH3, etc 4. Toxic gases: B2H6>99% WF6>99% TEPO>99% C4F8>95% TEB>99% Process: Solar Thin Film Etching Diffusion

40 Burn type of ECS-3000B Advantage: High abatement efficiency for PFC gases Strong recommendation for CVD : good treatment for powder Safety interlocks included flow, temperature, pressure, and leak sensors Special cooling design to prevent powder accumulation Excellent safety interlock system Relatively lower operation cost Simple operation and easy maintenance The advantage of powder trap could be 5um below High anti-corrosion design SEMI-S2 certified Directly handles gas with the combustion method. It has an efficient and compact design.

41 Burn type of ECS-3000B Almost all of the solvent can be handled Easy maintenance and management Equipped with wide range of exhaust heat recovery systems Due to a highly efficient and longer lasting catalyst, this saves energy. Low running cost No worries about secondary pollution Easy operation Equipped with wide range of exhaust heat recovery systems ECS-3000BG:Burn+Catalyst Direct combustion deodorizer No aged deterioration for deodorizing efficiency Handles gas with low-temperature combustion method using a catalyst. Catalyst is high efficiency and has a longer operating life *Capacity 300~6000LPM is available for customized design.

42 Burn type of ECS-3000L Abatement Type Scrubber Type Dimensions (mm) Weight (kg) Capacity (LPM) Temperature (For Processing Gas) Max. No. of Inlet ports Inlet Port Type option Outlet Port Type ECS-3000L Burn-Wet 2100Wx1500Dx2005H ºC(Up to 1400ºC) Up to 8 NW50 1 x ISO100

43 Burn type of ECS-3000L Application & DRE:Target abatement gas 1. PFCs : NF3>99%, C2F6>95%, SF6>95%, CF4>90%, C3F8>95%, etc 2. Flammable gases : SiH4>99%, PH3>99%, TEOS>99%, H2>99%, DCS, etc 3. Water soluble gases : Cl2, HCl>99%, HF, NH3, etc 4. Toxic gases: B2H6>99% WF6>99% TEPO>99% C4F8>95% TEB>99% Process: Solar Thin Film Etching Diffusion

44 Burn type of ECS-3000L Advantage: High abatement efficiency for PFC gases Strong recommendation for CVD : good treatment for powder Safety interlocks included flow, temperature, pressure, and leak sensors Special cooling design to prevent powder accumulation Excellent safety interlock system Relatively lower operation cost Simple operation and easy maintenance The advantage of powder trap could be 5um below High anti-corrosion design SEMI-S2 certified Directly handles gas with the combustion method. It has an efficient and compact design.

45 Burn type of ECS-3000L Almost all of the solvent can be handled Easy maintenance and management Equipped with wide range of exhaust heat recovery systems Due to a highly efficient and longer lasting catalyst, this saves energy. Low running cost No worries about secondary pollution Easy operation Equipped with wide range of exhaust heat recovery systems *Capacity 300~6000LPM is available for customized design.

46 Burn type of ECS-3000S Abatement Type Scrubber Type Dimensions (mm) Weight (kg) Capacity (LPM) Temperature (For Processing Gas) Max. No. of Inlet ports Inlet Port Type option Outlet Port Type ECS-3000S Burn-Wet 2100Wx1500Dx2005H ~ ºC(Up to 1400ºC) Up to 4 KF50 1 x ISO100

47 Burn type of ECS-3000S Application & DRE:Target abatement gas 1. PFCs : NF3>99%, C2F6>95%, SF6>95%, CF4>90%, C3F8>95%, etc 2. Flammable gases : SiH4>99%, PH3>99%, TEOS>99%, H2>99%, DCS, etc 3. Water soluble gases : Cl2, HCl>99%, HF, NH3, etc 4. Toxic gases: B2H6>99%WF6>99% TEPO>99% C4F8>95% TEB>99% Process: Solar Thin Film Etching Diffusion

48 Burn type of ECS-3000S Advantage: High abatement efficiency for PFC gases Strong recommendation for CVD : good treatment for powder Safety interlocks included flow, temperature, pressure, and leak sensors Special cooling design to prevent powder accumulation Excellent safety interlock system Relatively lower operation cost Simple operation and easy maintenance The advantage of powder trap could be 5um below High anti-corrosion design SEMI-S2 certified Directly handles gas with the combustion method. It has an efficient and compact design.

