12/5/2013. CH2M HILL Company Profile. CH2M HILL Today

Transcription

1 SEMI Taiwan High-Tech Facility / 11th BUEE International Symposium VERO (Visual Energy and Resource Optimization) Model for Advanced Semiconductor Facility Savings Generated and Impact to Advance Facility Design Keith Kibbee, PE LEED AP Advanced Design and Simulation Group CH2M HILL December 11, 213 CH2M HILL Company Profile CH2M HILL Today We are an industry leader in consulting, design, design-build, operations, and program management. Headquartered in Englewood, Colorado, USA Nearly 3, employees US$6.4 billion in revenue Employee-owned Broadly diversified across multiple business sectors Performing work in more than 6 countries worldwide Semiconductors Program Management (since 24) Environmental Firms (since 26) Engineering/Design Green Firms: Industrial Manufacturing Pipeline Design Sewer/Wastewater Design Sewerage and Solid Waste Site Assessment and Compliance 1

2 CH2M HILL IDC Taiwan Profile 1st Project in Taiwan Began in Tainan Office opened in 1998.(Officially Registered) Taipei Head Office Opened in May 23. Projects located in Hsinchu, Jhunan, Kaoshung, Tainan, Linkuo, Longtan Taichung areas. Service includes: Design, Design/Build, Construction Management. TSMC CMO / INNOLUX ProMOS MACRONIX Presentation Outline 5 1. Sustainability and Semiconductor Manufacturing 2. Integrated Systems Thinking 3. Energy and Modeling VERO Model 4. Energy Efficiency Strategies 5. Capital Cost & Total Cost of Ownership Sustainability and Semiconductor Manufacturing 2

3 Energy and Use 7 Semi manufacturing facilities are very energy and water intensive. Typical Office Building Semiconductor Fabrication Plant Data Center 15 kwh/ft 2 /yr 161 kwh/m 2 /yr 1,451 kwh/ft 2 /yr 15,61 kwh/m 2 /yr 2,792 kwh/ft 2 /yr 3,4 kwh/m 2 /yr.2 MW for 1k ft 2 17 MW for 1k ft 2 32MW for 1k ft 2 Traditional vs Sustainable Viewpoints 8 Inputs Outputs Energy Raw Materials Inputs Renewable Energy Local Recycled Materials TRADITIONAL MODEL SUSTAINABLE ABUNDANCE MODEL MODEL Heat and Emissions Waste Waste Materials Outputs Excess Energy Zero Liquid Discharge or Cleaner Usable Waste Material Systems Thinking 3

4 Semiconductor Systems and Resource Demands 1 Envelope AHUs Ancillary Spaces MAHs RAHs Cleanroom Equipment (Tools) Cleanrooms Wafer Fabrication General Acid Solvent Office and Support Buildings Recirculation Air Chilled Condenser Hot RO / DI BUILDING LEVEL SU UBMETERS Hot Pumps Primary Chilled Pumps Secondary Chilled Pumps Condenser Pumps Emergency Generators CCHP Plant UTILITY LEVE EL SUBMETERS Diesel SITE METERS OFFSITE RESOURCES Single System 11 Envelope AHUs Ancillary Spaces MAHs RAHs Cleanroom Equipment (Tools) Cleanrooms Wafer Fabrication General Acid Solvent Office and Support Buildings Recirculation Air Chilled Condenser Hot RO / DI BUILDING LEVEL SU UBMETERS Hot Pumps Primary Chilled Pumps Secondary Chilled Pumps Condenser Pumps Emergency Generators CCHP Plant UTILITY LEVE EL SUBMETERS Diesel SITE METERS OFFSITE RESOURCES Integrated Systems 12 Envelope AHUs Ancillary Spaces MAHs RAHs Cleanroom Equipment (Tools) Cleanrooms Wafer Fabrication General Acid Solvent Office and Support Buildings Recirculation Air Chilled Condenser Hot RO / DI BUILDING LEVEL SU UBMETERS Hot Pumps Primary Chilled Pumps Secondary Chilled Pumps Condenser Pumps Emergency Generators CCHP Plant UTILITY LEVE EL SUBMETERS Diesel SITE METERS OFFSITE RESOURCES 4

5 Visual Energy and Resource Optimization Model Balance of Competing Values 14 Environment Use Energy Use Materials Emissions Financial Impact Social Impact Model Inputs Key Facility Design Parameters Cleanroom Area 25, ft^2 23,2 m^2 ISO Class 5 Cleanroom Environment 68 degf +/- 2 deg F 2 degc +/- 1.1 degc Cleanroom Humidity 45 % RH Filter Velocity 9 ft/min.46 m/s Filter Coverage 5 % Tool Density 5 Watts/ft^2 54 W/m^2 4. cfm/ft^2 6.8 cmh/m^2 4.5 cfm/ft^2 7.6 cmh/m^2 Utility Systems Chilled Compressed Dry Air DI Hot DI Industrial Waste 15 5

6 VERO Model Example: Semiconductor Manufacturing Plant 16 Envelope AHUs Ancillary Spaces MAHs RAHs Cleanroom Equipment (Tools) Cleanrooms Wafer Fabrication General Acid Solvent Office and Support Buildings Recir Air Chilled Condenser Hot RO / DI BUILDING LE VEL SUBMETERS Hot Pumps Primary Chilled Pumps Secondary Chilled Pumps Condenser Pumps Emergency Generators UTILITY LEV VEL SUBMETERS Onsite Wells Diesel SITE METERS OFFSITE RESOURCES Chilled Plant Energy : AM 9: AM 1: AM 11: AM 12: PM 1: PM 2: PM 3: PM 4: PM 5: PM 6: PM 7: PM 8: PM 9: PM 1: PM 11: PM 12: AM 1: AM 2: AM 3: AM 4: AM 5: AM 6: AM 7: AM CHW Plant Chilled System Component Energy : AM 9: AM 1: AM 11: AM 12: PM 1: PM 2: PM 3: PM 4: PM 5: PM 6: PM 7: PM 8: PM 9: PM 1: PM 11: PM 12: AM 1: AM 2: AM 3: AM 4: AM 5: AM 6: AM 7: AM Pumps HRC Electric Cooling Tower Fan CHW Electric 6

