MEMS. Micro-Electro-Mechanical Systems

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1 Redline : Opt + 2 Henkel Electronics MEMS Micro-Electro-Mechanical Systems

2 MEMS Henkel Electronic Advantage When one considers the average smartphone contains approximately eight to 10 MEMS a number which is projected to grow in the coming years one gets a sense for the breadth of MEMS applications. The ability to design, test and commercialize new MEMS devices quickly is critical to a MEMS manufacturer s market competitiveness. In order to meet the average three-to-six month cycle time, MEMS manufacturers need to leverage proven materials solutions that are market-ready, market-tested and supported globally to facilitate multi-site design and manufacturing. For trusted, proven MEMS materials, a full-solutions approach, quick materials delivery for fast production ramp-up, supply chain simplification, global support and capability, along with an expert, knowledgeable team, Henkel is the obvious and only choice.

3 MEMS Application Overview Microphones, Pressure Sensors Diaphragm ASIC MEMS Lid/Cap ASIC Glob Top MEMS Henkel has a full portfolio of proven materials for a range of processes from die attach to underfill to lid attach and glob top. And Henkel's global support structure ensures quick delivery of Henkel materials around the globe for just about any MEMS application. MEMS Application Overview Accelerometers, Gyroscopes, Magnetometers Mold Compound Package Sensor ASIC ASIC Cap Source: Yole Développement SARL MEMS Henkel provides multiple materials for quick evaluation and testing. This, combined with Henkel's global infrastructure, ensures expert on-site worldwide technical support.

4 Henkel's MEMS Material Portfolio ASIC or MEMS Application Products Description Non-Conductive QMI 536NB QMI 538NB ABP 8142B Low stress and low moisture absorption. No bleed 25 C (MPa) 250 C (MPa) Ultra low stable modulus across reflow temperature Non-Conductive Print B-Stage 8006NS B-stagable, wafer backside coating, fillet control 4, CX B-stagable, printed BOC, fillet control ASIC Non-Conductive Film B-Stage ATB F125E ATB 120HA DDAF, compatible with non-uv and UV dicing tape, very good laser / SDBG performance Suitable for < 3 mm x 3 mm die Low modulus DDAF Laser & stealth dice able Suitable for > 3 mm x 3 mm die 5, , ASIC or MEMS Conductive ABP 8060T 8290 High thermal and electrical conductivity, high die shear strength High reliability and good adhesion on different surfaces 6,230 1,730 3, Lid or Cap Non-Conductive 3220 Low cure temperature and good adhesion on different surfaces including LCP 2, Fast cure at low temperatures, high adhesion 3,370 N/A 8387B High adhesion, fast cure, low weight loss 1, Lid or Cap Conductive ICP 3920 ABP 2032s Sn compatible, Stable adhesion after 5X reflow, low weight loss High adhesion on Au and steel, low temperature curable 5, , LMISR4 Good adhesion on different surfaces 3, Lid or Cap Glob Top Conductive- Print B-stage Non-Conductive Liquid 8007 Stencil printable, B-stage able, good thermal and electrical conductive 8008MD LOCTITE HYSOL FP 4802 LOCTITE ECCOBOND EO , , Good flow, 260 C compatible 13,000 N/A High Tg, Low CTE 4,100 N/A Underfill Non-Conductive Liquid Non-Conductive UF 8830S LOCTITE ECCOBOND FP 5201 Good flow with self filleting, bleeding control, 260 C compatible 11, Self fluxing, high Tg, low CTE 6, Mold Compound Non-Conductive LOCTITE HYSOL GR P High Tg, low shrinkage and warpage. Available in 45µm & 75µm filler size 21,000 2,300

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6 AMERICAS HEADQUARTERS: UNITED STATES Henkel Electronic Materials LLC Jamboree Road Irvine, CA USA Tel: Tel: Customer Support: Fax: ASIA-PACIFIC CHINA No. 332 Meigui South Road WaiGaoQiao Free Trade Zone Shanghai , P.R. China Tel: Fax: EUROPE BELGIUM Henkel Electronics Materials (Belgium) N.V. Nijverheidsstraat 7 B-2260 Westerlo Belgium Tel: Fax: Across the Board, Around the Globe. Except as otherwise noted, all marks are trademarks and/or registered trademarks of Henkel and/or its affiliates in the U.S. and elsewhere. = registered in the U.S. Patent and Trademark Office Henkel Corporation. All rights reserved / LT-6742 (8/15)

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