Integrated Nanosystems for Ultra-Miniaturized Information Technologies...and More

Transcription

1 Presentation for TTI-Vanguard NextGens Conf., Miami, FL Integrated Nanosystems for Ultra-Miniaturized Information Technologies...and More 6 December 2011 James C. Ellenbogen, Ph.D Chief Scientist Nanosystems Group and Emerging Technologies Division

2 Overview: Up-front Summary 2 Nanowire Nanoprocessor: from Design to Realization The world s first nanoprocessor has been built from the bottom up and demoed by a MITRE-Harvard team Programmable control processor Very low power operation Achieves goal set forth 50 yrs. ago by visionary physicist Richard Feynman May assist electronics miniaturization beyond present industry Roadmap Key step toward realizing integrated, nanotechnology-enabled systems Goals: reduce the area and power footprint for electronics, open up the design space for info. systems and platforms in which they are embedded

3 19-Year Nanotechnology R&D Effort at MITRE Focuses Upon... 3 Engineering integrated nanotechnology-enabled materials and systems Broadly-based R&D, including lab experimentation and testing, as well as design, simulation, and program planning Examples: Nanomemory & nanoprocessor prototypes that will fit on a human cell Diverse interdisciplinary staff Key goals: Much smaller electronics, power, and sensing to miniaturize and lighten all info. systems Assist the Government, and enhance the national defense Built by Govt.-sponsored teams that included MITRE Plus, extensive student R&D program every summer: emphasis on mentoring the next generation in nanotech and other STEM areas

4 Exploring Seven Key Areas of Nanosystems R&D 4 Nanoelectronic Circuits & Systems: Development of World s First Nanoprocessor Hybrid Nanoenabled Electric Power Storage Systems Nanoforensics Nanosensing Nanoforensics Research shows potential for using pollen to trace weapons (e.g., IEDs) & contraband Points the way to quantum-dotbased artificial pollen for: Inventory control Preventing counterfeiting & tampering with computers Glycobiology for Bio-Remediation Millimeter-Scale Robots Multi-Scale Modeling of Materials via New Laws of Physics ~ µm Quantum Dots Pollen Grains ~ 100 µm Broadly-based R&D enabled by robust, long-term support from corporate IR&D program

5 5 Overview of Our Nanoelectronics R&D Design & Prototyping of Nanoelectronic Systems Design, Modeling, & Simulation Laboratory Prototyping & Testing Nanoelectronic Switches Nanoelectronic Circuits & Systems Molecular Nanowire Memristor Nanomemories & Nanoprocessors CMOS-Nano (e.g., H-P FPNI) Pure Nano (e.g., Nanowire-Based) Graphene-Based Circuits Considering in detail all device & architecture options for nanoelectronics, as well as a wide variety of defense and intelligence system applications FPNI = Field-Programmable Nanowire Interconnect

6 MITRE-Harvard Collaboration Has Demoed First Programmable Nanoprocessor Logic Tile * 6 MITRE System Design & Simulation, Harvard Fabrication 2010 Nanowire Adder Tile Tile-based architecture developed and simulated at MITRE Nature 10 February 2011 Close collaboration with Lieber Group at Harvard, who fabricated prototypes Multi-Tile NanoController ~ 0.1 mm System and its components also tested at MITRE Application: Very small, low-power control of small electrical and mechanical systems Portion of Nanoprocessor Tile Tested in MITRE Nanotech Lab * Sponsored by U.S. Govt. NanoEnabled Technology Initiative and MITRE Innovation Program

7 7 Elements of Tile-Based Nanoprocessor System Larger, Low-Power, Tile-Based System Being Fabricated Over Next 1-1/2 Years First, 2010 Tile Nanodevices Demonstrated by Prof. C. Lieber, Harvard Univ. Charge-Trapping Nanowire Transistor 30 nm ~ 0.1 mm Designed to make use of novel functions of Lieber Gp. nanodevices Simulations predict low-power operation possible at up to 100 MHz Small size and non-volatile operation yields ultra-low power