49 Burn type of ECS-3000S Almost all of the solvent can be handled Easy maintenance and management Equipped with wide range of exhaust heat recovery systems Due to a highly efficient and longer lasting catalyst, this saves energy. Low running cost No worries about secondary pollution Easy operation Equipped with wide range of exhaust heat recovery systems *Capacity 300~6000LPM is available for customized design.

50 Catalyst type of CHA-600 Model Name Type Dimensions (mm) Weight (kg) Capacity (LPM) Temperature (For Processing Gas) Max. No. of Inlet ports Inlet Port Type (Option) Outlet Port Type GHA-600 Wet-Thermal (Catalyst)-Wet 970W x 930D x 1850H ºC Up to 3 3x NW50 (2x ISO80/KF80 Option) 1 x ISO100

51 Catalyst type of CHA-600 Application & DRE: Target abatement gas 1PFC Gases : CF4>95%, SF6>99%, NF3>99%, C2F6>99%, C3F8>99%, C4F8>99%, etc. 2.Toxic gases: NF3>99% Process: Solar Thin Film Etching Advantage: 1. Type: Heat-Catalyst-Wet TYPE 2. High abatement efficiency for PFC gases 3. No toxic by-products (NOx, SOx) 4. Excellent safety interlock system 5. Relatively lower operation cost 6. Simple operation and easy maintenance(simple change heater & catalyst) 7. High corrosion resistance structure 8. SEMI-S2 certified 9.Good efficiency for SF6, C2F6, NF3, CF4, C3F8,C4F8

52 Catalyst type of GMH-250 Model Name Type Dimensions (mm) Weight (kg) Capacity (LPM) Temperature (For Processing Gas) Max. No. of Inlet ports Inlet Port Type (Option) Outlet Port Type GMH-250 Wet-Thermal (Catalyst)-Wet 1200W x 1200D x 1950H ºC Up to 3 3x NW50 (2x ISO80/KF80 Option) 1 x ISO100

53 Catalyst type of GMH-250 Application & DRE: TEPO>99% B2H6>99% NF3>99% NH3>99% PH3>99% SF6>99% C4F8>99% SiH4>99% TEOS>99% WF6>99% GeH4>99% TEB>99% C2F6>99% C3F8>99% AsH3>99% CF4>95% Process: Solar Thin Film Etching Diffusion Advantage: High particle removal efficiency Uniform and high temperature distribution High performance removal PFCs Approved by SEMI S2 Organic solvent collection system Suitable for collection of CFC and C2HCI3, etc.. Original desorption wastewater treatment system Possible to increase the number of absorption towers Excellent durability Drastic cost reduction Easy operation

54 Dry type of DS-11 Abatement Type Scrubber Type Dimensions (mm) Weight (kg) Capacity (LPM) Temperature (For Processing Gas) Max. No. of Inlet ports Inlet Port Type option Outlet Port Type DS-11 Dry 850W x 850D x 1950H Room Temp Up to 1 NW-50 1 x ISO100

55 Dry type of DS-11 Application & DRE: Hydride (AsH3>99% PH3>99%) Acid (BF3>99%)(BCl3)(CL2) Process: Etching Ion Implantation Advantage: Built in by-pass system, avoid process interruption Epochal saving operation cost Treatment for soluble gases Long PM Cycle Easy maintenance Easy operation Compatible with wet scrubber Approved by SEMI S2

56 Dry type of DS-11 Advantage: Non-toxic gases release process can handle the processing of such seal highly toxic AsH3, sealed structure can safely handle. The water does not require fuel gas such as SiH4, is useful if you can not handle with water. Without using the fuel in order, there is no emission of CO2. Sealing process can handle such a highly toxic AsH3 Non-toxic gases release process can be handled safely sealed structure. Gases such as SiH4, is useful if you can not handle with water.

