Technical Solution Company HEATER JACKET. Light weight. TPOH - Series. ECO friendly

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1 Technical Solution Company HEATER JACKET Light weight TPOH - Series ECO friendly

2 Company Vision The world best part maker Business philosophy Challenge constantly and Set a goal Our executives and staff members have been making steady progress toward our goal, which is to achieve the world best component business based on creative, challenge and cooperation. We promise to provide the best product that is founded on accumulated technology. Also, we will do our best in order to develop new products as well as create customer value. CEO Os. Kim 15. Business Market Expansion (US) & UL Certification 14. Business Market Expansion (China, ASIA,JAPAN) 13. Contract of Industrial-Educational Collaboration 12. Transferred to Incorporated Company 11. Office Building Expansion and Move-in (Hwaseong) 11. Vendor List from Samsung Semiconductor, Co. Ltd 09. Established new manufacturing lines for heater jacket 08. Venture Capital Company Certification 07 Innobiz Certification / Vendor List from SK Hynix 06. Venture Capital Company Registration / ISO9001 Certification 06. Patent Acquisition for CMP PAD CONDITIONER Start Repair Service Business (System Built & Overhaul) Company Move-in (Suwon) Established TSC (Technical Solution Company) 2

3 SERIES TPOH TPH TPCH TSH MATERIAL POLY -IMIDE PTFE SHEET PTFE FABRIC SILICON COATED PTFE COATED SILICON RUBBER 1/4" О О О О О О 3/8 О О О О О О Applicable series per pipe size 1/2" О О О О О О NW16 О О О О О О NW25 О О О О О О NW40 О О О О О О NW50 О О О О О О NW63 О О О О О О NW80 О О О О О О NW100 О О О О О О NW125 О О О О О О OVER NW150 О О О О О О Maximum service temperature Process equipment suggestion series О О О 250 О О О - - CVD О О О О - - DIFF О О О О - - METAL О О О О - О ETCH О О О О - О SUB FAB suggestion series SPECIFIC FEATURE VACUUM LINE SCRU -BBER О - - О О - О - - О О - GAS LINE TTH Series : TAPE HEATER (reference 11 page ) MATERIAL * light * Strong chemical * eco-friendly resistance * price * Excellent thermal competitive uniformity ness POLY -IMIDE PTFE SHEET PTFE FABRIC - SILICON COATED * Chemical resistance * Price competitive ness PTFE COATED * Excellent thermal uniformity SILICON RUBBER SERIES TPOH TPH TPCH TSH 3

4 Application & Location Price Competitiveness Application : Fore-lines, Scrubber Lines 100% Polyimide Material : Harmless Semiconductor, LCD, Solar Equipment No particle elements such as harmful substances, Location : Sub Clean Fab Lines powder and fragments from materials. Main Fab Lines Ultra-light (existing H/J contrast 40%) & Easy Installation Wide Use Temperature Range (40 ~ 250 ) [ Insulator Comparison Table ] INSULATOR COMPARISION TSC Conventional Type Material Polyimide Foam Fiber Glass Power Consumption 0.9 (reduce 10%) 1 External Temp 46 (reduce 7 ) 53 Photo Particle No Particle PARTICLE Body/Skin Problem Harmless 4

5 Application & Location 100% PTFE Material : Strong chemical resistance Wide Use Temperature Range (40 ~ 250 ) The Best Temperature Uniformity Options - ECO Friendly Material : harmless - Electromagnetic Waves Breaking Application Semiconductor, LCD, Solar Equipments Location : Main Fabrication Lines [ Comparison Table ] COMPARISION TSC Conventional Type Temperature Uniformity 0 mg 50 mg Electromagnetic Waves Breaking (Optional) 5

6 Application & Location 100% PTFE Material : Strong chemical resistance Application Wide Use Temperature Range (40 ~ 250 ) Semiconductor, LCD, Solar Equipments The Best Temperature Uniformity Location : Main Fabrication Lines Options - ECO Friendly Material : harmless - Electromagnetic Waves Breaking (Refer to the pge5.) 6 [ For Semiconductor DIFF-process ]

7 Silicon Coated Material : Strong chemical resistance Use Temperature Range (40 ~ 150 ) Low Price Options - ECO Friendly Material : harmless - Electromagnetic Waves Breaking (Refer to the pge5.) Application & Location Application : Fore-lines, Scrubber Lines Location : Sub Clean Fabrication Lines [ PUMP VACUUM LINE ] [ For SCRUBBER LINE HEATER JACKET ] 7

8 Application & Location PTFE Coated Material : Chemical resistance Application : Fore-lines, Scrubber Lines Wide Use Temperature Range (40 ~ 200 ) Location : Sub Clean Fabrication Lines The Best Temperature Uniformity Price Competitiveness Options - ECO Friendly Material : harmless - Electromagnetic Waves Breaking (Refer to the pge5.) 8 [ For Semiconductor DIFF-process Fore-lines ]

9 Application & Location Jelly Type Rubber Application Chipping 0% (Good Durability) Semiconductor, LCD, Solar Equipments STS Film Patten Element Location : Main Fabrication Lines Good Thermal conductivity & Efficiency The Best Temperature Uniformity & Thermal Conductivity Use Temperature Range (40 ~ 220 ) - Ultra High Temperature : 180 ~ High Temperature (Under 150 ) [ Technology Comparison Table ] TECHNOLOGY COMPARISION TSC (Exclusive 3 Layers) Conventional Type (4 Layers) Different Structure 9

10 T/C OFF Low Limit High Limit Alarm Logging Power Display (%) Administration Communication Basic Function T/C disconnection check Monitor low temperature (Alarm sound when it s lower than set temperature) Monitor low temperature (Alarm sound when it s higher than set temperature) Record all data (date, time, alarm) Access control by level Monitor & Control through RS232/RS485 communication protocol Remark Fuse by channel Leakage Breaker Excess Current Over Voltage EMO S/W Note) Spec is different depend on product 10

11 Use : GAS LINE HEATING Material : PTFE FABRIC Maximum service temperature : 200 Feature : 1 wide, available to produce various length as customers requested (MAX. 150 ) Use : DIFF CHAMBER MANIFOLD HEATING Material : MICA & STS SHEET Maximum service temperature : 250 Feature : HEATER surrounding temperature is about 250 ~ 400, so it is available to install where general HEATER JACKET cannot be used. VACUUM GATE VALVE HEATER JACKET : TPOH, TPH, TPCH, TSH All of them can be produced - Use : VALVE HEATING that is installed in vacuum line BSGS HEATER JACKET : TPH-SILICON COATED - Use : BULK GAS (Y-CYLINDER ) BOTTLE HEATING [ VACUUM GATE VALVE HEATER JACKET ] [ BSGS HEATER JACKET ] 11

12 ADDR : Toseong-Ro, Hyangnam-Eup, Hwaseong-Si Gyeonggi-Do, Korea TEL : , FAX : tsc@newtsc.com, Homepage :

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