Energy and Utility Savings With Vacuum and Abatement Systems. Mike Percy, Edwards Ltd.

Transcription

1 Energy and Utility Savings With Vacuum and Abatement Systems Mike Percy, Edwards Ltd.

2 Contents Backdrop Technology Trends Product improvement examples Dry pumps Abatement Example foundry model Fab level Cost savings Addressing the installed base Conclusions

3 Our Industry The only thing constant in life is change French writer Francois de la Rochefoucauld ( ) And it still applies today. Continuous improvements in technology Continuous cost reduction activity Continuous focus on power and speed Edwards believes in continuous improvement. We support SEMI S23 statements that manufacturers set energy reduction targets and strategies.

4 Technology Trends DRAM 1/2 Pitch (um) New materials (FSG, Low-k, High-k, Dual Damascene, Si:Ge, etc.) Improved reliability Dimension Size More than Moore Scaling Source: Complexity Dry Pump Trends Abatement Trends Inverters enable green mode Matching pump design to process needs Thermal management for improved reliability and reduced energy consumption Asia manufacturing for reduced logistics costs and shorter lead times Reducing water consumption Multiple inlet burners with high DREs Reduced fuel consumption Increased service intervals Integrated process solutions for improved reliability

5 Edwards Pumps (1997 to Now) More inverters ih (ih1800) Process Specific Products ih (Mk5) ixh Harsh igx / GX Medium il Series ipx EPX T-4 T-3 T-2 ixl Range Light Generation T-1 Today

6 Load Lock Pump Evolution System optimization through cooperation with process tool designers Shift to on-tool pumps integrated in tool mainframes for Load locks ih600 Basement to on-tool EPX180 Mechanism development ih80 ixl120 igx100 Savings in material usage and power consumption have been achieved through good design with no sacrifice of performance. Inverters, high speed operation, mechanism optimization

7 Evolutional Development Results Basement load locks moving to lowpower on tool load locks. Power / volume / mass down roughly 86%. Evacuation time 47% faster Mechanism changes for lower power product Power / volume / mass down roughly 79%. Evacuation time 14% faster Less volume and less mass results in less material usage for greener manufacturing. Parameter (per unit) 100% 80% 60% 40% 20% 0% Power Volume Mass ~86% down for all factors ih600 EPX180 ixl120 Pump Generation Evacuation Time Power Volume Mass Parameter (per unit) 100% 80% 60% 40% 20% 0% ih600 EPX180 25L chamber (time to 10 Pa) On-tool: Φ100 mm x 1m x 2 elbows Basement: Φ 100 mm x 6m x 2 elbows ih80 igx100 ixl120 Parameter (per unit) 100% 80% 60% 40% 20% 0% ~79% down for all factors ih80 igx100 ixl120 Pump Generation

8 Process Pump Improvements Key inverter technology applied to pumps. 3 ih 50Hz ixh 50Hz Improvement ih 60Hz 60Hz Improvement 60% Increases rotational speed Enables Green Mode Consistent performance worldwide Speed to mass ratio increases. Less raw material usage 25% to 49% improvement Ratio of Peak Speed to Mass (m3/h/kg) % 40% 30% 20% 10% Challenges Maintaining torque for powder handling m3/h 1000 m3/h Pump Capacity 0%

9 Edwards Abatement (1997 to Now) TPU (original) TPU with water recycling TPU with reduced fuel burner Atlas T-4 T-3 T-2 T-1 Generation Co ntr o l EGM Product Evolution eatlas Today

10 Abatement Improvements Water recycling Material changes to accept acidic water with recycling of scrubbing stages. Water consumption reduced 91%. This is water that would go straight to the drain. Multiple inlet capability More gases with modified burner heads Reduced fuel usage through modified combustor design. Down 39%. Up to 6 nozzles Water pump and heat exchanger to reduce water consumption.

11 A Foundry Model Consider a 40,000 wpm foundry with state-of-the art equipment. There are just over 1,500 pumps used within the fab and over 260 abatement units all connected to nearly 400 process tools. Pump Count Abatement Count Process Tool Distribution Unit Count CVD Etch Other 0 CVD Etch Other

12 Energy Modeling of Pump and EMS Generations Fixing the tool list, the impact of Edwards product development on energy usage can be examined. Product generation starts from 1997 when DRAMs had a 250 µm half pitch! T-4 T-3 T-2 T-1 Each generation of product is inspected through the foundry tool list lens. T-0 Foundry Tool List T+1 Electricity ($/kwh) Compressed air ($/m 3 ) Industrial water and drain ($/m 3 ) Exhaust extraction ($/m 3 ) Utility Costs Used in Modeling (USD) 0.07 Natural gas ($/m 3 ) 0.10 Oxygen ($/m 3 ) Nitrogen ($/m 3 ) Process cooling water ($/m 3 ) Process time % Hydrogen ($/m 3 ) Cabinet extraction ($/m 3 ) Idle / maintenance time %

13 Pump Utility Cost Calculations Advancements in Edwards pump technology deliver more than $3.3M per year in utility cost savings. Mechanism development delivers $3M of these savings. Green Mode delivers $0.3M per year savings. With products currently in advanced development (T+1 generation) we expect to deliver a further $1M savings per year. Utility Costs (M USD) Utility Costs (M USD) Overall Savings: 47% T-4 T-3 T-2 T-1 Today Pump Generation CVD Etch Other CVD: 43% Etch: 50% Other: 49% T-4 T-3 T-2 T-1 Today Pump Generation

14 Abatement Utility Cost Calculations Advancements in Edwards abatement technology deliver more than $17.8M per year in utility cost savings. Advanced technology using Green Modes Multiple inlet technology Reduced fuel and water consumption T-4 to T-3 drop primarily due to reduced water consumption. Utility Costs (M USD) Utility Costs (M USD) Overall savings: 87% T-4 T-3 T-2 T-1 Today Pump Generation CVD Etch CVD: 89% Etch: 83% T-4 T-3 T-2 T-1 Today Pump Generation

15 Increasing Energy Efficiency in the Installed Base Companies building new fab facilities benefit from ability to purchase the latest energy efficient products However the installed base of older series dry pumps in existing semiconductor fabs is very high What can be done to reduce energy consumption in the installed base?

16 Energy Efficiency Upgrades Utility cost reductions are enabled with upgrades to existing products. Example: motor upgrades to ih pumps Achieved through optimizing performance around a tighter input voltage and target operating point Result ih80: 280 W (10 efficiency points) ih600 booster: 290 W (24 efficiency points) Total: 570 W reduction at typical operating point vacuum Efficiency Power ih80: Redesigned motor increases efficiency by 10 percentage points. ih600 Booster: Redesigned motor increases efficiency by 24 percentage points. Power Efficiency

17 Conclusions The semiconductor industry never stands still. Neither does Edwards. Continuous progress on green roadmap Reduced running costs achieved for pumps and abatement. Improved design to reduce material consumption for greener manufacturing Addressing the installed base to deliver existing customers reduced running costs Overall annual utility cost savings for a 40,000 wpm fab total nearly $21M USD through improvements in our products over 4 generations