57 Dry type of DS-11 The majority of speciality process gases used in wafer processing, solar and MEMS manufacturing are either pyrophoric, toxic, or corrosive. Safety of personnel and protection of the environment are matters of the highest priority. The IPI-Adsorbent waste gas abatement system removes hazardous process gases on the basis of chemical conversion (chemisorption) to stable salts at ambient temperature. No external heating, moisturisation, or other facilities are required for operation. Hence the IPI-Adsorbent system is fully passive, and is permanently on stand-by, even in the event of a power- or other facilities failure.

58 Dry type of DS-11 IPI-Adsorbent systems customers worldwide avail of a local service for the collection and refilling of expended IPI-Adsorbent columns, which are patented, and reusable transport containers. A wide range of IPI-Adsorbent model sizes are available to meet the needs of all our customersfrom small-scale university researchers to roundthe-clock wafer fabrication.

59 Dry type of DS-11(D) Abatement Type Scrubber Type Dimensions (mm) Weight (kg) Capacity (LPM) Temperature (For Processing Gas) Max. No. of Inlet ports Inlet Port Type option Outlet Port Type DS-11(D) Dry 1500W x 800D x 1935H Room Temp Up to 1 NW-50 1 x ISO100

60 Dry type of DS-11(D) Application & DRE: Hydride (AsH3>99% PH3>99%) Acid (BF3>99%) SiH4 Process: Etching Ion Implantation Advantage: If you spent one broken tower, the tower can be switched with another treatment. Change adsorbent equipment do not stop Built in by-pass system, avoid process interruption Easy operation Easy Maintains Approved by SEMI S2

61 Dry type of DS-11(D) Advantage: Absorption dry-type gas abatement system. This safely handles AsH3 and so on which needs hermetically-sealed treatment. Non-toxic gases release process can handle the processing of such seal highly toxic AsH3, sealed structure can safely handle. The water does not require fuel gas such as SiH4, is useful if you can not handle with water. Without using the fuel in order, there is no emission of CO2. Column 2 is also available with built-in tower 2 tower type apparatus, are also available switching devices can be used. Automatic switching system was also available. Sealing process can handle such a highly toxic AsH3 Non-toxic gases release process can be handled safely sealed structure. Gases such as SiH4, is useful if you can not handle with water.

62 Dry type of DS-11(D) The majority of speciality process gases used in wafer processing, solar and MEMS manufacturing are either pyrophoric, toxic, or corrosive. Safety of personnel and protection of the environment are matters of the highest priority. The IPI-Adsorbent waste gas abatement system removes hazardous process gases on the basis of chemical conversion (chemisorption) to stable salts at ambient temperature. No external heating, moisturisation, or other facilities are required for operation. Hence the IPI-Adsorbent system is fully passive, and is permanently on stand-by, even in the event of a power- or other facilities failure.

63 Dry type of DS-11(D) IPI-Adsorbent systems customers worldwide avail of a local service for the collection and refilling of expended IPI-Adsorbent columns, which are patented, and reusable transport containers. A wide range of IPI-Adsorbent model sizes are available to meet the needs of all our customersfrom small-scale university researchers to roundthe-clock wafer fabrication.

64 Dry type of DS-11 IPI Sorbent characteristics: 1. A non-combustible, high security 2. Adsorption of the pharmaceutical component is not disabled or restricted substances 3. For acid gases, toxic gas,the adsorption capacity is huge, the processing efficiency is very high (> 99%) 4. Technology is completely independent, LS adjustable for customer process exhaust needs 5. Easy to use, reasonable price 6. Waste removal and transportation of pharmaceutical processing have complete processes, and after use without causing secondary pollution worries. 7. Use of the advanced chemical adsorption pellet technology, used in designing the clean efficiency to be extremely high, and easy to operate waste gas purification system.

65 Dry type of DS-11 IPI Sorbent characteristics: 8.IPI dry sorbent system is no consumption of electricity, water or fuel.in addition, because the emission of polluted waste water in front of the water will not be contaminated, which can greatly improve the ecological balance. 9.A barrel IPI Adsorbent column can absorb a few liters of dangerous gases, generate a safe solid by-product 10.IPI adsorbent particles at ambient temperature to dangerous gases into stable inorganic salts. It is the best-performing, environmentally friendly waste gas treatment, purification technology. 11.IPI adsorbent system in dry base chemical absorption technology has over 22 years of extensive experience, can provide optimal solutions for a variety of technical applications. 12.In general, the vast majority of the professional process gas used in wafer processing, solar and micro-electromechanical industry are liable to spontaneous combustion, toxic, or corrosive. IPI exhaust gas treatment system at room temperature through chemical conversion (chemical absorption) way to clear the hazardous process gases, to form a stable salt. Operation without external heating, humidification or other facilities. Ready to use. 13.IPI of global customers to enjoy our local services, we are responsible the IPI adsorbent used barrels to collect and reinstall fill.

