Your ceramic-tooling partner for the front-end semiconductor industry

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1 ew/company Profile /4/05 9:59 AM Pagina 1 Schunk Semiconductor An international group of companies SCHUNK INGENIEURKERAMIK GmbH Hanns-Martin-Schleyer-Straße 5, Willich, Germany Tel.: , fax: detlef.brands@schunk-group.com SCHUNK KOHLENSTOFFTECHNIK GmbH Rodheimer Straße 59, Heuchelheim, Germany Tel.: , fax: info@schunk-group.com Your ceramic-tooling partner for the front-end semiconductor industry XYCARB CERAMICS B.V. Zuiddijk 4, 5705 CS Helmond, The Netherlands Tel.: , fax: info@xycarb.nl XYCARB CERAMICS INC. 101 Inner Loop Road, Georgetown, TX 78626, USA Tel.: , fax: info@xycarb.nl visit us at >> April 2005

2 ew/company Profile /4/05 9:59 AM Pagina 3 Your partner for complete packages Combined capability The Schunk Group A division of the world-renowned Schunk group, Schunk Semiconductor is a leading manufacturer of high-quality ceramic products for the semiconductor wafer manufacturing and wafer processing industry. Our specialities encompass the whole range of ceramic products essential to the industry - including CVD-coated, carbon-fiber-composite(cfc), graphite, quartz and ceramic products. Schunk Semiconductor brings together the expertise of several specialist companies, each a major player in its own area. The Schunk Group is a global technologies conglomerate with an exceptionally wide spectrum of products in materials as well as in systems engineering. The group comprises many individual companies that operate independently in the world s markets. This guarantees a high degree of flexibility as well as proximity to customers. The Schunk Group currently employs over 7500 people worldwide. The group s headquarters are located in the Frankfurt area, Germany. The group has subsidiaries in 25 countries. In addition, there are joint ventures and strategic alliances with other companies, partners and research institutes. More information on the Schunk Group can be found on the internet at: Meeting the highest quality and environmental standards Specified by major manufacturers of wafer-processing equipment worldwide, our products are also the first choice of wafer and chip manufacturers themselves, for the high level of quality and innovation they embody. This combined capability gives us full command of all technologies needed to meet the demanding requirements of the modern semiconductor manufacturing industry. Creating a world-class strategic partner ideally positioned to help you capitalize on your own technical strengths. A partner who can fully support you with the innovative products you need to meet the challenges of the new millennium and one, moreover, who can work and grow with you as this latest, exciting chapter of the electronics age unfolds. All Schunk Semiconductor products are manufactured with the prime objectives of increasing manufacturing yields, process speeds and product quality. Our products meet the semiconductor industry s toughest demands for dimensions, purity and particle level. At every major production step, measures are taken to prevent product contamination and to ensure that the required specifications are met. Critical production steps, final inspection and packaging are done in ultra clean-room conditions and systems are in place that enable full traceability from raw material to final product. All our activities are steered by the principles of ISO9001 (ISO/TS in process), providing an operational framework for achieving our quality goals and 100% customer satisfaction. We also fully embrace the principles of Environmental Management according ISO ensuring that our products have minimum impact on the environment and helping to preserve natural resources for future generations.