8 System Engineering for Tile-Based Nanoprocessor 8 Light Micrograph of Nanoprocessor Tile Designed a system to integrate individual nanodevices demonstrated by Lieber Group in Leveraged tile -based architecture and simulation techniques for nanosystems pioneered earlier at MITRE Showed it would work via simulation before it was built 10 µm Application: Very small, low-power control of small electrical and mechanical systems Built using industrializable processes and should be 10X smaller, while using 10 to 100X less power than end-of-the-roadmap CMOS

9 Future CMOS Transistors vs. Ultimate Nanowire Transistors 9 End-of-Roadmap CMOS (~2016) ~ 80 nanometers (nm) ~ 16 nm Ultimate Nanowire Devices (~2016) Semiconductor Core-Shell Nanowires SIDE VIEW Source Gate Drain Gate Lead TOP VIEW Industry CMOS transistor Gate Lead 15 nm Transistor Footprint 15 nm 15 nm Gate Lead Size: ~80 x 40 nm = 3200 sq. nm Power: ~ nw per logic op. Speed: ~5 GHz clock Size: ~15 x 15 nm = 225 sq. nm Power: Less than 1 nw per logic op. Speed: ~10 to 100 MHz clock Built using industrializable processes and should be 10X smaller, while using 10 to 100X less power than end-of-the-roadmap CMOS CMOS = Complementary Metal-Oxide Semiconductor (i.e., conventional microelectronics)

10 Future CMOS Transistors vs. Ultimate Nanowire Transistors 10 End-of-Roadmap CMOS (~2016) ~ 80 nanometers (nm) ~ 16 nm Ultimate Nanowire Devices (~2016) Semiconductor Core-Shell Nanowires SIDE VIEW Source Gate Drain Gate Lead TOP VIEW Industry CMOS transistor Gate Lead 15 nm Transistor Footprint 15 nm 15 nm Gate Lead Size: ~80 x 40 nm = 3200 sq. nm Power: ~ nw per logic op. Speed: ~5 GHz clock Size: ~15 x 15 nm = 225 sq. nm 1 billion transistors per sq. mm Power: Less than 1 nw per logic op. at less than 1 Watt Speed: ~10 to 100 MHz clock Built using industrializable processes and should be 10X smaller, while using 10 to 100X less power than end-of-the-roadmap CMOS CMOS = Complementary Metal-Oxide Semiconductor (i.e., conventional microelectronics)

11 Wide Range of Groundbreaking Applications for Ultra-Dense Nanoprocessor Systems 11 Reduce SWaP for DOD Info Systems Low-power control for tiny, autonomous info systems Ultra-miniature chem/bio sensing for defense, diagnostics, & therapeutics Miniaturize Unattended Sensors 4 in in. Electronics for unconventional imaging Novel signal processing Next steps: Multi-tile nanoprocessor Integrate with application system Ultra-tiny nanocontroller will enable application systems with form factors much smaller than previously imaginable! SWaP = Size, Weight and Power

12 Wide Range of Groundbreaking Applications for Ultra-Dense Nanoprocessor Systems 12 Reduce SWaP for DOD Info Systems Next Steps 2-Tile Nanoprocessor (e.g., 2-bit adder) Miniaturize Unattended Sensors 4x4-Tile Nanoprocessor Controlling a Sensor or Tag 4 in in. 1 in. Ultra-tiny nanocontroller will enable application systems with form factors much smaller than previously imaginable! SWaP = Size, Weight and Power

13 Wide Range of Groundbreaking Applications for Ultra-Dense Nanoprocessor Systems 13 Reduce SWaP for DOD Info Systems Example of Ultimate Vision Black-Box on a Battery: Concept for advanced processor, plus ~1 Gbyte of memory in 4 mm 2 2 mm Miniaturize Unattended Sensors 4 in in. Ultra-tiny nanocontroller will enable application systems with form factors much smaller than previously imaginable! SWaP = Size, Weight and Power

