PRECISION OPTICAL FILTERS BY EOSS - ENHANCED OPTICAL SPUTTERING SYSTEM. Fraunhofer

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1 PRECISION OPTICAL FILTERS BY EOSS - ENHANCED OPTICAL SPUTTERING SYSTEM

2 EOSS ENHANCED OPTICAL SPUTTERING SYSTEM Fraunhofer IST, Braunschweig Contact: Dr. M. Vergöhl

3 EOSS Coating System for Precision Optical Filters Motivation A coating system that offers stable and easy to use processes without complex process control combines the advantage of IBS processes (stability & quality) and evaporation (deposition rate & substrate size) is build for continued changes of designs to meet customer demands offers inherent long term stability produces clean and reproducible coatings

4 EOSS Coating System Setup

5 EOSS Sputter Coating System Key peformance Processes MF, RF sputtering, RF-plasma source CARS, Metamode, reactive Coating materials: SiO 2, Al 2 O 3, Ta 2 O 2, Nb 2 O 2, TiO 2, ZrO 2, HfO 2, easy to mix materials, metals Large area, fast rate: 12x200mm substrates Uniformity within ±0.15% Deposition rate: 0,6 nm/s Fully automatized production control: MOCCA +, BBM nm

6 EOSS Coating System High volume coating system 12 carriers on turntable Substrate cabinet with 60 carriers (200mm diameter) Base pressure < 2x10-7 mbar Process temperature 300 C Handling and coating fully automatized

7 EOSS Coating System Improved coatings by applying cylindrical magnetrons redeposition zone racetrack transition area: source of particles No redeposition zone and no racetrack! Continuous and uniform erosion of the surface

8 EOSS Coating System Very clean process Processes #1-#5: Sputter down #3-#7: Rotatable #6: EOSS, SiO 2 #7: EOSS, 14 layer filter Particle contamination < 10 ppm

9 EOSS Coating System Extremely high uniformity Distribution of material within the direction of rotational motion Uniformity better than ±0,10 % transmission [1] 0,54-96 mm -84 mm -72 mm -60 mm 0,52-48 mm -36 mm -24 mm -12 mm 0,50 Zentrum +12 mm +24 mm +36 mm 0, mm +60 mm +72 mm +84 mm +96 mm 0, wavelengt [nm]

10 EOSS Coating System Extremely high uniformity Distribution of material perpend. to the direction of rotational motion Uniformity better than ±0,15 % transmission [1] 0,54 0,52 0,50 0,48 0,46-96 mm -84 mm -72 mm -60 mm -48 mm -36 mm -24 mm -12 mm Zentrum +12 mm +24 mm +36 mm +48 mm +60 mm +72 mm +84 mm +96 mm wavelength [nm]

11 EOSS Coating Examples Longpass filter 40 layer longpass filter with defined spectral edge Partial substrate coatings by handmade masks 100 transmission [%] Sample #1 Sample #2 Sample #3 Sample #4 Sample #5 Sample #6 Sample #7 Sample #8 transmission [%] ,5 nm ± 0,3 nm substrates masked and positioned by hand Sample #1 Sample #2 Sample #3 Sample #4 Sample #5 Sample #6 Sample #7 Sample # Wellenlänge [nm] wavelength [nm]

12 EOSS Coating System Notch filter OD6 notch filter (80 layers) Broad band transmission Excellent layer quality On 200 mm wafer Transmission [%] ,1 0,01 1E-3 1E-4 Filter Theory 1E Wavelength [nm]

13 EOSS Coating Examples Filter for Laser 3D-projection, layers layer filter MOCCA + monitor 20 measurements on a 200mm wafer

14 EOSS Coating Examples AR Coating (time-controlled) Double side coating, 12 layers/side Reflectance [%] Spec: R < nm 10 runs, 5 substrates 1, Wavelength [nm] Time control only 1,0 Extremely reproducible Thinnest layer < 6 nm r.m.s. thickness error < 0.1 nm reflectance [%] Very low particular 0,0 contamination ,8 0,6 0,4 0,2 Batches #1- #10 (5 double sided coatings) wavelength [nm]

15 EOSS Coating Examples Laser clean-up filter 375 nm Specs: T avg > 90% nm OD avg >5 bei nm und nm OD avg >3 bei nm und nm Fabricated without test run No AR on back side Transmission [%] ,1 0,01 Transmission Design Target 1E-3 1E Wellenlänge [nm]

16 EOSS Coating Examples Bandpass filter, wide blocking range 9 substrates with 200 mm diameter each Double side coating Spectra shown for 3different batches 3 different carriers Wavelength position Transmission (%) 1,0 0,8 0,6 0,4 0,2 0,0 within 0.25% (±0.125%) Wavelength (nm)

17 EOSS Coating System Blended layers by co-sputtering Due to the layout of the coating system, co-sputtering in every sputtering mode is possible Virtually free tunable index of refraction between the materials Production of Rugate layers Stabilization of critical materials such as TiO 2, HfO 2 by doping with SiO 2 Filters created by mixed oxides presented at the Optatec 2012 in Frankfurt refractive index ( =550 nm) [1] 2,6 2,4 2,2 2,0 1,8 1,6 1,4 n( =550 nm) E G fraction of SiO 2 in TiO 2 [%] 5,5 5,0 4,5 4,0 3,5 3,0 optical bandgap [ev]

18 EOSS Coating System Products & Application Optical filters ranging from single layers up to several hundred layers Steep edge Notch, Multinotch Bandpass Beam splitters High/Low reflection Polarizers Dielectric-metal-hybrid Chirped mirrors Rugate, Material mixtures Applications Analytics: e.g. fluorescence microscopy, raman spectroscopy, biomedicine, solar simulators, Laser based systems: e.g. reflectors, chirped mirrors, Coatings on sensitive substrates The system is build for continued changes of designs to meet customer demands

19 EOSS Coating System Full production automation by MOCCA + The MOCCA + kit includes 19 system rack Spectral range nm Accuracy < 0.3 nm (< 0.6 nm IR ) Light source: 50W halogen Optical fiber system Fast measurement interval: 1.6 ms Optilayer adapter

20 EOSS Summary High precision optical coating system based on magnetron sputtering and cylindrical magnetrons Fully automized Excellent layer quality Low absorption and scatter losses Dense and defect-free layers Rotatable magnetrons Excellent long-term stability with rotatable magnetrons Target lifetime up to 3 months - 24/7! Extremely high uniformity, virtually no drift (no racetrack)

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