66 Comparison table of IPI adsorption medicament and the other trade mark medicament Adsorption capacity, (L-gas / kg-ads) gas type IPI Other commercially available products AsH 3 PH 3 BF 3 HCl BCl 3 Cl

67 Thermal wet type of ECS-2000P Abatement Type Scrubber Type Dimensions (mm) Weight (kg) Capacity (LPM) Temperature (For Processing Gas) Max. No. of Inlet ports Inlet Port Type option Outlet Port Type ECS-2000P Thermal-Wet 875W x 775D x 1720H ºC Up to 4 ISO80 (NW50 or KF80 Option) 1 x ISO100

68 Thermal wet type of ECS-2000P Application & DRE: H2>99% HCl>99% SiCl2H2>99% SiH4>99% WF6>99% NH3>99% Process: Solar Thin Film Etching Diffusion Advantage: N2 flash arrester,keep safety Installation of remove moisture Cost effective Approved by SEMI S2

69 Thermal wet type of ECS-2100S Abatement Type Scrubber Type Dimensions (mm) Weight (kg) Capacity (LPM) Temperature (For Processing Gas) Max. No. of Inlet ports Inlet Port Type option Outlet Port Type ECS-2100S Thermal-Wet 1500W x 1200D x 1800H ºC Up to 4 ISO80 (NW50 or KF80 Option) 1 x ISO100

70 Thermal wet type of ECS-2100S Application & DRE: GeH4>99% H2>99% HCl>99% PH3>99% SiCl2H2>99% SiH4>99% WF6>99% ClF3>99% NH3>99% Process: Thin Film Etching Diffusion Advantage: Ventrui s tube design N2 flash arrester,keep safety Installation of remove moisture Cost effective Approved by SEMI S2 *ECS-2100SG:Air-cooled(OPTION)

71 Wet Type SBW-SA Model Name Type Dimensions (mm) Weight (kg) Capacity (LPM) Temperature (For Processing Gas) Max. No. of Inlet ports Inlet Port Type Option Outlet Port Type SBW-SA Wet 1400W x 1100D x 1855H Room Temp Up to 4 4 x NW50 1 x ISO100

72 Wet Type SBW-SA Application & DRE: NH3>99% BCL3>99% SiH4>99% HCl>99% Cl2>99%(+NaOH) HBr>99% SiF4 HF COF2 Process: Solar Thin Film Etching Advantage: Strong RD and service team Cost effective Approved by SEMI S2 Burn box function SiH4 ionization Longer maintains cycle time Ventrui s tube design,4-step water cleaning function

73 Wet Type SBW-SA High efficiency small scrubber type gas abatement system. Equipped with two units of scrubbers, can handle watersoluble and hydrolysable gas efficiently High performance and high efficient abatement.it realizes high performance and high efficient abatement by a combination of special sprays and fillers. Safe for flammable gas incorporation.it is safe during unexpected flammable gas incorporation to our high specifcations related to explosive gases. Compact design.it is very compact because of our scrubber designs. It is possible to install in minimal space. Excellent economic efficiency Due to original design, it efficiently contacts gas-liquid and uses less water and electricity. It realizes low-running cost.