14 Exploring Seven Key Areas of Nanosystems R&D 14 Nanoelectronic Circuits & Systems: Development of World s First Nanoprocessor Hybrid Nanoenabled Electric Power Storage Systems Nanoforensics Nanosensing Nanoforensics Research shows potential for using pollen to trace weapons (e.g., IEDs) & contraband Points the way to quantum-dotbased artificial pollen for: Inventory control Preventing counterfeiting & tampering with computers Glycobiology for Bio-Remediation Millimeter-Scale Robots Multi-Scale Modeling of Materials via New Laws of Physics ~ µm Quantum Dots Pollen Grains ~ 100 µm Broadly-based R&D enabled by robust, long-term support from corporate IR&D program

15 Using a Hybrid Approach to Shrink the Limiting Power Footprint for Info Systems 15 Multi-Component Nano-enabled Power System + Control Circuit + + Most portable power systems unable to sustain telecomm load for long duration Tiny battery-supercap hybrid gives both long life & high current under pulsed load Hybrid System Nano-Enabled High-Energy Storage Nano-Enabled High-Power Delivery

16 Using a Hybrid Approach to Shrink the Limiting Power Footprint for Info Systems 16 Multi-Component Nano-enabled Power System + Control Circuit + + Most portable power systems unable to sustain telecomm load for long duration Tiny battery-supercap hybrid gives both long life & high current under pulsed load Nano-Enabled High-Energy Storage Nano-Enabled High-Power Delivery Hybrid power systems like this are ideal for portable, high performance information & communications systems Experimenting with fuel cells & photocells to extend operational lifetime still further--working with startup fuel cell company

17 17 Ultimate Goals Miniaturize and lighten all information systems: drastically reduce the spatial footprint & the power footprint Millimeter -Scale Autonomous Systems Integrated Nano-enabled Systems Nanoforensics Nanopower Nanomaterials & Bionanomaterials Nanocomputers Nanosensors

18 Beyond The Physical Sciences and Engineering: Dramatic Insights and Applications in Biology 18 Nanotech is leading to new understandings of structure and function in living things on the smallest of scales For example, it has been found that hordes of tiny molecular motors energize & animate us Also, new therapies of great precision are being developed (work of J. West, N. Halas, et al. at Rice University) Reaching Out Beyond the Physical Sciences Example: 2001 Work of 2006 Nobel Laureate Roger Kornberg Source: Journal Science, Precise nano-scale organization produces amazing function in biological materials and systems Polymerase reads DNA to manufacture RNA Harness the Mechanisms of the Cell for Manufacturing! Source: nano.cancer.gov

19 19 A Vision for the Future of Nanotechnology Over the next decade: Continued ascent of physically derived nanotechnology Esp., molecular electronic computers Artificial nanostructured materials Nanoelectronics Molecular Biology Over the next 15 years: Ascent of bio-nanotechnology Molecular & cellular biology combine with physical nanofabrication New vistas for medicine & engineering -- harness mechanisms of the cell for therapies & manufacturing Ultimately: Matter as software Bionanotechnology e.g., objects downloadable from the Internet -- distributed mfg. Bring an information economy to material goods -- desirable physical & economic properties like software