7 + Hot + Fan Energy + Utilities Light Util EXH RAH MAH HW 8: AM 9: AM 1: AM 11: AM 12: PM 1: PM 2: PM 3: PM 4: PM 5: PM 6: PM 7: PM 8: PM 9: PM 1: PM 11: PM 12: AM 1: AM 2: AM 3: AM 4: AM 5: AM 6: AM 7: AM CHW Plant + Tool Energy 2 Utilities Tool Light Util EXH RAH MAH HW 8: AM 9: AM 1: AM 11: AM 12: PM 1: PM 2: PM 3: PM 4: PM 5: PM 6: PM 7: PM 8: PM 9: PM 1: PM 11: PM 12: AM 1: AM 2: AM 3: AM 4: AM 5: AM 6: AM 7: AM CHW Plant Energy Efficiency Measures Ideas to reduce Energy and per Wafer Out 7

8 Supply Air Chilled Condenser Hot RO / DI General Acid Solvent 12/5/213 Energy Efficiency Strategies 22 Potential Benefit High Med Low Reduction Reduction side Economizers Cleanroom Air Change Demand Compressed Air Usage Reduction Demand Response Response Cleanroom Air Change N2 Usage Reduction Minienvironments Combined Heat and Heat Recovery (CCHP ) Vacuum Pump Optimization Dual CHW Air Management Loops (FFUs vs Pressurized Plenum) PCW Usage Submetering Oversized Reduction DI Usage Reduction Formal Energy Management Onsite Renewable Energy Program Low Pressure Air Systems Building Envelope Automatic High Efficiency Bldg Orientation & Controls Low Pressure Systems Massing Low Med High Implementation Difficulty Reduction Example 1% and 3% Reduction Single System - Fan Energy Savings 24 kwh/yr 1,, 9,, 8,, 7,, 6,, 5,, 4,, 3,, 2,, 8,865,678 6,467,693 27% 66% 3,4,927 1,, Baseline Alternate: Exh-1% Alternate: Exh-3% 8

9 Supply Air Chilled Condenser Hot RO / DI Industrial Wastewater Recir Air Chilled Condenser Hot RO / DI General Acid Solvent General Acid Solvent Hot Pumps Primary Chilled Pumps Secondary Chilled Pumps Condenser Pumps Hot Pumps Primary Chilled Pumps Secondary Chilled Pumps Condenser Pumps Emergency Generators 12/5/213 Cascading effect, Chilled, & Makeup 25 kwh/yr 5,, 45,, 4,, 35,, 3,, 25,, 2,, 15,, 1,, 8,865,678 4,493,286 31,714,959 6,467, ,41,744 3,69,637 11% 3% 3,4,927 Exh 1,797,943 MAH 26,814,811 5,, Baseline Alternate: Exh-1% Alternate: Exh-3% CHW 26 Sitewide Energy Savings Process Vacuum kwh/yr 18,, 16,, 14,, 12,, 1,, 8,, 6,, 4,, 81,534,452 6,142,5 6,615,829 44,538 8,865,678 16,46,13 81,534,452 6,142,5 6,592,541 44,538 6,467,693 16,46,13 4,493,286 3,41,744 1,838,943 1,838,943 3% US$515k 8% US$1,346k 81,534,452 6,142,5 6,577,317 3,4,927 44,538 16,46,13 1,797,943 1,838,943 Tool Light Util Support Exh RAH MAH HW 2,, 31,714,959 3,69,637 26,814,811 Baseline Alternate: Exh-1% Alternate: Exh-3% CHW 27 Sitewide and Carbon Gallons/yr 5,, 4,,,, 3,, 2,, 1,, 53,98,528 51,925,487 4% 48,37,73 1% Lbs carbon/yr 5,, 4,,, 3,, 5,92,626 2,, 1,, Carbon (CAMX: 661 lb/mwh) 3% 8% 48,548,762 46,57,293 Baseline Alternate: Exh-1% Alternate: Exh-3% Baseline Alternate: Exh-1% Alternate: Exh-3% 9

10 Reduction Example Capital Savings Reduction Example: Operating + Capital Costs Site & Design Concept Resource Model Utility Demands/Costs Electrical Design Configuration Building Shell HVAC Systems Electrical Systems Process Systems Cost Model Systems Capital Cost Electrical Mechanical Case Operating Cost Savings Capital Cost Savings 1% Less Process US$ 515, US$ 3,45, 3% Less Process US$ 1,35, US$ 1,26, Facility Total Cost of Ownership Site & Design Concept Resource Model Utility Demands/Costs Electrical Natural Wastewater Carbon Design Configuration Building Shell HVAC Systems Electrical Systems Process Systems Financial Model Net Present Value Facility Utilities Taxes Cost Model Facility Capital Cost Design & Permitting Sitework Building Electrical Mechanical Operating Expenses Taxes Incentives Maintenance Labor 1

11 Thank You! Keith Kibbee CH2M HILL Michael Wang CH2M HILL ext. 883 Julia Chuang CH2M HILL Julia.Chuang@ch2m.com ext