74 SBW-SA Option Item CMS ( Center Monitor System ) By-Pass to backup scrubber for supporting APC (Auto Pressure Control) Remote Monitor System Burn Box for mass powder process Flash Arrester for anti back fire Gas Detector for individual process gases PH Sensor / Controller Cabinet exhaust pressure alarm Inlet pressure alarm

75 Wet Type WS-666 Model Name Type Dimensions (mm) Weight (kg) Capacity (LPM) Temperature (For Processing Gas) Max. No. of Inlet ports Inlet Port Type Option Outlet Port Type WS-666 Wet 900W x 800D x 1620 H Room Temp Up to 4 4 x NW50 1 x ISO100

76 Wet Type WS-666 Application & DRE: NH3>99% BCL3>99% HCl>99% Cl2>99%(+NaOH) HBr>99% Process: Solar Thin Film Etching Advantage: Strong RD and service team Cost effective Approved by SEMI S2 Burn box function SiH4 ionization Longer maintains cycle time

77 WS-666 Option Item CMS ( Center Monitor System ) By-Pass to backup scrubber for supporting APC (Auto Pressure Control) Remote Monitor System Burn Box for mass powder process Flash Arrester for anti back fire Gas Detector for individual process gases PH Sensor / Controller Cabinet exhaust pressure alarm Inlet pressure alarm

78 Wet Type WS-1000 Model Name Type Dimensions (mm) Weight (kg) Capacity (LPM) Temperature (For Processing Gas) Max. No. of Inlet ports Inlet Port Type Option Outlet Port Type WS-1000 Wet 2230W x 1340D x 1960H Room Temp 4 NW-50 ISO-100

79 Wet Type WS-1000 Application & DRE: NH3>99% BCL3>99% HCl>99% Cl2>99%(+NaOH) HBr>99% Process: Solar Thin Film Etching Advantage: Strong RD and service team Cost effective Approved by SEMI S2 Burn box function SiH4 ionization Longer maintains cycle time

80 Wet Type WS-1000B Model Name Type Dimensions (mm) Weight (kg) Capacity (LPM) Temperature (For Processing Gas) Max. No. of Inlet ports Inlet Port Type (Option) Outlet Port Type WS-1000B Wet 2650W x 1850D x 2785H Room Temp Up to 4 NW-50 4 PP

81 Wet Type WS-1000B Application & DRE: NH3>99% BCL3>99% HCl>99% Cl2>99%(+NaOH) HBr>99% Process: Solar Thin Film Etching Advantage: Strong RD and service team Cost effective Approved by SEMI S2 Burn box function SiH4 ionization Longer maintains cycle time

82 Wet Type LS-2100 Model Name Type Dimensions (mm) Capacity (LPM) Temperature (For Processing Gas) Max. No. of Inlet ports Inlet Port Type (Option) Outlet Port Type LS-2100 Wet 2500W x 1380D x 2700H 1200 Room Temp Up to 4 NW-50 1 x ISO-100

83 Wet Type LS-2100 Application & DRE: NH3>99% PH3>99% AsH3>99% Process: MOCVD MOVPE LED Advantage: Ventrui s tube design Longer maintains cycle time Customized Products

84 Wet-EP Type WEP-800 Model Name Type Dimensions (mm) Weight (kg) Capacity (LPM) Temperature (For Processing Gas) Max. No. of Inlet ports Inlet Port Type (Option) Outlet Port Type WEP-800 Wet-EP 650W x 1100D x 1520H Room Temp Up to 2 1X ISO100 1 x ISO100

85 Wet-EP Type WEP-800 Application & DRE: SiO2>95% Process: Thin Film Etching Diffusion Advantage: Removal of nano-particles To solve the problem of white smoke Efficient reduction of condensable organic carbon compounds Collection of the condensate in a tank Collection of dust particles High safety standards (all critical parameters are sensor monitored) Interface to upstream process systems

86 Wet-EP Type WEP-800S Model Name Type Dimensions (mm) Weight (kg) Capacity (LPM) Temperature (For Processing Gas) Max. No. of Inlet ports Inlet Port Type (Option) Outlet Port Type WEP-800S Wet-EP 740mmW* 690mmD* 700mmH Room Temp Up to 2 1X ISO100 1 x ISO100

87 Wet-EP Type WEP-800S Application & DRE: SiO2>95% Process: Thin Film Etching Diffusion Advantage: Removal of nano-particles To solve the problem of white smoke Efficient reduction of condensable organic carbon compounds Collection of the condensate in a tank Collection of dust particles High safety standards (all critical parameters are sensor monitored) Interface to upstream process systems *WEP-800T:Compact(OPTION)