20 20 Selected References Nanoelectronics and Nanocomputing H. Yan, H. S. Choe, S. W. Nam, Y. Hu, S. Das, J. F. Klemic, J. C. Ellenbogen, and C. M. Lieber, Programmable nanowire circuits for nanoprocessors, Nature, Vol. 470, pp , 10 Feb S. Das, A. J. Gates, H. A. Abdu, G. S. Rose, C. A. Picconatto, and J. C. Ellenbogen, "Designs for Ultra-tiny, Special Purpose Nanoelectronic Circuits," IEEE Trans. on Circuits and Systems 54(11), Nov S. Das, C. A. Picconatto, G. S. Rose, M. M. Ziegler, and J. C. Ellenbogen, "System-Level Design and Simulation of Nanomemories & Nanoprocessors," in The CRC Handbook of Nano and Molecular Electronics, June M. M. Ziegler, C. A Picconatto, J. C. Ellenbogen, A. DeHon, D. Wang, Z. Zhong, and C. M. Lieber, Scalability Simulations for Nanomemory Systems Integrated on the Molecular Scale, Annals of the N.Y. Academy of Science, Vol. 1006, pp (2003). J. C. Ellenbogen, Toward Molecular-Scale Computers, Computation as a Property of Matter, and Matter as Software, MITRE Edge Magazine, Jan G. Y. Tseng and J. C. Ellenbogen "Toward Nanocomputers," Science, vol. 294, 9 Nov. 2001, pp Nanoenabled Power R. G. Willmott, K. Eisenbeiser, C. A. Picconatto, and J. C. Ellenbogen, Nanotechnology-Enabled Hybrid Power System Suitable for Portable Telecommunications and Sensor Applications, Report No. MP100372, The MITRE Corporation, McLean, VA, December M.S. Halper and J. C. Ellenbogen, "Supercapacitors: A Brief Overview," Report No. MP 05W , The MITRE Corporation, McLean, VA, March See the downloadable papers and list of patents on our Web site at the URL:

21 21 ~ Supplementary Vugraphs ~

22 22 Fabrication of Nanoprocessor Tile Aligned deposition of SiGe core nanowires (NWs) using nanoimprint lithography Etch nanowires into uniform strips and pattern Ti/Pd electrodes using e-beam lithography Atomic Layer Deposition (ALD) of charge trapping SiO 2 /ZrO 2 /Al 2 O 3 /ZrO 2 /SiO 2 shell and etch e-beam lithography patterned via Deposit Cr/Au and e-beam lithography pattern top gates Aligned & patterned NWs ALD & etch via Nanoprocessor Tile 10 µm Top gates Etch NWs & add source /drain electrodes Tile fabrication process developed by Harvard researchers working closely with MITRE scientists and engineers

23 System Thinking and Approach Guided Nanoprocessor Design 23 Key LOGIC FLOW p-type nanowire (charge-trapping) metal nanowire (e-beam) metal (e-beam) or p-si-core p-type nanowire (regular NW FET) gated FET single tile Ohmic contact FET = Field-Effect Transistor

24 System Simulations Provided Basis for Fabrication of Tile Hardware 24 Detailed Circuit Schematics Simulation Results A V ev A Actual Performance /A B B /B Cin /Cin Carry in V pc2 S Sum Cout V ev2 Carry out V pc Simulations predicted nanocircuit could be made to operate correctly using nanodevices demonstrated by the Lieber Group

25 Comparison of Projected Performance for Nanowire Nanoprocessors vs. CMOS 25 Non-volatile nanowire transistor technology offers very small device sizes and the potential for very small pitch dimensions, combined with very little static power dissipation Nanowire nanoprocessors should be 10X smaller, while using 10 to 100X less power than end-of-the-roadmap CMOS CMOS = Complementary Metal-Oxide Semiconductor (i.e., conventional microelectronics)

26 Using a Hybrid Approach to Shrink the Limiting Power Footprint for Info Systems 26 Ideal power system is able to minimize the size and weight while maximizing the power Have developed a prototype system with these features by combining High-energy nano-enabled battery High-power supercapacitor Control circuit Outperformed both battery & capacitor Energy density of 107 Wh/kg Power density of 832 W/kg Hybrid power systems like this are ideal for portable, high performance information & communications systems COTS 3-Component Nano-enabled Power System High-Energy Storage Control Circuit High-Power Delivery

27 Gross Performance Figures for Hybrid Energy Storage System 27 Specific Power (W/kg) Specific Energy (Wh/kg) Battery(Sanyo ) Under Static Load Supercap (Maxwell PC10) Under Pulsed Load 2011 Hybrid System

