Additive Manufacturing in precision engineering applications

Transcription

1 Additive Manufacturing in precision engineering applications Denis Loncke Dubrovnik

2 Additive Manufacturing in precision engineering applications Outline: Slide 2 Introduction Challenges in precision stages Enhancements by Additive Manufacturing Future developments needed Conclusion

3 ASML makes machines for making chips Slide 3 Lithography is critical for producing chips All of the world s top chip makers are our customers 2013 sales: 5.2 bln Payroll: over 13,000 FTEs

4 Photolithography how an ASML system works Slide 4 Reticle Illumination system Lens Reticle stage Light-entrance of Laser Wafer Stage

5 Photolitography where s the difficulty 4000 engineers 83 competencies Slide 5 50 challenges WS & RS position measurement <0.25nm >20.000x/s >15G RS position acceleration >300x/min synchronisation WS RS <1ps Temperature conditioning <10mK

6 Drivers in semiconductor Litho industry Pushing the ASML system to the limit Slide 6 Shrink Productivity reduces lithography costs increases efficiency of lithography systems precision, thermal stability, dynamics lightweight & stiff design reliability, function integration, less parts/assembly steps

7 Additive Manufacturing in precision engineering applications Outline: Slide 7 Introduction Challenges in high tech stages Enhancements by Additive Manufacturing Future developments needed Conclusion

8 Twinscan XT system layout Balance mass z xy z reticle stage Slide 8 Reticle stage Exposure lens metroframe wafer stage wafer stage F base frame Waferstages

9 Challenges on system design Position control f BW Position measurement Point of interest POI (error PC ) Stiffness (k) Mass (m) F d T d Thermal disturbance T d F act = m. a Mechanical disturbance F d f BW~ f n = 1 2π k m Slide 9 Actuation s,v,a,j T stability error PC F d = m. (2πf BW ) 2 System drivers: Precision Speed Impacted by: Disturbance forces Dynamics Temperature variations Enhanced by: Reduction of disturbances Light & stiff design Thermal control Feed Forward

10 Challenges on system design Position control f BW Position measurement Point of interest POI (error PC ) Stiffness (k) Mass (m) F d T d Thermal disturbance T d F act = m. a Mechanical disturbance F d f BW~ f n = 1 2π k m Slide 10 Actuation s,v,a,j T stability error PC F d = m. (2πf BW ) 2 System drivers: Precision Speed Impacted by: Disturbance forces Dynamics Temperature variations Enhanced by AM: Reduction of disturbances Light & stiff design Thermal control Feed Forward

11 Additive Manufacturing in precision engineering applications Outline: Slide 11 Introduction Challenges in high tech stages Enhancements by Additive Manufacturing Future developments needed Conclusion

12 Disturbance force Enhancements by AM: reduction of disturbances Freedom of design and manufacturing to eliminate flow induced disturbance forces Slide 12 supply Sharp corners and transitions 0,7N disturbance force return old 0,7N PEEK Conventional machined part frequency

13 Disturbance force Enhancements by AM: reduction of disturbances Freedom of design and manufacturing to eliminate flow induced disturbance forces Slide 13 ~90% disturbance force reduction by flow optimization Sharp corners and transitions 0,7N disturbance force Smooth corners and transitions 0,07N disturbance force old 0,7N PEEK Conventional machined part frequency new 0,07N Titanium Additive manufactured part

14 Enhancements by AM: Lightweight design & robustness Freedom of design and manufacturing to optimize weight and functionality Slide 14 Conventional design PEEK & PU 170x170x15 m = 110g Monolithic design milled Ti 170x170x15 m = 200g Unchanged monolithic design printed by SLM Ti 170x170x15 m = 200g optimized Monolithic design printed by SLM Ti 170x170x15 m = 100g Increased robustness Reduced mass Optimized flow Improved dynamics

15 Enhancements by AM : improved thermal control Freedom of design and manufacturing to integrate cooling for improved thermal control Slide 15 Old conditioning ring Welded coverplate Average ΔT at top surface: 13.8 mk Temp gradient: 22 mk

16 Enhancements by AM : improved thermal control Freedom of design and manufacturing to integrate cooling for improved thermal control Slide 16 Old conditioning ring Improved performance thermal 6x dynamics +15% Improved conditioning ring Ti Gr2 Welded coverplate Integrated channels Average ΔT at top surface: 13.8 mk Temp gradient: 22 mk Average ΔT at top surface: 2.3 mk Temp gradient : 3.7 mk

17 Additive Manufactured parts in ASML system Slide 17

18 Additive Manufacturing in precision engineering applications Outline: Slide 18 Introduction Challenges in high tech stages Enhancements by Additive Manufacturing Future developments needed Conclusion