3 ew/company Profile /4/05 9:59 AM Pagina 5 The operating company Xycarb Ceramics, plays a leading role in the development and manufacture of silicon carbide coated susceptors (barrel and single-wafer) for epitaxial processes. The coatings help to extend susceptor lifetime, improve process uptimes and cut cost of ownership. Xycarb Ceramics capabilities encompass a broad range of CVD coatings. These include aluminium nitride, used as a fluorine-etch resistant coating for single-wafer CVD applications, and tantalum carbide for very Schunk Semiconductor is also playing a leading role in the development of next generation susceptor kits for wafer-processing equipment. A key tool in developing better products, our pre-production computer simulations provide in-depth information on coating properties, enabling us to manufacture very thin, stress- and temperature-optimized parts to extremely close tolerances. high-temperature applications. The operating company Schunk Kohlenstofftechnik also has extensive capabilities in the application of silicon carbide, pyrolytic carbon and boron carbide coatings. setting the standard in susceptors epi/mocvd The operating company Xycarb Ceramics also fabricates coated and uncoated graphite A crucial quality-determining factor of a product, products for MOCVD applications. the coating, enhances the properties of the substrate material and makes the products better tailored for applications in the semiconductor industry. For the highest product purity, all our coated products are manufactured in clean rooms with purity monitoring and analysis methods that include SEM, EDAX, XRD and GDMS. Schunk Semiconductor also carries the full line of Philips Semiconductor lamps for all your fab s process requirements. These include lamps for single wafer EPI, batch EPI, ashing and RTP applications.

4 ew/company Profile /4/05 10:00 AM Pagina 7 All our parts are supplied to the highest purity levels. The total ash is lower than 10 ppm for parts up to 1300 mm in diameter. For low particle release, all the graphite and carbon-carbon (C/C) parts up to 1300 mm diameter can be coated with pyrolytic carbon and SiC. The C/C composite material can also be infiltrated with CVI-SiC and CVI-PYC to protect the matrix and the fibers themselves from methanisation in the H 2 atmosphere used in the polysilicon production stage. For the insulation package, we can supply high corrosion resistant soft and rigid graphite felt or foam. This material can be purified and infiltrated with PYC or SiC in the same way as the C/C composites and graphite. real innovation by process & product development optimized for today s leading-edge processes 2800 o C PYC coated crucible for growing optical or detector crystals o C CFC and graphite components for crystal growing units in the semiconductor industry. high-purity graphite and carbon composite for crystal growing No doubt that the semiconductor market is quickly changing through continuous development (summarized in Moore s law). Your problems are challenges for our R&D team. With our experience and long history we can help you move forward with your developments. Product developments have proven to be the most successful when organized in projects with our customers. The latest process developments resulted in two new materials: T-SiC and C-SiC. T-SiC Parts are formed by a thick CVD SiC coating process on a machined carbon form (product negative). Removing the carbon leaves a pure thick SiC final product, with exceptional clean bulk purity. Product configurations vary from small pins up to big plates. Product details and surface finish can be machined to customer demands. A Schunk patented XClean process leaves an ultra high surface purity. C-SiC Parts are preformed in carbon fiber reinforced carbon of high purity. Through impregnation with molten silicon the material is converted into SiC. Not all of the carbon reacts with the silicon, resulting in a composite structure. This C-SiC material is mechanically strong, has a high thermal shock resistance and a high purity.

5 ew/company Profile /4/05 10:00 AM Pagina 9 The operating company Xycarb Ceramics fabricates precision-machined parts for major manufacturers and users of ion implantation equipment. Our graphite parts can be supplied uncoated, impregnated or coated with pyrolytic carbon or silicon carbide CVD to enhance their properties. a wide range of critical workshop products ion implant Schunk Semiconductor also supplies refractory metals and ceramic products for, even the latest generation, ion implantation equipment. This makes Schunk Semiconductor your ultimate partner for ion implantation consumables. To fulfill process improvement demands we also manufacture special products tailored to customer requirements.

6 ew/company Profile /4/05 10:02 AM Pagina 11 Our operating company Xycarb Ceramics is a long-standing supplier to the semiconductor industry, well versed in working with all semiconductor quartz grades. Our experience in this area, our precision computer-controlled machining plus our advanced thermal forming and treatments enable us to achieve the high product quality essential for your current and future production systems. quartz products meeting all your current and future requirements To manufacture quartzware to the highest technical specifications, our production centers make widespread use of robotic manufacturing equipment, much of it designed We make extensive use of simulations to design out stresses in our quartz products long before they enter production. in-house. Our fully-automated quartz welders, for instance, give reproducible, stress-free welds that are seamless and blemish-free. Flame-polishing too is fully automated to create highly uniform, What s more, optimal surface treatments completely eliminate all risk of particle contamination during production. high-purity, virtually stress-free products. We can supply quartzware to any required customer specification including visual quality.