28 Exploring Seven Key Areas of Nanosystems R&D 28 Nanoelectronic Circuits & Systems: Development of World s First Nanoprocessor Hybrid Nanoenabled Electric Power Storage Systems Unique New GlycobioTechnology for Disease Prevention and Cleanup of Bio-Threats virus biotoxin Nanoforensics Nanosensing Millimeter-Scale Robots bacterium Micelle Multi-Scale Modeling of Materials via New Laws of Physics Glycobiology for Bio-Remediation Cloth Wipe Coated with Glycoprotein Micelles Binds to Specific Structures (Lectins) on Surfaces of Pathogens & Toxins

29 Motivation for R&D in Multi-Scale Modeling (MSM) of Materials 29 More rapid, accurate, reliable, modeling of nanostructures is essential for rational design and engineering of nanoenabled systems Present modeling methods Are too computationally intensive (~N 5 quantum problem) Require layers of different software for the different physical laws thought to apply on different scales: nano-scale, meso, micron, & macro-scales Hence, first-principles design of nanosystems and materials is difficult or impossible Aug issue of IEEE Spectrum highlights this problem

30 Background for R&D in Multi-Scale Modeling (MSM) of Materials 30 Counterintuitive MITRE discovery: one law that applies on all scales From quantum/nano scale...to macro/classical scale Studies of nanosystems revealed that quantum capacitances of atoms & molecules scale linearly with their radii, much like macroscopic spherical capacitors Recently discovered Quasi-classical Scaling Laws Atoms and molecules behave like macroscopic spherical capacitors Macroscopic - Classical Capacitance, C Macroscopic Spheres Radius, r C = Q/V Q Nanoscopic - Quantum r Dielectric, κ (Insulator) + Ground V Ongoing R&D at MITRE seeks to extend and apply these simple relationships for much faster and simpler modeling of materials Capacitance (+e/v) Atoms Atomic Mean Radius (pm) Capacitance (+e/v) Molecules Molecular Equivalent Radius (nm) See: Phys. Rev. A 2006 & 2007 * for explanations & sources of graphs.

31 Illustration of the Power of New Laws: New Periodic Property of the Elements 31 Quantum Capacitances from Experimental Data Plotted vs. Mean Atomic Radii from Detailed Quantum Calculations C = 1/(IP EA) Capacitance scaling lines for atoms predict their positions in the periodic table < r > < r > * LH Graph published in Phys. Rev. A, 74, v. 74, 34501, Oct. 2006; paper also available at URL: Positions in table govern atoms physical & chemical properties Thus, new capacitance laws also govern these properties of matter

32 Exploring Seven Key Areas of Nanosystems R&D 32 Nanoelectronic Circuits & Systems: Development of World s First Nanoprocessor Hybrid Nanoenabled Electric Power Storage Systems Unique New GlycobioTechnology for Disease Prevention and Cleanup of Bio-Threats virus biotoxin Nanoforensics Nanosensing Millimeter-Scale Robots bacterium Micelle Multi-Scale Modeling of Materials via New Laws of Physics Glycobiology for Bio-Remediation Cloth Wipe Coated with Glycoprotein Micelles Binds to Specific Structures (Lectins) on Surfaces of Pathogens & Toxins

33 Ultra-Thin Glycoprotein Films & Micelles Stick to Human Pathogens 33 A coherent film monolayer forms at the interface between oil and aqueous glycoprotein solution Films are coated with the same sugars that decorate human cell membranes Agitated films roll into balloonlike micelles that stick to pathogens and toxins Liquid oil Pathogens and biotoxins bind to sugars on micelle surface Micelle Micelle Glycoprotein film at oil-water interface ~ Glycoprotein solution ~

34 Micelles Remove Bacteria and Biotoxins from Contaminated Fluids and Solid Surfaces 34 We have demonstrated that micelles coated with specific sugar structures: Remove Salmonella cells from milk Remove sticky Bacillus spores from glass Human pathogens adhere tightly to micelle surface Potential applications of biocapture films include: Sample collection and preservation Removal of pathogens from infected human tissue Identification of virus strains Biotoxins like ricin bind to sugars on micelle surface