19 AM roadmap alignment for the high tech industry Participants Slide 19

20 AM roadmap alignment: goal and status Goal: Definition of a aligned roadmap on additive manufacturing technology. Status: Agreement on the consolidated AM technology roadmap Slide 20 OEM Topology Large Metals Small Metals Plastics Ceramics Hybrids ASML x x x x x x DAF x x x Eesa x x FEI x x x x Fokker x x x x OCE x x x x Philips Consumer x Philips Healthcare x x x x x Philips Healthcare x x x x x Philips Lighting x x x x x Philips PiNS x x x x Philips Research x x x x x Sulzer x x Thales Cryogenics x x Areas of interest/competence are mapped onto main topics Roadmap is now used as basis for new research programs at universities, AM equipment developers and AM part manufacturers Research Cranfield x x ECN x x x KULeuven x x x NLR x x x Sirris x x x TNO x x x x x TUD x x VITO x x x x Materials BASF x DSM/chemelot x x Sabic x x x

21 Consolidated Additive Manufacturing roadmap Slide 21

22 Consolidated roadmap metals Materials Ti grade 5, 316L, Al T7075, Al T6082, Invar, Inconel, Mo, Ta, W, T800MarM509, Hardmetals, Cu, Au, Ag, solder Slide 22 Small parts (<5000cm 3 ) driven by - precision - feature size - freedom of design Large parts (>1m) driven by - buy to fly ratio = cost Common drivers - material quality consistency and surface finish - resolution +/ mm (large parts) to 0.02 mm (small parts)

23 Breakthrough needed for Cost reduction Example: 3 manifold concepts Concept Material & standard parts 3D building cost Machining cost Welding / assembly cost Treatments / Cleaning / Quality Overhead / risk / profit Total cost Slide 23 Peek & hoses Ti Gr5 milled Ti Gr5 SLM Increase buildspeed -50% -25% Improve accuracy -20% & quality Peek & hoses 1650 TiGr5 Milled 2575 TiGr5 SLM 3050

24 Consolidated roadmap plastics High tech plastics Slide 24 - PEEK, PEI, POM, PA12, PFA, PC - ABS, PBT, PMMA, Viton, teflon, ECTFE, PVDF Driven by needed properties - mechanical properties, porosity, flammability, outgassing, ageing, thermal properties, optical properties Quality level comparable with SLA process - surface, porosity, topology Needed resolution +/ mm

25 Consolidated roadmap plastics: restrictions of technology FDM: Slide 25 + thermoplastics, ># structural materials, flammability certified materials - Design freedom, material cost SLA: New technology is needed that combines the advantages of available processes and design freedom + thermoset plastics, design freedom, porosity - Ageing, brittleness, color changing, flammability certified materials SLS: + high tech plastics, design freedom - porosity, surface quality, material cost, flammability certified materials

26 Consolidated roadmap ceramics Materials like Al 2 O 3, ZrO 2, SiC, SiSiC, Si 3 N 4, AlN, Cordierite, Zerodur SiSiC, Slide 26 Size: Small parts from 4x4x8cm to large parts of 1x1x0.2m Needed resolution +/-0.05mm large parts (>200mm) +/-0.01mm small parts (<200mm) Processes are relative new and still under development

27 Consolidated roadmap design & process tooling: Topology optimization Slide Define problem: - Objective? Constraints? - Domain? Boundary conditions? - Loadcases? 2. Discretize and parameterize material distribution 3. Optimize material distribution for best performance 4. Evaluate / fine-tune result (postprocessing, shape optimization) Maximize stiffness Use only 50% material Source: Fred van Keulen (TUD) i Load

28 Additive Manufacturing in precision engineering applications Outline: Slide 28 Introduction Challenges in high tech stages Enhancements by Additive Manufacturing Future developments needed Conclusion

29 Additive Manufacturing in precision engineering applications: Conclusion > 30 parts in production is a good start but further attention is needed on Slide 29 Particle cleanliness

30 Additive Manufacturing in precision engineering applications: Conclusion > 30 parts in production is a good start but further attention is needed on Slide 30 Particle cleanliness Surface finish & porosity

31 Additive Manufacturing in precision engineering applications: Conclusion > 30 parts in production is a good start but further attention is needed on Slide 31 Particle cleanliness Surface finish & porosity Consistency of materials & process

32 Additive Manufacturing in precision engineering applications: Conclusion > 30 parts in production is a good start but further attention is needed on Slide 32 Particle cleanliness Surface finish & porosity Consistency of materials & process Definition of quality verification and geometric accuracy

33 Additive Manufacturing in precision engineering applications: Conclusion > 30 parts in production is a good start but further attention is needed on Slide 33 Particle cleanliness Surface finish & porosity Consistency of materials & process Definition of quality verification and geometric accuracy Part size

34 Additive Manufacturing in precision engineering applications: Conclusion > 30 parts in production is a good start but further attention is needed on Slide 34 Particle cleanliness Surface finish & porosity Consistency of materials & process Definition of quality verification and geometric accuracy Part size Materials & processes

35 Additive Manufacturing in precision engineering applications: Conclusion > 30 parts in production is a good start but further attention is needed on Slide 35 Particle cleanliness Surface finish & porosity Consistency of materials & process Definition of quality verification and geometric accuracy Part size Materials & processes Design tools

36 Additive Manufacturing in precision engineering applications: Conclusion > 30 parts in production is a good start but further attention is needed on Slide 36 Particle cleanliness Surface finish & porosity Consistency of materials & process Definition of quality verification and geometric accuracy Part size Materials & processes Design tools Cost

37 Thank you for your attention Denis Loncke