88 Wet-EP Type WEP-800D Model Name Type Dimensions (mm) Weight (kg) Capacity (LPM) Temperature (For Processing Gas) Max. No. of Inlet ports Inlet Port Type (Option) Outlet Port Type WEP-800D Wet-EP 700W x 1400D x 700H Room Temp Up to 2 1x ISO100 1 x ISO100

89 Wet-EP Type WEP-800D Application & DRE: SiO2>95% Process: Thin Film Etching Diffusion Advantage: Removal of nano-particles To solve the problem of white smoke Efficient reduction of condensable organic carbon compounds Collection of the condensate in a tank Collection of dust particles High safety standards (all critical parameters are sensor monitored) Interface to upstream process systems

90 Plasma P-300A Specification Dimensions (mm) Weight (kg) Capacity (LPM) Working Temp Inlet ports Outlet port Power Handle Gas 900W x 950D x 1850H ~ ºC NW50*4 ISO 100 3W 208V 15KW CF4, SF6,C3F8,NF3,TEOS,etc

91 Plasma P-300A Application & DRE:Target abatement gas PFC gases : NF3, SF6, CF4, C2F6, C3F8 etc. Flammable gases : SiH4, DCS, TEOS, H2, PH3 etc. Water soluble gases : BCl3, Cl2, HF, HCl, NH3 etc. SiO2>95% Process: Solar Thin Film Etching Diffusion

92 Plasma P-300A Advantage: 1. Type : Plasma-Wet 2. Thermal or Equilibrium Plasma 3. High abatement efficiency for PFC gases(99%) 4. Excellent safety interlock system 5. Minimizing moisture vapor exhaust 6. High corrosion resistance structure 7. Relatively lower utility and operation cost(long torch life time/ Long PM term) 8. Simple operation and easy maintenance 9. SEMI-S2 progressing 10.Removal of nano-particles 11.To solve the problem of white smoke 12.Vertical structure : Strong for powder clogging 13. Abatement system for persistent PFC gas using atmospheric plasma 14.Due to a stable high temperature from the direct current plasma, it can decompose and purify persistent PFC gas like SF6 and CF4, etc..

93 Plasma P-300A 15.No unnecessary fossil fuels.no unnecessary initial cost of construction of fossil fuel pipe and running cost of fossil fuel. 16.Using direct current atmospheric plasma.security from accidental fires due to stable discharges and protected electricity. 17.Simple structure of reactor. Due to simple structure of reactor tank plasma generating portion, it realizes easymaintenance and low-cost. 18.Decomposes simultaneously.it is possible to handle PFC gas like CF4 and SF6 and halogen like HBr simultaneously. 19.Scrubber system operate safely and completely abate oxidized gas including power.we can construct various types of system from 300LPM to 400LPM based on your request. Original abatement for gas including power Excellent durability and corrosion resistance Easy operation Support flow fluctuation Optimum design for installation space

94 IPI Continuos Monitoring System The more efficient high-end machines get in today s industry, the more important it is to guarantee long term disposability and reliability. Fidelity and short response times to sudden changes in machine status are also important for productivity. Without a monitoring system it is impossible to monitor all machines on a plant. With the IPI Monitoring System we offer our clients a central, database-driven information system. This allows access to significant information, periodically obtained directly from the operating system. You can easily monitor the actual status of the whole plant in your control room. The IPI Monitoring System is based on a standardized TCP/IP protocol and an Ethernet network. It can easily and cost-effectively be implemented in the present network. Online Data: Data of system status, alarms and warnings, consumption and measuring is logged contiuously for a period of 24 hours for every single component of the abatement system. This function allows illustrating the logged data in diagrams, which facilitates to read out the data and to find out critical points.

95 IPI Continuos Monitoring System Data History:Data older than 24 hours is saved in the memory Data History. IPI Monitoring System allows saving data for a long time, even for years if neccessary. Data Logging:Consumption data is calculated and recorded daily. Among others, this includes the consumption of water, energy, lye, oxygen and fuel gas. This data can be illustrated in diagrams and hence be analyzed. Maintenance Plan:For the upkeep of the abatement system maintenance has to be planned. Therefore, a maintenance plan can be set up, displayed and determined for every single abatement system. Data Backup:A complete backup is automatically carried out every day at a set time.