7 ew/company Profile /4/05 10:03 AM Pagina 13 Schunk Semiconductor has all the necessary know-how, experience and equipment in-house to produce precision ceramic products with tolerances within the micron range. Modern products are geared, in particular, toward large size capabilities for 300 mm technology and far beyond. Strict control exercised over both macroscopic features and microstructure enables us to regulate and even alter many of the material properties in order to meet rapidly changing requirements for the latest generations of systems and applications. It also means we can develop ceramic materials with unique chemical, mechanical and electrical properties Each product is designed and manufactured with the precisely tailored to our customers requirements. optimum mix of properties for the intended application (e.g. purity, electrical conductivity, thermal capacitance and corrosion resistance). innovation geared to your needs ceramic and silicon products Main materials available today: Alumina (Al 2 O 3 ) Sapphire (Al 2 O 3 ) Aluminum nitride (AlN) Boron carbide (B 4 C) Well-controlled production processes, high-precision CNC development in semiconductor ceramics, bringing to the field a Quartz (SiO 2) machining and product monitoring guarantee the highest quality unique combination of material production know-how and Silicon nitride (Si 3 N 4 ) levels. And multi-stage cleaning ensures that all products meet advanced machining capabilities. Silicon carbide (SiC-hot pressed) customers specified cleanness and visual appearance. Silicon carbide (SiC-CVD) In addition, developments at our R&D centers are currently New advanced ceramic sintering processes achieve purity levels Silicon-infiltratedSiC (SiSiC) setting the scene for a whole new range of innovative ceramic that are among the highest in the industry, and our advanced Polycristalline silicon (Si) coating processes are leading to unique combinations between Single cristalline silicon (Si) materials meeting the present and future needs of the semiconductor industry. We are currently involved in almost every major ceramics and CVD coatings. All kinds of special composites

8 ew/company Profile /4/05 10:03 AM Pagina 15 Serving your global needs Schunk Semiconductor s expertise and continuous investment in its business is the key to providing you with a competitive edge in your own markets. With Schunk Semiconductor as your business partner, you re guaranteed Wherever your production facilities are located, Schunk unrivalled expertise and resources such as: Semiconductor will be close by. And our worldwide sales and technical support network provides effective assistance to customers throughout the semiconductor industry. High-precision ceramic tooling and machining meeting the most demanding specifications including those for processing wafers of 300 mm and larger. Choice of several ceramic materials for every wafer process. Currently, we make use of over forty types of ceramic, with new materials added regularly. Research facilities developing new materials with application-tailored chemical and physical properties. World-class CVD coatings and deposition technology. CNC equipment at all facilities. Proprietary, fully-automated equipment for seamless, blemish-free welding of quartzware. Besides having excellent appearance, welds produced by our services << this equipment are highly reproducible and stress-free. >> providing the competitive edge << Modern factories using advanced and efficient production Custom engineering methods able to operate to any required quality standard. Co-production programs Traceabilty from raw material to final product. Task-force teams for efficient Clean-room cleaning and packaging that guarantees up operations and short time-to-market to Class 10 packed products. In-house design, development and Well-controlled processes with quality monitoring production (using 3D CMM inspection equipment) at every major Visit our website at: Repair and refurbishment service stage of manufacture. to get the most up-to-date overview of our sales offices. Comprehensive suite of CAD tools Global sales and distribution network providing effective logistics. and precision computer-controlled Dedicated and skilled workforce. On-going training programs ensure staff remain up-to-date and machining to any required standard qualified in their function. World-wide customer support Continuous innovation and investment in new technologies and materials. World-class logistics with various Computer simulation (finite element analysis) for stress and temperature optimized designs. on-time supply arrangements Supply of complementary products such as infrared lamps and refractory metal parts.